CN218444281U - Pressure-sensitive paint frequency response characteristic test equipment - Google Patents
Pressure-sensitive paint frequency response characteristic test equipment Download PDFInfo
- Publication number
- CN218444281U CN218444281U CN202222412353.5U CN202222412353U CN218444281U CN 218444281 U CN218444281 U CN 218444281U CN 202222412353 U CN202222412353 U CN 202222412353U CN 218444281 U CN218444281 U CN 218444281U
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- Prior art keywords
- standing wave
- pressure
- frequency response
- wave tube
- sensitive paint
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- 238000012360 testing method Methods 0.000 title claims abstract description 46
- 239000003973 paint Substances 0.000 title claims abstract description 17
- 230000004044 response Effects 0.000 title claims abstract description 14
- 230000008878 coupling Effects 0.000 claims abstract description 21
- 238000010168 coupling process Methods 0.000 claims abstract description 21
- 238000005859 coupling reaction Methods 0.000 claims abstract description 21
- 230000003287 optical effect Effects 0.000 claims abstract description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 15
- 239000004065 semiconductor Substances 0.000 claims abstract description 13
- 238000001816 cooling Methods 0.000 claims description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 9
- 239000004020 conductor Substances 0.000 claims description 8
- 239000004922 lacquer Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000010433 feldspar Substances 0.000 claims 1
- 230000008859 change Effects 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 6
- 238000001514 detection method Methods 0.000 description 3
- 239000004519 grease Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 229920001296 polysiloxane Polymers 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 238000005057 refrigeration Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
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- Measuring Fluid Pressure (AREA)
Abstract
The dynamic pressure-sensitive paint frequency response characteristic test usually uses a standing wave tube as a test device. The coupling cavity is a key part of the standing wave tube, and for the standing wave tube with the fixed length of the coupling cavity, continuous frequency data cannot be obtained. The utility model uses the quartz glass tube as the main body of the coupling cavity, and the piston-shaped tail cover slides in the quartz glass tube to change the length of the coupling cavity, thereby realizing the continuous change of the fundamental frequency of the standing wave; the semiconductor refrigerating piece is arranged in the piston-shaped tail cover to control the temperature, so that the accurate control of the surface temperature of the sample piece from 30 ℃ below the room temperature to 50 ℃ above the room temperature is realized; meanwhile, 360-degree optical visibility is realized, and a series of problems that the fundamental frequency of the standing wave tube cannot be continuously changed, the temperature control range is small, and the requirement on optical path arrangement is high are solved.
Description
Technical Field
The utility model relates to a pressure sensor capability test equipment, especially a dynamic pressure sensitive paint (dynamic pressure sensitive paint) frequency response characteristic test equipment.
Background
The existing dynamic pressure-sensitive paint frequency response characteristic test usually uses a standing wave tube as test equipment, namely a standing wave tube principle is used for generating a constant sine pressure field, the pressure-time waveform of the pressure field is measured by a standard pressure sensor, and the pressure-time waveform is compared with the pressure-time waveform of the pressure-sensitive paint to be analyzed, so that the frequency response characteristic of the pressure-sensitive paint is obtained.
The coupling cavity is a key part of the standing wave tube, the length of the coupling cavity determines the fundamental frequency of the standing wave, and for a standing wave tube with a fixed length of the coupling cavity, data of the sensor in integral multiples of the fundamental frequency can only be measured, but data of continuous frequencies cannot be obtained. To obtain more test data, the fundamental frequency of the coupling cavity needs to be changed. For example, chinese utility model patent publication No. CN109916504A discloses "a high sound pressure microphone calibrator with adjustable amplitude and frequency and traceability, belonging to the field of high sound pressure microphone calibration", which adopts "a replaceable coupling cavity to generate uniform sound pressure in a wide frequency range". The method needs to be provided with a plurality of coupling cavities, and has low efficiency and tedious operation.
Secondly, the dynamic pressure sensitive paint is sensitive to temperature, so that the temperature of the test sample wafer is ensured to be constant. For example, chinese utility model patent with publication No. CN110146220A discloses a "sinusoidal optical pressure dynamic calibration cabin considering temperature control and light path layout", and "accurate control of the temperature of the optical pressure sensitive paint in the dynamic calibration process is realized by selecting a PT100 temperature sensor, a heating ring and a matched temperature controller". This method of controlling temperature by heating cannot meet the need for lower temperatures, such as below room temperature.
In addition, the pressure sensitive paint test measures the intensity of its excitation light using an optically sensitive device. The current common practice is to open an observation window on the side surface of the standing wave tube. This also places high demands on the arrangement of the optical paths.
SUMMERY OF THE UTILITY MODEL
The utility model provides a standing wave fundamental frequency can continuous variation, sample wafer surface temperature from below the room temperature 30 ℃ to the room temperature above 50 ℃, 360 visual pressure-sensitive lacquer frequency response characteristic test equipment of optics, has solved the unable continuous variation of fundamental frequency, temperature control scope is little, the light path arranges a series of problems that require highly.
In order to solve the problem, the utility model discloses on the basis of traditional standing wave pipe, use some coupling cavities to replace with the quartz circular tube, use piston form standing wave pipe bottom, control the fundamental frequency through the position of control bottom in the quartz glass pipe. The device comprises a signal generator, a power amplifier, a high-sound-pressure-level loudspeaker, a standing wave tube front section, a quartz glass tube, a piston-shaped bottom cover, an electric or hydraulic push rod, a fixed support, a sliding support, a high-precision temperature controller, a circulating water device, a pressure control unit, an installation platform, a test unit, control software and the like.
The action and the working principle of each part are as follows: the signal generator, the power amplifier and the high-sound-pressure loudspeaker form a vibrating diaphragm system, and sine pressure waves are generated and input into the standing wave tube; the front section of the standing wave tube, the quartz glass tube and the piston-shaped bottom cover form a coupling cavity of the standing wave tube, and the piston-shaped bottom cover moves back and forth in the quartz tube under the pushing of the electric or hydraulic push rod to realize the change of the length of the coupling cavity, so that the fundamental frequency of the standing wave tube is changed; a heat conductor, a reference sensor, a semiconductor refrigeration sheet, a water cooling head and the like are embedded in the piston-shaped bottom cover, and the reference sensor is used for measuring a pressure signal of the coupling cavity and is used as standard data and a control feedback signal; the semiconductor refrigeration chip, the water cooling head, the high-precision temperature controller and the circulating water device form a temperature control unit for controlling the surface temperature of the piston-shaped bottom cover, so that the temperature of the test sample chip is constant at a given value; the test unit comprises an optical test device, a data acquisition system, a test sample wafer and the like and is provided by a user; the piston-shaped bottom cover is fixedly connected with the optical testing device for testing, so that the optical device and the piston-shaped bottom cover do not move relatively; a sealing ring is used between the piston-shaped bottom cover and the quartz glass tube to realize the sealing of the standing wave tube coupling cavity; the front section of the standing wave tube is provided with a pressure adjusting hole, and the reference pressure inside the standing wave tube or the balance of the internal pressure and the external pressure is controlled by an electromagnetic valve. The standing wave tube front section, the quartz glass tube, the piston-shaped bottom cover and the optical testing device are respectively arranged on the mounting platform through a fixed support or a sliding support.
The equipment works in two working modes: debug mode or user mode, automatic mode. In the debugging mode, the control software controls the output frequency of the signal generator according to the basic frequency given by a user, automatically controls and adjusts the position of the piston-shaped bottom cover, finely adjusts the piston-shaped bottom cover back and forth according to requirements, sends out a signal after the waveform is stabilized, and the user controls the equipment of the test unit to acquire data to complete one-time test. In the automatic mode, the control software automatically reads the preset test parameters item by item, automatically controls related equipment to adjust, and automatically controls the test unit to collect data until all test items are finished. The device has a dynamic cut-off frequency automatic detection function, and the dynamic cut-off frequency of a sensor (a dynamic or static pressure sensor, a pressure sensitive paint and the like) is automatically detected according to a parameter (such as a distortion threshold value) given by a user within the capacity range (frequency range) of the device. The implementation method comprises the following steps: and calculating a frequency according to a certain algorithm, automatically controlling related equipment to adjust, automatically controlling a test unit to collect data, analyzing the data, and performing a circular test until the frequency with waveform distortion smaller than and closest to a given threshold is found, thereby obtaining the dynamic cut-off frequency of the tested object.
The beneficial effects of the utility model are that, the invention has realized that the standing wave fundamental frequency can continuous variation, sample wafer surface temperature from below the room temperature 30 ℃ to the room temperature above 50 ℃, 360 visual pressure-sensitive lacquer frequency response characteristic test equipment of optics, has solved the fundamental frequency can't continuous variation, temperature control range is little, the light path arranges a series of problems that require highly. The two working modes and the automatic dynamic cut-off frequency detection function are realized, so that the user detection operation is simpler.
Drawings
The present invention will be further described with reference to the accompanying drawings and examples.
FIG. 1 is a schematic view of the present invention;
FIG. 2 is a schematic diagram of a coupling cavity installation of a standing wave tube;
in the figure, 1, an optical testing device, 2, an equipment bracket, 3, a mounting platform, 4, a sliding platform and a driving device thereof, 5, a sliding platform controller, 6, a power amplifier, 7, a signal generator, 8, a testing unit, 9, a high-precision temperature controller, 10, a push rod, 11, a water cooling head, 12, a semiconductor refrigerator, 13, a heat conductor, 14, a sample wafer, 15, a quartz glass tube, 16, a standing wave tube front section and 17, a high-sound pressure loudspeaker are arranged.
Detailed Description
[ example 1 ]
The structure of the example is shown in figure 1. The high-sound-pressure loudspeaker (17), the standing wave tube front section (16) and the quartz glass tube (15) are arranged on a sliding platform and a moving part of a driving device (4) of the sliding platform through a support, control software controls the sliding platform and the moving part of the driving device (4) of the sliding platform to move through a sliding platform controller (5), a piston-shaped bottom cover embedded with parts such as a water-cooling head (11), a semiconductor refrigerator (12), a heat conductor (13) and the like is fixed on the mounting platform (3) through a push rod (10) and an equipment support, and an optical testing device (1) is also fixed on the mounting platform (3), so that the relative position of a sample wafer (14) arranged on the inner surface of the piston-shaped bottom cover and the optical testing device (1) is always kept unchanged; therefore, the length of the standing wave tube coupling cavity is changed, and the fundamental frequency of the standing wave tube is changed.
The sample wafer (14) is adhered to the inner side of the heat conductor (13) by using heat conduction silicone grease, the semiconductor refrigerator (12) is installed on the outer side of the heat conductor (13), the water cooling head (11) is installed on the outer side of the semiconductor refrigerator (12), the heat conductor (13), the semiconductor refrigerator (12) and the water cooling head (11) are adhered by using the heat conduction silicone grease, and are compressed by the push rod (10), so that the heat transfer efficiency is ensured. The control of the semiconductor refrigerator is controlled by a high-precision temperature controller (9), and the feedback of the temperature is fed back by a high-precision temperature sensor which is arranged in a heat conductor (13) and matched with the high-precision refrigerator, so that the high-precision temperature closed-loop control is realized.
The outer side of the quartz glass tube (15) is frameless, and 360-degree visibility is realized.
[ example 2 ]
The method is used for testing the dynamic characteristics of the pressure sensor without an optical measuring device. During the test, no temperature control is required.
The structure of the embodiment is based on the structure of figure 1, a sliding platform and a driving device (4) thereof are removed, an optical testing device (1) is not used, a sample wafer (13) is replaced by a sensor in other forms, a standing wave tube front section (16) and a quartz glass tube (15) are combined into a part, and the part and a high-sound-pressure loudspeaker (17) are directly installed and fixed on a mounting platform (3) through a bracket (2). An electric push rod, an air cylinder or a hydraulic cylinder and the like are used for adjusting the movable piston-shaped bottom cover to move in the standing wave tube coupling cavity through the push rod (10), so that the length of the coupling cavity is changed, and the fundamental frequency of the standing wave tube is changed.
[ example 3 ] A method for producing a polycarbonate
The dynamic characteristic testing device is used for testing the dynamic characteristic of the pressure sensor without an optical measuring device, and the temperature needs to be controlled in the testing process.
The present example was carried out on the basis of case 2, with temperature control according to case 1.
Claims (6)
1. The utility model provides a pressure sensitive lacquer frequency response characteristic test equipment which characterized in that comprises optical test device (1), equipment support (2), mounting platform (3), sliding platform and drive arrangement (4) thereof, sliding platform controller (5), power amplifier (6), signal generator (7), test unit (8), high accuracy temperature controller (9), push rod (10), water-cooling head (11), semiconductor refrigerator (12), heat conductor (13), sample wafer (14), quartz glass pipe (15), standing wave pipe anterior segment (16), high sound pressure speaker (17).
2. The apparatus for testing the frequency response of a pressure sensitive paint as claimed in claim 1, wherein the signal generator, the power amplifier and the high sound pressure speaker are used to generate sinusoidal pressure waves.
3. The pressure-sensitive paint frequency response characteristic testing equipment as claimed in claim 1, wherein a frameless feldspar quartz glass tube is used for manufacturing the standing wave tube coupling cavity to replace an observation window of a traditional standing wave tube.
4. The pressure-sensitive paint frequency response characteristic testing equipment is characterized in that a piston-shaped tail cover is used, and the position of the tail cover can be changed in a standing wave tube coupling cavity; the semiconductor refrigerator and the water cooling head are embedded in the piston-shaped tail cover.
5. The apparatus for testing the frequency response of a pressure sensitive paint as claimed in claim 1, wherein the temperature of the devices inside the standing wave tube is controlled using a semiconductor refrigerator.
6. The apparatus for testing the frequency response of pressure-sensitive paint as claimed in claim 1, wherein the temperature of the hot end of the semiconductor refrigerator is controlled by a water cooling device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222412353.5U CN218444281U (en) | 2022-09-14 | 2022-09-14 | Pressure-sensitive paint frequency response characteristic test equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222412353.5U CN218444281U (en) | 2022-09-14 | 2022-09-14 | Pressure-sensitive paint frequency response characteristic test equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218444281U true CN218444281U (en) | 2023-02-03 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222412353.5U Withdrawn - After Issue CN218444281U (en) | 2022-09-14 | 2022-09-14 | Pressure-sensitive paint frequency response characteristic test equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218444281U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117990268A (en) * | 2024-04-07 | 2024-05-07 | 中国空气动力研究与发展中心低速空气动力研究所 | Dynamic calibration device for measuring frequency response characteristic of pressure sensitive paint |
-
2022
- 2022-09-14 CN CN202222412353.5U patent/CN218444281U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117990268A (en) * | 2024-04-07 | 2024-05-07 | 中国空气动力研究与发展中心低速空气动力研究所 | Dynamic calibration device for measuring frequency response characteristic of pressure sensitive paint |
| CN117990268B (en) * | 2024-04-07 | 2024-05-31 | 中国空气动力研究与发展中心低速空气动力研究所 | Dynamic calibration device for measuring frequency response characteristic of pressure sensitive paint |
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|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20230203 Effective date of abandoning: 20231013 |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20230203 Effective date of abandoning: 20231013 |