CN218727534U

CN218727534U - Probe card holder

Info

Publication number: CN218727534U
Application number: CN202222699399.XU
Authority: CN
Inventors: 刘家铭; 吴灿煌; 张孝仁; 苏涛; 苏华庭
Original assignee: Hefei Core Semiconductor Co ltd
Current assignee: Hefei Core Semiconductor Co ltd
Priority date: 2022-10-13
Filing date: 2022-10-13
Publication date: 2023-03-24
Anticipated expiration: 2032-10-13

Abstract

The utility model discloses a probe card holder, including the probe card, the spout has all been opened, two to probe card upper end front portion and upper end rear portion all install testing arrangement in the spout, the fixing device is all installed, two to probe card left end and right-hand member the fixing device is kept away from the one end of probe card and is all installed the U-shaped fixed plate, two the installation device is installed jointly to U-shaped fixed plate lower extreme, two T shape fixture block is all installed to U-shaped fixed plate upper end front portion. A probe card holder, the mode of joint is fixed the probe card through the fixing device, not only makes the probe card be convenient for install, and the probe card takes out also comparatively convenient moreover, and then has improved the installation and the dismantlement efficiency of probe card, has improved the suitability of device through testing arrangement, compares in setting up a plurality of probe cards moreover, this formula not only saves the probe card, also reduces the volume that the device occupied moreover, the regulation of probe card is also more convenient simultaneously.

Description

Probe card holder

Technical Field

The utility model relates to a centre gripping technical field, in particular to probe card holder.

Background

In the semiconductor integrated circuit industry, a probe card is usually used for auxiliary testing when a wafer reliability test is performed on a full-automatic test system, wherein the probe card fixes one end of a probe on a circuit board and then is connected with a test machine through the circuit board, and the other end of the probe is contacted with a probe point of each test unit on the wafer, so that a complete test system is formed. However, when the probe card is used for auxiliary testing, the probe card needs to be fixed by using a holder.

Prior patent application No. 202110225030.2 discloses a probe card holder comprising: the probe card board is provided with a probe card board base through a plurality of card board frames, a probe card board library is formed through the plurality of card board frames, the up-and-down movement of the lifting platform is utilized to realize the selection of different probe cards, the probe card board is taken and placed through the card board switching structure moving along with the lifting platform, the taken probe card board moves to the bottom along with the lifting platform and then passes through the card board connecting structure, the probe card board is connected with the detection circuit, and due to the mode of selection through the probe card library and the lifting platform, the holder can be switched among a plurality of probe cards, and the adaptability of the holder during detection is improved.

The plurality of probe clamping plates are arranged to be in contact with the probe points of the test units on different wafers, so that the adaptability of the device is improved, but the arrangement of the plurality of probe clamping plates wastes resources, and the probe clamping plates are switched back and forth when different units are tested, so that the device is inconvenient, and the volume of the device is improved by clamping the plurality of probe clamping plates simultaneously, so that the probe clamping plates are more easily scratched by the outside to cause damage; in addition, when the probe clamping plate is damaged, the device is inconvenient to rapidly disassemble and replace.

SUMMERY OF THE UTILITY MODEL

The main object of the present invention is to provide a probe card holder, which can effectively solve the problem that a plurality of probe cards not only wastes resources, but also is inconvenient to switch the probe cards back and forth when testing different units; when the probe cardboard appears damaging, the inconvenient problem of dismantling the change fast that carries on of device also.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

a probe card holder comprises a probe card, wherein sliding grooves are formed in the front portion and the rear portion of the upper end of the probe card, testing devices are mounted in the two sliding grooves, fixing devices are mounted at the left end and the right end of the probe card, U-shaped fixing plates are mounted at the ends, far away from the probe card, of the two fixing devices, mounting devices are mounted at the lower ends of the two U-shaped fixing plates together, and T-shaped clamping blocks are mounted at the front portions of the upper ends of the two U-shaped fixing plates.

Preferably, the fixing device comprises a supporting slider, two clamping plates are installed at the right end of the supporting slider, fixing screws are installed at the front part of the upper end of each clamping plate and the rear part of the upper end of each clamping plate together, a group of springs are installed on the upper inner wall and the lower inner wall of the U-shaped fixing plate, two groups of supporting plates are installed at one ends corresponding to the springs, clamping grooves are formed in the front parts of the upper ends of the U-shaped fixing plate and the supporting slider respectively, the supporting slider is installed between the upper inner wall and the lower inner wall of the U-shaped fixing plate through the supporting plates, two screw holes are formed in the left part and the right part of the upper end of the probe card respectively, and the supporting slider is installed at the left end of the probe card through the fixing screws. In pushing into the U-shaped fixed plate with the supporting slide block, the spring in the U-shaped fixed plate drives the extension board to contract moreover, and then presss from both sides tightly the supporting slide block, treat that the supporting slide block pushes the U-shaped fixed plate in completely after, push the supporting slide block with T shape fixture block through the draw-in groove in, further fix the supporting slide block, through the mode of joint, make the probe card be convenient for install or dismantle.

Preferably, testing arrangement includes the link, the link is provided with five, five the link right-hand member all opens the spread groove, five link upper end front portion all installs a set of probe, five the link is all installed in the spout through the spread groove. The link can carry out the horizontal slip at the probe card through the spout, and the link and then drives its probe on and adjust its position as required, and the link is provided with a plurality ofly moreover, and then has improved the suitability of device.

Preferably, installation device includes a mounting panel and No. two mounting panels, the installation screw is all installed to a mounting panel and No. two mounting panel upper end front portions and upper end rear portion, a mounting panel and No. two mounting panels are installed respectively at two U-shaped fixed plate lower extremes.

Preferably, the lower end of the T-shaped clamping block penetrates through the clamping groove and is positioned in the supporting sliding block.

Preferably, the supporting slide block is H-shaped, and the fixing screw vertically corresponds to the screw hole.

Compared with the prior art, the utility model discloses following beneficial effect has:

1. the probe card is fixed between the two clamping plates on the fixing device through the screw holes on the probe card, the supporting sliding block is pushed into the U-shaped fixing plate at the moment, the supporting plate is driven by the spring in the U-shaped fixing plate to shrink, the supporting sliding block is clamped, after the supporting sliding block is completely pushed into the U-shaped fixing plate, the T-shaped clamping block is pushed into the supporting sliding block through the clamping groove, the supporting sliding block is further fixed, the probe card is convenient to mount through a clamping mode, when the probe card needs to be dismounted, the T-shaped clamping block is firstly pulled out, then the supporting sliding block is pulled out, and the probe card can be taken out, so that the mounting and dismounting efficiency of the probe card is improved.

2. When the probe card needs to test probe point contacts of test units on different wafers, the connecting frame on the test device can slide left and right on the probe card through the sliding groove, the connecting frame further drives the probes on the connecting frame to adjust the positions of the probes according to needs, and the connecting frame is provided with a plurality of connecting frames, so that the applicability of the device is improved.

Drawings

Fig. 1 is a schematic diagram illustrating an overall structure of a probe card holder according to the present invention;

fig. 2 is a schematic view of an overall structure of a holding device of a probe card holder according to the present invention;

fig. 3 is a schematic diagram illustrating an overall structure of a test apparatus for a probe card holder according to the present invention;

fig. 4 is a schematic view illustrating an overall structure of a mounting device of a probe card holder according to the present invention.

In the figure: 1. a probe card; 2. a holding device; 3. a testing device; 4. a mounting device; 5. a chute; 6. a U-shaped fixing plate; 7. a T-shaped fixture block; 20. a support slide block; 21. a splint; 22. fixing screws; 23. a spring; 24. a support plate; 25. a card slot; 26. a screw hole; 30. a connecting frame; 31. connecting grooves; 32. a probe; 40. a first mounting plate; 41. a second mounting plate; 42. and (5) mounting screws.

Detailed Description

In order to make the technical means, creation features, achievement purposes and functions of the present invention easy to understand, the present invention is further described below with reference to the following embodiments.

In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "front end", "rear end", "both ends", "one end", "the other end" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element to which the reference is made must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "disposed," "connected," and the like are to be construed broadly, and for example, "connected" may be either fixedly connected or detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

As shown in fig. 1 to 4, a probe card holder includes a probe card 1, sliding grooves 5 are formed in the front portion and the rear portion of the upper end of the probe card 1, a testing device 3 is installed in each of the two sliding grooves 5, holding devices 2 are installed at the left end and the right end of the probe card 1, U-shaped fixing plates 6 are installed at the ends of the two holding devices 2 far away from the probe card 1, installation devices 4 are installed at the lower ends of the two U-shaped fixing plates 6 together, and T-shaped clamping blocks 7 are installed at the front portions of the upper ends of the two U-shaped fixing plates 6.

The fixing device 2 comprises a supporting slide block 20, two clamping plates 21 are arranged at the right end of the supporting slide block 20, fixing screws 22 are jointly arranged at the front parts of the upper ends and the rear parts of the upper ends of the two clamping plates 21, a group of springs 23 are arranged on the upper inner wall and the lower inner wall of the U-shaped fixing plate 6, supporting plates 24 are arranged at the corresponding ends of the two groups of springs 23, clamping grooves 25 are respectively arranged at the front parts of the upper ends of the U-shaped fixing plate 6 and the supporting slide block 20, the supporting slide block 20 is arranged between the upper inner wall and the lower inner wall of the U-shaped fixing plate 6 through the supporting plates 24, and two screw holes 26 are respectively arranged at the left part of the upper end and the right part of the upper end of the probe card 1; in one embodiment, the probe card 1 is mounted between two clamping plates 21 by screw fastening. The supporting slider 20 is installed at the left end of the probe card 1 through a fixing screw 22; the lower end of the T-shaped clamping block 7 penetrates through the clamping groove 25 and is positioned in the supporting sliding block 20; the support block 20 is H-shaped, and the fixing screws 22 are vertically aligned with the screw holes 26. As a specific implementation manner, in this embodiment, the supporting slider 20 is pushed into the U-shaped fixing plate 6, the supporting plate 24 is driven by the spring 23 in the U-shaped fixing plate 6 to contract, and then the supporting slider 20 is clamped, after the supporting slider 20 is completely pushed into the U-shaped fixing plate 6, the T-shaped fixture block 7 is pushed into the supporting slider 20 through the clamping groove 25, so as to further fix the supporting slider 20, and the probe card 1 is convenient to mount or dismount through a clamping manner.

The testing device 3 comprises five connecting frames 30, the connecting frames 30 are provided with five connecting grooves 31, the right ends of the five connecting frames 30 are provided with connecting grooves 31, a group of probes 32 are arranged at the front parts of the upper ends of the five connecting frames 30, and the five connecting frames 30 are arranged in the sliding groove 5 through the connecting grooves 31. As a specific implementation manner, in the present embodiment, the connecting frame 30 can slide left and right on the probe card 1 through the sliding slot 5, the connecting frame 30 further drives the probe 32 thereon to adjust its position as required, and the connecting frame 30 is provided in plurality, thereby improving the applicability of the apparatus.

The mounting device 4 comprises a first mounting plate 40 and a second mounting plate 41, mounting screws 42 are respectively mounted on the front parts of the upper ends and the rear parts of the upper ends of the first mounting plate 40 and the second mounting plate 41, and the first mounting plate 40 and the second mounting plate 41 are respectively mounted at the lower ends of the two U-shaped fixing plates 6; in one embodiment, the first mounting plate 40 and the second mounting plate 41 are mounted at the lower ends of the two U-shaped fixing plates 6 by welding.

It should be noted that, the present invention is a probe card holder, first fixing a first mounting plate 40 and a second mounting plate 41 at proper positions by mounting screws 42 on a mounting device 4, then fixing a probe card 1 between two clamping plates 21 on a holding device 2 through screw holes 26 thereon, at this time, pushing a supporting slider 20 into a U-shaped fixing plate 6, and a spring 23 in the U-shaped fixing plate 6 driving a supporting plate 24 to contract, thereby clamping the supporting slider 20, after the supporting slider 20 is completely pushed into the U-shaped fixing plate 6, pushing a T-shaped fixture block 7 into the supporting slider 20 through a clamping slot 25, further fixing the supporting slider 20, by means of clamping, not only making the probe card 1 easy to mount, but also when the probe card 1 needs to be dismounted, firstly, the T-shaped fixture block 7 is pulled out, and then the supporting slide block 20 is pulled out, so that the probe card 1 can be taken out, and further the mounting and dismounting efficiency of the probe card 1 is improved, when the probe card 1 needs to test the probe contact of the test units on different wafers after being mounted, the connecting frame 30 on the test device 3 can slide left and right on the probe card 1 through the chute 5, the connecting frame 30 further drives the probes 32 on the connecting frame to adjust the positions of the probes as required, and the connecting frame 30 is provided with a plurality of probes, so that the applicability of the device is improved, compared with the mode of arranging a plurality of probe cards 1, the probe card 1 is saved, the occupied volume of the device is also reduced, and meanwhile, the adjustment of the probe card 1 is more convenient.

The basic principles and the main features of the invention and the advantages of the invention have been shown and described above. It will be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that the foregoing embodiments and descriptions are provided only to illustrate the principles of the present invention without departing from the spirit and scope of the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims

1. A probe card holder comprising a probe card (1), characterized in that: the probe card testing device is characterized in that sliding grooves (5) are formed in the front portion of the upper end and the rear portion of the upper end of the probe card (1), testing devices (3) are installed in the two sliding grooves (5), fixing devices (2) are installed at the left end and the right end of the probe card (1), U-shaped fixing plates (6) are installed at the ends, away from the probe card (1), of the two fixing devices (2), installation devices (4) are installed at the lower ends of the two U-shaped fixing plates (6) jointly, and T-shaped clamping blocks (7) are installed at the front portions of the upper ends of the two U-shaped fixing plates (6).

2. A probe card holder of claim 1, wherein: the fixing device (2) comprises a supporting sliding block (20), two clamping plates (21) are installed at the right end of the supporting sliding block (20), fixing screws (22) are installed at the front portion of the upper end and the rear portion of the upper end of each clamping plate (21) together, a group of springs (23) are installed on the upper inner wall and the lower inner wall of a U-shaped fixing plate (6), two groups of supporting plates (24) are installed at one ends corresponding to the springs (23), clamping grooves (25) are formed in the front portions of the upper ends of the U-shaped fixing plate (6) and the supporting sliding block (20), the supporting sliding block (20) is installed between the upper inner wall and the lower inner wall of the U-shaped fixing plate (6) through the supporting plates (24), two screw holes (26) are formed in the left portion and the right portion of the upper end of the probe card (1), and the supporting sliding block (20) is installed at the left end of the probe card (1) through the fixing screws (22).

3. A probe card holder of claim 1, wherein: testing arrangement (3) are including link (30), link (30) are provided with five, five link (30) right-hand member has all opened spread groove (31), five link (30) upper end front portion all installs a set of probe (32), five link (30) are all installed in spout (5) through spread groove (31).

4. A probe card holder of claim 1, wherein: installation device (4) are including mounting panel (40) and No. two mounting panels (41), mounting screw (42) are all installed to mounting panel (40) and No. two mounting panels (41) upper end front portion and upper end rear portion, mounting panel (40) and No. two mounting panels (41) are installed respectively at two U-shaped fixed plate (6) lower extremes.

5. The probe card holder of claim 2, wherein: the lower end of the T-shaped clamping block (7) penetrates through the clamping groove (25) and is positioned in the supporting sliding block (20).

6. A probe card holder according to claim 2, wherein: the supporting sliding block (20) is H-shaped, and the fixing screws (22) correspond to the screw holes (26) up and down.