CN218270238U - Furnace mouth cooling device - Google Patents
Furnace mouth cooling device Download PDFInfo
- Publication number
- CN218270238U CN218270238U CN202222140727.2U CN202222140727U CN218270238U CN 218270238 U CN218270238 U CN 218270238U CN 202222140727 U CN202222140727 U CN 202222140727U CN 218270238 U CN218270238 U CN 218270238U
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- Prior art keywords
- water
- cooling
- furnace mouth
- shell
- cooling device
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- 238000001816 cooling Methods 0.000 title claims abstract description 110
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 35
- 238000007789 sealing Methods 0.000 claims abstract description 21
- 239000003638 chemical reducing agent Substances 0.000 claims description 13
- 239000007789 gas Substances 0.000 abstract description 10
- 239000000112 cooling gas Substances 0.000 abstract description 3
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 210000000214 mouth Anatomy 0.000 description 27
- 238000004378 air conditioning Methods 0.000 description 3
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000008707 rearrangement Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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Abstract
The utility model belongs to the technical field of semiconductors, and discloses a furnace mouth cooling device, which comprises a water cooling component; the water cooling assembly comprises a water cooling shell, a water cooling pipe is arranged in the water cooling shell, and an air outlet is formed in the water cooling shell; the furnace mouth cooling device further comprises a fan and a connecting assembly, the connecting assembly comprises a connecting pipeline, the water-cooling shell is communicated with the fan through the connecting pipeline, and therefore the fan can send gas into the water-cooling shell through the connecting pipeline. In conveying gas to the water-cooling casing through the fan, then will cool off the back through the water-cooling pipe, cooling gas enters into the fire door cavity, makes fire door cavity department carry out rapid cooling, prolongs the life of furnace gate sealing washer.
Description
Technical Field
The utility model relates to the technical field of semiconductors, especially, relate to a fire door cooling device.
Background
High temperature furnaces are commonly used in thermal processing processes in the industries of large scale integrated circuits, power electronics, photovoltaics, and the like. In the prior art, a traditional high-temperature furnace door is generally sealed by a rubber sealing ring, when the high-temperature furnace works, the furnace door keeps high temperature for a long time, rubber is easy to expand and deform at high temperature, and the sealing ring is easy to lose efficacy, so that the vacuum degree in the furnace can not meet the process requirement, and finally a product is poor, therefore, the sealing ring needs to be cooled, the cooling speed of the traditional natural heat exchange cooling mode is too low, the furnace mouth cavity still keeps high temperature for a long time, and the sealing ring of the furnace door is easy to damage and lose efficacy.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a fire door cooling device makes air conditioning take away steam rapidly, carries out rapid cooling to fire door cavity department to make the furnace gate carry out rapid cooling, prolong the life of furnace gate sealing washer.
To achieve the purpose, the utility model adopts the following technical proposal:
furnace mouth cooling device for a furnace mouth chamber, comprising: a fan; a water-cooling assembly; the water cooling assembly comprises a water cooling shell, a water cooling pipe is arranged in the water cooling shell, and the water cooling shell is provided with the furnace mouth cavity communicated with the air outlet; a connecting assembly; the connecting assembly comprises a connecting pipeline, and the water-cooling shell is communicated with the fan through the connecting pipeline; wherein:
the fan can convey gas into the water-cooling shell through the connecting pipeline, and the gas and the water-cooling pipe exchange heat and then flow to the furnace mouth cavity.
Preferably, the connecting assembly further comprises a reducing joint, one end of the reducing joint is connected with the connecting pipeline, and the other end of the reducing joint is connected with the fan.
Preferably, the connecting assembly further comprises a corrugated pipe, one end of the corrugated pipe is connected with the reducing joint, and the other end of the corrugated pipe is connected with the connecting pipeline.
Preferably, the connecting assembly further comprises a clamp, and the corrugated pipe is connected with the reducing joint and the connecting pipeline through the clamp.
Preferably, a detachable sealing plate is arranged on the water-cooling shell.
Preferably, the air outlets are uniformly distributed on the sealing plate and face the furnace mouth.
Preferably, the number of the sealing plates is two, and the two sealing plates are respectively located on two opposite sides of the water-cooling shell.
Preferably, the water-cooled tubes are bent tubes or straight tubes and are uniformly distributed in the water-cooled shell.
Preferably, the water cooling unit is fixed to a chamber frame of the furnace throat chamber.
Preferably, the water cooling unit is disposed between the adjacent chamber frames.
The utility model has the advantages that:
in conveying gas to the water-cooling casing through the fan, then will cool off the back through the water-cooling pipe, cooling gas enters into the fire door cavity, accelerates the indoor air conditioning circulation of stove oral cavity, makes air conditioning take away steam rapidly, carries out rapid cooling to fire door cavity department, prolongs the life of furnace gate sealing washer.
Drawings
FIG. 1 is a schematic structural view of a furnace mouth cooling device of the present invention;
FIG. 2 is a side view of the inventive furnace mouth cooling device;
FIG. 3 is a schematic structural view of a high temperature furnace with a furnace mouth cooling device according to the present invention;
fig. 4 is a side view of the cooling device installed in the high temperature furnace of the present invention.
In the figure:
1, a fan; 2-connecting the components; 21-a reducer union; 22-a hoop; 23-a bellows; 24-connecting a pipe; 3-a water cooling component; 31-a water-cooled tube; 32-closing plate; 33-water-cooling the shell; 34-an air outlet; 4-a chamber frame; 5-furnace mouth; 6-furnace mouth chamber.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some of the structures associated with the present invention are shown in the drawings, not all of them.
In the description of the present invention, unless expressly stated or limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, e.g., as meaning permanently connected, detachably connected, or integral to one another; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood as a specific case by those skilled in the art.
In the present disclosure, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact between the first and second features, or may comprise contact between the first and second features not directly. Also, the first feature "on," "above" and "over" the second feature may include the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
In the description of the present embodiment, the terms "upper", "lower", "right", etc. are used in an orientation or positional relationship based on that shown in the drawings only for convenience of description and simplicity of operation, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used only for descriptive purposes and are not intended to be limiting.
As shown in fig. 1 to 4, the present embodiment provides a furnace mouth cooling device for cooling a furnace mouth chamber 6, comprising a water cooling assembly 3; the water-cooling assembly 3 comprises a water-cooling shell 33, a water-cooling pipe 31 is arranged in the water-cooling shell 33, and an air outlet 34 is arranged on the water-cooling shell 33; this fire door cooling device still includes fan 1 and coupling assembling 2, and this coupling assembling 2 includes connecting tube 24, and water-cooling casing 33 is linked together through connecting tube 24 with fan 1, and wherein, fan 1 can be through connecting tube 24 to water-cooling casing 33 in conveying gas, gas and 31 heat transfer of water-cooling pipe flow to fire door cavity 6. Carry gaseous to the water-cooling casing 33 in through fan 1, then will cool off the back through water-cooled tube 31, cooling gas enters into fire door cavity 6 in to fan 1 continuously blows gaseous air and can flow fast in the fire door cavity 6 with higher speed for the speed of cooling, makes fire door cavity 6 carry out rapid cooling, prolongs the life of furnace gate sealing washer.
Referring to the present embodiment in detail, as shown in fig. 1 and 2, the furnace mouth cooling device includes a water cooling unit 3; the water cooling assembly 3 comprises a water cooling shell 33, wherein a water cooling pipe 31 is arranged in the water cooling shell 33, and further, the water cooling pipe 31 is a bent pipe or a straight pipe and is uniformly distributed in the water cooling shell 33. In the present embodiment, the water cooling pipe 31 is a straight pipe, and the water cooling pipe 31 is connected to an external water supply device. The water cooling tubes 31 are uniformly distributed in the water cooling shell 33, so that the water cooling area is increased, and the cooling effect is more obvious. Furthermore, a detachable sealing plate 32 is arranged on the water-cooling shell 33, so that the working condition of the inner water-cooling pipe 31 can be observed as a window for observation, and a proper position is provided for maintenance. Further, a plurality of air outlets 34 are uniformly distributed on the sealing plate 32, wherein the air outlets 34 face the direction of the furnace mouth 5. The quantity of the air outlets 34 can adjust the quantity of the conveyed air, and cold air can rapidly act on the furnace mouth facing the furnace mouth 5, so that the furnace mouth chamber 6 can be rapidly cooled; it should be noted that the specific number of the air outlets 34 is designed according to the size of the furnace mouth 5. Furthermore, two sealing plates 32 are provided, and the two sealing plates 32 are respectively located at two opposite sides of the water-cooled shell 33, so that one furnace mouth cooling device can cool two adjacent furnace mouth cavities 6, and the purpose of saving energy is achieved.
As shown in fig. 1 and 2, further comprises a connecting assembly 2; the connecting assembly 2 comprises a connecting pipeline 24, and the water-cooling shell 33 is communicated with the fan 1 through the connecting pipeline 24 so as to enable the fan 1 to supply gas into the water-cooling shell 33 through the connecting pipeline 24. Furthermore, a reducing joint 21 is arranged between the connecting pipeline 24 and the fan 1, one end of the reducing joint 21 is connected with the connecting pipeline 24, and the other end of the reducing joint 21 is connected with the fan 1; the reducer union 21 can solve the problem of different calibers when different pipelines are connected. Furthermore, the reducer union 21 and the connecting pipeline 24 are also provided with a corrugated pipe 23, one end of the corrugated pipe 23 is connected with the reducer union 21, and the other end of the corrugated pipe 23 is connected with the connecting pipeline 24; the bellows 23 can be stretched to facilitate finding a suitable mounting location to accommodate different mounting environments. In the present embodiment, sealing rings are installed between the bellows 23 and the connecting pipe 24 and between the bellows 23 and the reducer union 21 to better seal and prevent air leakage.
Further, the bellows 23 and the reducer union 21 and the bellows 23 and the connection pipe 24 are connected by clips 22. The connecting device is used for tightly hooping and connecting the corrugated pipe 23 and the reducer union 21 and the corrugated pipe 23 and the connecting pipeline 24, so that air leakage is avoided.
Further, the water cooling component 3 is fixed on the chamber frame 4 of the furnace mouth chamber 6; further, the water cooling assembly 3 is disposed between the adjacent chamber frames 4, so that the air outlets 34 are respectively located in two adjacent furnace mouth chambers 6. Can cool the two adjacent furnace mouth chambers 6 to achieve the purpose of saving. It should be added that the water cooling module 3 may be connected to the chamber frame 4 through a connector such as a screw, a pin, or a rivet according to actual needs, or may be fastened to the chamber frame 4 through a structure such as a buckle, and the connection structure between the water cooling module 3 and the chamber frame 4 is not limited herein.
The working principle of the furnace mouth cooling device is as follows:
It is to be understood that the above-described embodiments of the present invention are merely examples for clearly illustrating the present invention and are not intended to limit the embodiments of the present invention. Numerous obvious variations, rearrangements, and substitutions will now occur to those skilled in the art without departing from the scope of the invention. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.
Claims (10)
1. Furnace mouth cooling device for furnace mouth cavity (6) cooling, its characterized in that includes:
a fan (1);
a water cooling unit (3); the water-cooling component (3) comprises a water-cooling shell (33), a water-cooling pipe (31) is arranged in the water-cooling shell (33), and an air outlet (34) communicated with the furnace mouth cavity (6) is formed in the water-cooling shell (33);
a connecting assembly (2); the connecting assembly (2) comprises a connecting pipeline (24), and the water-cooling shell (33) is communicated with the fan (1) through the connecting pipeline (24); wherein:
the fan (1) can convey gas into the water-cooling shell (33) through the connecting pipeline (24), and the gas and the water-cooling pipe (31) exchange heat and then flow to the furnace mouth cavity (6).
2. The furnace mouth cooling device according to claim 1, wherein the connecting assembly (2) further comprises a reducer union (21), one end of the reducer union (21) is connected with the connecting pipeline (24), and the other end of the reducer union (21) is connected with the fan (1).
3. The furnace mouth cooling device according to claim 2, wherein the connecting assembly (2) further comprises a corrugated pipe (23), one end of the corrugated pipe (23) is connected with the reducer union (21), and the other end of the corrugated pipe (23) is connected with the connecting pipeline (24).
4. The furnace mouth cooling device according to claim 3, characterized in that the connecting assembly (2) further comprises a collar (22), and the bellows (23) and the reducer union (21) and the bellows (23) and the connecting pipe (24) are connected by the collar (22).
5. The furnace mouth cooling device according to any one of claims 1 to 4, wherein a detachable closing plate (32) is provided on the water-cooled shell (33).
6. The furnace mouth cooling device according to claim 5, wherein the air outlet (34) is provided with a plurality of air outlets, and is uniformly distributed on the sealing plate (32) and faces the furnace mouth (5).
7. The furnace mouth cooling device according to claim 6, wherein there are two of the sealing plates (32), and the two sealing plates (32) are respectively located on opposite sides of the water-cooled shell (33).
8. The furnace mouth cooling device according to any one of claims 1 to 4, wherein the water-cooled tubes (31) are curved or straight and are uniformly distributed in the water-cooled shell (33).
9. The furnace mouth cooling device according to any one of claims 1 to 4, wherein the water cooling assembly (3) is fixed to a chamber frame (4) of the furnace mouth chamber (6).
10. The furnace mouth cooling device according to claim 9, wherein the water cooling assembly (3) is disposed between adjacent chamber frames (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222140727.2U CN218270238U (en) | 2022-08-15 | 2022-08-15 | Furnace mouth cooling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222140727.2U CN218270238U (en) | 2022-08-15 | 2022-08-15 | Furnace mouth cooling device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218270238U true CN218270238U (en) | 2023-01-10 |
Family
ID=84774611
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222140727.2U Active CN218270238U (en) | 2022-08-15 | 2022-08-15 | Furnace mouth cooling device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218270238U (en) |
-
2022
- 2022-08-15 CN CN202222140727.2U patent/CN218270238U/en active Active
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 518122 No. 1 Jikang Road, Kengzi Street, Pingshan District, Shenzhen, Guangdong, China Patentee after: Laplace New Energy Technology Co.,Ltd. Address before: 518122 No. 1 Jikang Road, Kengzi Street, Pingshan District, Shenzhen, Guangdong, China Patentee before: SHENZHEN LAPLACE ENERGY TECHNOLOGY Co.,Ltd. |
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| CP01 | Change in the name or title of a patent holder |