CN2190279Y - Workpiece shape measuring apparatus - Google Patents

Workpiece shape measuring apparatus Download PDF

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Publication number
CN2190279Y
CN2190279Y CN 94238602 CN94238602U CN2190279Y CN 2190279 Y CN2190279 Y CN 2190279Y CN 94238602 CN94238602 CN 94238602 CN 94238602 U CN94238602 U CN 94238602U CN 2190279 Y CN2190279 Y CN 2190279Y
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light
workpiece
optic probe
detector
measurement
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Expired - Fee Related
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CN 94238602
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Chinese (zh)
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李润身
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Shanghai Institute of Optics and Fine Mechanics of CAS
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Shanghai Institute of Metallurgy of CAS
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Abstract

The utility model discloses a measuring apparatus which measures the section shape of a workpiece with light pulse method, and the measuring apparatus belong to a metering device which is used for measuring configuration with optical method. The measuring apparatus comprises a pulse counting circuit. The measuring apparatus is characterized in that the measuring apparatus is provided with an optical probe which is composed of a pulsed light source with stable frequency and an optical detector, an optical probe position adjusting and stepping mechanism, a standard pattern plate, a working table, a moving system which causes the optical probe to do scanning motion relatively to workpieces to be measured. The best measurement precision of the utility model approaches to the precision of the standard pattern plate. The measuring apparatus can be widely used for the shape detection of mechanical parts, and is especially suitable for measuring the shape of a plane workpiece to obtain other parameters associated with the shape.

Description

Workpiece shape measuring apparatus
The utility model is a kind of measurement mechanism of workpiece cross sectional shape, is specially adapted to the measurement of flat work pieces profile.Belonging to adopt optical means is feature, is used to measure the metering outfit of profile.The utility model also can be used for measuring the parameter relevant with the workpiece cross sectional shape, for example area, profile, curvature etc.
The workpiece cross sectional shape is the important measurement parameter of workpiece, as profile, tooth-formation of gear and the oil motor rotor of various standard callipers, the thread form of stator etc.Its measurement is more more difficult than measuring workpieces size and angle.Though multiple surveying instrument is arranged at present, adopt probe along the scanning of workpiece outside surface mostly, measure the displacement of probe then with grating, thereby obtain the coordinate of edge of work each point.Shape, the size of probe, the randomness of probe and workpiece contact point all can influence the measuring accuracy of this quasi-instrument.Owing to will use the grating measuring displacement, equipment is relatively more expensive, the cost height, and Measuring Time is long, is unsuitable for the quick measurement of batch workpiece.
The purpose of this utility model is a kind of precision measurement apparatus of measuring the workpiece cross sectional shape rapid, convenient, that price is lower of design.The utility model also can be measured other parameter relevant with the workpiece shape, as area, curvature etc.
The optic probe that the utility model adopts high stability light-pulse generator of frequency and photo-detector to form scans workpiece for measurement and test pattern, calculate workpiece and test pattern by or the light pulse number that stops read the coordinate at workpiece for measurement edge, thereby measure the cross sectional shape of workpiece and other relevant therewith parameter.Scan mode can be used rectilinear scanning line by line, also can adopt the circular arc scan mode.Test pattern can be selected flexibly according to workpiece for measurement, but requires figure to be easy to processing, precision height.General circular, arc, rectangle or the square selected.Following simple declaration the utility model adopts the measuring principle of two kinds of scan modes.
Fig. 1 represents that optic probe makes the measuring principle of rectilinear scanning mode with respect to workpiece for measurement.Test pattern is that the center of circle is O, and is the circular hole of r directly, and r is precision measurement value.Workpiece for measurement is a thread profile gauge.Determine a rectangular coordinate system XOY by the center of circle, transverse axis OX, longitudinal axis OY.The capable K of the preliminary sweep of optic probe 1K 2Be parallel to the OX axle, K 1K 2With the Y-axis intersection point be K 0K 1K 2Between the umber of pulse n that can from this line scanning, pass through apart from l 0The umber of pulse n ' that passes through during with scanning on the standard round bore dia tries to achieve [ l=2r(n 0/ n ') ].Standard specimen scanning that also can be by length precision measurement or directly use other precision measurement method (for example to measure OK 0) after try to achieve.Probe is from the capable K of preliminary sweep 1K 2Beginning scanning standard circular hole, after the every scanning delegation, probe is along Y-axis displacement one little step-length, continues to carry out next line scanning being parallel to X-direction.As sweep trace process workpiece for measurement, for example A among Fig. 1 1A 2A 3A 4Line.A wherein 1, A 4Be two intersection points in sweep trace and standard round hole circle week, A 2, A 3Intersection point for two edges of workpiece for measurement and sweep trace.If A 1A 2Between the light pulse number that passes through of scanning be n 1, A 2A 3Between the blocking the light pulse number be n 2, A 3A 4Between the light pulse number that sees through be n 3, then have
()/(A1A2) = (L)/(n0) n 1
()/(A2A3) = (L)/(n 0) n 2
()/(A 3A 4) = (L)/(n 0) n 3
()/(A 1A 4) = (L)/(n 0) n k ,n K=n 1+n 2+n 3
So, edge of work A 2, A 3The coordinate of point can be defined as
A 2(X, Y)=A 2
Figure 942386027_IMG2
A 3(X, Y)=A 3
Figure 942386027_IMG3
When popping one's head in once along the every stepping of Y direction, be parallel to the X-direction run-down, the coordinate of two points on the workpiece border can be obtained, thereby the profile of whole workpiece for measurement can be measured.
Fig. 2 represents that optic probe makes the measuring principle of circular arc scan mode with respect to workpiece for measurement.Workpiece for measurement is similarly thread profile gauge, places on the specimen rotating holder.Being placed with a center of circle on the sample stage is that 0 radius is the Standard arch wire hole that intercepts on the circle of r, and its string is K 1K 2The center of circle 0 is arrived to K 1K 2Apart from OK 0Be the amount of accurately measuring with other precision measurement method.The optic probe edge is the circular scan in the center of circle with 0, and every run-down is popped one's head in radially precession once.0 being the polar coordinates initial point, OK 0Be pole axis, measure the polar coordinates of workpiece for measurement edge every bit.Suppose along A 1A 2A 3A 4A 1The light pulse number in one week of circular scan is n 0, and corresponding circular arc A 1A 2, A 2A 3, A 3A 4Between the light pulse number be respectively n 1, n 2, n 3, then have
∠A 1OA 2=360°.(n 1/n 0
∠A 3OA 4=360°.(n 3/n 0
∠A 1OA 4=360°.(n K/n O),n K=n 1+n 2+n 3
Thereby, 2 A of the edge of work 2, A 3Polar angle be respectively
φ A2= 1/2 ∠A 1OA 4-∠A 1OA 2=180°. (n k-2n 1)/(n 0)
φ A3=-[ 1/2 ∠A 1OA 4-∠A 3OA 4=-180°. (n k-2n 3)/(n 0)
A 2, A 3The common utmost point of point is jumped
P=OA 1=OK 0/cos 1/2 ∠A 1OA 4=OK 0/cos(180°. (n k)/(n 0) )
Like this, by measuring the polar coordinates of workpiece for measurement edge each point, can measure the profile of whole work-piece.
From above-mentioned this principle as seen, the precision of test pattern is the key of measuring.Choose different test patterns,, also be not difficult to derive though its computing formula is inequality.
Structure of the present utility model should guarantee the frequency stabilization of light-pulse generator.When optic probe was done scanning motion with respect to workpiece for measurement and test pattern, sweep velocity should be constant (when scanning in the circular arc mode, the sweep velocity on need only same circular arc is constant).The stepping step-length of optic probe can according to how many selections of measurement point, measurement point many more (step-length is more little), and measuring accuracy is high more.
The utility model comprises pulse-scaling circuit, it is characterized in that the optic probe formed by the light-pulse generator and the photo-detector of the excitation of the pulse power of crystal oscillator frequency stabilization by one, the optic probe position is adjusted and stepping mechanism, the test pattern plate is placed the worktable of workpiece for measurement and test pattern plate and is made optic probe make kinematic system scanning motion, that be made of motor, speed reduction unit, belt gear and flywheel with respect to workpiece for measurement and test pattern plate.The pulse power of crystal oscillator frequency stabilization can guarantee the light-pulse generator frequency stabilization, and flywheel can make the sweep velocity of scanning motion keep constant.
Light-pulse generator of the present utility model is preferably sent the energizer of directional light or with optics colimated light system collimated laser light device or ordinary light source, to strengthen beam intensity and to improve measuring accuracy.The reception of pulsed light can be adopted correlation or reflective two kinds of structures.The light source and the photo-detector of correlation structure optic probe are staggered relatively, and workpiece for measurement places between light source and the detector, the light that the direct received pulse light source of photo-detector sends.The light source of reflective structure optic probe and photo-detector are coupled with two optical fiber of an optical cable respectively and place workpiece for measurement the same side, and photo-detector receives the reflected light of surface of the work.This shows, use the correlation optic probe, then require the workpiece for measurement surface-brightening, can reflected light and make reflected light that certain intensity be arranged, so that photo-detector receives.
In order to guarantee measuring accuracy, be provided with the diaphragm of restriction light-receiving window size before the photo-detector of correlation optic probe or, make the light-receiving window as far as possible little photo-detector and optical fiber coupling.
In order further to reduce the influence of detector receive window size to measuring accuracy, the utility model also is provided with the pulse amplitude analysis unit, only makes the light pulse that surpasses peak value of pulse 50% is counted.
The shape of test pattern plate of the present utility model can be easy to process, accurate in size arbitrary graphic, preferably circular port, arcuate apertures, rectangular opening or square hole.The test pattern plate can be made one with worktable.
Owing to adopted the crystal oscillator frequency stabilization, guaranteed the frequency stabilization of light-pulse generator, to 10 6The pulsed light of hertz, light prober can detect each pulse.The scanning motion system that is made of motor, belt gear and flywheel can realize that sweep velocity is constant.Fully little light prober window and pulse amplitude analysis unit have reduced the influence of beam sizes to measuring.Therefore, measuring error of the present utility model is mainly from the shape and size error of test pattern.The measuring accuracy of the precision measurement pattern precision that can be near the mark.
Compare with existing workpiece shape measure instrument, the utlity model has simple in structurely, it is convenient rapidly to measure, the advantage that cost is low.By measuring the coordinate of the edge of work, not only measured the shape in workpiece cross section, and can go out other parameter relevant by COMPUTER CALCULATION rapidly with the workpiece for measurement cross sectional shape, as area, curvature etc.
Fig. 1 and Fig. 2 are respectively the synoptic diagram that explanation the utility model adopts the measuring principle of rectilinear scanning mode and circular arc scan mode.
Fig. 3 is the structural drawing of a kind of preferred embodiment of the utility model.
The utility model can have numerous embodiments.As noted earlier, optic probe can be rectilinear scanning or circular arc scanning with respect to the scan mode of workpiece for measurement, relative scanning motion can be workpiece for measurement motion and optic probe is motionless or opposite, and optic probe can be correlation structure or reflective structure.These modes can be made up by the difference of workpiece for measurement and measurement requirement, thereby multiple embodiments is arranged.Certainly, in the circular arc scan mode, adopt the optic probe motion and workpiece for measurement is motionless, can relate to the difficulty that optic probe is electrically connected, generally should not adopt.
Recommend a preferred embodiment below in conjunction with Fig. 3.Present embodiment adopts workpiece motion s and makes the circular arc scan mode with respect to optic probe.According to different workpieces, probe can adopt correlation or reflective.What Fig. 3 drew is the correlation optic probe.
1 is synchronous motor among Fig. 3, the 2nd, reducer casing, the 3rd, belt gear, the 4th, flywheel, the 5th, the workpiece turntable, with test pattern circular hole P, 6 is workpiece for measurement on the turntable, and a gear draws among this figure, 7 and 8 is respectively light-pulse generator and photo-detector, constitute an optic probe, 9 are probe upper and lower displacement mechanism, and 10 for comprising a stepper motor 13 and a feed screw nut, guide rail (not drawing in detail among the figure) is at interior probe (precession) displacement mechanism radially, the 11st, the pulse power of light source, pulse-scaling circuit and pulse amplitude analysis unit, the pulse power is by the crystal oscillator frequency stabilization, and 12 is computing machine and demonstration, print system is to realize measurement automatically and to calculate, print etc.
During measurement, workpiece for measurement (gear) 6 is placed on the work stage 5, tooth to be measured is positioned within the standard circular hole P, measurement point density is as requested selected radially step-length of optic probe.Workpiece for measurement is made uniform circular motion with worktable under motor 1, reducer casing 2, belt gear 3 and flywheel 4 drive.For whether the judgment task platform has entered the uniform circular motion state, in the time of can being rotated by worktable, whether the light pulse number of tooth continuous quadratic blocking-up to be measured equates is determined.After worktable (workpiece) is in uniform circular motion, can measure.Worktable rotates a week, and optic probe precession one step-length, step-length press the workpiece shape and measurement requirement is selected, and measures the polar coordinates of gear edge, thereby records the shape of gear.
If the workpiece for measurement surface-brightening, edge clear, but edge is not the border (for example, the edge of work has an inclined-plane, and what will measure is the workpiece shape that its inboard comprises) of printing opacity or shading, then can adopt the reflective optic probe.
When present embodiment is measured cross sectional shape,, be easy to obtain other parameter, for example area, the curvature etc. relevant with the workpiece for measurement cross sectional shape by COMPUTER CALCULATION.

Claims (9)

1, a kind of measurement mechanism with light pulse method measuring workpieces cross sectional shape, comprise pulse-scaling circuit, the optic probe of forming by a light-pulse generator that excites by the pulse power of crystal oscillator frequency stabilization and photo-detector that is characterised in that of the present utility model, the optic probe position is adjusted and stepping mechanism, the test pattern plate is placed the worktable of workpiece for measurement and test pattern plate and is made optic probe make the kinematic system that is made of motor, speed reduction unit, belt gear and flywheel of scanning motion with respect to workpiece for measurement and test pattern plate.
2, by the described measurement mechanism of claim 1, the light-pulse generator that it is characterized in that said optic probe is to send the laser instrument of directional light or by optical alignment system collimated laser light or ordinary light source.
3,, it is characterized in that said optic probe is that photo-detector and light-pulse generator are staggered relatively and place workpiece for measurement two limits, photo-detector directly to receive the correlation optic probe of the pulsed light that light source sends by claim 1 or 2 described measurement mechanisms.
4, by claim 1 or 2 described measurement mechanisms, it is characterized in that said optic probe be photo-detector and light-pulse generator respectively with two optical fiber couplings of an optical cable and place workpiece for measurement the same side, photo-detector receives the catoptrical reflective optic probe of surface of the work.
5,, it is characterized in that being provided with the diaphragm of restriction light-receiving window size before the photo-detector of said correlation optic probe or photo-detector and optical fiber being coupled by the described measurement mechanism of claim 3.
6,, it is characterized in that pulse amplitude analysis unit in addition by the described measurement mechanism of claim 1.
7, by the described measurement mechanism of claim 1, the shape that it is characterized in that said test pattern plate can be easy to process, accurate in size arbitrary graphic, preferably circular port, arcuate apertures, rectangular opening or square hole.
8, by claim 1 or 7 described measurement mechanisms, it is characterized in that said test pattern plate and worktable are made into integration.
9, by the described measurement mechanism of claim 1, it is characterized in that also comprising computing machine and demonstration, print system.
CN 94238602 1994-04-27 1994-04-27 Workpiece shape measuring apparatus Expired - Fee Related CN2190279Y (en)

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CN 94238602 CN2190279Y (en) 1994-04-27 1994-04-27 Workpiece shape measuring apparatus

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Application Number Priority Date Filing Date Title
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CN2190279Y true CN2190279Y (en) 1995-02-22

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105414068A (en) * 2015-12-16 2016-03-23 佛山市南海鑫隆机工机械有限公司 Edge washing device of special-shaped product and technology of edge washing device
CN113232613A (en) * 2021-07-07 2021-08-10 江铃汽车股份有限公司 System for detecting operation safety of vehicle nonstandard hub and control method
CN115371563A (en) * 2022-10-24 2022-11-22 溧阳市金桥机械有限公司 Flywheel detection device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105414068A (en) * 2015-12-16 2016-03-23 佛山市南海鑫隆机工机械有限公司 Edge washing device of special-shaped product and technology of edge washing device
CN113232613A (en) * 2021-07-07 2021-08-10 江铃汽车股份有限公司 System for detecting operation safety of vehicle nonstandard hub and control method
CN115371563A (en) * 2022-10-24 2022-11-22 溧阳市金桥机械有限公司 Flywheel detection device

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