CN218382482U - X-ray diffractometer sample holder for single crystal lens crystal orientation determination - Google Patents
X-ray diffractometer sample holder for single crystal lens crystal orientation determination Download PDFInfo
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- CN218382482U CN218382482U CN202221399558.8U CN202221399558U CN218382482U CN 218382482 U CN218382482 U CN 218382482U CN 202221399558 U CN202221399558 U CN 202221399558U CN 218382482 U CN218382482 U CN 218382482U
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Abstract
The utility model discloses an X-ray diffractometer sample holder for single crystal lens crystal orientation determination, which comprises a first electric swing sliding table, wherein the first electric swing sliding table comprises a first swing part; the second electric swing sliding table is fixedly arranged on the first swing part and comprises a second swing part; the electric lifting sliding table comprises a lifting part which can move along the Z-axis direction; the electric rotating platform is fixedly arranged on the lifting part; the electric rotating platform comprises a rotating mechanism capable of rotating around a Z axis, and a lens support capable of positioning a single crystal lens sample is arranged on the rotating mechanism. The application has the following advantages: the motion mechanisms in the embodiment of the application are all positioned below the electric rotating table and used for compensating errors of levelness and height when a sample is placed; the electric rotating table is positioned below the lens support, and above other electric sliding tables, the rotating range is not limited.
Description
Technical Field
The utility model relates to an X-ray diffraction test field especially relates to a single crystal lens X-ray diffractometer test sample frame for survey.
Background
In special optical systems, e.g. lithography machines, single crystal lenses are used, e.g.<111>Textured CaF 2 A single crystal lens. When in use, the specific crystal direction of the single crystal lens is required to be consistent with the optical path direction or form a specific angle, however, the single crystal lens always has a bias angle due to the influence of processing errors during processing, i.e. the specific crystal direction has a certain deviation from the included angle of the lens surface, such as<111>Textured CaF 2 The (111) crystal plane of the single crystal lens is not parallel to the surface of the lens, and a certain angle exists. Therefore, before the lens is used, the crystal orientation of the lens is accurately measured by using an X-ray diffraction device and the like so as to ensure that the lens can be accurately installed in an optical system.
In the process of determining the crystal orientation, the single crystal lens is required to rotate 180 degrees or even 360 degrees around the normal direction of the lens, namely the corresponding phi axis in the diffractometer, so as to perform the test, and the test has certain requirements on the precision of the diffractometer. The phi axis in the conventional diffractometer is generally positioned below other electric tables such as an goniometer axis, the rotation range is limited, the speed is slow, and the accuracy is low in order to keep the bearing capacity, so that the conventional diffractometer is not very suitable for determining the crystal orientation of the single crystal lens.
SUMMERY OF THE UTILITY MODEL
The embodiment of the application discloses an X-ray diffractometer test sample holder for single crystal lens determination, which can solve at least one of the technical problems.
The embodiment of the application discloses single crystal lens sample crystal orientation X-ray diffractometer sample holder for survey includes:
the first electric swing sliding table comprises a first swing part capable of swinging around the X-axis direction;
the second electric swing sliding table is fixedly arranged on the first swing part and comprises a second swing part capable of swinging around the Y-axis direction, and the X axis is vertical to the Y axis;
the electric lifting sliding table is fixedly arranged on the second swinging part; the electric lifting sliding table comprises a lifting part which can move along the Z-axis direction; wherein, the Z axis is respectively vertical to the X axis and the Y axis;
an electric rotating table fixedly arranged on the lifting part; the electric rotating platform comprises a rotating mechanism capable of rotating around a Z axis, and a lens support capable of positioning a single crystal lens sample is arranged on the rotating mechanism.
Preferably, still include the connecting seat, the connecting seat with first electronic swing slip table fixed connection, the connecting seat with X ray diffractometer's goniometer fixed connection, X ray diffractometer includes light source and detector, the light source the detector with the single crystal lens sample be in with the goniometer axle is on the circumference at center.
Preferably, the swing angle range of the first electric swing sliding table is ± 15 °.
Preferably, the swing angle range of the second electric swing sliding table is ± 15 °.
Preferably, the stroke of the electric lifting sliding table is 2-20mm, and the movement precision is 0.005mm.
Preferably, the electric rotating table can rotate around the central shaft for 360 degrees, and the repeated positioning precision is better than 0.005 degrees.
Preferably, the lens holder is fixed by a jackscrew to ensure that the surface of the single crystal lens sample is exposed in a test light path.
The X-ray diffractometer test sample holder for single crystal lens determination in the embodiment of the application has the following advantages:
1. in the embodiment of the present application, the movement mechanisms, for example, the first electric oscillating sliding table, the second electric oscillating sliding table, and the electric lifting sliding table are all located below the electric rotating table, and are used for compensating errors of levelness and height when a sample is placed, so as to perform a function of aligning the position of the single crystal lens sample;
2. the electric rotating table is located below the lens support, above other electric sliding tables, the rotating range is not limited, and meanwhile, due to the fact that no bearing exists on the electric rotating table, the electric rotating table can rotate quickly to complete testing.
For a better understanding of the features and technical content of the present invention, reference should be made to the following detailed description and accompanying drawings, which are provided for reference and illustration purposes only and are not intended to limit the present invention.
Drawings
In order to more clearly illustrate the embodiments of the present specification or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the description below are only some embodiments described in the present specification, and for those skilled in the art, other drawings may be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic diagram of a sample holder for single crystal lens measurement in an X-ray diffractometer;
fig. 2 is a schematic structural diagram of the first electric swing sliding table or the second electric swing sliding table;
FIG. 3 is a schematic structural view of an electric elevating slide table;
FIG. 4 is a schematic view of a motorized turntable;
FIG. 5 is a schematic view of a lens holder;
FIG. 6 is a schematic structural view of the adapter;
FIG. 7 is a schematic diagram of a sample holder in a diffraction system;
FIG. 8 is a schematic view of the arrangement of the axes in an X-ray diffractometer;
FIG. 9 is a schematic diagram of the crystal mid-plane;
FIG. 10 shows CaF 2 The single crystal lens is a schematic bevel.
The reference numbers of the above figures refer to: 1. a first electric swing sliding table; 2. a second electric swing sliding table; 3. an electric lifting sliding table; 4. an electric rotating table; 5. a rotation mechanism; 6. a lens holder; 7. an X-ray source; 8. a goniometer; 9. and a detector.
Detailed Description
In order to make those skilled in the art better understand the technical solutions in the present specification, the technical solutions in the embodiments of the present specification will be clearly and completely described below with reference to the drawings in the embodiments of the present specification, and it is obvious that the described embodiments are only a part of the embodiments of the present specification, and not all of the embodiments. All other embodiments obtained by a person skilled in the art based on the embodiments in the present specification without any inventive step should fall within the scope of protection of the present specification.
The following embodiments are provided as specific examples, and those skilled in the art can understand the advantages and effects of the present invention from the disclosure of the present specification. The present invention can be implemented or applied by other different embodiments, and various details in the present specification can be modified and changed based on different viewpoints and applications without departing from the concept of the present invention. The drawings of the present invention are for illustrative purposes only and are not intended to be drawn to scale. The following embodiments will further explain the related art of the present invention in detail, but the disclosure is not intended to limit the scope of the present invention.
It will be understood that, although the terms "first," "second," "third," etc. may be used herein to describe various components or signals, these components or signals should not be limited by these terms. These terms are used primarily to distinguish one element from another element or from one signal to another signal. Additionally, the term "or" as used herein is intended to include any one or combination of the associated listed items, as the case may be.
Referring to fig. 1 to 10, an embodiment of the present application discloses an X-ray diffractometer sample holder for determining a crystal orientation of a single crystal lens sample, including:
the first electric swing sliding table 1 comprises a first swing part which can swing around the X-axis direction, wherein the first electric swing sliding table 1 comprises a first swing part which can swing around the X-axis direction;
the second electric swing sliding table 2 is fixedly arranged on the first swing part and comprises a second swing part capable of swinging around the Y-axis direction, and the X axis is vertical to the Y axis;
the electric lifting slide 3 is fixedly arranged on the second swinging part; the electric lifting slide 3 comprises a lifting part which can move along the Z-axis direction; wherein, the Z axis is respectively vertical to the X axis and the Y axis;
an electric rotating table 4, wherein the electric rotating table 4 is fixedly arranged on the lifting part; the electric rotating platform 4 comprises a rotating mechanism 5 capable of rotating around a Z axis, and a lens support 6 capable of positioning a single crystal lens sample is arranged on the rotating mechanism 5.
Specifically, the first electric swing sliding table 1 includes a first housing, and a first swing portion disposed on the first housing. The first swing portion can swing relative to the first housing about the X-axis direction. In the present embodiment, the range of the swing angle of the first swing portion is ± 15 °.
And the second electric swing sliding table 2 is positioned above the first electric swing sliding table 1. The second electric swing sliding table 2 includes a second housing fixedly disposed on the first swing portion and a second swing portion disposed on the second housing. The second swing portion can swing relative to the second housing about the Y-axis direction. In the present embodiment, the range of the swing angle of the second swing portion is ± 15 °. Wherein, the X axis and the Y axis are mutually vertical.
The electric lifting slide 3 is positioned above the second electric swing sliding table 2. The electric lifting slide 3 comprises a third shell fixedly arranged on the second swinging part and a lifting part arranged on the third shell. The lifting part can move relative to the third shell along the Z-axis direction. Wherein the Z axis is respectively vertical to the X axis and the Y axis. The stroke of the lifting part of the electric lifting slide 3 is 2-20mm, and the movement precision is 0.005mm.
From this, first swing portion can drive lift portion and swing along the X axle direction, and second swing portion can drive lift portion and swing along the Y axle direction.
The electric rotating platform 4 is positioned above the electric lifting slide 3. The electric rotating table 4 includes a fourth housing fixedly provided on the lifting portion and a rotating mechanism 5 provided on the fourth housing. The rotation mechanism 5 is rotatable about the Z axis relative to the fourth housing. The rotation mechanism 5 of the electric rotating platform 4 can rotate around the central shaft within 360 degrees, and the repeated positioning precision is better than 0.005 degree. The rotating mechanism 5 can be provided with a lens holder 6, and the lens holder 6 is used for positioning and fixing the single crystal lens sample. The lens support 6 is fixed by adopting a jackscrew so as to ensure that the surface of the single crystal lens sample is exposed in a test light path.
In summary, under the combined action of the first swing portion and the second swing portion, the lens holder 6 may have a certain swing space in the X-axis direction and the Y-axis direction; under the action of the lifting part, the lens holder 6 can have certain lifting and falling space in the Z-axis direction. Therefore, errors of levelness and height when a sample is placed can be compensated by the first electric swing sliding table 1, the second electric swing sliding table 2 and the electric lifting sliding table 3, and the function of aligning the position of the single crystal lens sample is achieved. Under the effect of the rotating mechanism 5, the rotation of the lens holder 6 can be unlimited, and meanwhile, because no bearing exists on the lens holder, the lens holder can rotate quickly to complete the test.
Preferably, still include the connecting seat, the connecting seat with first electronic swing slip table 1 fixed connection, the connecting seat with goniometer 8 fixed connection of X ray diffractometer, X ray diffractometer includes light source and detector 9, the light source the detector with the single crystal lens sample be in with on the circumference of goniometer axle as the center. In the present embodiment, the connecting seat is L-shaped. Two sides of the L-shaped plate are respectively connected with the first shell of the first electric swing sliding table 1 and the goniometer 8 of the X-ray diffractometer through bolts, so that the single crystal lens sample, the light source and the detector 9 are positioned in the same plane.
Fig. 7 shows a schematic diagram of the structure of the sample holder in the diffraction system. Wherein the diffraction systemAlso comprises an X-ray source 7, a goniometer 8, a detector 9 and the like. FIG. 8 is a schematic diagram of the arrangement of the axes in the X-ray diffractometer. FIG. 9 is a schematic diagram of the crystal mid-plane. FIG. 10 shows CaF 2 The single crystal lens is a schematic bevel.
Referring to fig. 7 to 10, before the lens is used, the crystal orientation is precisely determined by using X-ray diffraction to ensure that the lens can be accurately installed in the optical system. The method comprises the following steps: the single crystal lens rotates 180 degrees (sometimes even 360 degrees) around the normal direction of the lens, namely the corresponding phi axis in the diffractometer rotates to complete the CaF alignment 2 And (4) measuring the crystal orientation of the single crystal, and further determining whether the beveling exists and the beveling angle. Wherein, the X axis, the Y axis and the Z axis are the axial directions of the sample; chi, phi and Z are axial directions of the sample table. The method comprises the following specific steps:
001. lens position alignment:
(1) The light path is in a straight-through state, i.e. the detector 9 is at the zero point of 2 theta
(2) Elevation scan (Z-axis scan), finding the half-cut (half the intensity of the through light) position, and moving to that position
(3) Omega axial scan, find peak (most horizontal position) and move to that position
(4) Repeating the steps (2) and (3) until the positions are adjusted twice without deviation basically
(5) The incident angle is set to 0.2 °, and the detector 9 is set to 2 θ =0.4 °
(6) Axial scan, finding the peak (most horizontal position), and moving to that position
(7) Omega axial scan, find peak (most horizontal position) and move to that position
(8) Z-axis scan, finding the peak (at the optimum position in the optical path), and moving to that position
(9) Repeating the steps (6), (7) and (8) until the two positions are adjusted basically without deviation
002. Lens crystal orientation determination process to<111>Textured CaF 2 Test of (111) crystal plane (2 theta 28.266 deg. at copper target wavelength) of single crystal lens
(1) The incident angle is 14.333 DEG, and the detector 9 is set to 2 theta =28.266 DEG
(2) Phi coarse scan (0 deg. -360 deg., step size 0.1 deg.), ideally with <111> crystal orientation coincident with the normal to the lens surface, the intensity does not vary with angle, but this is not possible. The angle with stronger strength is the approximate crystal orientation deflection direction, and phi is moved to the peak position
(3) Omega scanning (relative value range-1 to 1 degree, step length 0.01 degree), and the peak value is the crystal orientation deflection angle. Moving ω to the peak position.
(4) Phi coarse scanning (relative value range-1 to 1 DEG, step length 0.01 DEG), and the peak value is the crystal orientation deflection direction. Move phi to the peak position
(5) And (4) repeating the steps (3) and (4) until the peak values of the two measurements are basically free of deviation, and the peak values of the two measurements are the accurate crystal orientation deflection direction and angle.
The embodiments in the present specification are described in a progressive manner, and the same or similar parts among the embodiments are referred to each other, and each embodiment focuses on the differences from the other embodiments. While the present application has been described by way of examples, those of ordinary skill in the art will appreciate that there are numerous variations and permutations of the present application that do not depart from the spirit of the present application and that the appended embodiments are intended to include such variations and permutations without departing from the present application.
Claims (7)
1. An X-ray diffractometer sample holder for single crystal lens crystal orientation determination, characterized by comprising:
the first electric swing sliding table comprises a first swing part capable of swinging around the X-axis direction;
the second electric swing sliding table is fixedly arranged on the first swing part and comprises a second swing part capable of swinging around the Y-axis direction, and the X axis is vertical to the Y axis;
the electric lifting sliding table is fixedly arranged on the second swinging part; the electric lifting sliding table comprises a lifting part which can move along the z-axis direction; wherein, the Z axis is respectively vertical to the X axis and the Y axis;
an electric rotating table fixedly arranged on the lifting part; the electric rotating platform comprises a rotating mechanism capable of rotating around a Z axis, and a lens support capable of positioning a single crystal lens sample is arranged on the rotating mechanism.
2. The X-ray diffractometer sample holder for measuring the crystal orientation of the single crystal lens according to claim 1, further comprising a connecting seat, wherein the connecting seat is fixedly connected with the first electric swing sliding table, the connecting seat is fixedly connected with an angle measuring instrument of the X-ray diffractometer, the X-ray diffractometer comprises a light source and a detector, and the light source, the detector and the single crystal lens sample are located on a circumference with the axis of the angle measuring instrument as the center.
3. The X-ray diffractometer sample holder for measuring the crystal orientation of a single crystal lens according to claim 1, wherein the range of the swing angle of the first electric swing slide table is ± 15 °.
4. The X-ray diffractometer sample holder for measuring the crystal orientation of a single crystal lens according to claim 1, wherein the second electric swing slide table has a swing angle range of ± 15 °.
5. The sample holder for an X-ray diffractometer according to claim 1, wherein the electric lift slide has a stroke of 2 to 20mm and a movement accuracy of 0.005mm.
6. The sample holder for an X-ray diffractometer according to claim 1, wherein the motorized rotary stage is capable of rotating around the central axis through an angle of 360 ° and the positioning accuracy is better than 0.005 °.
7. The sample holder for an X-ray diffractometer according to claim 1, wherein the lens holder is fixed by a jackscrew to ensure that the surface of the single crystal lens sample is exposed in a test light path.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221399558.8U CN218382482U (en) | 2022-06-07 | 2022-06-07 | X-ray diffractometer sample holder for single crystal lens crystal orientation determination |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221399558.8U CN218382482U (en) | 2022-06-07 | 2022-06-07 | X-ray diffractometer sample holder for single crystal lens crystal orientation determination |
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| Publication Number | Publication Date |
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| CN218382482U true CN218382482U (en) | 2023-01-24 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202221399558.8U Active CN218382482U (en) | 2022-06-07 | 2022-06-07 | X-ray diffractometer sample holder for single crystal lens crystal orientation determination |
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| CN (1) | CN218382482U (en) |
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- 2022-06-07 CN CN202221399558.8U patent/CN218382482U/en active Active
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