CN218673632U

CN218673632U - Flatness detection device

Info

Publication number: CN218673632U
Application number: CN202223107729.8U
Authority: CN
Inventors: 李德勇
Original assignee: Hangzhou Fuxin Semiconductor Co Ltd
Current assignee: Hangzhou Fuxin Semiconductor Co Ltd
Priority date: 2022-11-22
Filing date: 2022-11-22
Publication date: 2023-03-21
Anticipated expiration: 2032-11-22

Abstract

The application provides a flatness detection device, which comprises a bearing table, a detection disc and a level meter, wherein the bearing table is provided with a horizontal bearing surface; the detection disc is provided with an accommodating groove, and the bottom surface of the detection disc is provided with a horizontal plane; the level meter is positioned in the accommodating groove and exposed on the top surface of the detection disc, and the chip carrying disc to be detected is positioned between the bottom surface of the detection disc and the horizontal bearing surface of the bearing table, so that the flatness of the chip carrying disc is detected through the detection disc provided with the level meter. The flatness detection device can achieve the purpose of quickly, conveniently and accurately detecting the flatness of the chip carrying disc.

Description

Flatness detection device

Technical Field

The application relates to semiconductor detection equipment, in particular to a flatness detection device.

Background

With the development of integrated circuits, the demand of package-level chip (IC) product testing is increasing, the automation degree of the testing system is increasing, and a series of process detection devices are derived, wherein the flatness of a chip tray (IC tray) during testing is an important link. If use and have the chip of deformation to carry the dish, the coordinate when leading to the manipulator to get and put the IC product appears the deviation very easily to lead to the IC product cracked in the test, whole dish IC product spills the material damage even, so carry the roughness of dish to the chip and detect to become indispensable step in whole production process.

At present, the flatness of a chip carrying disc is detected by using a plug gauge in a common method for measuring, the operation method comprises the steps of placing the chip carrying disc to be detected on a flat horizontal desktop, measuring a gap between the chip carrying disc and the desktop by using the plug gauge, if the plug gauge can be easily plugged into the gap, the chip carrying disc is deformed, and if the plug gauge cannot be plugged into the gap, the chip carrying disc is qualified. However, the use of the plug gauge for measurement has great limitations, such as obtaining the deformation of the edge of the chip carrying disc, but not obtaining the central deformation of the chip carrying disc, so that only the deformation of part of the external structure of the chip carrying disc can be detected, and thus, there is a great risk that the unqualified product of the chip carrying disc is mistakenly regarded as a qualified product, the unqualified product of the chip carrying disc is injected into a production link, and further, the damage of the IC product and the waste of the production efficiency are caused.

Therefore, it is necessary to provide a flatness detecting apparatus.

SUMMERY OF THE UTILITY MODEL

In view of the above shortcomings of the prior art, an object of the present application is to provide a flatness detecting apparatus for solving the problem that the flatness of a chip tray in the prior art is difficult to effectively and accurately detect.

To achieve the above and other related objects, the present application provides a flatness detecting apparatus including:

the bearing platform is provided with a horizontal bearing surface;

the detection disc is provided with an accommodating groove, and the bottom surface of the detection disc is provided with a horizontal plane;

the level gauge is positioned in the accommodating groove and exposed on the top surface of the detection disc, and the chip carrying disc to be detected is positioned between the bottom surface of the detection disc and the horizontal bearing surface of the bearing table, so that the flatness of the chip carrying disc is detected through the detection disc provided with the level gauge.

Optionally, the level comprises a bubble level or an electronic level.

Optionally, the accommodating groove is located at a diagonal center position of the detection disc and/or the accommodating groove is located at four corners of the detection disc.

Optionally, the detection disc comprises a stainless steel IC standard tray, an aluminum alloy IC standard tray, or a plastic IC standard tray matched with the chip carrying disc to be detected.

Optionally, the surface of plummer is provided with the plummer spirit level, through the plummer spirit level detects the roughness of plummer.

Optionally, the surface of plummer is provided with and accomodates the groove, the plummer spirit level is located accomodate the groove, just the surface of plummer spirit level with the surface of plummer flushes.

Optionally, the carrier level comprises a bubble level or an electronic level.

Optionally, the carrier level is located at a diagonal center of the carrier and/or at four corners of the carrier.

Optionally, the bottom of the bearing platform is provided with an adjustable mounting foot, and the bearing platform is adjusted by the adjustable mounting foot to obtain a horizontal bearing surface.

Optionally, the susceptor comprises a stainless steel susceptor, an aluminum alloy susceptor, or a plastic susceptor.

As described above, the flatness detecting apparatus of the present application includes a carrier, a detecting plate, and a level, wherein the carrier has a horizontal carrying surface; the detection disc is provided with an accommodating groove, and the bottom surface of the detection disc is provided with a horizontal plane; the level meter is positioned in the accommodating groove and exposed on the top surface of the detection disc, and the chip carrying disc to be detected is positioned between the bottom surface of the detection disc and the horizontal carrying surface of the carrying table, so that the flatness of the chip carrying disc is detected through the detection disc provided with the level meter. The flatness detection device can achieve the purpose of quickly, conveniently and accurately detecting the flatness of the chip carrying disc.

Drawings

Fig. 1 is a schematic top view of a flatness detecting apparatus according to the present application.

Fig. 2 is a schematic side view of the flatness detecting apparatus for detecting a chip carrier tray according to the present application.

Description of the element reference

100. Bearing platform

200. Detection disc

300. Level meter

400. Bearing platform level

500. Adjustable installation foot

600. Chip carrying disc

Detailed Description

The following description of the embodiments of the present application is provided by way of specific examples, and other advantages and effects of the present application will be readily apparent to those skilled in the art from the disclosure herein. The present application is capable of other and different embodiments and its several details are capable of modifications and/or changes in various respects, all without departing from the spirit of the present application.

Please refer to fig. 1 and fig. 2. It should be noted that the drawings provided in the present embodiment are only for illustrating the basic idea of the present application, and the drawings only show the components related to the present application rather than the number, shape and size of the components in actual implementation, and the type, quantity and ratio of the components in actual implementation may be changed arbitrarily, and the layout of the components may be more complicated.

As shown in fig. 1 and 2, the present embodiment provides a flatness detecting apparatus, including: the device comprises a bearing table 100, a detection plate 200 and a level meter 300, wherein the bearing table 100 is provided with a horizontal bearing surface; the test tray 200 has a receiving groove, and the bottom surface of the test tray 200 has a horizontal surface; the level meter 300 is located in the receiving groove and exposed on the top surface of the detection tray 200, and the chip carrier tray 600 to be detected is located between the bottom surface of the detection tray 200 and the horizontal bearing surface of the bearing table 100, so that the flatness of the chip carrier tray 600 is detected by mounting the detection tray 200 of the level meter 300.

Specifically, the chip carrying tray 600 is provided with a plurality of grooves arranged in an array manner, so that the position of the chip carrying tray 600 is limited, and the IC heating, IC testing and other processes can be performed in batches, therefore, in the long-term application process, the chip carrying tray 600 can deform, warp and other abnormal phenomena, if the chip carrying tray 600 warps, the use of the chip carrying tray 600 can be seriously affected, if the flatness is insufficient, the manipulator taking and placing positions can be inaccurate, the IC is easily damaged, even the IC is scattered, so that the IC is completely separated from the original groove position, therefore, the flatness of the chip carrying tray 600 is very necessary to be monitored, and when the flatness of the chip carrying tray 600 exceeds a certain deformation amount, the chip carrying tray needs to be maintained or replaced, so that the loss is avoided.

In this embodiment, through having horizontal loading face plummer 100 and bottom surface have the horizontal plane examine test tray 200 to can for place in plummer 100 with examine between the test tray 200 the chip carries a set 600 and provides upper and lower water level, and it is right as needs the roughness that the chip carried set 600 is examined time measuring, is located through observing examine test tray 200 in the holding tank spirit level 300, can know and be detected the roughness that the chip carried set 600, thereby can realize right the quick, convenient, accurate inspection of the roughness that the chip carried set 600.

As an example, the test tray 200 includes a stainless steel IC standard tray, an aluminum alloy IC standard tray, or a plastic IC standard tray that matches the chip carrier tray 600 to be tested.

Specifically, in this embodiment, the detection tray 200 is a stainless steel IC standard tray with high stability, that is, in this embodiment, the detection tray 200 is provided with a receiving groove for receiving the level meter 300, and is further provided with a groove and other structures for receiving an IC, which are matched with the chip carrying tray 600 to be detected, so that when the chip carrying tray 600 and the detection tray 200 are stacked, the levelness of the chip carrying tray 600 can be detected by the level meter 300, the measurement accuracy of the levelness of the chip carrying tray 600 can be further improved, and the misdetection probability is reduced, as shown in fig. 2. However, the type of the test tray 200 is not limited thereto, and the test tray 200 may also include, for example, a plastic IC standard tray or an aluminum alloy IC standard tray, and the like, which is not limited herein.

By way of example, the level 300 may comprise a bubble level or an electronic level.

Specifically, the selection of the type of the level gauge 300 may be configured as required, and is not limited herein, and in the embodiment, the level gauge 300 is a bubble-type level gauge with scales, which is convenient to operate, but is not limited thereto.

As an example, the receiving grooves are located at a diagonal center position of the test tray 200 and/or the receiving grooves are located at four corner positions of the test tray 200.

Specifically, as shown in fig. 1, in this embodiment, an accommodating groove for accommodating the level meter 300 is disposed at a diagonal center position of the detection tray 200, but not limited thereto, the accommodating groove may be disposed at four corner positions of the detection tray 200, or the accommodating groove may be disposed at both the diagonal center position of the detection tray 200 and the four corner positions of the detection tray 200 as required, so as to improve the test accuracy, and thus, the method is suitable for a process having a higher requirement on the flatness of the chip tray 600. The location and distribution of the receiving slots in the test tray 200 is not overly limited herein.

As an example, a stage level 400 is provided on a surface of the stage 100, and the flatness of the stage 100 is detected by the stage level 400.

Specifically, as shown in fig. 1, in this embodiment, the carrier level 400 is further disposed on the surface of the carrier 100, so that the carrier level 400 detects the flatness of the carrier 100, and the detection accuracy of the levelness of the chip carrier 600 can be further improved.

Further, a receiving groove may be further formed on the surface of the carrier 100, and the carrier level 400 is placed in the receiving groove, and the surface of the carrier level 400 is flush with the surface of the carrier 100.

Specifically, work as the surface of plummer 100 sets up during plummer spirit level 400, preferably the surface of plummer 100 is provided with accomodates the groove, in order to place plummer spirit level 400, thereby can be right plummer spirit level 400 carries on spacingly, need not make a round trip to place plummer spirit level 400 improves the simple operation nature, and prefers plummer spirit level 400 the surface with plummer 100's surface flushes to provide horizontal bearing surface, in order to bear the chip carries dish 600, improves plummer 100's space utilization.

As an example, the carrier level 400 includes a bubble level or an electronic level.

Specifically, the selection of the type of the carrier level 400 may be configured as required, and is not limited herein, in this embodiment, the carrier level 400 is a bubble-type level meter with scales, which is convenient to operate, but is not limited thereto.

As an example, the carrier level 400 is located at the center of the diagonal of the carrier 100 and/or the carrier level 400 is located at the four corners of the carrier 100.

Specifically, in this embodiment, the carrier level meters 400 are disposed at the diagonal center of the carrier 100 and at the four corners of the carrier 100, so as to improve the testing accuracy, and is suitable for the process with high requirement on the flatness of the chip tray 600, but the number and distribution of the carrier level meters 400 disposed on the carrier 100 are not limited thereto, for example, the carrier level meters 400 may be disposed at the diagonal center of the carrier 100 or at the four corners of the carrier 100, and the number and distribution of the carrier level meters 400 in the carrier 100 are not limited too.

As an example, the bottom of the bearing platform 100 may be further provided with adjustable mounting feet 500, and the bearing platform 100 is adjusted by the adjustable mounting feet 500 to obtain a horizontal bearing surface.

Specifically, when the horizontal plane of plummer 100 is uneven, the accessible is located the bottom setting of plummer 100 regulation formula installation foot 500 is right plummer 100 adjusts to the higher horizontal loading face of convenient acquisition roughness. The type, number, distribution, etc. of the adjustable mounting legs 500 can be adjusted according to the requirement, and are not limited herein.

By way of example, the carrier 100 may comprise a stainless steel carrier, an aluminum alloy carrier, or a plastic carrier.

Specifically, in the embodiment, the bearing table is a stainless steel bearing table, but is not limited thereto, and the bearing table 100 may also be an aluminum alloy bearing table, a plastic bearing table, or the like, which is not limited herein.

In summary, the flatness detection device of the application comprises a bearing table, a detection plate and a level meter, wherein the bearing table is provided with a horizontal bearing surface; the detection disc is provided with an accommodating groove, and the bottom surface of the detection disc is provided with a horizontal plane; the level meter is positioned in the accommodating groove and exposed on the top surface of the detection disc, and the chip carrying disc to be detected is positioned between the bottom surface of the detection disc and the horizontal carrying surface of the carrying table, so that the flatness of the chip carrying disc is detected through the detection disc provided with the level meter. The flatness detection device can achieve the purpose of quickly, conveniently and accurately detecting the flatness of the chip carrying disc. Therefore, the application effectively overcomes various defects in the prior art and has high industrial utilization value.

The above embodiments are merely illustrative of the principles and utilities of the present application and are not intended to limit the application. Any person skilled in the art can modify or change the above-described embodiments without departing from the spirit and scope of the present application. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical concepts disclosed in the present application shall be covered by the claims of the present application.

Claims

1. The flatness detecting apparatus, characterized in that, the flatness detecting apparatus includes:

a bearing table (100), wherein the bearing table (100) is provided with a horizontal bearing surface;

the detection disc (200), the detection disc (200) has a containing groove, and the bottom surface of the detection disc (200) has a horizontal surface;

the level gauge (300) is positioned in the accommodating groove and exposed on the top surface of the detection disc (200), and the chip carrying disc (600) to be detected is positioned between the bottom surface of the detection disc (200) and the horizontal carrying surface of the bearing table (100) so as to detect the flatness of the chip carrying disc (600) through the detection disc (200) provided with the level gauge (300).

2. The flatness detecting apparatus according to claim 1, wherein: the level (300) comprises a bubble level or an electronic level.

3. The flatness detecting apparatus according to claim 1, wherein: the accommodating grooves are located in the diagonal center position of the detection disc (200) and/or the accommodating grooves are located in the four corners of the detection disc (200).

4. The flatness detecting apparatus according to claim 1, wherein: the detection disc (200) comprises a stainless steel IC standard tray disc, an aluminum alloy IC standard tray disc or a plastic IC standard tray disc which is matched with the chip carrying disc (600) to be detected.

5. The flatness detecting apparatus according to claim 1, wherein: the surface of plummer (100) is provided with plummer spirit level (400), through plummer spirit level (400) detect the roughness of plummer (100).

6. The flatness detecting apparatus according to claim 5, wherein: the surface of plummer (100) is provided with accomodates the groove, plummer spirit level (400) are located accomodate the groove in, just the surface of plummer spirit level (400) with the surface of plummer (100) flushes.

7. The flatness detecting apparatus according to claim 5, wherein: the plummer spirit levels (400) include bubble spirit levels or electronic spirit levels.

8. The flatness detecting apparatus according to claim 5, wherein: the bearing platform level gauge (400) is located at the diagonal center position of the bearing platform (100) and/or the bearing platform level gauge (400) is located at the four corners of the bearing platform (100).

9. The flatness detecting apparatus according to claim 5, wherein: the utility model discloses a bearing platform, including plummer (100), plummer (500) bottom is equipped with regulation formula installation foot (500), through regulation formula installation foot (500) are adjusted plummer (100) obtains horizontal loading face.

10. The flatness detecting apparatus according to claim 1, wherein: the bearing table (100) comprises a stainless steel bearing table, an aluminum alloy bearing table or a plastic bearing table.