CN218465590U - Online recovery system of silicon part processing waste liquid - Google Patents
Online recovery system of silicon part processing waste liquid Download PDFInfo
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- CN218465590U CN218465590U CN202122693455.4U CN202122693455U CN218465590U CN 218465590 U CN218465590 U CN 218465590U CN 202122693455 U CN202122693455 U CN 202122693455U CN 218465590 U CN218465590 U CN 218465590U
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Abstract
The utility model relates to an online recovery system of silicon part processing waste liquid, the play liquid end in cutting waste water collection ground pool communicates to waste water buffer tank, waste water buffer tank and concentrated sour blending tank all communicate to the feed end of pressure filter, the play liquid end of pressure filter communicates all the way to waste water buffer tank via turbidity, another way communicates to the blending ground pool through a branch road behind the tee bend, another branch road communicates to concentrated sour blending tank and perlite blending tank, the liquid outlet of perlite blending tank communicates all the way to cutting waste water collection ground pool, another way communicates to the feed end of pressure filter, the play liquid end in blending ground pool is through secondary filter one, leading-in section workshop behind retrieval and utilization finished product ground pool and the secondary filter. The utility model relates to an online recovery system of silicon part processing waste liquid, it has realized the processing to the cutting waste liquid through online processing mode, has realized the recycling, has played energy-concerving and environment-protective positive benefit.
Description
Technical Field
The utility model relates to an online recovery system especially relates to a carry out the recycle system of the produced waste liquid of production and processing to the silicon part among the semiconductor technology, belongs to the supporting technical field of semiconductor.
Background
At present, in the field of semiconductor materials, cutting waste liquid in the silicon part processing process generally has strong basicity and contains silicon powder and other problems, so the cutting waste liquid is in the environment-friendly requirement, a collection area needs to be arranged in a factory area, and the cutting waste liquid is treated outside the commission after being collected by a ton barrel in a unified manner, so that the cost is huge, resources are also wasted outside the commission, and the energy conservation and the environment protection are not facilitated. Therefore, there is a need for an online recycling system that can solve the above problems.
Disclosure of Invention
An object of the utility model is to overcome above-mentioned not enough, provide an online recovery system of silicon part processing waste liquid, it has realized the processing to the cutting waste liquid through online processing mode, has realized the recycling, has played energy-concerving and environment-protective positive benefit.
The purpose of the utility model is realized like this:
an online recovery system for silicon component processing waste liquid comprises a cutting waste water collecting ground pool, wherein a liquid outlet end of the cutting waste water collecting ground pool is communicated to a waste water cache tank, a liquid outlet end of the waste water cache tank and a liquid outlet end of a concentrated acid blending tank are both communicated to a material inlet end of a filter press, the liquid outlet end of the filter press is divided into two paths through a turbidity meter, one path is communicated to the waste water cache tank, the other path is divided into two branches through a tee joint, one branch is communicated to a blending ground pool, the other branch is communicated to the concentrated acid blending tank and a perlite blending tank, one path of a liquid outlet of the perlite blending tank is communicated to the cutting waste water collecting ground pool, the other path is communicated to a material inlet end of the filter press, the liquid outlet end of the blending ground pool is communicated to a recycling finished product ground pool through a first fine filter, and the liquid outlet end of the recycling finished product ground pool is guided into a slicing workshop through a second fine filter.
Preferably, the cutting wastewater collecting ground pools are connected in parallel to form two groups, the blending ground pools are connected in parallel to form two groups, and the recycling finished product ground pools are connected in parallel to form two groups.
Preferably, the filter press is connected with a filter pressing pressure relief pipeline, one end of the filter pressing pressure relief pipeline is communicated with a liquid outlet of the filter press, and the other end of the filter pressing pressure relief pipeline is communicated with a liquid inlet at the top of the wastewater cache tank.
Preferably, the liquid outlet of the recycled finished product ground pool is connected to a secondary squeezing water inlet of the filter press through a liquid pump, and a secondary squeezing water outlet of the filter press is connected to a liquid inlet of the recycled finished product ground pool.
Preferably, the liquid outlet of one recycling finished product ground pool is communicated to the liquid inlet of the other recycling finished product ground pool through a pipeline.
Preferably, the liquid outlet of the cutting fluid ton barrel is communicated to the blending ground pool through a delivery pump and a metering valve.
Compared with the prior art, the beneficial effects of the utility model are that:
the acid liquor realizes acid-base neutralization, and before the feed of the filter press, the solution in the perlite blending tank is firstly pumped into the filter press for pre-coating through the perlite blending tank, so that the filter press filter cloth is attached with a layer of perlite solution film, and the filtered water is clearer and the clean water is quicker to be discharged; meanwhile, the filtering and recycling of the silicon powder are realized through the filter press, the recycling of the cutting machining liquid is successfully, safely and effectively realized, the generated solid waste also has great economic value, and the policy requirements of environmental protection and energy conservation are met.
Drawings
FIG. 1 is a schematic diagram of the utility model of an online recovery system for silicon part processing waste liquid.
Wherein:
a slicing plant 101;
the device comprises a cutting wastewater collection ground pool 1, a wastewater cache tank 2, a concentrated acid blending tank 3, a perlite blending tank 4, a filter press 5, a turbidity meter 6, a blending ground pool 7, a first fine filter 8, a recycled finished product ground pool 9, a second fine filter 10 and a cutting fluid ton barrel 11.
Detailed Description
Referring to fig. 1, the utility model relates to an online recovery system of silicon part processing waste liquid, the cutting waste water collection pipe network who arranges in the section workshop 101 communicates to cutting waste water collection ground pond 1, thereby collect and stir in cutting waste water collection ground pond 1 with the waste liquid drainage in the section workshop 101, the waste liquid of collecting in cutting waste water collection ground pond 1 is via the leading-in waste water buffer tank 2 of elevator pump and stir, in the leading-in feed end of waste liquid pressure filter 5 of waste water buffer tank 2, prepare before unloading at the pressure filter feeding later stage with the acidizing fluid of concentrated acid allotment jar 3 simultaneously leading-in pressure filter 5 in, thereby realize the acid alkali neutralization to the waste liquid, detect via turbidity instrument 6 after the filtrating behind pressure filter 5 filter-pressing afterwards, leading-in waste water buffer tank 2 of unqualified filtrating backward flow, up to standard filtrating divide into, communicate all the way to allotment ground pond 7, the other end communicates to concentrated acid allotment jar 3 and allotment jar 4 inlet of pearlite allotment after the flowmeter, realizes the acidity allotment jar 3 and another way communicates to the perlite filter press filter 5 collection waste water collection ground pond 1 before the pearlite allotment jar of the initial filtration is done all the way. Meanwhile, a filter pressing pressure relief pipeline is further arranged for the filter press 5, when solid waste needs to be discharged after filter pressing of the filter press 5 is completed, pressure exists in the pipeline and the filter press 5, and partial waste water also exists in the pipeline and the filter press 5, so that pressure relief needs to be carried out through the filter pressing pressure relief pipeline, the filter pressing pressure relief pipeline is connected with a liquid outlet of the filter press 5 and the waste water cache tank 2, and waste water is brought into the waste water cache tank 2 during pressure relief. Meanwhile, after the feeding of the filter press 5 is finished and the secondary tympanic membrane pressing is finished, the compressed air is used for back flushing of the excess materials in the central hole.
And filtering the filtrate in the blending ground pool 7 once through a first fine filter 8, then feeding the filtrate into a recycled finished product ground pool 9, filtering the filtrate in the recycled finished product ground pool 9 again through a second fine filter 10, and then guiding the filtrate into a slicing workshop 101 for production and use. The second fine filter 10 is communicated with a pipeline of the slicing workshop 101, and after a branch is laid in the slicing workshop 101 to supply liquid for equipment, the main pipeline is communicated with the recycled finished product ground pool 9 to form a circulating loop (liquid flow: the recycled finished product ground pool → the workshop machine → the recycled finished product ground pool), so that a conveying pump on the pipeline is ensured to run at constant pressure all the time (floccules in the pipeline can be avoided), and meanwhile, the flow can be regulated through a variable regulating valve on the pipeline forming the circulating loop; the waste water used up by the equipment is collected into the cutting waste water collecting ground pool 1 through the cutting waste water collecting pipe network.
Meanwhile, the filtrate in the recycled finished product ground pool 9 is pumped into the filter press 5 to provide secondary squeezed water, and the squeezed water after secondary squeezing flows back to the recycled finished product ground pool 9. Specifically speaking: the secondary of connecting pressure filter 5 through the pipeline squeezes the liquid outlet of water import and finished product ground pond 9, squeeze water for pressure filter 5 provides the secondary through this pipeline, what pressure filter 5 adopted is diaphragm filter press (a solid slab, a hollow slab), when pressure filter feeding later stage (normal feed pressure 0.65 Mpa), stop the charge pump, open the backpressure and squeeze the pump delivery water and carry out the tympanic membrane secondary in hollow slab and squeeze (the tympanic membrane secondary squeezes pressure and can reach 0.85 Mpa), thereby make the filter cake moisture content that squeezes lower, squeeze more fully, the secondary squeezes after accomplishing, squeeze water backward flow to retrieval and utilization finished product ground pond 9 through another backflow pipeline with the secondary, its liquid flow process is: a recycled finished product ground pool → a hollow pump of a filter press → a recycled finished product ground pool.
The recycling finished product ground pool 9 is provided with two groups of liquid outlets of one recycling finished product ground pool 9 in parallel and communicated to a liquid inlet of the other recycling finished product ground pool 9 through a pipeline; the pipeline is connected with a COD detector (a COD instrument is arranged in the middle of the circulating pipeline) in series and used for detecting the COD value of the reuse water, the circulating pipeline is used for circulating the reuse water at constant pressure all the time, and a water sample can be directly extracted when the COD instrument needs to be sampled and detected.
The liquid outlet of the cutting fluid ton barrel 11 is communicated to the blending ground pool 7 through a delivery pump and a metering valve, so that unused cutting fluid and circulating fluid are added at any time for blending, and the quality of recycled cutting fluid is guaranteed.
In addition: it should be noted that the above-mentioned embodiment is only a preferred embodiment of the present patent, and any modification or improvement made by those skilled in the art based on the above-mentioned conception is within the protection scope of the present patent.
Claims (6)
1. The utility model provides an online recovery system of silicon part processing waste liquid which characterized in that: the cutting waste water recycling system comprises a cutting waste water collecting ground pool (1), wherein a liquid outlet end of the cutting waste water collecting ground pool (1) is communicated to a waste water caching tank (2), a liquid outlet end of the waste water caching tank (2) and a liquid outlet end of a concentrated acid blending tank (3) are communicated to a feeding end of a filter press (5), the liquid outlet end of the filter press (5) is divided into two paths through a turbidity meter (6), one path is communicated to the waste water caching tank (2), the other path is divided into two branches through a tee joint, one branch is communicated to a blending ground pool (7), the other branch is communicated to the concentrated acid blending tank (3) and a perlite blending tank (4), one path of a liquid outlet of the perlite blending tank (4) is communicated to the cutting waste water collecting ground pool (1), the other path is communicated to a feeding end of the filter press (5), a liquid outlet end of the blending ground pool (7) is communicated to a finished product recycling ground pool (9) through a first fine filter (8), and a liquid outlet end of the finished product ground pool (9) is introduced into a slicing workshop (101) through a second fine filter (10).
2. The on-line recovery system of silicon part processing waste liquid according to claim 1, characterized in that: the cutting wastewater collecting ground pools (1) are connected in parallel and are provided with two groups, the blending ground pools (7) are connected in parallel and are provided with two groups, and the recycling finished product ground pools (9) are connected in parallel and are provided with two groups.
3. The on-line recovery system of silicon part processing waste liquid according to claim 1, characterized in that: the filter press is characterized in that a filter pressing pressure relief pipeline is connected to the filter press (5), one end of the filter pressing pressure relief pipeline is communicated with a liquid outlet of the filter press (5), and the other end of the filter pressing pressure relief pipeline is communicated with a top liquid inlet of the wastewater cache tank (2).
4. The on-line recovery system of silicon part processing waste liquid according to claim 1, characterized in that: and the liquid outlet of the recycling finished product ground pool (9) is connected to a secondary squeezing water inlet of the filter press (5) through a liquid pump, and a secondary squeezing water outlet of the filter press (5) is connected to the liquid inlet of the recycling finished product ground pool (9).
5. The on-line recovery system of silicon part processing waste liquid according to claim 2, characterized in that: the liquid outlet of one recycled finished product ground pool (9) is communicated to the liquid inlet of the other recycled finished product ground pool (9) through a pipeline.
6. The on-line recovery system of silicon part processing waste liquid according to claim 1, characterized in that: the liquid outlet of the cutting fluid ton barrel (11) is communicated to the blending ground pool (7) through a delivery pump and a metering valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122693455.4U CN218465590U (en) | 2021-11-05 | 2021-11-05 | Online recovery system of silicon part processing waste liquid |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122693455.4U CN218465590U (en) | 2021-11-05 | 2021-11-05 | Online recovery system of silicon part processing waste liquid |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218465590U true CN218465590U (en) | 2023-02-10 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122693455.4U Active CN218465590U (en) | 2021-11-05 | 2021-11-05 | Online recovery system of silicon part processing waste liquid |
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| CN (1) | CN218465590U (en) |
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2021
- 2021-11-05 CN CN202122693455.4U patent/CN218465590U/en active Active
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