CN218266280U

CN218266280U - Vacuumizing mechanism and efficient vacuum pump

Info

Publication number: CN218266280U
Application number: CN202222471104.3U
Authority: CN
Inventors: 杨琪; 杨国华
Original assignee: Richtek Electronics Co Ltd
Current assignee: Richtek Electronics Co Ltd
Priority date: 2022-09-19
Filing date: 2022-09-19
Publication date: 2023-01-10
Anticipated expiration: 2032-09-19

Abstract

The utility model relates to a vacuum pumping mechanism and a high-efficiency vacuum pump, the vacuum pumping mechanism comprises a shell, a gas passing plate, a diaphragm and a piston, the gas passing plate is covered on the shell, and the gas passing plate is provided with an air inlet and an air outlet; the air passing plate is matched with the shell to fix the periphery of one end of the diaphragm, an air cavity is formed between the diaphragm and the air passing plate, and the side wall of the diaphragm is of a wavy telescopic structure; the piston is connected with one end of the diaphragm, which is far away from the gas passing plate, and the piston is used for pushing the diaphragm to be close to or far away from the gas passing plate. The vacuumizing mechanism fixes the periphery of the diaphragm by matching the air passing plate with the shell, and the side wall of the diaphragm is of a wavy telescopic structure, so that when the diaphragm is stretched by the piston towards the direction far away from the air passing plate, the stroke of the diaphragm can be increased, the air capacity of the air cavity is increased, and the air extraction efficiency is improved; when the piston compresses the diaphragm towards the air plate, the gap between the diaphragm and the air plate can be reduced, and therefore the air compression amount is increased.

Description

Vacuumizing mechanism and efficient vacuum pump

Technical Field

The utility model relates to a vacuum pump technical field especially relates to an evacuation mechanism and high-efficient vacuum pump.

Background

The vacuum pump is a multi-stage structure formed by combining two or more pumping units, is flexible in connection, improves the efficiency of vacuum pumping, is widely applied to the processes of pumping gas and the like, and is an essential gas transmission device. However, the existing vacuum pump has the problem of low air extraction efficiency due to small air extraction amount and air compression amount.

SUMMERY OF THE UTILITY MODEL

In view of the above, it is desirable to provide a vacuum pumping mechanism and a high-efficiency vacuum pump capable of improving the air pumping efficiency.

A vacuum pumping mechanism comprises a shell, a gas passing plate, a diaphragm and a piston, wherein the gas passing plate is covered on the shell and is provided with an air inlet hole and an air outlet hole; the air passing plate is matched with the shell to fix the periphery of one end of the diaphragm, an air cavity is formed between the diaphragm and the air passing plate, and the side wall of the diaphragm is of a wavy telescopic structure; the piston is connected with one end, far away from the gas passing plate, of the diaphragm and used for pushing the diaphragm to be close to or far away from the gas passing plate.

In one embodiment, the length of the end of the diaphragm connected with the air passing plate is larger than that of the end of the diaphragm connected with the piston.

In one embodiment, the air-permeable plate further comprises a cover plate, one end of the air-permeable plate is connected with the shell, and the other end of the air-permeable plate is connected with the cover plate; the cover plate is provided with an input port, a first through hole, a second through hole and an output port, one end of the first through hole is communicated with the input port, and the other end of the first through hole is communicated with the air inlet hole; one end of the second through hole is communicated with the air outlet hole, and the other end of the second through hole is communicated with the output port.

In one embodiment, the device further comprises a valve, wherein the valve is movably connected to one side, close to the cover plate, of the gas passing plate, and the cover plate covers the valve; the valve selectively seals the air outlet or the first through hole along with the expansion and contraction of the diaphragm.

In one embodiment, the valve comprises a first connecting portion, a first partition portion, a second connecting portion and a second partition portion, the first partition portion is connected with the first connecting portion, the second connecting portion is connected with the first connecting portion, the second partition portion is connected with the second connecting portion, the first partition portion is used for controlling the opening and closing of the first through hole, and the second partition portion is used for controlling the opening and closing of the air outlet hole.

In one embodiment, the first connecting portion is provided with a first vent groove which is communicated with the air inlet hole, and the second connecting portion is provided with a second vent groove which is communicated with the second through hole.

In one embodiment, the gas passing plate comprises a base plate part and a protruding part connected with the base plate part, one side of the base plate part is provided with a groove for accommodating the valve, and the protruding part is used for inserting the valve; one side of the cover plate is provided with a first convex ring and a second convex ring, the first convex ring is used for being abutted to the first connecting portion, and the second convex ring is used for being abutted to the second connecting portion.

In one embodiment, the diaphragm further comprises a pressing plate, the pressing plate is connected with the piston, and the pressing plate is matched with the piston to fix one end of the diaphragm; the pressing plate is connected to one side of the diaphragm close to the substrate portion.

In one embodiment, a containing cavity is concavely arranged on one side of the base plate part close to the membrane, and the containing cavity is used for containing the pressure plate; the size of the accommodating cavity is smaller than or equal to that of the pressing plate.

A high-efficiency vacuum pump comprises the vacuum pumping mechanism.

According to the vacuum pumping mechanism, the air passing plate is matched with the shell to fix the periphery of the diaphragm, the side wall of the diaphragm is of a wavy telescopic structure, when the piston stretches the diaphragm in the direction away from the air passing plate, the stroke of the diaphragm can be increased, so that the air capacity of the air cavity is increased, and the air pumping efficiency is improved; when the piston compresses the diaphragm towards the air passing plate direction, the gap between the diaphragm and the air passing plate can be reduced, and therefore the air compression amount is improved.

Drawings

Fig. 1 is a schematic view of an assembly structure of a vacuum pumping mechanism according to an embodiment of the present invention;

FIG. 2 is an exploded view of the evacuation mechanism of FIG. 1, wherein the housing is not shown;

FIG. 3 is a schematic diagram of the operation of the vacuum mechanism shown in FIG. 2;

FIG. 4 isbase:Sub>A partial cross-sectional view taken along line A-A of FIG. 1;

fig. 5 is a schematic view of the evacuation mechanism shown in fig. 1 in an evacuated state.

The reference numbers in the drawings have the meanings given below:

100. a vacuum pumping mechanism;

10. a housing; 20. a gas passing plate; 21. a substrate section; 211. an air inlet; 212. an air outlet; 213. a groove; 214. an accommodating chamber; 22. a boss portion; 23. a limiting part; 30. a membrane; 301. an air cavity; 40. a piston; 50. a cover plate; 51. an input port; 52. a first through hole; 53. a second through hole; 54. an output port; 55. a bolt; 56. a first convex ring; 57. a second convex ring; 60. a valve; 61. a first connection portion; 611. a first vent channel; 62. a first partition plate portion; 63. a second connecting portion; 631. a second vent groove; 64. a second partition plate portion; 70. pressing a plate; 71. a panel; 72. and a positioning column.

Detailed Description

In order to make the above objects, features and advantages of the present invention more comprehensible, embodiments of the present invention are described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein, as those skilled in the art will be able to make similar modifications without departing from the spirit and scope of the present invention.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like, indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.

In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

In the present application, unless expressly stated or limited otherwise, the first feature may be directly on or directly under the second feature or indirectly via intermediate members. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. As used herein, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like are for purposes of illustration only and do not denote a single embodiment.

Referring to fig. 1 to 5, a high-efficiency vacuum pump according to an embodiment of the present invention includes a vacuum pumping mechanism 100, which includes a housing 10, a gas passing plate 20, a diaphragm 30 and a piston 40, wherein an air cavity 301 is formed between the diaphragm 30 and the gas passing plate 20, and a side wall of the diaphragm 30 is a wavy telescopic structure; in the vacuum pumping mechanism 100, the air passing plate 20 and the housing 10 are matched to fix the periphery of one end of the diaphragm 30, and the side wall of the diaphragm 30 is of a wavy telescopic structure, so that when the piston 40 stretches the diaphragm 30 in the direction away from the air passing plate 20, the stroke of the diaphragm 30 can be increased, the air capacity of the air cavity 301 is increased, and the air extraction efficiency is improved; when the piston 40 compresses the diaphragm 30 toward the air passing plate 20, the gap between the diaphragm 30 and the air passing plate 20 can be reduced, thereby increasing the amount of air compression.

As shown in fig. 1 to fig. 3, in the present embodiment, the air passing plate 20 is covered on the housing 10, the air passing plate 20 includes a base plate portion 21 and a protruding portion 22 connecting the base plate portion 21, the base plate portion 21 is provided with an air inlet hole 211 and an air outlet hole 212; alternatively, there are two inlet holes 211 and one outlet hole 212; further, the air inlet holes 211 are strip-shaped holes, and the air outlet holes 212 are round holes. One side of the base plate 21 is further provided with a groove 213, the other side is provided with a concave accommodating cavity 214, and the air inlet hole 211 and the air outlet hole 212 are both communicated with the accommodating cavity 214. In one embodiment, the protrusion 22 is plural. As shown in fig. 4 and 5, the air passing plate 20 further includes a limiting portion 23, the limiting portion 23 is disposed on one side of the substrate portion 21 in a protruding manner, and the limiting portion 23 is used for abutting against the membrane 30; in one embodiment, the limiting portion 23 is arc-shaped to prevent the diaphragm 30 from being crushed when the diaphragm 30 stretches, so as to prolong the service life of the diaphragm 30. For the inclined plane setting between chamber 214 and the spacing portion 23 that holds of base plate portion 21, under spacing portion 23 effect, when exhausting, diaphragm 30 and inclined plane parallel arrangement reduce the friction of diaphragm 30 and base plate portion 21, increase of service life, and moreover, the clearance between diaphragm 30 and the inclined plane is less, can reduce the air and remain, improves the air compression volume.

As shown in fig. 2, 4 and 5, the air passing plate 20 cooperates with the housing 10 to fix a periphery of one end of the diaphragm 30, an air cavity 301 is formed between the diaphragm 30 and the air passing plate 20, and optionally, the limiting portion 23 cooperates with the housing 10 to fix one end of the diaphragm 30; the piston 40 is connected to an end of the diaphragm 30 remote from the gas passing plate 20, and the piston 40 is used for pushing the diaphragm 30 to approach or move away from the gas passing plate 20. Optionally, the side wall of the diaphragm 30 is of a wavy telescopic structure, as shown in fig. 4, when the diaphragm 30 is stretched, the volume of the air cavity 301 is increased, and the air capacity is increased; as shown in fig. 5, when the diaphragm 30 retracts, the gap between the diaphragm 30 and the air passing plate 20 can be reduced, thereby increasing the air compression amount; further, the length of the end of the diaphragm 30 connected with the air passing plate 20 is greater than that of the end of the diaphragm 30 connected with the piston 40; the diaphragm 30 is made of soft rubber so as to be elastically deformed.

As shown in fig. 1 to 5, the vacuum pumping mechanism 100 further includes a cover plate 50, one end of the air passing plate 20 is connected to the housing 10, and the other end is connected to the cover plate 50; optionally, the cover plate 50 is provided with an input port 51, a first through hole 52, a second through hole 53 and an output port 54, one end of the first through hole 52 is communicated with the input port 51, and the other end is communicated with the air inlet hole 211 to form an air inlet channel; one end of the second through hole 53 is communicated with the air outlet hole 212, and the other end is communicated with the output port 54, so that an air outlet channel is formed. Further, the number of the first through holes 52 is one, the number of the first through holes 52 is two, the number of the second through holes 53 is two, and the second through holes 53 are strip-shaped holes. In one embodiment, a latch 55 is disposed on one side of the cover plate 50, and the latch 55 is used for inserting the base plate 21 for positioning; optionally, there are two pins 55; further, a first bead 56 and a second bead 57 are provided at one side of the cover plate 50. When in use, the plug 55 is inserted into the base plate 21, and then the cover plate 50, the air passing plate 20 and the shell 10 are fixed by screws, so that the assembly and disassembly are convenient.

As shown in fig. 2 to fig. 5, the vacuum pumping mechanism 100 further includes a valve 60, the valve 60 is movably connected to one side of the air-passing plate 20 close to the cover plate 50, the cover plate 50 covers the valve 60, and the valve 60 selectively closes the air outlet 212 or the first through hole 52 along with the expansion and contraction of the membrane 30; the valve 60 is received in the groove 213, and the protrusion 22 is used to insert the valve 60 to fix the valve 60. Optionally, the valve 60 includes a first connecting portion 61, a first partition portion 62, a second connecting portion 63, and a second partition portion 64, the first partition portion 62 connects the first connecting portion 61, the second connecting portion 63 connects the first connecting portion 61, the second partition portion 64 connects the second connecting portion 63, the first partition portion 62 is used for controlling the opening and closing of the first through hole 52, and the second partition portion 64 is used for controlling the opening and closing of the air outlet hole 212; the first collar 56 is adapted to abut the first connection portion 61 and the second collar 57 is adapted to abut the second connection portion 63. Further, the size of the first bead 56 is smaller than that of the first connecting portion 61, and the size of the second bead 57 is smaller than that of the second connecting portion 63; the first connecting part 61 is provided with a first vent groove 611, the first vent groove 611 is communicated with the air inlet hole 211, the second connecting part 63 is provided with a second vent groove 631, and the second vent groove 631 is communicated with the second vent hole 53; the valve 60 is made of soft plastic material so that the first partition portion 62 and the second partition portion 64 are deformed. As shown in fig. 4, when air is sucked, the diaphragm 30 moves away from the air passing plate 20, and under the action of the air flow, the first partition part 62 bulges towards the air inlet hole 211, and the second partition part 64 bulges towards the air outlet hole 212 to close the air outlet hole 212, at this time, the first through hole 52 is in an open state, and the air outlet hole 212 is in a closed state, so that the external air enters the air cavity 301 from the input port 51 through the first through hole 52 and the air inlet hole 211; as shown in fig. 5, when the gas needs to be compressed, the diaphragm 30 moves toward the air passing plate 20 to compress the air in the air cavity 301; when the pressure of the compressed air is high enough, the air flow pushes the first partition portion 62 to bulge toward the first through hole 52 to close the first through hole 52, and the second partition portion 64 bulges toward the second through hole 53, at this time, the first through hole 52 is in a closed state, and the air outlet 212 is in an open state, so that the compressed air in the air cavity 301 is discharged from the air outlet 212 through the second through hole 53 and the output port 54.

As shown in fig. 2 to 4, the vacuum pumping mechanism 100 further includes a pressure plate 70, the pressure plate 70 is connected to the piston 40, and the pressure plate 70 cooperates with the piston 40 to fix one end of the diaphragm 30; the pressing plate 70 is connected to the diaphragm 30 on the side close to the base plate portion 21; the accommodating cavity 214 is used for accommodating the pressure plate 70 and provides enough space for the pressure plate 70 to move when exhausting air, so that the diaphragm 30 is in a concave state, the gap between the diaphragm 30 and the air passing plate 20 is reduced, and the air compression amount is further increased. Optionally, the size of the receiving cavity 214 is less than or equal to the size of the platen 70; further, the pressing plate 70 includes a panel 71 and positioning pillars 72 connecting the panel 71, the positioning pillars 72 being inserted into the piston 40; in one embodiment, there are two positioning posts 72; when the device is used, one end of the diaphragm 30 is abutted to the piston 40, the positioning column 72 is inserted into the piston 40, the panel 71 is abutted to the other end of the diaphragm 30, and the panel 71 and the piston 40 are fixed through the screws, so that the device is convenient to assemble.

As shown in fig. 4, when inhaling, the external power element drives the piston 40 to stretch the diaphragm 30 in the direction away from the air passing plate 20, the first partition portion 62 bulges in the direction of the air passing hole 211, the second partition portion 64 bulges in the direction of the air outlet hole 212, and at this time, the first through hole 52 is in the open state, and the air outlet hole 212 is in the closed state, so that the external air enters the air cavity 301 from the input port 51 through the first through hole 52 and the air inlet hole 211, and cannot be exhausted from the air cavity 301; as shown in fig. 5, when compressing the air, the external power component drives the piston 40 to compress the diaphragm 30 in the direction of the air plate 20, compressing the air in the air cavity 301; when the pressure of the compressed air is high enough, the air flow pushes the first partition portion 62 to bulge toward the first through hole 52, and the second partition portion 64 bulges toward the second through hole 53, at this time, the first through hole 52 is in a closed state, and the air outlet 212 is in an open state, so that the compressed air in the air cavity 301 is discharged from the air outlet 212 through the second through hole 53 and the output port 54. Because the side wall of the diaphragm 30 is of a wavy telescopic structure, when the diaphragm 30 is stretched outwards, the diaphragm 30 is in a convex state, and the stroke of the diaphragm 30 can be increased, so that the air capacity of the air cavity 301 is increased, and the air extraction efficiency is improved; when compressing diaphragm 30, clamp plate 70 holds in holding chamber 214, and at this moment, diaphragm 30 is the indent state, can reduce the clearance of diaphragm 30 and air board 20, and moreover, diaphragm 30 and inclined plane parallel arrangement, the clearance between diaphragm 30 and the inclined plane is less, can reduce the air residual to promote the air compression volume.

In the vacuum pumping mechanism 100, the air passing plate 20 and the housing 10 are matched to fix the periphery of one end of the diaphragm 30, and the side wall of the diaphragm 30 is of a wavy telescopic structure, so that when the piston 40 stretches the diaphragm 30 in the direction away from the air passing plate 20, the stroke of the diaphragm 30 can be increased, the air capacity of the air cavity 301 is increased, and the air extraction efficiency is improved; when the piston 40 compresses the diaphragm 30 toward the air passing plate 20, the gap between the diaphragm 30 and the air passing plate 20 can be reduced, thereby increasing the amount of air compression.

The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.

The above-mentioned embodiments only represent some embodiments of the present invention, and the description thereof is specific and detailed, but not to be construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, without departing from the spirit of the present invention, several variations and modifications can be made, which are within the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.

Claims

1. A vacuum pumping mechanism is characterized by comprising a shell, an air passing plate, a diaphragm and a piston, wherein the air passing plate is covered on the shell and is provided with an air inlet hole and an air outlet hole; the air passing plate is matched with the shell to fix the periphery of one end of the diaphragm, an air cavity is formed between the diaphragm and the air passing plate, and the side wall of the diaphragm is of a wavy telescopic structure; the piston is connected with one end, far away from the air passing plate, of the diaphragm and used for pushing the diaphragm to be close to or far away from the air passing plate.

2. The vacuum pumping mechanism as claimed in claim 1, wherein the length of the end of the diaphragm connected with the gas passing plate is greater than the length of the end of the diaphragm connected with the piston.

3. The vacuum pumping mechanism according to claim 1, further comprising a cover plate, wherein one end of the air passing plate is connected with the housing, and the other end of the air passing plate is connected with the cover plate; the cover plate is provided with an input port, a first through hole, a second through hole and an output port, one end of the first through hole is communicated with the input port, and the other end of the first through hole is communicated with the air inlet hole; one end of the second through hole is communicated with the air outlet hole, and the other end of the second through hole is communicated with the output port.

4. The vacuum pumping mechanism according to claim 3, further comprising a valve movably connected to a side of the gas passing plate close to the cover plate, wherein the cover plate covers the valve; the valve selectively seals the air outlet or the first through hole along with the expansion and contraction of the diaphragm.

5. The vacuum pumping mechanism as claimed in claim 4, wherein the valve comprises a first connecting portion, a first partition portion, a second connecting portion and a second partition portion, the first partition portion is connected to the first connecting portion, the second connecting portion is connected to the first connecting portion, the second partition portion is connected to the second connecting portion, the first partition portion is used for controlling the opening and closing of the first through hole, and the second partition portion is used for controlling the opening and closing of the air outlet hole.

6. The vacuum pumping mechanism as claimed in claim 5, wherein the first connecting portion is provided with a first vent groove, the first vent groove is communicated with the air inlet hole, the second connecting portion is provided with a second vent groove, and the second vent groove is communicated with the second through hole.

7. The vacuum pumping mechanism according to claim 5, wherein the gas passing plate comprises a base plate portion and a protrusion portion connected to the base plate portion, one side of the base plate portion is provided with a groove for accommodating the valve, and the protrusion portion is used for inserting the valve; one side of the cover plate is provided with a first convex ring and a second convex ring, the first convex ring is used for being abutted to the first connecting portion, and the second convex ring is used for being abutted to the second connecting portion.

8. The evacuation mechanism of claim 7, further comprising a pressure plate coupled to the piston, the pressure plate cooperating with the piston to secure an end of the diaphragm; the pressing plate is connected to one side, close to the base plate, of the diaphragm.

9. The vacuum pumping mechanism according to claim 8, wherein a receiving cavity is recessed in a side of the base plate portion close to the diaphragm, and the receiving cavity is used for receiving the pressing plate; the size of the accommodating cavity is smaller than or equal to that of the pressing plate.

10. A high-efficiency vacuum pump, characterized by comprising the evacuation mechanism of any one of claims 1 to 9.