CN219016680U - Chip appearance imaging detection system - Google Patents
Chip appearance imaging detection system Download PDFInfo
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- CN219016680U CN219016680U CN202223375936.1U CN202223375936U CN219016680U CN 219016680 U CN219016680 U CN 219016680U CN 202223375936 U CN202223375936 U CN 202223375936U CN 219016680 U CN219016680 U CN 219016680U
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- 238000003384 imaging method Methods 0.000 title claims abstract description 78
- 238000001514 detection method Methods 0.000 title claims abstract description 44
- 239000007788 liquid Substances 0.000 claims abstract description 52
- 230000001276 controlling effect Effects 0.000 claims abstract description 4
- 230000001105 regulatory effect Effects 0.000 claims abstract description 4
- 230000003287 optical effect Effects 0.000 claims description 7
- 238000010586 diagram Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
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Abstract
The application discloses chip outward appearance imaging detecting system includes: an imaging assembly, a prism assembly, and a computer device; the imaging assembly comprises a camera and a liquid telecentric lens, wherein the camera and the liquid telecentric lens are coaxially arranged and are used for imaging the bottom surface of one side of the chip, which is close to the liquid telecentric lens, and four side surfaces around the bottom surface, which are five surfaces in total; the prism assembly comprises a prism unit, wherein the prism unit is used for reflecting four sides of the chip into the liquid telecentric lens in a non-overlapping manner for clear imaging, and the bottom surface of the chip directly enters the liquid telecentric lens for clear imaging; the computer device is electrically connected with the imaging component and used for regulating and controlling the clear imaging range of the liquid telecentric lens and storing the imaging of five surfaces of the chip shot by the camera for detection; when the chip appearance imaging detection system operates, the chip is arranged between the imaging component and the prism component.
Description
Technical Field
The utility model relates to the technical field of chips, in particular to a chip appearance imaging detection system.
Background
Chips, often part of a computer or other electronic device. With the expansion of market demands and the upgrading of industrial scale, china is taken as a large country for chip consumption, and a lot of brands with stronger international competitiveness are developed in China. The application of machine vision in the semiconductor industry is very widespread and the application range is more and more extensive, and relates to the detection and measurement of defects in the appearance, size, number, flatness, spacing, positioning, calibration, solder joint quality, bending and the like of semiconductors.
One camera in the traditional appearance imaging detection device can only shoot one surface to be detected of the chip, and for products with a plurality of surfaces to be detected, a plurality of machine positions are often needed for shooting, so that the shooting cost is high, and the occupied space of equipment is large;
the existing appearance imaging detection device for shooting a plurality of surfaces to be detected simultaneously often has the following problems: 1. multiple surfaces of the chip to be detected cannot be imaged clearly at the same time; 2. the imaging of the different faces of the chip interfere with each other.
How to detect the appearance of the chip with high efficiency and high quality is a problem to be solved.
Disclosure of Invention
The technical problem to be solved by the embodiment of the utility model is to provide the chip appearance imaging detection system which can realize clear imaging detection of the appearance of five surfaces of the chip on a single station, avoid mutual interference of imaging of the five surfaces and is convenient for high-efficiency and high-quality chip appearance imaging detection.
In order to solve the above technical problems, the present utility model provides a chip appearance imaging detection system, including: an imaging assembly, a prism assembly, and a computer device; the imaging assembly comprises a camera and a liquid telecentric lens, wherein the camera and the liquid telecentric lens are coaxially arranged and are used for imaging the bottom surface of one side of the chip, which is close to the liquid telecentric lens, and four side surfaces around the bottom surface, which are five surfaces in total; the prism assembly comprises a prism unit, wherein the prism unit is used for reflecting four sides of the chip into the liquid telecentric lens in a non-overlapping manner for clear imaging, and the bottom surface of the chip directly enters the liquid telecentric lens for clear imaging; the computer device is electrically connected with the imaging component and used for regulating and controlling the focal plane position of the liquid telecentric lens and storing the imaging of five surfaces of the chip shot by the camera for detection; when the chip appearance imaging detection system operates, the chip is arranged between the imaging component and the prism component.
In one possible implementation, the adjustable focus range of the liquid telecentric lens is greater than the distance between the plane of the side of the chip mirrored in the prism unit and the plane of the bottom surface.
In one possible implementation, the liquid telecentric lens comprises a lens, and the computer device comprises an electromagnetic driver; when the chip appearance imaging detection system is operated, the electromagnetic driver adjusts the surface curvature radius of the lens by adjusting the voltage applied to the surface of the lens, so that the focal plane position of the liquid telecentric lens is adjusted.
In one possible implementation, the liquid telecentric lens is an object telecentric lens that receives only light rays having principal rays parallel to an optical axis of the object telecentric lens.
In one possible implementation manner, the prism unit includes four isosceles right prisms, the four isosceles right prisms are arranged in a cross shape, and four inclined surfaces form a concave space towards the center of the cross shape; when the chip appearance imaging detection system operates, the chip is arranged in the concave space.
In one possible implementation, the field of view of the liquid telecentric lens is larger than the area of the prism unit sectioned from the thickness direction of the chip.
In one possible implementation, the prism assembly includes a plurality of prism units arranged in sequence, each prism unit accommodating one chip.
The implementation of the utility model has the following beneficial effects:
according to the imaging detection device, on the basis of the design of the prism assembly, quick zooming is realized through the liquid telecentric lens, and imaging detection of five surfaces of the bottom surface and the 4 side surfaces of the chip is realized on a single station.
The image crosstalk problem caused by the combination of the non-telecentric lens and the prism array is effectively avoided by using the object space telecentric lens.
The prism array formed by the plurality of prism units can meet the requirements of five-face appearance imaging detection of a plurality of chips, a large field of view, a large depth of field and high resolution.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the application.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the application and together with the description, serve to explain the principles of the application and do not constitute an undue limitation on the application.
FIG. 1 is a schematic diagram of a chip appearance imaging detection system shown in accordance with some embodiments of the present application;
FIG. 2 is a schematic diagram of various sides of a chip shown in accordance with some embodiments of the present application;
FIG. 3 is a three-view of a prism unit shown according to some embodiments of the present application;
FIG. 4 is a schematic view of focal planes of different sized chips shown according to some embodiments of the present application;
FIG. 5 is a schematic illustration of a liquid lens variation according to some embodiments of the present application;
fig. 6 is a schematic structural view of a prism assembly according to some embodiments of the present application.
Reference numerals in the drawings:
1-imaging assembly, 11-camera, 12-liquid telecentric lens, 121-lens, 121' -lens;
2-prism assembly, 21-prism unit, 211-prism;
3-chip, 3-1' -chip mirror image, 3-2-chip, 3-2' -chip mirror image, 31-bottom, 311-bottom focal plane, 32-side, 32' -side, 321-side focal plane, 33-top;
4-computer means;
WD 1-first working distance, WD 2-second working distance.
Detailed Description
In order that the above objects, features and advantages of the utility model will be readily understood, a more particular description of the utility model will be rendered by reference to the appended drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present utility model. The present utility model may be embodied in many other forms than described herein and similarly modified by those skilled in the art without departing from the spirit of the utility model, whereby the utility model is not limited to the specific embodiments disclosed below.
It will be understood that when an element is referred to as being "fixed to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like are used herein for illustrative purposes only.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this utility model belongs. The terminology used herein in the description of the utility model is for the purpose of describing particular embodiments only and is not intended to be limiting of the utility model. The term "and/or" as used herein includes any and all combinations of one or more of the associated listed items.
Referring to fig. 1, fig. 1 is a schematic diagram of a chip appearance imaging detection system according to some embodiments of the present application. As shown in fig. 1, the chip appearance imaging detection system includes: an imaging assembly 1, a prism assembly 2 and a computer device 4. Wherein the imaging assembly 1 comprises a camera 11 and a liquid telecentric lens 12. The camera 11 and the liquid telecentric lens 12 are coaxially arranged for imaging five faces of the chip 3. As shown in fig. 2, the chip 3 includes a bottom surface 31, four side surfaces 32 surrounding the bottom surface 31, and a top surface 33. When the chip 3 performs appearance imaging detection, the bottom surface 31 is close to the liquid telecentric lens 12. Specifically, the plane of the bottom surface 31 of the chip 3 is perpendicular to the axis of the liquid telecentric lens 12. The imaging assembly 1 images the bottom face 31 and four side faces 32 of the chip 3. The prism assembly 2 includes a prism unit 21. The prism unit 21 is used for reflecting the four sides 32 of the chip 3 into the liquid telecentric lens 12 without overlapping each other for clear imaging, and the bottom surface 31 of the chip 3 directly enters the liquid telecentric lens 12 for clear imaging. When the chip appearance imaging detection system is in operation, the chip 3 is arranged between the imaging component 1 and the prism 211 component 2. The computer device 4 is electrically connected with the imaging assembly 1 and is used for regulating and controlling the focal plane position of the liquid telecentric lens 12 and storing the images of the five surfaces of the chip 3 shot by the imaging assembly 1 for detection.
Further, referring to fig. 3, fig. 3 is a three view of a prism unit shown according to some embodiments of the present application. Where a in fig. 3 is a top view of the prism unit, b in fig. 3 is a front view of the prism unit, and c in fig. 3 is a side view of the prism unit. As shown in fig. 3, the prism unit 21 may include four prisms 211, and the four prisms 211 are isosceles right prisms 211. The four isosceles right prisms 211 are arranged in a cross shape, and the four inclined surfaces form a concave space toward the center of the cross shape. When the chip appearance imaging detection system operates, the chip 3 is arranged in the concave space. Specifically, both the bottom surface 31 and the side surface 32 of the chip 3 can be imaged clearly in the liquid telecentric lens 12, that is, after the bottom surface 31 of the chip 3 is imaged clearly in the lens, focusing is performed on the liquid telecentric lens 12, and then the mirror image reflected by the prism 211 of the side surface 32 of the chip 3 can be imaged clearly in the lens. That is, the distance between the bottom surface 31 of the chip 3 and the mirror image reflected by the side surface 32 of the chip 3 through the prism 211 is within the focusing range of the lens. Referring to fig. 4, fig. 4 is a schematic view of focal planes of different sized chips according to some embodiments of the present application. As shown in a of fig. 4, the width of the right angle surface of the isosceles right angle prism 211 is 4.7mm, the distance between the two opposite isosceles right angle prisms 211 is 9mm, the distance between the plane of the top surface 33 of the chip 3-1 and the right angle surface of the side of the isosceles right angle prism 211 far from the lens is 0.33mm, the size of the chip 3-1 is 5mm x 0.85mm, the chip 3-1 is mirrored as the chip mirror image 3-1' by the prism unit 21, and the distance between the bottom surface 31 of the chip 3-1 and the side surface 32' of the mirrored chip 3-1' is 3.1mm, namely, the optical path difference between the bottom surface 31 and the side surface 32 of the chip 3-1 is 3.1mm. As shown in b of fig. 4, the width of the right angle surface of the isosceles right angle prism 211 is 4.7mm, the distance between the two opposite isosceles right angle prisms 211 is 9mm, the distance between the plane of the top surface 33 of the chip 3-2 and the right angle surface of the side of the isosceles right angle prism 211 far from the lens is 0.55mm, the size of the chip 3-2 is 3mm x 1.1mm, the chip 3-2 is mirrored as the chip mirror image 3-2' by the prism unit 21, and the distance between the bottom surface 31 of the chip 3-2 and the side surface 32' of the mirrored chip 3-2' is 4.65mm, namely, the optical path difference between the bottom surface 31 and the side surface 32 of the chip 3-2 is 4.65mm. It can be seen that the focusing ranges of the lenses required for different chips are different, and the focusing range of the liquid telecentric lens 12 is larger than the optical path difference between the bottom surface 31 and the side surface 32 of the chip 3, so that the bottom surface 31 and the side surface 32 of the chip 3 can clearly image in the camera 11.
Further, referring to fig. 5, fig. 5 is a schematic diagram illustrating a liquid lens variation according to some embodiments of the present application. As shown in fig. 5, liquid telecentric lens 12 includes a lens 122. The computer device 4 comprises an electromagnetic drive. In operation of the chip-appearance imaging detection system, the electromagnetic drive adjusts the focal plane of the liquid telecentric lens 12 by adjusting the radius of curvature of the surface of the lens 122 by adjusting the voltage applied to the surface of the lens 122. Specifically, as shown in fig. 5 a, the radius of curvature of the surface of the lens 122 is R1, and the focal plane of the liquid telecentric lens 12 is on the plane of the bottom surface 31 of the chip 3, and the focal plane 311 of the bottom surface is a first working distance WD1 from the surface of the lens 121. At this time, the telecentric lens can clearly capture an image of the bottom surface 31 of the chip 3. As shown in fig. 5 b, the radius of curvature of the surface of the lens 121' is R2, and the focal plane of the liquid telecentric lens 12 is on the plane where the 3-side 32 of the chip is imaged by the prism 211, and at this time, the telecentric lens can clearly capture images of the four sides 32 of the chip 3. The side focal plane 321 is a second working distance WD2 from the surface of the lens 122'. The second working distance WD2 is greater than the first working distance WD1, and the difference between the second working distance WD2 and the first working distance WD1, that is, the distance between the plane where the mirror surface and the bottom surface 31 of the side surface 32 of the chip 3 are located in the prism 211 unit 21 is smaller than the focusing range of the liquid telecentric lens 12, so that the chip appearance imaging detection system can implement clear imaging of five surfaces of the chip 3 through one camera 11, and efficiency and quality of appearance detection of the chip 3 are improved.
Further, the liquid telecentric lens 12 may be an object telecentric lens. The object side telecentric lens only receives light rays with main light rays parallel to the optical axis of the object side telecentric lens, and the main light rays reflected by the prism 211 of the bottom surface 31 and the top surface 33 of the chip 3 are not parallel to the optical axis of the telecentric lens, so that the light rays cannot enter the telecentric lens for imaging. In this way, the problem of crosstalk of images of the top surface 33 and the bottom surface 31 of the chip 3 to images of the side surfaces 32 of the chip 3 can be avoided.
Further, the field of view of the liquid telecentric lens 12 may be larger than the area of the prism unit 21 sectioned from the thickness direction of the chip 3. The liquid telecentric lens 12 has a large field of view and can image a chip 3 of a larger size. Further, when the field of view of the liquid telecentric lens 12 is the size of the cross-sectional area of the plurality of prism 211 units 21, the prism assembly 2 may include two or more prism units 21, and the prism units 21 are arranged in sequence, so that the field of view of the liquid telecentric lens 12 is utilized as optimally as possible. Each prism unit 21 may house one chip 3. Referring to fig. 6, fig. 6 is a schematic diagram of a prism assembly 2 according to some embodiments of the present application. As shown in fig. 6, the prism assembly 2 may include 8 prism units 21,8 prism units 21 arranged and distributed according to 2×4, and can accommodate 8 chips 3 for imaging detection. Therefore, the imaging detection can be carried out on five surfaces of the same chip 3 at the same station, and simultaneously the imaging detection can be carried out on a plurality of chips 3, so that the imaging detection efficiency of the appearance of the chip 3 is greatly improved, and the space cost is also saved.
The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.
The above examples illustrate only a few embodiments of the utility model, which are described in detail and are not to be construed as limiting the scope of the utility model. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the utility model, which are all within the scope of the utility model. Accordingly, the scope of protection of the present utility model is to be determined by the appended claims.
Claims (7)
1. A chip appearance imaging detection system, comprising: an imaging assembly, a prism assembly, and a computer device; wherein,,
the imaging assembly comprises a camera and a liquid telecentric lens, and the camera and the liquid telecentric lens are coaxially arranged and are used for imaging the bottom surface of one side of the chip, which is close to the liquid telecentric lens, and four side surfaces around the bottom surface, wherein the total number of the side surfaces is five;
the prism assembly comprises a prism unit, wherein the prism unit is used for reflecting four sides of the chip into the liquid telecentric lens in a non-overlapping manner for clear imaging, and the bottom surface of the chip directly enters the liquid telecentric lens for clear imaging;
the computer device is electrically connected with the imaging component and used for regulating and controlling the focal plane position of the liquid telecentric lens and storing the imaging of five surfaces of the chip shot by the camera for detection;
when the chip appearance imaging detection system operates, the chip is arranged between the imaging component and the prism component.
2. The chip appearance imaging detection system of claim 1, wherein the adjustable focus range of the liquid telecentric lens is greater than a distance between a plane of the side surface of the chip mirrored in the prism unit and a plane in which the bottom surface is located.
3. The chip appearance imaging detection system of claim 2, wherein the liquid telecentric lens comprises a lens and the computer device comprises an electromagnetic driver; when the chip appearance imaging detection system is operated, the electromagnetic driver adjusts the surface curvature radius of the lens by adjusting the voltage applied to the surface of the lens, so that the focal plane position of the liquid telecentric lens is adjusted.
4. The chip appearance imaging detection system of claim 1, wherein the liquid telecentric lens is an object telecentric lens that receives only light rays having principal rays parallel to an optical axis of the object telecentric lens.
5. The chip appearance imaging detection system according to claim 1, wherein the prism unit includes four isosceles right prisms arranged in a cross shape, and four inclined surfaces form a concave space toward the center of the cross shape; when the chip appearance imaging detection system operates, the chip is arranged in the concave space.
6. The chip appearance imaging detection system of claim 5, wherein the field of view of the liquid telecentric lens is larger than the area of the prism unit cross-section from the thickness direction of the chip.
7. The chip appearance imaging detection system of claim 6, wherein the prism assembly includes a plurality of prism units arranged in sequence, each prism unit housing a chip.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202223375936.1U CN219016680U (en) | 2022-12-15 | 2022-12-15 | Chip appearance imaging detection system |
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| CN202223375936.1U CN219016680U (en) | 2022-12-15 | 2022-12-15 | Chip appearance imaging detection system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116532388A (en) * | 2023-06-02 | 2023-08-04 | 芯朋半导体科技(如东)有限公司 | Five-sided imaging detector |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116532388A (en) * | 2023-06-02 | 2023-08-04 | 芯朋半导体科技(如东)有限公司 | Five-sided imaging detector |
| CN116532388B (en) * | 2023-06-02 | 2023-11-14 | 芯朋半导体科技(如东)有限公司 | Five-sided imaging detector |
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