CN219012952U - Bearing cooling assembly and molecular pump with same - Google Patents

Abstract

The utility model relates to the technical field of molecular pumps, in particular to a bearing cooling assembly and a molecular pump with the same. A bearing cooling assembly comprising: the bearing housing, the bearing housing is equipped with the installation end, the installation end is suitable for holding the bearing, the inner wall of installation end with the periphery laminating of bearing sets up, be equipped with at least one cooling tank on the bearing housing, be suitable for holding the coolant liquid in the cooling tank, the coolant liquid in the cooling tank absorbs the heat that transmits to the bearing housing from the bearing. The utility model solves the problem that heat generated by a bearing of a molecular pump can be transferred to cooling liquid only after passing through other parts for a long distance, and has low cooling efficiency, and the working state and the service life of the molecular pump are affected, so that the bearing cooling assembly and the molecular pump with the bearing cooling assembly are provided.

Description

Bearing cooling assembly and molecular pump with same

Technical Field

The utility model relates to the technical field of molecular pumps, in particular to a bearing cooling assembly and a molecular pump with the same.

Background

The turbomolecular pump is a mainstream vacuum obtaining device, and is widely used in the application fields of high-energy accelerators, controllable nuclear reaction devices, heavy particle accelerators, vacuum coating and the like which need to obtain high vacuum degree because of the stable performance, strong atmospheric impact resistance and little pollution of oil vapor.

The turbo molecular pump is a transmission type molecular pump which transfers momentum to gas molecules through moving blades rotating at a high speed so as to enable the gas molecules to generate directional flow, the rotating speed of the molecular pump has a critical effect on the air suction performance, the rotating speed of the molecular pump is generally tens of thousands of revolutions, when the rotating speed of a mechanical rotating part is higher, a great burden is brought to a bearing, the temperature of the bearing is increased, the bearing is damaged, and the service life of the molecular pump is influenced. In the existing molecular pump, a cooling structure is often arranged in a bearing seat, so that heat of a bearing can be transferred to cooling liquid only through a long distance after passing through other parts, and the problems of low cooling efficiency and slow cooling of the bearing exist, so that the normal working state and the service life of the molecular pump are affected.

Disclosure of Invention

Therefore, the technical problem to be solved by the utility model is to overcome the defects that the cooling efficiency is low and the working state and the service life of the molecular pump are affected because the heat generated by the bearing of the molecular pump in the prior art can be transferred to the cooling liquid only after passing through other parts and components for a long distance, so that the bearing cooling assembly and the molecular pump with the bearing cooling assembly are provided.

In order to solve the above problems, the present utility model provides a bearing cooling assembly comprising:

the bearing housing, the bearing housing is equipped with the installation end, the installation end is suitable for holding the bearing, the inner wall of installation end with the periphery laminating of bearing sets up, be equipped with at least one cooling tank on the bearing housing, be suitable for holding the coolant liquid in the cooling tank, the coolant liquid in the cooling tank absorbs the heat that transmits to the bearing housing from the bearing.

Optionally, the bearing sleeve further comprises a sealing cover, and the sealing cover is fixedly connected with the sealing end of the bearing sleeve.

Optionally, a sealing gasket is further arranged between the sealing cover and the sealing end.

Optionally, the cooling groove is an annular groove provided on the sealing end with a central axis of the sealing end as a central line.

Optionally, the mounting end and the sealing end are through and arranged with a common central axis; annular protrusions facing the central axis are arranged between the sealing end and the mounting end, and the upper end faces of the annular protrusions facing the mounting end are attached to the end faces of the outer ring of the bearing.

The molecular pump comprises the bearing cooling assembly and further comprises a main shaft, wherein the connecting end of the main shaft is arranged in the bearing sleeve, and the outer peripheral wall of the main shaft is attached to the inner wall of the bearing inner ring.

Optionally, the bearing further comprises a lock nut, wherein the lock nut is sleeved on the periphery of the connecting end, and the end face of the lock nut is attached to the end face of the bearing inner ring.

Optionally, the bearing sleeve further comprises a bearing seat sleeved on the periphery of the bearing sleeve, a radial buffer groove is formed in the bearing sleeve, and a radial buffer piece is arranged in the radial buffer groove.

Optionally, the device further comprises a bottom cover, wherein the bottom cover is connected with the bearing seat, a sealing ring is arranged between the bottom cover and the bearing seat, and an axial buffer piece is arranged between the bottom cover and the sealing end.

Optionally, the device further comprises a pump shell, wherein the main shaft, the bearing seat and the bottom cover are all arranged in the pump shell.

The technical scheme of the utility model has the following advantages:

1. the present utility model provides a bearing cooling assembly comprising: the bearing housing is provided with a mounting end, the mounting end is suitable for accommodating the bearing, the inner wall of the mounting end is in fit with the periphery of the bearing, at least one cooling groove is formed in the bearing housing, cooling liquid is suitable for accommodating the cooling liquid in the cooling groove, and the cooling liquid in the cooling groove absorbs heat transferred from the bearing to the bearing housing. The inner wall of installation end and bearing periphery laminating, the heat transfer that the bearing produced to the bearing housing, by the coolant liquid absorption in the cooling tank on the bearing housing again to effectively reduce the temperature of bearing, prevent that the bearing is impaired. The bearing cooling assembly provided by the utility model solves the problem that the bearing can be transferred to the cooling liquid only after passing through other parts and a longer distance, has higher cooling efficiency and ensures the normal working state of the molecular pump.

2. The bearing cooling assembly provided by the utility model further comprises a sealing cover, wherein the sealing cover is fixedly connected with the sealing end of the bearing sleeve, and a sealing gasket is arranged between the sealing cover and the sealing end and plays a sealing role.

3. The bearing cooling assembly provided by the utility model has the advantages that the cooling groove is the annular groove which is arranged on the sealing end by taking the central axis of the sealing end as the central line, and the annular groove is arranged to enable the cooling liquid to fully and uniformly absorb heat.

4. The bearing cooling assembly provided by the utility model has the advantages that the mounting end and the sealing end are communicated and are arranged in a concentric axis manner so as to form a through hole of the shaft sleeve; annular protrusions facing the central axis are arranged between the sealing end and the mounting end, the upper surfaces of the annular protrusions facing the mounting end are attached to the end face of the bearing outer ring, and the annular protrusions play a role in supporting and limiting the bearing outer ring.

5. According to the molecular pump provided by the utility model, the connecting end of the main shaft is arranged in the bearing sleeve, the outer peripheral wall of the main shaft is attached to the inner wall of the bearing inner ring, and the main shaft rotates to drive the inner ring to rotate, so that the rotating beads between the inner ring and the outer ring generate heat, and the heat is transferred to the bearing sleeve through the outer ring.

6. The molecular pump provided by the utility model further comprises a lock nut, wherein the lock nut is fixedly connected with the connecting end, the lock nut is sleeved on the periphery of the connecting end so as to prevent the main shaft from swaying back and forth, and the end face of the lock nut is attached to the end face of the bearing inner ring so as to play a role in supporting the inner ring.

7. The molecular pump provided by the utility model further comprises a bearing seat sleeved on the periphery of the bearing sleeve, the bearing sleeve is provided with a radial buffer groove, a radial buffer piece is arranged in the radial buffer groove, the radial buffer piece plays a role in slowing down the radial vibration of the main shaft, the damage to the bearing caused by overlarge shaking under the condition that the main shaft rotates at a high speed is avoided, and meanwhile, the radial buffer piece buffers the bearing sleeve and the bearing seat without rigid collision, so that the influence caused by external vibration is reduced.

8. The molecular pump provided by the utility model further comprises a bottom cover, wherein the bottom cover is connected with the bearing seat, a sealing ring is arranged between the bottom cover and the bearing seat, an axial buffer piece is arranged between the bottom cover and the sealing ring, the axial buffer piece is arranged to play a role in reducing vibration of the main shaft along the central axis, damage to the bearing caused by excessive shaking under the condition that the main shaft rotates at a high speed is avoided, and meanwhile, the axial buffer piece is used for pre-tightening the main shaft and the bearing sleeve in the axial direction so as to reduce the influence caused by external vibration.

9. The molecular pump provided by the utility model further comprises a pump shell, wherein the main shaft, the bearing seat and the bottom cover are all arranged in the pump shell, and the radial buffer part, the axial buffer part and the cooling groove are simultaneously arranged on the bearing sleeve, so that the whole structure of the molecular pump is more compact, the effects of eliminating vibration and absorbing amplitude are achieved on the bearing sleeve, the temperature rise amplitude of the bearing is low, the heat absorption efficiency is high, and the molecular pump has the advantages of simple structure and high reliability.

Drawings

In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present utility model, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.

Fig. 1 is a front view of a bearing housing provided in an embodiment of the present utility model.

FIG. 2 is a front view of a bearing housing, bearing sleeve and spindle assembly provided in an embodiment of the present utility model;

fig. 3 is a front view of a bearing housing having microspheres and a spacer provided therein in an embodiment of the present utility model.

Reference numerals illustrate: 1. a bearing sleeve; 2. a mounting end; 3. sealing the end; 4. an annular protrusion; 5. a sealing gasket; 6. a cooling tank; 7. sealing cover; 8. radial buffer grooves; 9. a radial buffer; 10. a bearing; 11. a main shaft; 12. a seal ring; 13. an axial buffer; 14. locking a nut; 15. a bottom cover; 16. a bearing seat; 17. a microsphere; 18. a partition board.

Detailed Description

The following description of the embodiments of the present utility model will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the utility model are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

In the description of the present utility model, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

In addition, the technical features of the different embodiments of the present utility model described below may be combined with each other as long as they do not collide with each other.

One embodiment of a bearing cooling assembly as shown in fig. 1-3, comprises: the bearing comprises a bearing sleeve 1 and a sealing cover 7, wherein the two ends of the bearing sleeve 1 are respectively provided with a mounting end 2 and a sealing end 3, the mounting end 2 is provided with a bearing 10, namely, the inner wall of the mounting end 2 is attached to the periphery of the bearing 10.

As shown in fig. 2, the mounting end 2 and the sealing end 3 are communicated and arranged on the same central axis, an annular protrusion 4 facing the central axis is arranged between the mounting end 2 and the sealing end 3, and the upper end surface of the annular protrusion 4 facing the mounting end 2 is attached to the end surface of the outer ring of the bearing 10 so as to support and limit the outer ring of the bearing 10. For absorbing heat transferred from the bearing 10, the sealing end 3 of the bearing housing 1 is provided with a cooling groove 6, wherein the cooling groove 6 is an annular groove provided on the sealing end 3 with the central axis of the sealing end 3 as a central line. The cooling tank 6 is sealed, and further comprises a sealing cover 7 fixedly connected with the sealing end 3 and a sealing gasket 5 arranged between the sealing cover 7 and the sealing end 3, wherein the sealing cover 7 is fixedly connected with the sealing end 3 through a fastener. Specifically, the fastening piece is a bolt, and the sealing gasket 5 is a rubber sealing gasket 5.

The utility model also provides a molecular pump, which comprises the bearing cooling assembly, and further comprises a main shaft 11, a bearing seat 16, a bottom cover 15 and a pump shell, wherein the main shaft 11, the bearing seat 16, the bottom cover 15 and the bearing cooling assembly are all arranged in the pump shell.

As shown in fig. 1, the connecting end of the main shaft 11 is provided in the bearing 10, and the outer peripheral wall of the main shaft 11 is fitted to the inner wall of the inner ring of the bearing 10. In order to avoid the main shaft 11 from swaying back and forth, the device further comprises a lock nut 14 sleeved on the periphery of the connecting end, wherein the end face of the lock nut 14 is attached to the end face of the inner ring of the bearing 10. As shown in fig. 1, the bearing housing 1 is further provided with a bearing housing 16 around its outer circumference. In order to avoid rigid collision between the bearing sleeve 1 and the bearing seat 16, as shown in fig. 1 and 2, two radial buffer grooves 8 are arranged on the bearing sleeve 1 at intervals, and a radial buffer piece 9 is respectively arranged in the radial buffer grooves 8. In particular, the radial buffer 9 is a damping rubber ring. As shown in fig. 1, the cooling device further comprises a bottom cover 15, the bottom cover 15 is fixedly connected with the bearing seat 16, the axial buffer member 13 is in a compressed state, and a sealing ring 12 is arranged between the bottom cover 15 and the bearing seat 16 to avoid overflow of cooling liquid. As shown in fig. 2, an axial buffer 13 is provided in the space between the bottom cover 15 and the sealing end 3. In particular, the axial buffer 13 is a spring.

In the specific implementation process, the main shaft 11 positioned in the pump shell rotates at a high speed to drive the inner ring of the bearing 10 and the main shaft 11 to rotate, so that the balls positioned between the inner ring and the outer ring of the bearing 10 rotate to generate a large amount of heat, the heat is transferred to the bearing sleeve 1 through the bearing 10, and the heat is absorbed by the cooling liquid positioned in the cooling groove 6, so that the bearing 10 is prevented from being heated up quickly, and the normal rotation of the main shaft 11 and the bearing 10 is ensured. In the rotation process of the main shaft 11, axial or radial movement can be avoided, the bearing 10 is driven to generate axial or radial vibration, the axial buffer member 13 in a compressed state provides axial pre-tightening and can eliminate the axial vibration, the radial buffer member 9 can absorb the radial vibration, and the vibration amplitude is reduced, so that the bearing 10 can be prevented from being damaged, the service life is prolonged, and the influence caused by external vibration can be reduced.

The radial buffer piece 9, the axial buffer piece 13 and the cooling groove 6 are arranged on the bearing sleeve 1, so that the whole structure of the molecular pump is more compact, the effects of eliminating vibration and absorbing amplitude are achieved on the bearing sleeve 1, the temperature rise amplitude of the bearing is low, the heat absorption efficiency is high, and the bearing has the advantages of being simple in structure and high in reliability.

Alternatively, the number of radial buffer slots 8 may also be 1, 3 or even more.

Alternatively, the number of cooling channels 6 may also be 2, 3 or even more.

Alternatively, water may be directly injected into the cooling tank 6 to cool the bearing outer ring by water cooling, or a honeycomb structure may be placed or microspheres 17 and partitions 18 may be filled, and then a certain amount of cooling liquid may be injected to form a "thermal cycle of liquid-gas exchange" therein, so as to further enhance the cooling effect.

As an alternative embodiment, a heat-conducting glue may be filled between the outer ring of the bearing housing 1 and the bearing housing 16 to accelerate the heat transfer between the bearing housing 1 and the bearing housing 16.

It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. And obvious variations or modifications thereof are contemplated as falling within the scope of the present utility model.

Claims (10)

1. A bearing cooling assembly, comprising:

bearing housing (1), bearing housing (1) is equipped with installation end (2), installation end (2) are suitable for holding bearing (10), the inner wall of installation end (2) with the periphery laminating of bearing (10) sets up, be equipped with at least one cooling tank (6) on bearing housing (1), be suitable for holding the coolant liquid in cooling tank (6), the coolant liquid in cooling tank (6) absorbs the heat of transferring to bearing housing (1) from bearing (10).

2. Bearing cooling assembly according to claim 1, further comprising a sealing cover (7), the sealing cover (7) being fixedly connected with the sealing end (3) of the bearing housing (1).

3. Bearing cooling assembly according to claim 2, wherein a gasket (5) is further provided between the sealing cap (7) and the sealing end (3).

4. Bearing cooling assembly according to claim 2, wherein the cooling groove (6) is an annular groove provided on the sealing end (3) with the central axis of the sealing end (3) as a centre line.

5. Bearing cooling assembly according to claim 2, wherein the mounting end (2) and the sealing end (3) are through and arranged concentrically; annular protrusions (4) facing the central axis are arranged between the sealing end (3) and the mounting end (2), and the upper end faces of the annular protrusions (4) facing the mounting end (2) are attached to the end faces of the outer ring of the bearing (10).

6. A molecular pump, characterized by comprising the bearing cooling assembly according to any one of claims 1-5, and further comprising a main shaft (11), wherein a connecting end of the main shaft (11) is arranged in the bearing sleeve (1), and an outer peripheral wall of the main shaft (11) is attached to an inner wall of an inner ring of the bearing (10).

7. The molecular pump according to claim 6, further comprising a lock nut (14), wherein the lock nut (14) is sleeved on the outer periphery of the connecting end, and an end face of the lock nut (14) is attached to an end face of an inner ring of the bearing (10).

8. The molecular pump according to claim 7, further comprising a bearing seat (16) sleeved on the periphery of the bearing sleeve (1), wherein the bearing sleeve (1) is provided with a radial buffer groove (8), and a radial buffer piece (9) is arranged in the radial buffer groove (8).

9. The molecular pump according to claim 8, further comprising a bottom cover (15), wherein the bottom cover (15) is connected with the bearing seat (16), a sealing ring (12) is arranged between the bottom cover (15) and the bearing seat (16), and an axial buffer (13) is arranged between the bottom cover (15) and the sealing end (3).

10. The molecular pump according to claim 9, further comprising a pump housing, wherein the main shaft (11), the bearing housing (16), and the bottom cover (15) are all disposed in the pump housing.

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