CN218612272U - Laser ablation system suitable for uneven sample surface - Google Patents
Laser ablation system suitable for uneven sample surface Download PDFInfo
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- CN218612272U CN218612272U CN202222911752.6U CN202222911752U CN218612272U CN 218612272 U CN218612272 U CN 218612272U CN 202222911752 U CN202222911752 U CN 202222911752U CN 218612272 U CN218612272 U CN 218612272U
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Abstract
The utility model discloses a laser ablation system suitable for unevenness sample surface, include: the device comprises an ablation laser emitting module, an objective lens, a sample table and a ranging module, wherein the ablation laser emitting module is used for emitting ablation laser, the ranging module detects and detects the distance change from the objective lens to the surface of a sample through a pulse laser method, controls the objective lens to move up and down according to a ranging result, keeps the distance from the objective lens to the surface of the sample unchanged, and is arranged on a light path between the ablation laser emitting module and the objective lens. The utility model discloses add distance measuring module between objective and sample surface in current laser ablation system, adjust the distance on objective and sample surface constantly at the laser ablation in-process for the distance of sample surface and focusing mirror keeps invariable, makes laser ablation efficiency improve greatly.
Description
Technical Field
The utility model belongs to the technical field of laser ablation, especially, relate to a laser ablation system suitable for unevenness sample surface.
Background
As laser ablation systems have grown mature, their use has become more widespread. At present, when a laser system is used for ablating a sample with an uneven surface, the ablation efficiency is different, and the reason is that the distance between a focusing lens (an objective lens) and the surface of the sample is changed.
The existing laser ablation system is more and more common as a solid sample feeding mode, a distance measurement technology is not used for measuring the distance between the surface of a sample and a focusing objective lens in the laser ablation process generally, a laser focusing point is often not on the surface of the sample, and the laser ablation efficiency is further influenced.
Therefore, how to keep the distance between the focusing lens (objective lens) and the sample surface at the focal length according to the ranging result is an urgent problem to be solved.
SUMMERY OF THE UTILITY MODEL
In view of this, an object of the present invention is to provide a laser ablation system suitable for uneven sample surface, which can keep the distance between the sample surface and the focusing mirror constant, and effectively improve the laser ablation efficiency.
In order to achieve the above object, the present invention provides a laser ablation system suitable for uneven sample surface, including: the device comprises a denudation laser emission module, an objective lens, a sample stage and a distance measurement module;
the ablation laser sending module is used for emitting ablation laser:
the distance measurement module detects the distance change from the objective lens to the surface of the sample through a pulse laser method, and controls the objective lens to move up and down according to the distance measurement result, so that the distance from the objective lens to the surface of the sample is kept unchanged;
the ranging module is arranged on a light path between the ablation laser emitting module and the objective lens.
Preferably, the distance measuring module comprises a distance measuring laser emitter, a beam splitter, a detector, an adjustable parallel light mirror and a dichroic mirror;
the distance measurement laser emitter is used for emitting distance measurement laser, the distance measurement laser passes through the first light path and focuses on the surface of the sample, and the distance measurement laser is reflected on the surface of the sample to form reflection distance measurement light, and the reflection distance measurement light passes through the second light path and focuses on the detector.
Preferably, the ranging laser sequentially passes through the beam splitter, the adjustable parallel light mirror, the dichroic mirror and the objective lens and then is focused on the surface of the sample to form a first light path.
Preferably, the beam splitter is configured to split the received ranging laser into a plurality of beams of ranging laser;
the adjustable parallel light mirror is used for changing the ranging laser after passing through the beam splitter into parallel light;
the dichroic mirror is used for reflecting the parallel light passing through the adjustable parallel light mirror to the objective lens.
Preferably, the reflected distance measuring light sequentially passes through the objective lens, the dichroic mirror, the adjustable parallel light mirror and the beam splitter and then is focused to the detector through the slit of the detector to form a second light path.
Preferably, the dichroic mirror is used for reflecting the reflected ranging light passing through the objective lens to the adjustable parallel light mirror;
the adjustable parallel light mirror is used for focusing the reflected ranging light radiated by the dichroic mirror to the beam splitter;
the beam splitter is used for reflecting the reflected distance measuring light focused by the adjustable parallel light mirror to the slit of the detector and focusing the reflected distance measuring light to the detector.
The detector is for detecting the reflected ranging light beam.
The utility model discloses add distance measuring module between focusing mirror (objective) and sample surface in current laser ablation system, adjust the distance on focusing mirror (objective) and sample surface constantly at the laser ablation in-process for the distance of sample surface and focusing mirror keeps invariable, makes laser ablation efficiency improve greatly.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the description below are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
Fig. 1 is a schematic optical path diagram of a laser ablation system suitable for uneven sample surfaces as disclosed in the present invention;
fig. 2 is a schematic diagram of the disclosed laser ablation system for uneven sample surfaces;
wherein: 1, ranging laser transmitter; 2 a beam splitter; 3-1, a detector; 3-2 slits of the detector; 4, an adjustable parallel light mirror; 5 a dichroic mirror; 6 an objective lens; 7-1 sample stage; 7-2 sample; 8, a distance measuring module; a denudation laser; b, ranging laser; c reflecting the ranging light.
Detailed Description
The utility model discloses an one of the cores lies in providing a laser ablation system suitable for unevenness sample surface, can be so that sample surface keeps invariable with the distance of focusing mirror, effectively improves laser ablation efficiency.
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts all belong to the protection scope of the present invention.
The laser ablation system suitable for uneven sample surfaces disclosed in the present embodiment is applied to laser ablation, and those skilled in the art can understand that the laser ablation system includes: the device comprises an ablation laser emitting module, an objective lens 6, a sample stage 7-1 and a distance measuring module 8, wherein as shown in fig. 2, the distance measuring module is arranged on a light path between the ablation laser emitting module and the objective lens, and ablation laser a (a long dotted line in fig. 1) emitted by the ablation laser emitting module firstly passes through the distance measuring module 8 and the objective lens 6 and then reaches the surface of a sample 7-2. At this time, the distance measuring module 8 detects the distance change from the objective lens 6 to the surface of the sample 7-2 by a pulse laser method, and controls the objective lens 6 to move up and down according to the distance measuring result, so that the distance from the objective lens 6 to the surface of the sample 7-2 is kept unchanged.
As shown in fig. 1, the distance measuring module 8 includes a distance measuring laser emitter 1, a beam splitter 2, a detector 3-1, an adjustable parallel light mirror 4 and a dichroic mirror 5;
the distance measuring laser emitter 1 is used for emitting distance measuring laser b, the distance measuring laser b passes through a first optical path and then is focused on the surface of the sample 7-2, the distance measuring laser b is reflected on the surface of the sample to form reflected distance measuring light c, and the reflected distance measuring light c passes through a second optical path and then is focused on a detector;
the ranging laser b sequentially passes through the beam splitter 2, the adjustable parallel light mirror 4, the dichroic mirror 5 and the objective lens 6 and then is focused on the surface of the sample to form a first light path as shown by a solid line in fig. 1;
the reflected distance measuring light c sequentially passes through the objective lens 6, the dichroic mirror 5, the adjustable parallel light mirror 4 and the beam splitter 2, and then is focused to the detector 3-1 through the slit 3-2 of the detector to form a second light path, as shown by a short dashed line in fig. 1.
In the actual use process, the distance measuring laser 8 is changed into parallel light through the adjustable parallel light mirror 4, the parallel light is coaxial with the ablation laser a through reflection of the dichroic mirror 5, then the distance measuring laser is focused through the objective lens 6, at the moment, if a sample is on a focal plane, the distance measuring laser is reflected into reflected distance measuring light c, the reflected distance measuring light c is reflected into a slit 3-2 of the detector through the objective lens 6, the dichroic mirror 5 and the adjustable parallel light mirror 4 and then reflected into the slit 3-2 of the detector at the beam splitter 2, and a focused light beam is formed at the detector 3-1. If the surface of the sample 7-2 moves up or down, the reflected distance measuring light c cannot form a focused beam at the slit 3-2 of the detector, and the reflected distance measuring light c can be focused and pass through the slit 3-2 of the detector only by adjusting the position of the objective lens 6 to change the distance from the surface of the sample 7-2 to the focal length. The adjustment process ensures that the ablation laser a is always focused on the surface of the sample, achieves the aim of keeping the distance between the surface of the sample and the focusing mirror constant, and greatly improves the laser ablation efficiency.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (6)
1. A laser ablation system adapted for use with an uneven sample surface, comprising: denudate laser emission module, objective, sample platform, denudation laser sending module is used for launching and denudates laser, its characterized in that still includes: a distance measuring module for measuring the distance between the object,
the distance measurement module detects the distance change from the objective lens to the surface of the sample through a pulse laser method, and controls the objective lens to move up and down according to the distance measurement result, so that the distance from the objective lens to the surface of the sample is kept unchanged;
the ranging module is arranged on a light path between the ablation laser emitting module and the objective lens.
2. The laser ablation system suitable for the uneven sample surface according to claim 1, wherein the distance measurement module comprises a distance measurement laser emitter, a beam splitter, a detector, an adjustable parallel light mirror and a dichroic mirror;
the distance measurement laser emitter is used for emitting distance measurement laser, the distance measurement laser passes through the first light path and focuses on the surface of the sample, and the distance measurement laser is reflected on the surface of the sample to form reflection distance measurement light, and the reflection distance measurement light passes through the second light path and focuses on the detector.
3. The laser ablation system suitable for the uneven sample surface according to claim 2, wherein the ranging laser sequentially passes through the beam splitter, the adjustable parallel light mirror, the dichroic mirror and the objective lens and then is focused on the sample surface to form a first optical path.
4. The laser ablation system suitable for the uneven sample surface as recited in claim 3, wherein the beam splitter is configured to split the received ranging laser into a plurality of beams of ranging laser;
the adjustable parallel light mirror is used for changing the ranging laser after passing through the beam splitter into parallel light;
the dichroic mirror is used for reflecting the parallel light passing through the adjustable parallel light mirror to the objective lens.
5. The laser ablation system suitable for the uneven sample surface as claimed in claim 2, wherein the reflected distance measuring light passes through the objective lens, the dichroic mirror, the adjustable parallel light mirror and the beam splitter in sequence, and then is focused to the detector through the slit of the detector to form a second light path.
6. The laser ablation system suitable for the uneven sample surface according to claim 5, wherein the dichroic mirror is used for reflecting the reflected ranging light passing through the objective lens to the adjustable parallel light mirror;
the adjustable parallel light mirror is used for focusing the reflected distance measuring light radiated by the dichroic mirror to the beam splitter;
the beam splitter is used for reflecting the reflected distance measuring light focused by the adjustable parallel light mirror to a slit of the detector and focusing the reflected distance measuring light to the detector;
the detector is for detecting the reflected ranging light beam.
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| CN202222911752.6U CN218612272U (en) | 2022-11-02 | 2022-11-02 | Laser ablation system suitable for uneven sample surface |
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| CN202222911752.6U CN218612272U (en) | 2022-11-02 | 2022-11-02 | Laser ablation system suitable for uneven sample surface |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116329769A (en) * | 2023-05-29 | 2023-06-27 | 上海凯来仪器有限公司 | Laser ablation laser ionization device, method and mass spectrometer |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116329769A (en) * | 2023-05-29 | 2023-06-27 | 上海凯来仪器有限公司 | Laser ablation laser ionization device, method and mass spectrometer |
| CN116329769B (en) * | 2023-05-29 | 2023-08-04 | 上海凯来仪器有限公司 | Laser ablation laser ionization device, method and mass spectrometer |
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