CN218251957U - Be used for abluent rotary device of quartz capsule - Google Patents
Be used for abluent rotary device of quartz capsule Download PDFInfo
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- CN218251957U CN218251957U CN202222457388.0U CN202222457388U CN218251957U CN 218251957 U CN218251957 U CN 218251957U CN 202222457388 U CN202222457388 U CN 202222457388U CN 218251957 U CN218251957 U CN 218251957U
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- box body
- chain
- transmission shaft
- chain wheel
- motor
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Abstract
The utility model discloses a rotating device for cleaning a quartz tube, which comprises a box body with a cavity inside, a motor, a first chain wheel, a second chain wheel, a chain and a rotating assembly; an output shaft of the motor penetrates through the box wall of the box body and extends into the cavity of the box body, and the first chain wheel is sleeved on the output shaft of the motor and is fixedly connected with the output shaft of the motor; the first chain wheel is connected with the second chain wheel through a chain to drive the second chain wheel to rotate; the number of the second chain wheels is two, the two second chain wheels are positioned on the same horizontal plane, and the two second chain wheels are symmetrically arranged around the central axis of the box body; the quantity of rotating assembly is two, and two rotating assembly symmetries set up, and two second gyro wheels drive two rotating assembly rotations respectively. The utility model has the advantages that: the device adopts the motor to drive the quartz capsule and rolls the washing, has increased the cleaning efficiency of quartz capsule, under the condition that reduces chemical cleaner use amount, has guaranteed the cleaning performance and the quality of quartz capsule.
Description
Technical Field
The utility model belongs to the technical field of semiconductor equipment consumptive material cleaning equipment, concretely relates to be used for abluent rotary device of quartz capsule.
Background
The quartz tube is special industrial technical glass made of silicon dioxide and is a very good basic material. The quartz glass has a series of excellent physical and chemical properties. Is a consumable material of semiconductor equipment commonly used in semiconductor device manufacturing equipment. The quartz tube has a large amount of dirt, metal impurities or solid particles left on the inner wall surface after being used for a period of time in the semiconductor device, but the quartz tube is expensive to manufacture, and thus needs to be reused after being thoroughly cleaned, so as to reduce the manufacturing cost of the semiconductor device.
The quartz tube is fragile in material, the surface of the supporting part of the quartz tube is not clean and is easy to generate crystallization or acid mist due to the fact that the cleaning process is very compact, and the using amount of chemicals is large in the cleaning process.
SUMMERY OF THE UTILITY MODEL
The main aim at of this application provides one kind and adopts the gyro wheel roll technology to drive the quartz capsule and washs rotatoryly, and then reduces the use amount of chemicals and improves the abluent rotary device that is used for the quartz capsule to wash.
In order to achieve the above object, the present invention provides the following technical solutions:
a rotating device for cleaning a quartz tube comprises a box body with a cavity, a motor, a first chain wheel, a second chain wheel, a chain and a rotating assembly, wherein the motor, the first chain wheel, the second chain wheel, the chain and the rotating assembly are arranged in the box body;
an output shaft of the motor penetrates through the box wall of the box body and extends into the cavity of the box body, and a first chain wheel is sleeved on the output shaft of the motor and is fixedly connected with the output shaft of the motor; the first chain wheel is connected with the second chain wheel through a chain to drive the second chain wheel to rotate;
the number of the second chain wheels is two, the two second chain wheels are positioned on the same horizontal plane, and the two second chain wheels are symmetrically arranged around the central axis of the box body;
the number of the rotating assemblies is two, the two rotating assemblies are symmetrically arranged, and the two second rollers respectively drive the two rotating assemblies to rotate.
Adopt this application be used for abluent rotary device of quartz capsule, starter motor, the output shaft of motor drives first sprocket and rotates, and first sprocket passes through the chain and drives the second sprocket and rotate, and the second sprocket drives the rotating assembly and rotates and wash the quartz capsule.
And adding pure water or pure water with chemical liquid medicine into the cavity of the box body to clean the quartz tube.
As a preferred embodiment, the rotating assembly includes a transmission shaft, a roller and a transmission shaft seat for supporting the transmission shaft, one end of the transmission shaft passes through the second sprocket and is fixedly connected with the second sprocket, the other end of the transmission shaft extends along the length direction of the cavity of the box body, and the roller is sleeved on the transmission shaft.
Because of the one end of transmission shaft with second sprocket fixed connection, the second sprocket rotates and drives the transmission shaft and rotate, and the transmission shaft rotates and drives the gyro wheel and rotate. Because of the quantity of second rotating assembly is two, and two rotating assembly symmetries set up, just so have two gyro wheel symmetries to set up, establish quartz capsule between two gyro wheels with the quartz capsule support, because frictional effect, the rotation of gyro wheel just drives the quartz capsule and rotates, can realize the washing to the whole pipe wall of quartz capsule.
As a preferred embodiment, the two transmission shaft seats are fixedly connected with the inner surface of the box body, and are respectively arranged at two ends of the transmission shaft.
The transmission shaft seat is used for supporting the rotating shaft and ensuring the normal rotation of the rotating shaft.
As a preferred embodiment, the number of the rollers is several, and the rollers are uniformly arranged along the length direction of the transmission shaft.
Because the rollers are used for supporting the quartz tube, the quartz tube is flatly placed on the rollers, and the rotation of the quartz tube is driven along with the rotation of the rollers, in order to ensure that the quartz tube is more firmly fixed, at least two pairs of rollers are supported by one quartz tube (positioned on the two rotating assemblies, and the two corresponding rollers form a pair of rollers).
As a preferred embodiment, the distance L =2 between two corresponding rollers on two rotating assemblies is provided in the above-mentioned rotating device for cleaning quartz tube 1/2 *D/2。
Wherein L is the distance between two corresponding rollers on the two rotating assemblies;
d is the outer diameter of the quartz tube.
Therefore, the rollers can be guaranteed to stably support the quartz tube, and the quartz tube can be effectively cleaned.
The above-mentioned a rotary device for quartz capsule washs as a preferred embodiment, still includes the case lid, the case lid closes with the box mutually.
As a preferred embodiment, the inner surface of the box body is provided with a bearing seat, a sealing ring is arranged at a contact part of the bearing seat and the box body, and an output shaft of the motor sequentially penetrates through the box wall of the box body and the bearing seat and extends into a cavity of the box body.
The bearing seat can be arranged to ensure that the motor output shaft is in sealing connection with the box body under the condition of normal rotation, so that the leakage of cleaning liquid in the box body is prevented.
The beneficial effects of the utility model are that: be used for abluent rotary device of quartz capsule to adopt the motor to drive the quartz capsule and roll the washing, increased the cleaning efficiency of quartz capsule, under the condition that reduces chemical cleaner use amount, guaranteed the cleaning performance and the quality of quartz capsule.
Drawings
Fig. 1 is a top view of the rotating device for cleaning quartz tubes according to the present invention;
FIG. 2 is a side view of the rotating device for cleaning the quartz tube according to the present invention;
in the figure: 1. a box body; 2. a motor; 3. a first sprocket; 4. a chain; 5. a second sprocket; 6. a drive shaft; 7. a roller; 8. a transmission shaft seat; 9. a cavity.
Detailed Description
In order to make the technical solutions in the embodiments of the present application better understood, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to examples, and it is obvious that the described embodiments are only some embodiments of the present application, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
In this application, the terms "upper", "lower", "left", "right", "front", "rear", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings. These terms are used primarily to better describe the present application and its embodiments, and are not used to limit the indicated devices, elements or components to a particular orientation or to be constructed and operated in a particular orientation.
Moreover, some of the above terms may be used to indicate other meanings besides the orientation or positional relationship, for example, the term "on" may also be used to indicate some kind of attachment or connection relationship in some cases. The specific meaning of these terms in this application will be understood by those of ordinary skill in the art as the case may be.
A rotating device for cleaning a quartz tube comprises a box body 1 with a cavity 9, a motor 2, a first chain wheel 3, a second chain wheel 5, a chain 4 and a rotating assembly; an output shaft of the motor 2 penetrates through the box wall of the box body 1 and extends into a cavity 9 of the box body 1, and a first chain wheel 3 is sleeved on the output shaft of the motor 2 and is fixedly connected with the output shaft of the motor 2; the first chain wheel 3 is connected with the second chain wheel 5 through a chain 4 to drive the second chain wheel 5 to rotate;
the number of the second chain wheels 5 is two, the two second chain wheels 5 are positioned on the same horizontal plane, and the two second chain wheels 5 are symmetrically arranged about the central axis of the box body 1; the number of the rotating assemblies is two, the two rotating assemblies are symmetrically arranged, and the two second chain wheels respectively drive the two rotating assemblies to rotate.
The rotating assembly described in this embodiment includes a transmission shaft 6, a roller 7, and a transmission shaft seat 8 for supporting the transmission shaft 6, one end of the transmission shaft 6 passes through the second sprocket 5 and is fixedly connected to the second sprocket 5, the other end of the transmission shaft 6 extends along the length direction of the cavity 9 of the box body 1, and the roller 7 is sleeved on the transmission shaft 6.
In order to effectively support the rotating shaft by the transmission shaft seats 8, the number of the transmission shaft seats 8 is two, the two transmission shaft seats 8 are fixedly connected with the inner surface of the box body 1, the two transmission shaft seats 8 are respectively arranged at two ends of the transmission shaft 6, and the transmission shaft 6 is arranged on the rotation shaft seats.
Because of rotating assembly's quantity is two, is convenient for set up two transmission shafts 6 side by side like this, rolls to say the cover locate on transmission shaft 6, because of the quartz capsule need keep flat when wasing on two corresponding gyro wheels 7, guarantee the stability of quartz capsule for making gyro wheel 7 can effectively support the quartz capsule, the quantity of gyro wheel 7 is a plurality of, and a plurality of gyro wheel 7 is followed transmission shaft 6's length direction evenly sets up.
In order to prevent the quartz tube from falling off in the cleaning process, the distance L =2 between the two corresponding rollers 7 on the two rotating assemblies 1/2 *D/2。
Because the cleaning liquid is required to be added into the cavity 9 of the box body 1 in the cleaning process, in order to prevent the cleaning liquid from splashing, a box cover is covered on the box body 1, in addition, in order to prevent the liquid from leaking at the connecting part between the output shaft of the motor 2 and the box body 1, a bearing seat is arranged on the inner surface of the box body 1, a sealing ring is arranged at the contact part of the bearing seat and the box body 1, and the output shaft of the motor 2 sequentially penetrates through the box wall of the box body 1 and the bearing seat to extend into the cavity 9 of the box body 1.
When using this application be used for abluent rotary device of quartz capsule, starter motor 2, motor 2's output shaft drives first sprocket 3 and rotates, first sprocket 3 drives two second sprockets 5 through chain 4 and rotates, under the effort of second sprocket 5, rotating assembly's transmission shaft 6 rotates and then drives gyro wheel 7 and rotates, because of the quantity of transmission shaft 6 is two and parallel symmetry setting, gyro wheel 7 also has two rows, put the quartz capsule on two rows of rolls, because the rotation of friction power drive quartz capsule, thereby realize the comprehensive washing to the quartz capsule inner wall.
The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of improvements and additions can be made without departing from the method of the present invention, and these improvements and additions should also be regarded as the protection scope of the present invention.
Claims (7)
1. A rotating device for cleaning a quartz tube is characterized by comprising a box body with a cavity, a motor, a first chain wheel, a second chain wheel, a chain and a rotating assembly, wherein the cavity is formed in the box body;
an output shaft of the motor penetrates through the box wall of the box body and extends into the cavity of the box body, and a first chain wheel is sleeved on the output shaft of the motor and is fixedly connected with the output shaft of the motor; the first chain wheel is connected with the second chain wheel through a chain to drive the second chain wheel to rotate;
the number of the second chain wheels is two, the two second chain wheels are positioned on the same horizontal plane, and the two second chain wheels are symmetrically arranged around the central axis of the box body;
the number of the rotating assemblies is two, the two rotating assemblies are symmetrically arranged, and the two second chain wheels respectively drive the two rotating assemblies to rotate.
2. The rotating device for cleaning the quartz tubes as claimed in claim 1, wherein the rotating assembly comprises a transmission shaft, a roller and a transmission shaft seat for supporting the transmission shaft, one end of the transmission shaft passes through and is fixedly connected with the second chain wheel, the other end of the transmission shaft extends along the length direction of the cavity of the box body, and the roller is sleeved on the transmission shaft.
3. The rotating device for cleaning the quartz tube as claimed in claim 2, wherein the number of the transmission shaft seats is two, and the two transmission shaft seats are respectively disposed at two ends of the transmission shaft.
4. The rotating device for cleaning the quartz tube as claimed in claim 2, wherein the number of the rollers is several, and the several rollers are uniformly arranged along the length direction of the transmission shaft.
5. The rotating device for cleaning the quartz tubes as claimed in claim 4, wherein the distance L =2 between the two corresponding rollers on the two rotating assemblies 1/2 *D/2。
6. The rotating device for cleaning the quartz tubes as claimed in claim 1, further comprising a box cover, wherein the box cover is covered with the box body.
7. The rotating device for cleaning the quartz tubes as claimed in claim 1, wherein a bearing seat is arranged on the inner surface of the box body, a sealing ring is arranged at the contact part of the bearing seat and the box body, and the output shaft of the motor sequentially penetrates through the box wall of the box body and the bearing seat to extend into the cavity of the box body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222457388.0U CN218251957U (en) | 2022-09-16 | 2022-09-16 | Be used for abluent rotary device of quartz capsule |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222457388.0U CN218251957U (en) | 2022-09-16 | 2022-09-16 | Be used for abluent rotary device of quartz capsule |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218251957U true CN218251957U (en) | 2023-01-10 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222457388.0U Active CN218251957U (en) | 2022-09-16 | 2022-09-16 | Be used for abluent rotary device of quartz capsule |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218251957U (en) |
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2022
- 2022-09-16 CN CN202222457388.0U patent/CN218251957U/en active Active
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