CN218671273U - Single crystal diamond growth elevating platform - Google Patents
Single crystal diamond growth elevating platform Download PDFInfo
- Publication number
- CN218671273U CN218671273U CN202222814454.5U CN202222814454U CN218671273U CN 218671273 U CN218671273 U CN 218671273U CN 202222814454 U CN202222814454 U CN 202222814454U CN 218671273 U CN218671273 U CN 218671273U
- Authority
- CN
- China
- Prior art keywords
- fixedly connected
- single crystal
- supporting platform
- crystal diamond
- diamond growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 239000013078 crystal Substances 0.000 title claims abstract description 22
- 239000010432 diamond Substances 0.000 title claims abstract description 13
- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 13
- 230000003028 elevating effect Effects 0.000 title claims abstract description 7
- 230000000694 effects Effects 0.000 abstract description 14
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 3
- 238000005034 decoration Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000001174 ascending effect Effects 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/04—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/18—Heads with mechanism for moving the apparatus relatively to the stand
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/42—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters with arrangement for propelling the support stands on wheels
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses a single crystal diamond growth elevating platform, including supporting platform and driving motor, driving motor output fixedly connected with threaded rod, threaded rod outer wall threaded connection has a sliding cylinder, and sliding cylinder top fixed connection has seted up the fixed slot in the supporting platform bottom, supporting platform top, and the inside sliding connection of fixed slot has four grip blocks, and four grip blocks keep away from equal fixedly connected with spring between one side and the fixed slot mutually, the beneficial effects of the utility model are that: through placing the container inside the fixed slot, extrude the grip block through the spring afterwards, realize the effect fixed bottom the container, through spring elasticity, be convenient for fix the container of multiple size simultaneously, increase the practicality of device.
Description
Technical Field
The utility model relates to a semiconductor single crystal growth technical field specifically is a single crystal diamond growth elevating platform.
Background
With the rapid development of the semiconductor industry, more strict requirements are put on the quality of semiconductor materials, and in the process of single crystal crystallization, according to the process requirements, a quartz container and a supporting part of the container in a single crystal growing furnace need a slow and stable moving process to promote the quartz container and the supporting part to be gradually solidified into single crystals from a molten state.
For example, chinese patent document discloses a lifting device for single crystal growth, application No.: CN201922127978.5 makes crystal supporting platform realize the level as far as through the use of angle sensor and adjustable support column, provides the ideal horizontal holding surface that the crystal grows, can let the crystal be in the horizontality and grow, and the crystal thermal field symmetry is even, but in the in-service use process, places the container on supporting platform earlier, restarts adjusting device and drives supporting platform and go up and down, because the last lack of supporting platform is to the clamping structure.
Thereby easy in the lift in-process, can bump or take place to rock when wrench movement lock nut is spacing because of operating personnel's mistake, and lead to the container bottle to take place the slope, greatly reduced device's stability can.
Therefore, the single crystal diamond growth lifting platform is designed and produced so as to solve the problem that the clamping structure is lacked on the supporting platform.
SUMMERY OF THE UTILITY MODEL
The utility model discloses the technical problem who solves: because the supporting platform is lack of the pair clamping structure, the container bottle can be inclined due to shaking caused by mistaken collision of operators or the limit of the lock nut by twisting in the lifting process, and the single crystal diamond growth lifting platform is provided.
The utility model provides a technical scheme that technical problem adopted is: the utility model provides a single crystal diamond growth elevating platform, includes supporting platform and driving motor, driving motor output fixedly connected with threaded rod, threaded rod outer wall threaded connection has the sliding cylinder, sliding cylinder top fixed connection is in the supporting platform bottom, the fixed slot has been seted up at the supporting platform top, the inside sliding connection of fixed slot has four grip blocks, four equal fixedly connected with spring between one side and the fixed slot is kept away from mutually to the grip block, through placing the container inside the fixed slot, extrudees the grip block through the spring afterwards, realizes the fixed effect bottom the container.
Preferably, four the grip blocks all set up to the quarter circle, the grip blocks is close to the equal fixedly connected with slipmat in one side, increases the antiskid effect after the centre gripping through the slipmat, prevents that the container from sliding, influences the centre gripping effect.
Preferably, a pair of electric putter of supporting platform top fixedly connected with, the equal fixedly connected with fixed block in electric putter top, the fixed block is close to one side mutually and all is provided with the limiting plate, slides from top to bottom through starting electric putter drive limiting plate, is convenient for fix the container of co-altitude.
Preferably, the inside equal threaded connection of fixed block has the regulation pole, adjust the pole and be close to one side mutually and all rotate and connect at the limiting plate lateral wall, adjust the pole through rotating, drive the limiting plate afterwards and remove to the centre to the realization is to the effect of container top centre gripping.
Preferably, the limiting plates are all set to be circular-arc-shaped, the adjusting rod is kept away from the rotating disc fixedly connected with on one side, the limiting plates are set to be circular-arc-shaped, clamping is convenient to carry out on the outer wall of the container, and meanwhile the adjusting rod is convenient to rotate through the rotating disc to adjust the distance between the limiting plates.
Compared with the prior art, the beneficial effects of the utility model are that: the container is placed in the fixing groove, and then the clamping plate is extruded through the spring, so that the effect of fixing the bottom of the container is achieved, meanwhile, the container with various sizes can be conveniently fixed through the elasticity of the spring, and the practicability of the device is improved;
the limiting plate is driven to move towards the middle through the rotation adjusting rod, so that the effect of fixing the top of the container is achieved, meanwhile, the limiting plate is driven to slide up and down through the starting of the electric push rod, the containers with different heights are convenient to fix, and the stability of the device is further improved.
Drawings
Fig. 1 is a front partial sectional structure schematic view of the elevating platform of the utility model;
FIG. 2 is a schematic view of the overall appearance structure of the supporting platform of the present invention;
fig. 3 is a schematic diagram of a local enlarged structure at a.
In the figure: 1. a support platform; 2. a drive motor; 3. a threaded rod; 4. a sliding cylinder; 5. fixing grooves; 6. a clamping plate; 7. a spring; 8. a non-slip mat; 9. an electric push rod; 10. a fixed block; 11. a limiting plate; 12. adjusting a rod; 13. a turntable.
Detailed Description
The present invention will be further explained with reference to the accompanying drawings.
Example 1
Referring to fig. 1-3, the embodiment provides a single crystal diamond growth lifting table, which includes a supporting platform 1 and a driving motor 2, a threaded rod 3 is fixedly connected to an output end of the driving motor 2, a sliding cylinder 4 is in threaded connection with an outer wall of the threaded rod 3, a top of the sliding cylinder 4 is fixedly connected to a bottom of the supporting platform 1, the driving motor 2 is started to drive the threaded rod 3 to rotate, and then the sliding cylinder 4 in threaded connection with the threaded rod 3 is driven to slide, so that the supporting platform 1 is driven to slide upwards, and a container lifting effect is achieved;
the fixed slot 5 is seted up at supporting platform 1 top, 6 sliding connection of four grip blocks are inside 5 fixed slots, the equal fixed connection of spring 7 is kept away from between one side and the fixed slot 5 mutually at four grip blocks 6, place the container inside 5 fixed slots, elasticity through spring 7 afterwards, promote grip block 6 and slide to the centre and carry out the centre gripping to the container bottom, the realization is to the fixed effect in container bottom, simultaneously through spring 7 elasticity, be convenient for fix the container of multiple size, increase the practicality of device, the stability of device can be improved, the technical problem that lacks the structure of holding among the prior art on the supporting platform 1 has been solved.
Wherein, four grip blocks 6 all set up to the quarter circle, and the equal fixed connection of slipmat 8 is close to one side mutually at grip block 6, increases the antiskid effect after the centre gripping through slipmat 8, prevents that the container from sliding, influences the centre gripping effect, improves the stability ability of device centre gripping.
Example 2
Referring to fig. 1-3, a further improvement is made on the basis of embodiment 1:
wherein, a pair of electric putter 9 fixed connection is at 1 top of supporting platform, the equal fixed connection of fixed block 10 is at electric putter 9 top, slide from top to bottom through starting electric putter 9 and driving limiting plate 11, be convenient for fix the not container of co-altitude, adjust the equal threaded connection of pole 12 inside fixed block 10, limiting plate 11 all rotates to be connected and is being close to one side mutually at adjusting pole 12, through rotating regulation pole 12, drive limiting plate 11 afterwards and remove to the centre, thereby realize the effect to container top centre gripping, improve the stability ability of device.
Wherein, limiting plate 11 all sets up to circular-arcly, sets limiting plate 11 to circular-arcly be convenient for carry out the centre gripping to the container outer wall, and one side is kept away from mutually to the equal fixedly connected with of carousel 13 regulation pole 12, is convenient for rotate through carousel 13 and adjusts pole 12 and adjust the practicality of device to the distance between limiting plate 11.
Insert whole device external power source, when using, at first place the container inside fixed slot 5, elasticity through spring 7 afterwards, promote grip block 6 and slide to the centre and carry out the centre gripping to the container bottom, the realization is to the fixed effect of container bottom, then restart electric putter 9 drives fixed block 10 and upwards removes, adjust the position of limiting plate 11, adjust the completion back, it drives regulation pole 12 and rotates to rotate carousel 13 again, drive limiting plate 11 and remove to the centre afterwards, thereby the realization is to the effect of container top centre gripping, it drives threaded rod 3 and rotates to restart driving motor 2 at last, it slides with 3 threaded connection's of threaded rod sliding barrel 4 to drive thereupon, thereby drive supporting platform 1 and upwards slide, realize the ascending effect of container.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of improvements and decorations can be made without departing from the principle of the present invention, and these improvements and decorations should also be regarded as the protection scope of the present invention.
Other parts not described in detail in the present invention belong to the prior art, and are not described herein again.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention.
Claims (5)
1. The utility model provides a single crystal diamond growth elevating platform, includes supporting platform (1) and driving motor (2), driving motor (2) output end fixedly connected with threaded rod (3), threaded rod (3) outer wall threaded connection has a sliding barrel (4), sliding barrel (4) top fixed connection is in supporting platform (1) bottom, its characterized in that: fixed slot (5) have been seted up at supporting platform (1) top, fixed slot (5) inside sliding connection has four grip blocks (6), four grip block (6) keep away from equal fixedly connected with spring (7) between one side and fixed slot (5) mutually.
2. A single crystal diamond growth stage according to claim 1 wherein: the four clamping plates (6) are all arranged to be quarter circles, and the clamping plates (6) are close to one side and are fixedly connected with anti-slip pads (8).
3. A single crystal diamond growth stage according to claim 1 wherein: supporting platform (1) top fixedly connected with a pair of electric putter (9), the equal fixedly connected with fixed block (10) in electric putter (9) top, fixed block (10) are close to one side mutually and all are provided with limiting plate (11).
4. A single crystal diamond growth stage according to claim 3 wherein: the inside equal threaded connection of fixed block (10) has regulation pole (12), it all rotates to connect at limiting plate (11) lateral wall to be close to one side mutually to adjust pole (12).
5. A single crystal diamond growth stage according to claim 4 wherein: the limiting plates (11) are all set to be arc-shaped, and the adjusting rods (12) are far away from one side and are fixedly connected with rotating discs (13).
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222814454.5U CN218671273U (en) | 2022-10-25 | 2022-10-25 | Single crystal diamond growth elevating platform |
| PCT/CN2023/101653 WO2024087671A1 (en) | 2022-10-25 | 2023-06-21 | Lifting platform for growth of single crystal diamond |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222814454.5U CN218671273U (en) | 2022-10-25 | 2022-10-25 | Single crystal diamond growth elevating platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218671273U true CN218671273U (en) | 2023-03-21 |
Family
ID=85566214
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222814454.5U Active CN218671273U (en) | 2022-10-25 | 2022-10-25 | Single crystal diamond growth elevating platform |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN218671273U (en) |
| WO (1) | WO2024087671A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024087671A1 (en) * | 2022-10-25 | 2024-05-02 | 上海征世科技股份有限公司 | Lifting platform for growth of single crystal diamond |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3823694B2 (en) * | 2000-06-29 | 2006-09-20 | 信越半導体株式会社 | Crucible support device, raw material filling device and filling method |
| CN211191340U (en) * | 2019-12-01 | 2020-08-07 | 孙囡囡 | Container fixing frame for ultrasonic instrument |
| CN211057278U (en) * | 2019-12-03 | 2020-07-21 | 山西中科晶电信息材料有限公司 | Lifting device for be used for single crystal growth |
| CN212152492U (en) * | 2020-05-22 | 2020-12-15 | 晶创铭盛电子科技（香河）有限公司 | Novel large-scale crucible rotating and lifting mechanism of single crystal furnace |
| CN111962142B (en) * | 2020-07-13 | 2021-06-25 | 大同新成新材料股份有限公司 | Graphite crucible convenient for semiconductor crystal growth and use method thereof |
| CN216156020U (en) * | 2021-09-02 | 2022-04-01 | 青海高景太阳能科技有限公司 | Monocrystalline silicon draft tube dismouting auxiliary device |
| CN216879447U (en) * | 2021-12-10 | 2022-07-05 | 青海省地质矿产测试应用中心(青海省生态环境地质检验检测中心) | Convenient to use's water-bath |
| CN218671273U (en) * | 2022-10-25 | 2023-03-21 | 上海征世科技股份有限公司 | Single crystal diamond growth elevating platform |
-
2022
- 2022-10-25 CN CN202222814454.5U patent/CN218671273U/en active Active
-
2023
- 2023-06-21 WO PCT/CN2023/101653 patent/WO2024087671A1/en unknown
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024087671A1 (en) * | 2022-10-25 | 2024-05-02 | 上海征世科技股份有限公司 | Lifting platform for growth of single crystal diamond |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2024087671A1 (en) | 2024-05-02 |
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| GR01 | Patent grant | ||
| GR01 | Patent grant |