CN218917917U

CN218917917U - Nanometer stamping device with flexible sucker and semiconductor processing equipment

Info

Publication number: CN218917917U
Application number: CN202223085348.4U
Authority: CN
Inventors: 娄飞
Original assignee: Shenzhen Diaotou Technology Co ltd
Current assignee: Shenzhen Diaotou Technology Co ltd
Priority date: 2022-11-17
Filing date: 2022-11-17
Publication date: 2023-04-25
Anticipated expiration: 2032-11-17

Abstract

The utility model belongs to the technical field of semiconductor processing, and provides a nano imprinting device provided with a flexible sucker and semiconductor processing equipment, comprising: a work table; the displacement table is erected above the workbench, and the top of the displacement table is provided with a substrate; the embossing mechanism is arranged above the displacement table and comprises a negative pressure cavity, a flexible absorption part arranged at the lower port of the negative pressure cavity and a compression roller assembly arranged in the negative pressure cavity; and the lifting mechanism is used for driving the imprinting mechanism to move up and down and driving the die to keep inclined relative to the substrate. The nano imprinting workbench is provided with the flexible sucking disc, the stamping mechanism provided with the flexible sucking disc is used for sucking the die and stamping the die with the substrate, the lifting mechanism is used for adjusting the distance and the included angle between the die and the substrate, rolling is carried out on the die, the die is prevented from deforming, and meanwhile, bubbles between the die and the substrate are discharged in the rolling process, so that a good stamping effect is achieved.

Description

Nanometer stamping device with flexible sucker and semiconductor processing equipment

Technical Field

The utility model relates to the field of semiconductor processing, in particular to a nano imprinting device with a flexible sucker and semiconductor processing equipment.

Background

Nanoimprinting is a completely new pattern transfer technique, different from traditional photolithography, that can "copy" the nanopattern from the template onto the substrate, with the advantages of high yield, low cost, and simple process. The nano-imprinting glue on the substrate enters the nano-structure of the template by pressure, and then the nano-imprinting glue is solidified and molded by a heating or ultraviolet exposure method, so that the microstructure on the template can be copied to the substrate.

When a substrate coated with imprinting glue is imprinted, a die provided with a nano microstructure is flattened and tensioned through a tensioning mechanism, and then is rolled to a substrate through a pressing roller, so that the nano microstructure on the die is deformed, bubbles are generated between the die and the substrate in the imprinting process, and the imprinting quality is affected.

Disclosure of Invention

In view of the above, the embodiment of the utility model provides a nano imprinting device with a flexible sucker, which is used for solving the technical problems of deformation of a die and bubble generation during imprinting.

In a first aspect, embodiments of the present utility model provide a nanoimprint apparatus provided with a flexible suction cup, the apparatus comprising: a work table; the displacement table is erected above the workbench, and a substrate is arranged at the top of the displacement table; the embossing mechanism is arranged above the displacement table and comprises a negative pressure cavity, a flexible adsorption piece arranged at the lower port of the negative pressure cavity and used for adsorbing a die plate, and a compression roller assembly arranged in the negative pressure cavity and used for pressing the die plate and the substrate; and the lifting mechanism is used for driving the imprinting mechanism to move up and down along the height direction of the displacement table and driving the die in the imprinting mechanism to keep inclined relative to the substrate.

Preferably, the flexible suction member sucks the die by negative pressure in the negative pressure chamber.

Preferably, the lifting mechanism drives one end of the die on the embossing mechanism to incline upwards and the other end of the die is contacted with the substrate, and the compression roller assembly applies deformation force to the flexible adsorption piece so that the die and the substrate are gradually pressed together along with the movement of the compression roller assembly from the contact end to the inclined end.

Preferably, the press roll assembly includes: the pair of guide rails are arranged in the negative pressure cavity at intervals in parallel; the compression roller is arranged between the two guide rails; the driving mechanism is arranged in the negative pressure cavity and drives the compression roller to reciprocate along the length direction of the guide rail.

Preferably, the driving mechanism includes: the motor is arranged at any one end of one side of the guide rail, and the driving end is provided with a driving wheel; the driven wheel is arranged at one end of the two guide rails; and the synchronous toothed belt is meshed with the driving wheel and the driven wheel, is meshed with a gear arranged at one end of the pressing roller, drives the pressing roller to move along the length direction of the guide rail through the synchronous toothed belt, and presses the die with the substrate through the adjustment of the rolling position of the pressing roller by the lifting mechanism.

Preferably, the lifting mechanism comprises a pair of pivoting arms horizontally extending from two ends of the negative pressure cavity, a pivoting shaft is arranged between two adjacent pivoting arms at each end in a penetrating way, each pivoting shaft is in rotary connection with the driving end of the lifting mechanism corresponding to the lower part, and the lifting mechanism drives two ends of the negative pressure cavity to have different heights, so that the distance and the included angle between the die and the substrate during contact are adjusted.

Preferably, the lifting mechanism is an electric push rod, the driving end of the electric push rod is provided with a joint bearing connecting piece, and the pivot shaft penetrates through the joint bearing connecting piece and is rotationally connected with the joint bearing connecting piece.

Preferably, the lifting mechanisms are at least three, and the three lifting mechanisms are distributed on two sides of the negative pressure cavity in a triangular shape.

Preferably, the flexible absorbing component is made of a net or cloth made of transparent materials, a UV light curing component is arranged in the negative pressure cavity, and UV light is cured on the pressed substrate and the pressed die through the flexible absorbing component; or the flexible adsorption piece adopts a net or cloth made of opaque materials, and the pressed substrate and the pressed die together with the displacement table are moved to the next station for independent UV light fixation.

In a second aspect, embodiments of the present utility model provide a semiconductor processing apparatus including any one of a nano-imprinting device provided with a flexible chuck thereon.

In summary, the beneficial effects of the utility model are as follows:

the stamping mechanism with the flexible adsorption piece adsorbs the die and stamps with the substrate, the lifting mechanism adjusts the distance and the included angle between the die and the substrate, the die is rolled, the die is prevented from deforming, and meanwhile, bubbles between the die and the substrate are discharged in the rolling process, so that a better stamping effect is achieved.

Drawings

In order to more clearly illustrate the technical solution of the embodiments of the present utility model, the drawings required to be used in the embodiments of the present utility model will be briefly described, and it is within the scope of the present utility model to obtain other drawings according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic structural view of a nanoimprint apparatus provided with a flexible suction cup according to an embodiment of the present utility model;

FIG. 2 is a front view of the lower bottom surface of the embossing mechanism of FIG. 1;

FIG. 3 is a plan view of FIG. 2 with the flexible absorbent member removed;

fig. 4 is a schematic diagram of the lifting mechanism after being connected with the pivoting mechanism.

Parts and numbers in the figures: 1-a workbench; 2-a displacement table; 3-a lifting mechanism; 31-an electric push rod; 32-knuckle bearing connection; 4-an embossing mechanism; 41-a negative pressure cavity; 411-pivoting arms; 42-a press roll assembly; 421-a rail; 422-driving the press roller; 431-motor; 432-driven wheel; 433-synchronous toothed belt; 5-pivoting the shaft; 6-a flexible absorbent member; 100-die; 200-substrate.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present utility model more clear, the technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. In the description of the present utility model, it should be understood that the terms "center," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, merely to facilitate description of the present application and simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising … …" does not exclude the presence of other like elements in a process, method, article or apparatus that comprises the element. If not conflicting, the embodiments of the present utility model and the features of the embodiments may be combined with each other, which are all within the protection scope of the present utility model.

Referring to fig. 1 to 4, an embodiment of the present utility model provides a nanoimprint apparatus provided with a flexible suction cup, the apparatus including: a workbench 1 for carrying various working components of the device; a displacement table 2 arranged on the table surface of the workbench 1, and the upper surface of which carries the substrate 200; lifting mechanisms 3 arranged at two sides of the displacement table 2 and used for driving the imprinting mechanism 4 to move up and down along the height direction of the displacement table 1 and driving the mold sheet 100 in the imprinting mechanism 4 to keep inclined relative to the substrate 200; the imprinting mechanism 4 is arranged above the displacement table 2, drives the up-and-down displacement to press the substrate 200 on the displacement table 2 through the lifting mechanism 3, and the imprinting mechanism 4 comprises a negative pressure cavity 41, a compression roller assembly 42 arranged in the negative pressure cavity 41 and used for pressing the die 100 and the substrate 200, and a flexible adsorption piece 6 arranged at the lower port of the negative pressure cavity of the imprinting mechanism 4 and used for adsorbing the die 100 to flatten. The flexible adsorption piece 6 can be made of flexible adsorption net, flexible adsorption cloth and other materials, so that the deformation of the die sheet 100 is prevented, and the damage to the die sheet 100 caused by the mode of tensioning the die sheet by adopting a tensioning mechanism in the prior art is avoided. Through the imprinting mechanism 4 with the flexible adsorption piece 6, the mold sheet 100 can be adsorbed in the imprinting process, the occurrence of the problems of abnormal imprinting patterns and the like caused by tensioning deformation of the mold sheet 100 can be avoided, and in addition, the mold sheet can be uniformly rolled to the substrate 200 through the press roller, so that the imprinting quality is effectively improved.

Further, the lifting mechanism 3 is an electric push rod 31, and the driving end of the electric push rod 31 is provided with a knuckle bearing connector 32. The pivot shaft 5 penetrates through the knuckle bearing connector 32 and is rotationally connected with the knuckle bearing connector 32.

Furthermore, the lifting mechanism 3 comprises pivoting arms 411 extending horizontally outside the two ends of the negative pressure cavity 41, and a pivoting shaft 5 is disposed between two adjacent pivoting arms 411 at each end, and then is rotatably connected with the driving end of the lifting mechanism 3 corresponding to the lower part through the pivoting shaft 5.

Still further, the embossing mechanism 4 includes a platen assembly 42 that rolls and flattens the die 100 from its end in contact with the substrate 200 to one end to conform the die 100 while venting air bubbles between the die 100 and the substrate 200. Wherein, the compression roller assembly 42 comprises a guide rail 421 which is arranged in the negative pressure cavity 41 at intervals in parallel; a pressing roller 422 disposed between the two guide rails 421; and a driving mechanism for driving the pressing roller 422 to reciprocate along the length direction of the guide rail 421.

Still further, the driving mechanism includes a motor 431; a driven wheel 432 provided at one end of the rail 421; and a synchronous toothed belt 433 engaged with the driven wheel 432 and the driving wheel of the driving end of the motor 431. The synchronous toothed belt 433 is meshed with a gear arranged at one end of the press roller 422, so that the press roller 422 is driven to move along the length direction of the guide rail 421 by the synchronous toothed belt 433, and the press-fit of the die 100 and the substrate 200 is realized by adjusting the rolling position of the press roller 422 by the lifting mechanism 3.

Further, the pivot shaft 5 is rotatably connected with the driving end of the lifting mechanism 3 corresponding to the lower part. The height position of the two end pivot shafts 5 relative to the substrate 200 is adjusted by the lifting mechanisms 3 at the two ends of the negative pressure cavity, and then the distance and the included angle between the die 100 and the substrate 200 are adjusted. The die 100 is adjusted to have one end slightly inclined upward and the other end in contact with the substrate 200, and then a press roll assembly is started to roll the die 100 from the end of the die 100 in contact with the substrate 200 to the upward inclined end of the die 100 through a flexible suction member, so that the die 100 is pressed and air bubbles between the die 100 and the substrate 200 are discharged.

Further, the flexible absorbing component 6 is made of a net or cloth made of transparent material, correspondingly, a UV light curing component is installed in the negative pressure cavity, and UV light can be cured through the flexible absorbing component 6 to the pressed substrate 200 and the die 100. The die 100 is then removed from over the substrate 200 by an external separation device.

Still further, the top of the displacement table 2 in the embodiment of the present utility model is provided with a vacuum chuck for adsorbing and fixing the substrate 200, and the displacement table 2 can realize displacement in the direction X, Y, RZ, so that the position of the substrate 200 can be adjusted, and the substrate 200 can be aligned better when being pressed with the die 100. The specific structural arrangement of the displacement table 2 is relatively common in the related art, and will not be described in detail.

Furthermore, in order to maintain the stability of the imprint mechanism 4, at least three lifting mechanisms 3 are provided in the embodiment of the present utility model, for example, three lifting mechanisms are distributed on two sides of the negative pressure cavity in a triangle shape, that is, one middle of one end pivot shaft 5 of the negative pressure cavity 41 is provided, and two ends of the other end pivot shaft 5 of the negative pressure cavity 41 are respectively provided, so that the three lifting mechanisms 3 are distributed on two sides of the negative pressure cavity 41 in a triangle shape, and stability of the imprint mechanism 4 during operation is further increased.

According to the nano imprinting device provided with the vacuum cavity, the imprinting mechanism 4 provided with the flexible absorbing part 6 and the lifting mechanism 3 are used for adjusting the die 100 to be slightly inclined upwards at one end, the press roller assembly is started, the die 100 is rolled, air bubbles between the die 100 and the substrate 200 are discharged, deformation generated when the die 100 is tensioned can be avoided, and the die 100 can be uniformly pressed to the substrate 200 through the press roller, so that the imprinting quality is effectively improved.

Preferably, with the above nano-imprinting device, the die 100 is adsorbed to the flexible adsorption member 6 by the negative pressure in the negative pressure cavity of the imprinting mechanism 4, and the die 100 is adjusted to have one end inclined slightly upward by rotationally connecting the pivot shaft 5 with the driving end of the lifting mechanism 3 corresponding to the lower part, and adjusting the pressing position of the die 100 and the substrate 200. Then, the electric push rod 31 is driven to lift and drive the imprinting mechanism 4 to press down, so that the die 100 is contacted with the substrate 200 and forms a small included angle. The synchronous toothed belt 433 of the press roller assembly 42 and the driving assembly drives the press roller 422 to move along the length direction of the guide rail 421 through the motor 431, and adjusts the rolling position of the press roller 422 by the lifting mechanism 3, so that the die 100 is rolled to the substrate 200 through the press roller, and the die 100 and the substrate 200 are pressed. After imprinting, the pressed substrate 200 and the die 100 are subjected to UV curing through a UV curing assembly in the negative pressure cavity, and after the die 100 and the substrate 200 are cured, the die 100 is removed from the position above the substrate 200 through an external separation device.

In another preferred implementation of the embodiment of the present utility model, if the flexible absorbing member is a net or cloth made of opaque material, since UV light cannot directly irradiate the underlying substrate 200 through the opaque material, in this application scenario, the laminated substrate 200 and the die 100 together with the displacement table 2 may be moved to the next station for separate UV curing, and then the die 100 is removed.

To achieve still another object of the present utility model, there is provided a semiconductor processing apparatus including the above nano-imprinting device provided with a flexible suction cup, which can obtain the advantageous effects of any one of the above nano-imprinting devices, and will not be described herein. Therefore, the semiconductor processing equipment is provided with the nano imprinting device with the vacuum cavity, the die 100 is adsorbed by the flexible sucker, the lifting mechanism 3 adjusts the angle between the die 100 and the substrate 200, the die 100 is attached to the substrate 200 by rolling through the press roller assembly 42, deformation can be avoided when the die 100 is tensioned, the die can be uniformly pressed onto the substrate 200 by the press roller 422, bubbles are avoided between the die and the substrate 200, and the imprinting quality is effectively improved.

Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present utility model, and not for limiting the same; although the utility model has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some or all of the technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the utility model.

Claims

1. A nanoimprint apparatus provided with a flexible suction cup, comprising:

a work table;

the displacement table is erected above the workbench, and a substrate is arranged at the top of the displacement table;

the embossing mechanism is arranged above the displacement table and comprises a negative pressure cavity, a flexible adsorption piece arranged at the lower port of the negative pressure cavity and used for adsorbing a die plate, and a compression roller assembly arranged in the negative pressure cavity and used for pressing the die plate and the substrate;

and the lifting mechanism is used for driving the imprinting mechanism to move up and down along the height direction of the displacement table and driving the die in the imprinting mechanism to keep inclined relative to the substrate.

2. The nanoimprinting apparatus according to claim 1, wherein the flexible adsorption member adsorbs the stamper by a negative pressure in the negative pressure chamber.

3. The nanoimprinting apparatus according to claim 2, wherein the elevating mechanism drives one end of the die on the imprinting mechanism to incline upward and the other end to contact the substrate, and the pressing roller assembly applies a deforming force to the flexible adsorbing member to press the die and the substrate gradually with the movement of the pressing roller assembly from the contact end to the inclined end.

4. The nanoimprinting apparatus according to claim 2, wherein the pressing roller assembly comprises:

the pair of guide rails are arranged in the negative pressure cavity at intervals in parallel;

the compression roller is arranged between the two guide rails;

the driving mechanism is arranged in the negative pressure cavity and drives the compression roller to reciprocate along the length direction of the guide rail.

5. The nanoimprinting apparatus according to claim 4, wherein the driving mechanism comprises:

the motor is arranged at any one end of one side of the guide rail, and the driving end is provided with a driving wheel;

the driven wheel is arranged at one end of the two guide rails;

and the synchronous toothed belt is meshed with the driving wheel and the driven wheel, is meshed with a gear arranged at one end of the pressing roller, drives the pressing roller to move along the length direction of the guide rail through the synchronous toothed belt, and presses the die with the substrate through the adjustment of the rolling position of the pressing roller by the lifting mechanism.

6. The nanoimprint apparatus of claim 1, wherein the lifting mechanism comprises pivoting arms extending horizontally to both sides of the negative pressure cavity, wherein a pivoting shaft is arranged between two adjacent pivoting arms on each side of the negative pressure cavity in a penetrating manner, each pivoting shaft is rotatably connected with a driving end of the lifting mechanism corresponding to the lower part, and the lifting mechanism drives both ends of the negative pressure cavity to have different heights, so that a distance and an included angle between the die and the substrate when the die and the substrate are contacted are adjusted.

7. The nanoimprint apparatus according to claim 6, wherein the lifting mechanism is an electric push rod, the driving end of the electric push rod is provided with a knuckle bearing connector, and the pivot shaft is inserted into the knuckle bearing connector and is rotatably connected with the knuckle bearing connector.

8. The nanoimprinting apparatus according to claim 6, wherein at least three lifting mechanisms are provided, and the three lifting mechanisms are distributed in a triangle shape on both sides of the negative pressure cavity.

9. A nanoimprint apparatus according to claim 3, wherein the flexible absorbing member is a net or cloth made of transparent material, and the negative pressure chamber is provided with a UV light curing unit, and UV light curing is performed on the pressed substrate and the die by the flexible absorbing member; or the flexible adsorption piece adopts a net or cloth made of opaque materials, and the pressed substrate and the pressed die together with the displacement table are moved to the next station for independent UV light fixation.

10. A semiconductor processing apparatus, characterized in that the apparatus comprises a nanoimprint apparatus according to any one of claims 1 to 9.