CN218410654U

CN218410654U - Cleaning and drying device with drying front blowing basket bottom rod mechanism

Info

Publication number: CN218410654U
Application number: CN202222571046.1U
Authority: CN
Inventors: 陈春芙; 张军
Original assignee: Changzhou Kelongwei Intelligent Technology Co ltd
Current assignee: Changzhou Kelongwei Intelligent Technology Co ltd
Priority date: 2022-09-28
Filing date: 2022-09-28
Publication date: 2023-01-31
Anticipated expiration: 2032-09-28

Abstract

The utility model discloses a washing and drying device with blow basket sill bar mechanism before drying, including lifting groove, stoving groove and manipulator slowly, still including a sill bar mechanism that blows that is used for blowing water droplet on the basket sill bar, blow sill bar mechanism and be located between lifting groove and the stoving groove slowly, but blow sill bar mechanism includes blowing pipe, altitude mixture control's support frame and loading board, and the rotatable setting of blowing pipe is in the upper end of support frame, and the lower extreme and the loading board of support frame are connected. The utility model can remove water drops on the bottom rod of the flower basket before drying, and no liquid drops remain, thereby avoiding pollution to the silicon wafer caused by entering a subsequent process and improving the yield of the silicon wafer; the subsequent drying time is effectively shortened, the drying efficiency is improved, the configuration of a drying groove body is reduced, the occupied area of the device is reduced, and the cost is saved; the blowing pipe structure with adjustable height and angle is adopted, the application range of the bottom blowing rod mechanism is improved, and effective removal of water drops on the bottom rod of the flower basket is guaranteed.

Description

Cleaning and drying device with drying front blowing basket bottom rod mechanism

Technical Field

The utility model belongs to the technical field of the silicon chip washs the stoving, particularly, relate to a washing drying device with stoving front-blowing basket sill bar mechanism.

Background

In the silicon wafer cleaning process, after the slow lifting process of the silicon wafer with the flower basket is finished, the silicon wafer with the flower basket needs to be dried in a drying tank, so that the silicon wafer and the flower basket are ensured to be carried without water drops. The currently common methods mainly comprise: the manipulator directly transports the silicon chip to the drying tank body to blow dry the silicon chip and the flower basket after lifting the silicon chip from the slow lifting tank, or sets up the brush before the drying tank, transports the silicon chip and the flower basket to the drying tank body to blow dry after wiping water at the bottom rod of the flower basket. The silicon wafer and the flower basket are directly transferred into the drying groove, although the silicon wafer and the flower basket main body can be dried, the bottom rod of the flower basket is still hung by water drops and enters a subsequent process, and the silicon wafer is polluted; and adopt to transport the stoving mode in the drying groove body again after scraping water to the flower basket bottom rod with the brush, because the brush has elasticity, get rid of the water droplet to the silicon chip easily when scraping water, the brush is after using a period of time in addition, easily remains water stain and acidizing fluid, causes secondary pollution to the silicon chip.

SUMMERY OF THE UTILITY MODEL

In order to solve the prior art, the utility model aims at providing a washing and drying device with blow-drying basket sill bar mechanism to detach basket sill bar water droplet before realizing drying, when avoiding causing the silicon chip to pollute the silicon chip, shorten the later stage stoving time, promote and weather efficiency and silicon chip and produce the piece yield.

In order to achieve the technical purpose and effect, the utility model discloses a following technical scheme realizes:

the utility model provides a wash drying device with blow-out basket sill bar mechanism before drying, is in including being used for abluent slow hand-held tank of silicon chip, being used for the silicon chip and the stoving groove of basket of flowers stoving and being used for realizing the basket of flowers and being in slow hand-held tank with the manipulator of transporting between the stoving groove, still including a blow-out basket sill bar mechanism that is used for blowing the basket of flowers sill bar to go up the water droplet, blow-out basket sill bar mechanism be located slow hand-held tank with between the stoving groove, but blow-out basket sill bar mechanism includes blowing pipe, altitude mixture control's support frame and loading board, the rotatable setting of blowing pipe is in the upper end of support frame, the lower extreme of support frame with the loading board is connected.

Furthermore, a row of air blowing holes are formed in the axial direction of the air blowing pipe.

Furthermore, the air blowing holes are uniformly distributed.

Furthermore, the air blowing holes are round holes.

Furthermore, the supporting frame comprises a fixed plate and a movable plate, the fixed plate is fixedly connected with the supporting plate, and the movable plate can move up and down and is connected with the fixed plate.

Furthermore, two groups of long round holes are formed in the fixed plate, round holes corresponding to the long round holes one to one are formed in the movable plate, and the height of the movable plate on the fixed plate can be adjusted through the long round holes, the round holes and the locking screws.

Furthermore, a circular through hole is formed in the upper end of the movable plate, an opening is formed in the upper portion of the circular through hole, and the blowing pipe is clamped in the circular through hole.

Furthermore, a reinforcing rib is arranged at the connecting corner of the fixing plate and the bearing plate.

The utility model has the advantages as follows:

1. the utility model adds the bottom rod mechanism of the flower basket between the slow lifting groove and the drying groove, which can remove water drops on the bottom rod of the flower basket before drying without residual liquid drops, thereby avoiding the pollution to the silicon wafer caused by entering the next procedure and improving the yield of the silicon wafer; meanwhile, water drops on the bottom rod of the flower basket are removed in advance before drying, so that the subsequent drying time is effectively shortened, and the drying efficiency is improved, so that the configuration of a drying groove body is reduced, the occupied area of the device is reduced, and the cost is saved;

2. the utility model discloses a blast pipe structure with adjustable height and angle are all, have improved the application scope of bottom blowing rod mechanism and have guaranteed that the flower basket bottom rod water droplet is effectively got rid of.

The above description is only an overview of the technical solution of the present invention, and in order to make the technical means of the present invention clearer and can be implemented according to the content of the description, the following detailed description is made with reference to the preferred embodiments of the present invention and accompanying drawings. The detailed description of the present invention is given by the following examples and the accompanying drawings.

Drawings

The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without undue limitation to the invention. In the drawings:

FIG. 1 is a schematic view of the present invention with the manipulator removed;

FIG. 2 is a schematic view of the overall structure of the present invention;

FIG. 3 is a schematic structural view of the bottom blowing rod mechanism of the present invention;

FIG. 4 is an enlarged view of the point A in FIG. 3 according to the present invention;

fig. 5 is a schematic structural view of the support frame and the bearing plate of the present invention.

The reference numbers in the figures illustrate: 1. slowly lifting the trough; 2. a drying tank; 3. a manipulator; 4. a bottom blowing rod mechanism; 41. a blowpipe; 42. a support frame; 43. carrying a plate; 411. a gas blowing hole; 421. a fixing plate; 422. a movable plate; 423. reinforcing ribs; 4211. a long round hole; 4221. a circular hole; 4222. and a circular through hole.

Detailed Description

The present invention will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.

It should be noted that all directional indicators (such as upper, lower, left, right, front, rear, upper end, lower end, top, bottom \8230;) in the embodiments of the present invention are only used to explain the relative positional relationship between the components in a specific posture (as shown in the attached drawings), the motion situation, etc., and if the specific posture is changed, the directional indicator is changed accordingly.

Referring to fig. 1-3, a cleaning and drying device with a bottom bar mechanism of a flower basket before drying comprises a slow lifting groove 1 for cleaning silicon wafers, a drying groove 2 for drying the silicon wafers and the flower basket, a manipulator 3 for transferring the flower basket between the slow lifting groove 1 and the drying groove 2, and a bottom bar mechanism 4 of the flower basket for spraying water drops on the bottom bar of the flower basket, wherein the bottom bar mechanism 4 of the flower basket is located between the slow lifting groove 1 and the drying groove 2, the bottom bar mechanism 4 of the flower basket comprises a blowing pipe 41, a supporting frame 42 with adjustable height and a bearing plate 43, the blowing pipe 41 is rotatably arranged at the upper end of the supporting frame 42, and the lower end of the supporting frame 42 is connected with the bearing plate 43.

Referring to fig. 1-2, in the present embodiment, the slow lifting tank 1 and the drying tank 2 are disposed in close proximity, and the bottom bar mechanism 4 of the blowing basket is disposed across the upper end surfaces of the slow lifting tank 1 and the drying tank 2 through the carrying plate 43; the three groups of support frames 42 are arranged at the front part, the middle part and the rear part of the blowpipe 41 respectively, so that the blowpipe 41 is supported and the height of the blowpipe is adjusted.

Referring to fig. 3 to 4, a row of uniformly distributed air blowing holes 411 are formed in the axial direction of the air blowing pipe 41, and the air blowing holes 411 are circular holes, but may be other shapes instead of circular holes, for example: oblong holes, elliptical holes, etc.

Referring to fig. 5, the supporting frame 42 includes a fixed plate 421 and a movable plate 422, the fixed plate 421 is fixedly connected to the supporting plate 43, and the movable plate 422 is connected to the fixed plate 421 and can move up and down. In this embodiment, in order to enable the movable plate 422 to move on the fixed plate 421, two sets of oblong holes 4211 are formed in the fixed plate 421, circular holes 4221 corresponding to the oblong holes 4211 in one-to-one correspondence are formed in the movable plate 422, the movable plate 422 realizes adjustment of the height position on the fixed plate 421 through the oblong holes 4211, the circular holes 4221 and the locking screws, and when the adjustment is specifically performed, the locking screws are loosened, the movable plate 422 is moved upward or downward, and after the movable plate 422 is moved to a desired height, the locking screws are tightened; the height adjustment range of the movable plate 422 is determined by the length direction of the oblong hole 4211.

In addition, as shown in fig. 5, a circular through hole 4222 is formed in the upper end of the movable plate 422, an opening is formed in the upper portion of the circular through hole 4222, the blowpipe 41 is clamped in the circular through hole 4222, and the diameter of the circular through hole 4222 is slightly smaller than the outer diameter of the blowpipe 41, so that the blowpipe 41 is clamped in operation, the blowpipe 41 is convenient to rotate in the circular through hole 4222, and the angle of the blowhole 411 is convenient to adjust.

In addition, as shown in fig. 3 or fig. 4, in this embodiment, in order to enhance the connection strength between the fixing plate 421 and the bearing plate 43, a reinforcing rib 423 is disposed at a corner of the fixing plate 421 and the bearing plate 43.

The working principle of the utility model is as follows:

before drying the silicon wafer, firstly lifting the flower basket to a set height position, and controlling the distance from the blowing pipe 41 to the bottom rod of the flower basket by adjusting the movable plate 422; then the blowing direction of the blowing holes 411 in the blowing pipe 41 is adjusted to the optimal angle of the bottom rod of the flower basket; then, the blowpipe 41 is connected to a compressed air or nitrogen gas supply device.

When the cleaned silicon wafer is dried, firstly, after the manipulator 3 is moved to the position above the slow lifting groove 1, the flower basket in the slow lifting groove 1 is grabbed, and the flower basket is slowly lifted to a certain height from the slow lifting groove 1, and at the moment, the lowest part of the flower basket is higher than the blowing pipe 41 of the flower basket bottom rod mechanism 4; the mechanical arm 3 drives the flower basket to slowly translate towards the drying groove 2, and in the translation process, when the flower basket passes through the flower basket bottom rod mechanism 4, the blowing pipe 41 in the flower basket bottom rod mechanism 4 blows off water drops on the flower basket bottom rod; when manipulator 3 redriven basket of flowers translation to drying bath 2 top, manipulator 3 stops to move forward, then, falls the basket of flowers to drying bath 2 in, carries out the stoving operation.

The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. The utility model provides a washing and drying device with blow-drying basket bottom bar mechanism before drying, is including being used for abluent slow hand-held tank (1) of silicon chip, be used for silicon chip and basket of flowers stoving drying groove (2) and be used for realizing that the basket of flowers is in slow hand-held tank (1) with manipulator (3) of transporting between drying groove (2), its characterized in that: the flower basket drying device is characterized by further comprising a flower basket bottom rod mechanism (4) used for blowing water drops on the flower basket bottom rod, the flower basket bottom rod mechanism (4) is located between the slow lifting groove (1) and the drying groove (2), the flower basket bottom rod mechanism (4) comprises a blowing pipe (41), a supporting frame (42) capable of being adjusted in height and a bearing plate (43), the blowing pipe (41) is rotatably arranged at the upper end of the supporting frame (42), and the lower end of the supporting frame (42) is connected with the bearing plate (43).

2. The cleaning and drying device with a bottom rod mechanism of a blow-drying basket according to claim 1, characterized in that: and the axial direction of the blowpipe (41) is provided with a row of blowholes (411).

3. The cleaning and drying device with a bottom rod mechanism of a blow-drying basket according to claim 2, characterized in that: the air blowing holes (411) are uniformly distributed.

4. The cleaning and drying device with a bottom rod mechanism of a blow-drying basket according to claim 2, characterized in that: the air blowing holes (411) are round holes.

5. The cleaning and drying device with a bottom rod mechanism of a blow-drying basket according to claim 1, characterized in that: the supporting frame (42) comprises a fixed plate (421) and a movable plate (422), the fixed plate (421) is fixedly connected with the supporting plate (43), and the movable plate (422) can move up and down and is connected with the fixed plate (421).

6. The washing and drying apparatus with a bottom bar mechanism for drying front blowing baskets of claim 5, characterized in that: two groups of long round holes (4211) are formed in the fixed plate (421), round holes (4221) corresponding to the long round holes (4211) one by one are formed in the movable plate (422), and the movable plate (422) can adjust the height position of the fixed plate (421) through the long round holes (4211), the round holes (4221) and locking screws.

7. The cleaning and drying apparatus with a bottom bar mechanism for drying a front blowing basket according to claim 5, wherein: the upper end of the movable plate (422) is provided with a circular through hole (4222), the upper part of the circular through hole (4222) is provided with an opening, and the blowing pipe (41) is clamped in the circular through hole (4222).

8. The cleaning and drying apparatus with a bottom bar mechanism for drying a front blowing basket according to claim 5, wherein: a reinforcing rib (423) is arranged at the connecting corner of the fixing plate (421) and the bearing plate (43).