CN218331692U - Test probe position adjusting mechanism - Google Patents
Test probe position adjusting mechanism Download PDFInfo
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- CN218331692U CN218331692U CN202222322086.2U CN202222322086U CN218331692U CN 218331692 U CN218331692 U CN 218331692U CN 202222322086 U CN202222322086 U CN 202222322086U CN 218331692 U CN218331692 U CN 218331692U
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- 239000000523 sample Substances 0.000 title claims abstract description 102
- 238000012360 testing method Methods 0.000 title claims abstract description 44
- 238000005096 rolling process Methods 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 description 5
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- 230000009286 beneficial effect Effects 0.000 description 1
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Abstract
The application discloses test probe position adjustment mechanism includes: the probe connector, one end of the said probe connector is used for fixing the test probe; the probe connector is in sliding fit with the supporting seat through the first sliding rail, and the first sliding rail extends along the vertical direction; the first adjusting assembly is arranged between the supporting seat and the probe connecting piece, and the first adjusting assembly acts to drive the probe connecting piece to reciprocate along the vertical direction. The adjusting precision of the test probe position adjusting mechanism can be obviously improved.
Description
Technical Field
The present application relates generally to the field of semiconductor testing and, more particularly, to a test probe position adjustment mechanism.
Background
In testing semiconductor devices, a special testing apparatus is generally required, a testing platform of the testing apparatus is used for placing the semiconductor devices, and probes are used for contacting with specific positions of the semiconductor devices so as to test the performance of the semiconductor devices. The relative position of the probe in the vertical direction is often required to be adjusted in the test process, the existing adjusting mechanism generally comprises a driving motor, a lead screw and a probe connecting piece, wherein the probe connecting piece is used for fixing the probe, a lead screw pair structure is formed between the lead screw and the probe connecting piece, and an output shaft of the driving motor is directly connected with the lead screw or is connected with the lead screw through a transmission assembly so as to drive the lead screw to rotate and further drive the probe connecting piece. However, in this adjustment method, the lead screw is prone to shaking during rotation, so that the probe cannot reach the set position at last, and normal testing is affected, and therefore the adjustment mechanism needs to be improved.
Disclosure of Invention
In view of the above-mentioned shortcomings or drawbacks of the prior art, it is desirable to provide a test probe position adjustment mechanism with improved adjustment accuracy.
The specific technical scheme is as follows:
the application provides a test probe position adjustment mechanism, includes:
the probe connector, one end of the said probe connector is used for fixing the test probe;
the probe connector comprises a supporting seat, a first sliding rail and a second sliding rail, wherein the supporting seat is fixed on a test board and provided with the first sliding rail, the first sliding rail extends along the vertical direction and is provided with two first sliding rails, and the two first sliding rails are arranged along the horizontal direction and are respectively in sliding fit with the probe connector from two sides of the probe connector;
the first adjusting assembly is arranged between the supporting seat and the probe connecting piece, and the first adjusting assembly acts to drive the probe connecting piece to reciprocate along the vertical direction.
Optionally, an adjusting groove is formed in one side, facing the supporting seat, of the probe connecting piece; the first adjustment assembly includes:
the driving motor is fixed on the supporting seat;
the two ends of the eccentric shaft are respectively provided with a first rotating shaft and a second rotating shaft, the first rotating shaft and the second rotating shaft are parallel to each other, the first rotating shaft is coaxially connected to an output shaft of the driving motor, and the second rotating shaft extends into the adjusting groove and is movably matched with the inner wall of the upper side of the adjusting groove to drive the probe connecting piece.
Optionally, the first adjusting assembly further includes a first elastic member, and the first elastic member is connected between the supporting seat and the probe connector;
when the probe connector moves to the topmost end, the first elastic piece is in a natural state;
when the probe connector moves downwards from the topmost end, the first elastic piece is in a stretching state.
Optionally, a first bearing and a second bearing coaxial with the first bearing and the second bearing are further arranged on the second rotating shaft, the outer side of the first bearing is used for being in rolling fit with the inner wall on the upper side of the adjusting groove, and the outer side of the second bearing is used for being in rolling fit with the inner wall on the lower side of the adjusting groove.
Optionally, the device further comprises a second adjusting assembly and a third adjusting assembly;
the second adjusting assembly is arranged between the supporting seat and the test board and comprises a sliding plate and a second sliding rail, the sliding plate is parallel to the horizontal plane, the second sliding rail is arranged on the upper side surface of the sliding plate along the first direction, and the bottom surface of the supporting seat is in sliding fit with the second sliding rail;
the third adjusting component is arranged between the sliding plate and the test board and comprises a third sliding rail, the third sliding rail is arranged on the test board along a second direction, the second direction is parallel to the horizontal plane and is perpendicular to the first direction, and the bottom surface of the sliding plate is in sliding fit with the third sliding rail.
Optionally, a first distance measuring device is arranged on the probe connecting piece and used for measuring the moving distance of the probe in the vertical direction;
the supporting seat is provided with a second distance measuring device for measuring the moving distance of the probe in the first direction;
and the sliding plate is provided with a third distance measuring device for measuring the moving distance of the probe in the second direction.
The beneficial effect of this application lies in:
because the two first sliding rails are arranged on the supporting seat and are respectively in sliding fit with the two sides of the probe connecting piece, when the first adjusting component drives the probe connecting piece to reciprocate in the vertical direction, the two first sliding rails can effectively clamp the probe connecting piece, the self shaking of the probe connecting piece in the process can be effectively restrained, and the adjusting precision of the test probe position adjusting mechanism is effectively improved.
Drawings
Other features, objects and advantages of the present application will become more apparent upon reading of the detailed description of non-limiting embodiments made with reference to the following drawings:
fig. 1 is a schematic structural diagram of a test probe position adjustment mechanism according to an embodiment of the present disclosure;
FIG. 2 is a side cross-sectional view of a test probe position adjustment mechanism provided in an embodiment of the present application;
FIG. 3 is a front cross-sectional view of a test probe position adjustment mechanism provided in an embodiment of the present application;
the reference numbers in the figures: 1, a probe connector; 2, supporting a base; 21, a first slide rail; 31, a drive motor; 32, an eccentric shaft; 33, a first elastic member; 321, a first bearing; 322, a second bearing; 41, a sliding plate; 10, a first distance measuring device; 20, a second distance measuring device; 30, a third distance measuring device.
Detailed Description
The present application will be described in further detail with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the relevant invention and not restrictive of the invention. It should be noted that, for convenience of description, only the portions related to the present invention are shown in the drawings.
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The present application will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.
Referring to fig. 1, a test probe position adjustment mechanism provided in this embodiment includes:
the probe connector comprises a probe connector 1, wherein one end of the probe connector 1 is used for fixing a test probe;
the supporting seat 2 is fixed on the test board, a first sliding rail 21 is arranged on the supporting seat 2, the first sliding rail 21 extends in the vertical direction and is provided with two first sliding rails, and the two first sliding rails 21 are arranged in the horizontal direction and are respectively in sliding fit with the probe connecting piece 1 from two sides;
the first adjusting assembly is arranged between the supporting seat 2 and the probe connecting piece 1, and the first adjusting assembly acts to drive the probe connecting piece 1 to reciprocate along the vertical direction.
Because the two first slide rails 21 are arranged on the supporting seat 2, and the two first slide rails 21 are respectively in sliding fit with the two sides of the probe connector 1, when the first adjusting component drives the probe connector 1 to reciprocate in the vertical direction, the two first slide rails 21 can effectively clamp the probe connector 1, the self-shaking of the probe connector 1 in the process can be effectively restrained, and the adjusting precision of the test probe position adjusting mechanism is effectively improved.
In the preferred embodiment of the first adjusting assembly, an adjusting groove is arranged on one side of the probe connector 1 facing the supporting seat 2; the first adjustment assembly includes:
the driving motor 31, the said driving motor 31 is fixed on said supporting seat 2;
the two ends of the eccentric shaft 32 are respectively provided with a first rotating shaft and a second rotating shaft, the first rotating shaft and the second rotating shaft are parallel to each other, the first rotating shaft is coaxially connected to the output shaft of the driving motor 31, and the second rotating shaft extends into the adjusting groove and is movably matched with the inner wall of the upper side of the adjusting groove to drive the probe connecting piece 1.
As shown in fig. 3, the driving motor 31 can drive the second rotating shaft to rotate around the axis of the first rotating shaft by driving the first rotating shaft on the eccentric shaft 32, and since the second rotating shaft extends into the adjusting groove on the probe connector 1 and is movably matched with the upper inner wall thereof, the probe connector 1 is driven to reciprocate along the vertical direction by the rotation of the second rotating shaft. Preferably, the width of the adjusting slot in the horizontal direction can accommodate the movable range of the second rotating shaft in the horizontal direction.
In a preferred embodiment for further improving the adjustment accuracy, the first adjustment assembly further comprises a first elastic member 33, wherein the first elastic member 33 is connected between the support base 2 and the probe connector 1;
when the probe connector 1 moves to the topmost end, the first elastic member 33 is in a natural state;
when the probe connector 1 moves downward from the topmost end, the first elastic member 33 is in a stretched state.
As described above, when the probe connector 1 moves downward from the topmost end, a vertically upward pulling force can be applied to the probe connector 1 by the first elastic member 33, so that the second rotation shaft can be brought into close contact with the upper inner wall of the adjustment groove, thereby further improving the accuracy of adjustment.
In a preferred embodiment for improving the operation stability of the adjusting mechanism, the second rotating shaft is further provided with a first bearing 321 and a second bearing 322 which are coaxial with the second rotating shaft, the outer side of the first bearing 321 is used for being in rolling fit with the inner wall on the upper side of the adjusting groove, and the outer side of the second bearing 322 is used for being in rolling fit with the inner wall on the lower side of the adjusting groove.
As shown in fig. 2, the second rotating shaft is further provided with a first bearing 321 and a second bearing 322 which are coaxial with the second rotating shaft, the outer side of the first bearing 321 is used for being in rolling fit with the upper inner wall of the adjusting groove, and the outer side of the second bearing 322 is used for being in rolling fit with the lower inner wall of the adjusting groove, so that when the probe connector 1 reciprocates in the vertical direction, the second rotating shaft is in rolling contact with the adjusting groove, and the movement of the probe connector 1 is prevented from being influenced by a large friction force generated between the second rotating shaft and the adjusting groove. Thereby improving the stability of the operation of the adjusting mechanism.
Wherein in a preferred embodiment of expanding the regulation range of the probe, a second regulation component and a third regulation component are further included;
the second adjusting component is arranged between the supporting seat 2 and the test bench and comprises a sliding plate 41 and a second sliding rail, the sliding plate 41 is parallel to the horizontal plane, the second sliding rail is arranged on the upper side surface of the sliding plate 41 along the first direction, and the bottom surface of the supporting seat 2 is in sliding fit with the second sliding rail;
the third adjusting component is arranged between the sliding plate 41 and the test board, and includes a third slide rail, the third slide rail is arranged on the test board along a second direction, the second direction is parallel to the horizontal plane and perpendicular to the first direction, and the bottom surface of the sliding plate 41 is in sliding fit with the third slide rail.
According to the scheme, the second adjusting assembly and the third adjusting assembly are additionally arranged on the adjusting mechanism, so that the mechanism can drive the probe to move along the first direction and the second direction which are horizontal, and the adjusting range of the probe is expanded.
In a preferred embodiment for further improving the adjustment accuracy, a first distance measuring device 10 is arranged on the probe connector 1 and is used for measuring the moving distance of the probe in the vertical direction;
the supporting seat 2 is provided with a second distance measuring device 20 for measuring the moving distance of the probe in the first direction;
the sliding plate 41 is provided with a third distance measuring device 30 for measuring the moving distance of the probe in the second direction.
The first distance measuring device 10, the second distance measuring device 20 and the third distance measuring device 30 can measure the moving distance of the probe in the respective directions, so that the movement of the probe can be controlled more accurately, and the test result is more accurate.
The foregoing description is only exemplary of the preferred embodiments of the application and is illustrative of the principles of the technology employed. It will be appreciated by a person skilled in the art that the scope of the invention according to the present application is not limited to the specific combination of the above-mentioned features, but also covers other embodiments where any combination of the above-mentioned features or their equivalents is made without departing from the inventive concept. For example, the above features may be replaced with (but not limited to) features having similar functions disclosed in the present application.
Claims (6)
1. A test probe position adjustment mechanism, comprising:
the probe connector (1), one end of the probe connector (1) is used for fixing a test probe;
the probe connector comprises a supporting seat (2), wherein the supporting seat (2) is fixed on a test bench and is provided with two first sliding rails (21), the first sliding rails (21) extend in the vertical direction and are arranged in parallel, and the two first sliding rails (21) are arranged in the horizontal direction and are respectively in sliding fit with the probe connector (1) from two sides;
the first adjusting assembly is arranged between the supporting seat (2) and the probe connecting piece (1), and the first adjusting assembly acts to drive the probe connecting piece (1) to reciprocate along the vertical direction.
2. The test probe position adjustment mechanism of claim 1, wherein the probe connector (1) is provided with an adjustment groove on a side facing the support base (2); the first adjustment assembly includes:
the driving motor (31), the said driving motor (31) is fixed on said supporting seat (2);
the two ends of the eccentric shaft (32) are respectively provided with a first rotating shaft and a second rotating shaft, the first rotating shaft and the second rotating shaft are parallel to each other, the first rotating shaft is coaxially connected to the output shaft of the driving motor (31), and the second rotating shaft extends into the adjusting groove and is movably matched with the inner wall of the upper side of the adjusting groove to drive the probe connecting piece (1).
3. The test probe position adjustment mechanism of claim 2, wherein the first adjustment assembly further comprises a first elastic member (33), the first elastic member (33) being connected between the support base (2) and the probe connector (1);
when the probe connector (1) moves to the topmost end, the first elastic piece (33) is in a natural state;
when the probe connector (1) moves downwards from the topmost end, the first elastic piece (33) is in a stretching state.
4. The test probe position adjusting mechanism according to claim 2, wherein the second rotating shaft is further provided with a first bearing (321) and a second bearing (322) which are coaxial with the second rotating shaft, an outer side of the first bearing (321) is used for being in rolling fit with an upper inner wall of the adjusting groove, and an outer side of the second bearing (322) is used for being in rolling fit with a lower inner wall of the adjusting groove.
5. The test probe position adjustment mechanism of any of claims 1-4, further comprising a second adjustment assembly and a third adjustment assembly;
the second adjusting component is arranged between the supporting seat (2) and the test board and comprises a sliding plate (41) and a second sliding rail, the sliding plate (41) is parallel to the horizontal plane, the second sliding rail is arranged on the upper side surface of the sliding plate (41) along the first direction, and the bottom surface of the supporting seat (2) is in sliding fit with the second sliding rail;
the third adjusting component is arranged between the sliding plate (41) and the test board and comprises a third sliding rail, the third sliding rail is arranged on the test board along a second direction, the second direction is parallel to the horizontal plane and is perpendicular to the first direction, and the bottom surface of the sliding plate (41) is in sliding fit with the third sliding rail.
6. The test probe position adjustment mechanism according to claim 5, wherein the probe connector (1) is provided with a first distance measuring device (10) for measuring a moving distance of the probe in a vertical direction;
the supporting seat (2) is provided with a second distance measuring device (20) for measuring the moving distance of the probe in the first direction;
and a third distance measuring device (30) is arranged on the sliding plate (41) and is used for measuring the moving distance of the probe in the second direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222322086.2U CN218331692U (en) | 2022-09-01 | 2022-09-01 | Test probe position adjusting mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222322086.2U CN218331692U (en) | 2022-09-01 | 2022-09-01 | Test probe position adjusting mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218331692U true CN218331692U (en) | 2023-01-17 |
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ID=84833802
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222322086.2U Active CN218331692U (en) | 2022-09-01 | 2022-09-01 | Test probe position adjusting mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218331692U (en) |
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2022
- 2022-09-01 CN CN202222322086.2U patent/CN218331692U/en active Active
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Address after: 101399 North Wenhuaying Village, Shunyi District, Beijing (No. 1, Shunchuang 2nd Road) Patentee after: Beijing Ruihuayu Semiconductor Equipment Co.,Ltd. Country or region after: China Address before: 100010 0146, Floor 3, Building 1, Yard 1, Shuangyu South Street, Shunyi District, Beijing Patentee before: Beijing Ketai optical core semiconductor equipment Technology Co.,Ltd. Country or region before: China |
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| TR01 | Transfer of patent right |
Effective date of registration: 20240322 Address after: 528248, No. 16 Guangming Avenue, New Light Source Industrial Base, Shishan Town, Nanhai District, Foshan City, Guangdong Province (Residence application, multiple photos for one address) Patentee after: Foshan Xince Technology Co.,Ltd. Country or region after: China Address before: 101399 North Wenhuaying Village, Shunyi District, Beijing (No. 1, Shunchuang 2nd Road) Patentee before: Beijing Ruihuayu Semiconductor Equipment Co.,Ltd. Country or region before: China |