CN218939605U

CN218939605U - Single crystal silicon slice sizing frame removing and conveying device

Info

Publication number: CN218939605U
Application number: CN202223457960.XU
Authority: CN
Inventors: 杨春旺; 李尚松; 徐福; 李春阳; 安琪; 吴常坤
Original assignee: Tianjin New Mart Technology Development Co ltd
Current assignee: Tianjin New Mart Technology Development Co ltd
Priority date: 2022-12-23
Filing date: 2022-12-23
Publication date: 2023-04-28
Anticipated expiration: 2032-12-23

Abstract

The utility model discloses a monocrystalline silicon wafer sizing frame removing and conveying device, which comprises a conveying gripper frame, wherein a group of swing arm hooks which are driven to rotate and open or fold are respectively arranged at two opposite end sides of the conveying gripper frame, the axial direction of a swing arm rotating shaft which drives the swing arm hooks to rotate is consistent with the width direction of the conveying gripper frame, and two groups of clamping positioning blocks are arranged in the middle of the inside of the conveying gripper frame: the two groups of clamping positioning blocks are arranged at intervals along the length direction of the carrying gripper frame, and the clamping moving direction of the two groups of clamping positioning blocks is perpendicular to the length direction of the carrying gripper frame. According to the utility model, through the arrangement of the swing arm hook and the clamping positioning block, the monocrystalline silicon wafer material dipping seat can be carried, and meanwhile, the monocrystalline silicon wafer sizing frame removing frame can be carried, so that one device has two functions, and an external robot is used as the input power of the tool, and is matched with the external robot to flexibly and intelligently operate.

Description

Single crystal silicon slice sizing frame removing and conveying device

Technical Field

The utility model relates to a material frame conveying device, in particular to a monocrystalline silicon wafer sizing frame removing conveying device.

Background

At present, most of the domestic semiconductor raw material processing industry belongs to a semi-automatic control flow, a plurality of special stations still need to be manually participated, and because of the fact that manual operation is preferably adopted when uncertain factors exist, the semiconductor raw material processing industry is flexibly and reasonably carried through manual cognition, the working environment, labor intensity and working efficiency of operators are difficult to guarantee although the uncertain factors exist, certain safety risks exist, and particularly the special stations for carrying workpieces are heavier and the manual lifting appliance has dropping risks, so that the transfer difficulty of the workpieces is increased, and corresponding safety measures cannot be guaranteed.

Therefore, the monocrystalline silicon wafer sizing frame removing and conveying device which is convenient and practical, reasonable in control, strong in reliability and guaranteed in safety performance is provided, and the monocrystalline silicon wafer sizing frame removing and conveying device becomes one of the problems to be solved urgently by the technicians in the field.

Disclosure of Invention

The utility model aims to provide the monocrystalline silicon wafer sizing frame removing and conveying device which is convenient and practical, reasonable in control, strong in reliability and guaranteed in safety performance, can convey monocrystalline silicon wafer material dipping seats and monocrystalline silicon wafer sizing frame removing, is particularly suitable for the environment temperature with corrosive liquid in manual operation, reduces the risk of manual operation under the condition that the conveying load exceeds the condition that the ergonomics can bear, and improves the production efficiency.

The technical scheme adopted for realizing the purpose of the utility model is as follows:

the utility model provides a monocrystalline silicon piece takes off sizing material frame handling device, includes the transport tongs frame, a set of swing arm couple that receives the rotation of drive to open or fold has been arranged respectively to transport tongs frame's opposite both ends side, the drive the rotatory swing arm rotation axis's of swing arm couple axial direction with the width direction of transport tongs frame is unanimous, two sets of clamp positioning piece have been arranged at the inside middle part of transport tongs frame: the two groups of clamping positioning blocks are arranged at intervals along the length direction of the carrying gripper frame, and the clamping moving direction of the two groups of clamping positioning blocks is perpendicular to the length direction of the carrying gripper frame.

According to the utility model, through the arrangement of the swing arm hook and the clamping positioning block, the monocrystalline silicon wafer material dipping seat can be carried, and meanwhile, the monocrystalline silicon wafer sizing frame removing frame can be carried, so that one device has two functions, and an external robot is used as the input power of the tool, and is matched with the external robot to flexibly and intelligently operate.

The utility model can utilize the robot control system, through the mutual feedback of corresponding sensor signals between the PLC controller and the equipment as well as between the PLC controller and the robot, the robot can flexibly and intelligently replace the corresponding work which is finished by the original manual work, thereby saving labor force, reducing labor cost, greatly improving the transfer efficiency of the material dipping seat and the degumming material frame, and being a further improvement on the automatic operation flow.

The monocrystalline silicon wafer sizing frame removing and conveying device is reasonable in structure and control, high in reliability and guaranteed in safety performance, the problems of high cost of labor in the high-risk manual work industry, high safety risk and low production efficiency are effectively solved, and the monocrystalline silicon wafer sizing frame removing and conveying device is particularly widely applied in the semiconductor raw material processing industry.

The monocrystalline silicon wafer sizing frame removing and conveying device is used for transferring and storing monocrystalline silicon wafer sizing frames among various devices in the chip semiconductor industry, is controlled by a robot to be used, saves labor force, reduces labor cost, is safe and reliable, and improves working efficiency.

Drawings

FIG. 1 is a schematic front view of a single crystal silicon wafer sizing frame removing and conveying device;

FIG. 2 is a schematic left view of the structure of the single crystal silicon wafer de-sizing frame conveying device;

FIG. 3 is a schematic top view of a monocrystalline silicon wafer de-sizing frame handling device according to the present utility model;

FIG. 4 is a schematic structural axial view of a single crystal silicon wafer de-sizing frame conveying device;

FIG. 5 is a schematic cross-sectional view of FIG. 1 taken along line A-A;

FIG. 6 is a schematic cross-sectional view of FIG. 1 taken along B-B;

FIG. 7 is a schematic view of the cross-sectional structure of FIG. 1 taken along the line C-C;

FIG. 8 is a schematic view of the cross-sectional structure of FIG. 1 taken along D-D;

FIG. 9 is a left side partial schematic view of the structure of the single crystal silicon wafer de-sizing frame handling device of the present utility model;

FIG. 10 is a schematic view showing a structural axis of a single crystal silicon wafer de-sizing frame handling device according to the present utility model;

reference numerals illustrate:

the device comprises a robot flange support, a carrying gripper frame, a 3 swing arm cylinder assembly, a 4 swing arm pull rod, a 5 swing arm sensing pin, a 6 round sensing switch, a 7 swing arm sensing switch mounting plate, a 8 swing arm rotating shaft supporting seat, a 9 hook in place switch mounting plate, a 10 swing arm hook, a 11 press frame anti-collision switch mounting plate, a 12 tension spring, a 13 press frame spring fixing mounting plate, a 14 pin bolt, a 15 press frame anti-collision plate, a 16 swing arm rotating shaft, a 17 opening pin, a 18 round gasket, a 19 rotary copper sleeve, a 20 limit shaft block, a 21 locking nut, a 22 rotary thin sleeve, a 23 swing arm pull rod fixing key, a 24 swing arm hook fixing key, a 25 swing arm hook in place dead gear, a 26 in place dead gear adjusting gasket, a 27 clamp sliding guide rail pair, a 28 clamp in place mounting block, a 29 clamp in place adjusting gasket, a 30 sliding limiting block, a 31 back in place mounting block, a 32 clamp sliding cylinder, a 33 floating cylinder joint, a 34 clamp positioning block A, a 35 clamp positioning block B, a 36 clamp positioning block, a 37 hook in place spring, a 38 hook in place sensing plate, a 39 single crystal sizing block seat, a 40 silicon wafer pin block and a 41 silicon wafer pin.

Detailed Description

The utility model is described in further detail below with reference to the drawings and the specific examples. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the utility model.

As shown in fig. 1 to 10, a monocrystalline silicon wafer sizing frame removing and conveying device comprises a conveying gripper frame 2, a group of swing arm hooks 10 which are driven to rotate and open or fold are respectively arranged on two opposite end sides of the conveying gripper frame 2, the axial direction of a rotating shaft which drives the swing arm hooks to rotate is consistent with the width direction of the conveying gripper frame, and two groups of clamping positioning blocks are arranged in the middle of the inside of the conveying gripper frame 2: the two groups of clamping positioning blocks are arranged at intervals along the length direction of the carrying gripper frame, and the clamping moving direction of the clamping positioning blocks is perpendicular to the length direction of the carrying gripper frame or is consistent with the width direction.

As a preferred embodiment, the top of the handling gripper frame is provided with a robot flange mount 1 for connection to a robot, said robot flange mount 1 being mounted by means of bolts and positioning pins on top of the middle circular flange of the handling gripper frame 2. The robot flange support is made of steel plates and thick-wall round tubes in a welded mode, one end of the robot flange support is connected with the robot six-axis flange, the other end of the robot flange support is connected with the carrying gripper frame 2, the middle of the robot flange support can be made of stainless steel plates and stainless steel square tubes in a welded mode through flexible cables, and the robot flange support is rectangular.

As a preferred embodiment, each set of swing arm hooks 10 includes two swing arm hooks which are driven to rotate by a rotation mechanism and are arranged at intervals along the length direction of a rotation shaft which drives the swing arm hooks to rotate, specifically, the two swing arm hooks may be mounted on a swing arm rotation shaft 16 and are arranged at intervals, the swing arm rotation shaft 16 is mounted on the top end surface of the carrying gripper frame 2 through a swing arm rotation shaft support seat 8 and is positioned near the outer end side, the swing arm rotation shaft 16 is connected with a swing arm pull rod 4 which is used as a transmission link, the swing arm pull rod 4 is connected with a swing arm cylinder assembly 3, and the swing arm rotation shaft 16 is rotated through the swing arm pull rod 4 by the action of the swing arm cylinder assembly 3, so that the swing arm hooks 10 are opened or folded.

The swing arm rotating shaft 16 is mounted on the swing arm rotating shaft supporting seat 8 in a limiting mode through a cotter pin 17 and a round gasket 18.

The rear end of the swing arm cylinder assembly 3 is connected with the carrying gripper frame 2, a cylinder piston rod at the front end of the swing arm cylinder assembly is hinged with the swing arm pull rod 4, in addition, one side of the swing arm rotating shaft 16 is provided with two cylindrical round induction switches 6, the two round induction switches 6 are arranged at intervals along the radial direction and fixedly mounted on the swing arm induction switch mounting plate 7, one side surface of the swing arm pull rod 4 is provided with a swing arm induction pin shaft 5, the swing arm induction pin shaft 5 is matched with the round induction switch 6, the round induction switch 6 is used for inducing the position state of the swing arm induction pin shaft 5, and the swing arm cylinder assembly 3 can act according to induction signals, so that the swing arm hook 10 is controlled to be opened or folded.

Specifically, the step surface of the swing arm induction pin shaft 5 is positioned and installed at the position of the through hole of the swing arm pull rod 4 and then locked and fixed by a locking nut M8; the swing arm inductive switch mounting plate 7 is fixed on the carrying gripper frame 2 through an upper oblong hole thereof, and the two cylindrical inductive switches 6 are fixedly mounted on the swing arm inductive switch mounting plate 7 in a mode of locking nuts at two ends.

Preferably, the swing arm pull rod 4 is of an arc-shaped bent structure, and the appearance of the swing arm pull rod is similar to that of a hook.

Specifically, one end of the swing arm cylinder assembly 3 is fixed on the middle strip flange plate of the carrying gripper frame 2 through a tail foot seat flange mounting hole on the swing arm cylinder assembly, the other end of the swing arm cylinder assembly is in positioning connection with a circular hole on the swing arm pull rod 4 in a mode of matching and locking a Y-shaped connector attached to the cylinder and a pin shaft 41, and a rotary thin sleeve 22 is arranged between the circular hole and the pin shaft for connection, as shown in fig. 3 and 4.

The swing arm induction pin shaft 5 is installed on the swing arm pull rod 4 through a lock nut 21, as shown in fig. 4, the swing arm pull rod 4 is sleeved on the swing arm rotating shaft 16 and fixed, the arm induction switch installation plate 7 is installed on the top surface of the carrying gripper frame 2, the swing arm hook 10 is provided with an installation hole, and is installed on the swing arm rotating shaft 16 through the installation hole, as shown in fig. 4, an annular limiting shaft stop 20 is arranged between the swing arm hook 10 and the swing arm rotating shaft supporting seat 8, wherein a rotating copper sleeve 19 is arranged in a shaft hole of the swing arm rotating shaft supporting seat 8, and the swing arm rotating shaft 16 is installed in the rotating copper sleeve 19 to rotate.

The swing arm hook 10 is sleeved on the swing arm rotating shaft and then fixed through a swing arm hook fixing key 24, and the swing arm pull rod 10 is fixed with the swing arm rotating shaft 16 through a swing arm pull rod fixing key 23.

According to the utility model, the swing arm pull rod 4, the swing arm pull rod fixing key 23, the swing arm hook 10 and the swing arm hook fixing key 24 are arranged on the swing arm rotating shaft 16 in a clearance fit mode through a central hole, the rotating copper sleeve 19 is arranged in a hole of the swing arm rotating shaft supporting seat 8 in a clearance fit mode, the swing arm rotating shaft supporting seat 8 and the rotating copper sleeve 19 are arranged at two ends of the swing arm rotating shaft 16 together in a clearance fit mode, the shaft ends of the circular gaskets 18 and the cotter pins 17 are positioned to prevent relative left and right movement, and the assembled rotating assembly can be horizontally arranged on an upper rectangular strip-shaped flange plate of the carrying gripper frame 2 through screw holes on the swing arm rotating shaft supporting seats 8 at the two ends.

As a preferred embodiment, the swing arm hook 10 is provided with a swing arm hook in-place dead stop 25 on the outer side, and a dead stop adjusting gasket 26 is arranged on the surface of the swing arm hook in-place dead stop 25. The swing arm hook in-place dead stop 25 is made of a resin material by machining, and is long-shaped, and two counter bores are formed in the surface and used for limiting the rotation end position of the swing arm hook 10; the in-place dead stop adjusting gasket 26 is made of stainless steel thin steel plates through linear cutting, and has the manufacturing thickness of 0.2 mm, 0.5 mm, 1 mm and 2 mm, and the mounting thickness is adjusted according to the actual use effect.

As a preferred embodiment, two cylindrical press frame anti-collision switches (implemented by the circular sensing switch devices) are disposed at two ends of the length direction of the carrying gripper frame 2, and are mounted on the press frame anti-collision switch mounting plates 11, specifically two press frame anti-collision plates 15, which are disposed at opposite intervals along the width direction of the carrying gripper frame 2, and are L-shaped below each press frame anti-collision switch mounting plate 11; specifically, two press frame anti-collision plates 15 are respectively attached to the inner side and the outer side or the front side and the back side of the two swing arm hooks 10 according to the shape and the style, and are fixed by pin bolts 14.

In addition, a hook in-place induction plate 9 is arranged above the outer side of the swing arm hook 10, specifically, the hook in-place switch mounting plate 9 and the pressing frame anti-collision switch mounting plate 11 are respectively fixed on the side surface and the bottom surface of the square tube of the carrying gripper frame 2 through bolts, two end nuts are adopted for locking, and two circular induction switches are respectively mounted on round holes of the hook in-place switch mounting plate 9 and the pressing frame anti-collision switch mounting plate 11.

Through being provided with and pressing the frame anticollision board, can respond to whether the deviation that the whole material frame was placed is too big, avoid automatic mistake collision damage equipment when snatching, through couple sensing plate 9 in place, can respond to the hanger position of whether normal string material frame of couple, with the material frame tipping when avoiding automatic snatching.

Further, at the side mounting hole position of each group of swing arm hooks 10, a frame pressing spring fixing mounting plate 13 is respectively mounted in a bolt fixing manner, and the frame pressing anti-collision switch mounting plate 11 and the frame pressing spring fixing mounting plate 13 are respectively connected together in a mode of end hooks through a tension spring 12; a hook in-place spring mounting plate 37 is mounted on a mounting hole on the right upper side of a swing arm hook 10, and the hook in-place spring mounting plate 37 and a hook in-place sensing plate 38 are connected together through a tension spring in a mode of end hooks to form a swing arm hook assembly on one side of a carrying gripper. Preferably, the hook in-place sensing plate 38 is L-shaped, and both ends of the extension spring 12 are provided with bent hooks, so that the extension spring has a certain telescopic elastic force during extension, and can be used for extending a certain length under the condition that the hand grip touches any unexpected workpiece, and automatically contracts when leaving.

As a preferred embodiment, each set of clamping and positioning blocks comprises two clamping and positioning blocks a 34 and B35 which are arranged oppositely, a clamping and positioning slot 36 is fixed at the lower parts of the clamping and positioning blocks a 34 and B35, and the clamping and positioning slot 36 is of an L-shaped structure and is used for clamping a monocrystalline silicon wafer bonding material seat 39 for carrying, as shown in fig. 2.

The clamping driving mechanism comprises a clamping sliding cylinder 32 and a floating cylinder joint 33, wherein the clamping driving mechanism is arranged between a clamping positioning block A34 and a clamping positioning block B35, the clamping sliding cylinder 32 and the floating cylinder joint 33 are connected, the tail end of the clamping sliding cylinder 32 is connected with the clamping positioning block A34, and the clamping positioning block B35 is connected with one end of the floating cylinder joint 33.

Each clamping sliding guide rail is provided with two sliding flange seats, and the clamping positioning block A34 and the clamping positioning block B35 can be fixedly arranged on the sliding seat flange surface of the clamping sliding guide rail pair 27 through bolts.

Preferably, the clamping positioning block A34 and the clamping positioning block B35 adopt T-shaped flange seats, square flange surfaces of the clamping positioning block A34 and the clamping positioning block B35 are respectively connected to one sliding flange seat of the clamping sliding guide rail pair 27 through bolts, and clamping positioning clamping grooves 36 are arranged at the step surfaces of the rectangular flanges of the clamping positioning block A and the clamping positioning block B.

The clamping sliding cylinder adopts standard SMC commercial products, a magnetic ring is arranged in the clamping sliding cylinder, and the moving position of a cylinder piston rod is sensed through a magnetic switch to be used as an input power source for sliding clamping.

The lower part of the carrying gripper frame 2 is provided with a clamping in-place mounting block 28 and two retreating in-place mounting blocks 31, the clamping in-place mounting block 28 is positioned at the middle position below the clamping sliding guide rail pair 27, the two retreating in-place mounting blocks 31 are mounted at two ends of the clamping sliding guide rail pair 27 in a bolt and pin combination mode to carry out retreating limiting of the clamping blocks, two ends of the clamping in-place mounting block 28 are provided with clamping in-place adjusting sheets 29, and the outer sides of the clamping in-place adjusting sheets are sliding limiting blocks 30.

The clamping in-place mounting block 28 is made of a stainless steel material by machining, is Z-shaped, is mounted on the lower surface of the carrying gripper frame 2 in a mode of combining bolts and pins, and is provided with clamping in-place adjusting gaskets 29 and sliding limiting blocks 30 in a mode of fixing the two ends of the clamping in-place adjusting gaskets through counter bore bolts.

The clamping in-place adjusting gasket 29 is made of stainless steel thin steel plates through linear cutting, and has the manufacturing thickness of 0.2 mm, 0.5 mm, 1 mm and 2 mm, and the mounting thickness is adjusted according to the actual use effect.

The sliding limiting block 30 is made of a stainless steel material by machining, and is long, and two counter bores are formed in the surface of the sliding limiting block and are used for limiting the relative clamping positions of the clamping positioning block A34 and the clamping positioning block B35;

the backward in-place mounting block 31 is made of a stainless steel material by machining, is L-shaped, is mounted on the lower surface of the carrying gripper frame 2 in a mode of combining bolts and pins, and is used for limiting the relative opening positions of the clamping positioning blocks A34 and B35;

the clamping sliding guide rail pair 27 is fixedly arranged on the installation surface of the lower part of the square tube of the carrying gripper frame 2 through bolts, two clamping and positioning clamping grooves 36 are oppositely arranged on the step surfaces of the clamping and positioning block A34 and the clamping and positioning block B35 through bolt fixation, the tail part of the clamping sliding cylinder 32 is fixedly arranged on the long flange plate of the clamping and positioning block A34 through bolts, the end head of the cylinder rod is provided with a floating cylinder joint 33 in an internal and external threaded connection mode, and then the other end of the floating cylinder joint 33 is connected into a screw hole of the clamping and positioning block B35 through external threads.

The floating cylinder joint 33 is an internal bolt with one end of M14, one end of M24x1.5, which is a standard commercial product, one end of the internal thread is connected to the cylinder rod end of the clamping sliding cylinder 32, and one end of the external thread is connected to the screw hole of the clamping positioning block B35.

In this embodiment, the monocrystalline silicon wafer bonding material seat 39 is made of a stainless steel material by machining, is strip-shaped, is provided with a resin plate with a thickness of about 10 mm below, and is coated with a layer of special industrial glue, so that about 30 kg of strip-shaped monocrystalline silicon can be fixed below the bonding material seat and then placed inside the monocrystalline silicon wafer sizing material removing frame 40.

In this embodiment, the monocrystalline silicon wafer sizing frame 40 is assembled from various parts made of stainless steel materials, and is a frame for the main transfer of the handling gripper, and is one of the main targets of the present utility model, and is divided into a high box and a low box according to different functions thereof, but the positioning positions of the positioning hooks are the same relative to the swing arm hooks 10, so that the present utility model is also shared.

The utility model relates to a monocrystalline silicon piece sizing frame removing and conveying device, which has the following conveying working principle:

the swing arm cylinder drives the swing arm pull rod and the swing arm rotating shaft to do rotary motion, so as to drive the swing arm hook to do folding and unfolding motions; when the four swing arm hooks on the two sides are simultaneously opened, the trunnion of the monocrystalline silicon wafer sizing frame 40 can be positioned through the semicircular open slot on the swing arm hook, so that the monocrystalline silicon wafer sizing frame is horizontally hoisted;

when the four swing arm hooks on two sides are folded simultaneously and the clamping and sliding cylinder rod is retracted, the clamping and sliding positioning block (comprising the clamping and sliding positioning block A and the clamping and sliding positioning block B) is driven to do horizontal sliding movement on the clamping and sliding guide rail pair 27, and the monocrystalline silicon piece sticking seat 39 can be tightly fixed on the clamping and sliding positioning block through the thickness of the in-place dead stop adjusting gasket 26, so that the carrying, taking and placing functions are realized.

By arranging the press frame anti-collision sensing function, the equipment is prevented from being damaged by collision during automatic grabbing; the hook in-place induction function is set, and the material frame is prevented from being tipped over when the automatic grabbing is performed.

The device can be connected to the wrist end of a six-axis robot through a robot flange support, the six-axis robot is used for controlling the six-axis robot to realize the carrying of workpieces, when the robot receives a carrying command from a PLC (programmable logic controller), the state of the gripper is defined initially, the swing arm hook 10 is folded, the clamping positioning block is opened, all signals are in a carrying state, then the robot accurately moves the gripper to the position right above a monocrystalline silicon wafer sizing frame 40, performs a downward movement action perpendicular to the monocrystalline silicon wafer sizing frame, moves to a process point for carrying the monocrystalline silicon wafer sizing seat 39, retracts a cylinder rod of a clamping sliding cylinder 27 through an output signal of the robot, clamps the monocrystalline silicon wafer sizing seat 39, then slowly moves upwards to a safe position through a signal of the PLC, is placed on corresponding equipment after the signal of the PLC is confirmed, the clamping positioning block is opened, the monocrystalline silicon wafer sizing seat 39 is put down to the equipment, and the robot returns to the initial position and continues to wait for a command of the PLC for carrying the workpieces.

After the carrying signal is confirmed, the swing arm hook 10 is opened, the clamping and positioning block is retracted, the robot accurately moves the gripper right above the monocrystalline silicon wafer sizing frame 40 again, moves to a process point for carrying the monocrystalline silicon wafer sizing frame 40 after moving downwards, transversely and upwards perpendicular to the monocrystalline silicon wafer sizing frame, then slowly lifts with the monocrystalline silicon wafer sizing frame, slightly inclines for a small angle, waits for corrosive liquid to be left to be cleaned, confirms through a signal of the PLC controller, and then degumps the monocrystalline silicon wafer and places the monocrystalline silicon wafer on corresponding transfer equipment, and the robot returns to an initial position to wait for the next circulation to start.

The device of the utility model can carry the monocrystalline silicon wafer bonding seat 39 and the monocrystalline silicon wafer sizing frame 40, thereby realizing the special advantages of one device with two functions.

The load of the device for carrying the workpieces can reach 100-120 kg, and the types of the workpieces which can be carried comprise a high-box material seat and material frame, a low-box material seat and material frame, and the device is not limited to the monocrystalline silicon wafer bonding material seat 39 and the monocrystalline silicon wafer sizing material removing frame 40 in the embodiment.

In a word, the device replaces the original manual type workpiece conveying, solves the falling risk of the manual lifting tool, saves labor force, reduces labor cost, improves the conveying efficiency of the material dipping seat and the degumming frame to a large extent, is particularly suitable for various environment temperatures which are not suitable for manual operation, and is an effective way for automatic transformation in the semiconductor raw material processing industry.

While the fundamental and principal features of the utility model and advantages of the utility model have been shown and described, it will be apparent to those skilled in the art that the utility model is not limited to the details of the foregoing exemplary embodiments, but may be embodied in other specific forms without departing from the spirit or essential characteristics thereof;

the present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein.

Furthermore, it should be understood that although the present disclosure describes embodiments, not every embodiment is provided with a separate embodiment, and that this description is provided for clarity only, and that the disclosure is not limited to the embodiments described in detail below, and that the embodiments described in the examples may be combined as appropriate to form other embodiments that will be apparent to those skilled in the art.

Claims

1. Monocrystalline silicon piece takes off sizing material frame handling device, a serial communication port, including carrying the tongs frame, the relative both ends side of carrying the tongs frame has arranged respectively a set of swing arm couple of receiving rotatory opening or folding of drive, the drive the rotatory swing arm rotation axis's of swing arm couple axial direction with the width direction of carrying the tongs frame is unanimous, two sets of clamp positioning pieces have been arranged at the inside middle part of carrying the tongs frame: the two groups of clamping positioning blocks are arranged at intervals along the length direction of the carrying gripper frame, and the clamping moving direction of the two groups of clamping positioning blocks is perpendicular to the length direction of the carrying gripper frame.

2. The monocrystalline silicon piece takes off sizing frame handling equipment of claim 1, wherein each group swing arm couple includes two swing arm couples of arranging along the length direction of swing arm rotation axis interval, the swing arm rotation axis is installed in the top of transport tongs frame, is connected with swing arm cylinder subassembly through the swing arm pull rod, is driven rotatory by swing arm cylinder subassembly to control make the swing arm couple open or fold.

3. The monocrystalline silicon piece takes off sizing material frame handling equipment of claim 2, wherein arrange cylindric circular inductive switch in one side of swing arm rotation axis, be arranged the swing arm on the swing arm pull rod side and respond to the round inductive switch, this swing arm responds to the round inductive switch and cooperates with the swing arm and responds to the position state of round inductive switch response swing arm response round pin, control swing arm cylinder subassembly according to the response signal action.

4. The monocrystalline silicon piece sizing frame removing and conveying device according to claim 1, wherein a swing arm hook in-place dead stop is arranged on the outer side of the swing arm hook, and an in-place dead stop adjusting gasket is arranged on the surface of the swing arm hook in-place dead stop.

5. The monocrystalline silicon piece sizing frame removing and conveying device according to claim 1, wherein two frame pressing anti-collision switches are respectively arranged at two ends of the conveying gripper frame in the length direction, the frame pressing anti-collision switches are oppositely arranged at intervals along the width direction of the conveying gripper frame, and an L-shaped frame pressing anti-collision plate is arranged below each frame pressing anti-collision switch mounting plate; a hook in-place induction plate is arranged above the outer side of one swing arm hook of each group of swing arm hooks.

6. The monocrystalline silicon piece sizing frame removing and conveying device according to claim 5, wherein a frame pressing spring fixing mounting plate is arranged on the side face of each group of swing arm hooks, and the frame pressing anti-collision switch mounting plate and the frame pressing spring fixing mounting plate are connected together through a tension spring respectively; and a hook in-place spring mounting plate is arranged right above one swing arm hook adjacent to the hook in-place sensing plate, and the hook in-place spring mounting plate and the hook in-place sensing plate are connected together through another tension spring.

7. The monocrystalline silicon piece sizing frame handling device according to claim 1, wherein each group of clamping positioning blocks comprises two clamping positioning blocks A and B which are arranged oppositely, and the lower parts of the clamping positioning blocks A and B are fixed with a clamping positioning clamping groove with an L-shaped structure.

8. The monocrystalline silicon piece sizing frame removing and conveying device according to claim 7, wherein a clamping driving mechanism is arranged between the clamping positioning block A and the clamping positioning block B and comprises a clamping sliding cylinder and a floating cylinder joint; the tail end of the clamping sliding cylinder is connected with a clamping positioning block A, and a clamping positioning block B is connected with one end of the floating cylinder joint.

9. The monocrystalline silicon piece takes off sizing material frame handling equipment of claim 8, wherein there are two flange seats that slide on each clamp sliding rail, clamp locating piece A, clamp locating piece B adopts T flange seat, its flange face is respectively through the bolt connection to clamp sliding rail pair on one slide flange seat, flange step face position installation clamp locating slot.

10. The monocrystalline silicon piece sizing frame conveying device according to claim 8, wherein a clamping in-place mounting block and two backing in-place mounting blocks are mounted on the lower portion of the conveying gripper frame, the clamping in-place mounting blocks are located at the middle position below the clamping sliding guide rail pair, the two backing in-place mounting blocks are mounted on two ends of the clamping sliding guide rail pair to conduct backing limiting of the clamping blocks, clamping in-place adjusting plates are arranged on two ends of the clamping in-place mounting blocks, and sliding limiting blocks are arranged on the outer sides of the clamping in-place adjusting plates.