CN218179680U

CN218179680U - Heating device for diffusion furnace

Info

Publication number: CN218179680U
Application number: CN202221877522.6U
Authority: CN
Inventors: 王作义; 朱莉; 高万智; 何立新; 陈家胜; 毛明兴
Original assignee: Shanghai Vastity Electronics Technology Co ltd
Current assignee: Shanghai Vastity Electronics Technology Co ltd
Priority date: 2022-07-21
Filing date: 2022-07-21
Publication date: 2022-12-30
Anticipated expiration: 2032-07-21

Abstract

The utility model discloses a heating device for be used for diffusion furnace, including the diffusion furnace body, the fixed surface of diffusion furnace body is connected with heating device, heating device's top is provided with the photovoltaic board, the equal fixedly connected with lug of front side and the rear side of photovoltaic board bottom is first, the equal fixedly connected with lug of front side and the rear side at heating device top is two, heating device's top fixedly connected with biax motor, two equal fixedly connected with poles of output shaft of biax motor, the one end and the two rotations of lug of stock are connected. The utility model discloses possess the advantage of adjustable angle, in the in-service use process, can adjust its angle according to the position that the sun removed to the photovoltaic board of diffusion furnace surface installation for the photovoltaic board can absorb the energy that the sun distributed out all the time, and then has improved the utilization ratio to solar energy, has improved the practicality of diffusion furnace simultaneously.

Description

Heating device for diffusion furnace

Technical Field

The utility model relates to a diffusion furnace technical field specifically is a heating device for be used for diffusion furnace.

Background

The diffusion furnace is one of important process devices of a front process of a semiconductor production line, is used for diffusion, oxidation, annealing, alloying, sintering and other processes in the industries of large-scale integrated circuits, discrete devices, power electronics, photoelectric devices, optical fibers and the like, and is of two types, namely a vertical diffusion furnace and a horizontal diffusion furnace, wherein the vertical diffusion furnace is a quartz boat vertical to the horizontal plane, so that a mechanical arm is more favorable for conveying silicon wafers, and the consistency of in-chip process parameters is better; the horizontal diffusion furnace is characterized in that the quartz boat is parallel to the horizontal plane, one process furnace tube can be four or more than four, the average furnace tube occupies smaller area, and the process parameters among the plates are better than those of the vertical diffusion furnace.

The diffusion furnace is in the use, when need heating its inside through heating device, current heating device can consume a large amount of electric energy when using, thereby user's economic burden has been increased, in order to can save resources, the photovoltaic board can be installed on the surface of diffusion furnace, the photovoltaic board after the installation is accomplished is because it is comparatively single to place the position, make the unable solar mobile position of following of photovoltaic board adjust, thereby the utilization ratio of solar energy has been reduced, in order to solve the above-mentioned problem, a heating device for diffusion furnace, urgent need to be developed.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a heating device for be used for diffusion furnace possesses the advantage of adjustable angle, has solved the problem that above-mentioned background art provided.

In order to achieve the above purpose, the utility model provides a following technical scheme: the utility model provides a heating device for be used for diffusion furnace, includes the diffusion furnace body, the fixed surface of diffusion furnace body is connected with heating device, heating device's top is provided with the photovoltaic board, the equal fixedly connected with lug one of front side and the rear side of photovoltaic board bottom, the equal fixedly connected with lug two of front side and the rear side at heating device top, heating device's top fixedly connected with biax motor, the equal fixedly connected with stock of two output shafts of biax motor, the one end and the lug two of stock rotate to be connected, the fixed surface of stock is connected with regulating block one, one side of regulating block one rotates and is connected with regulating block two, one side and the lug one of regulating block two rotates to be connected, the equal fixedly connected with fixed block in four corners at heating device top, the top of fixed block is seted up flutedly, the inner chamber of recess rotates and is connected with the connecting block, the top and photovoltaic board fixed connection, the spout has been seted up to one side, and the common sliding connection of the inner chamber of two of one side has the movable block, the equal electrically connected with direction hose of both sides of photovoltaic board, the one end and heating device electrically connected with the movable block of telescopic link.

Preferably, one side of each of the two moving blocks opposite to each other is fixedly connected with a connecting plate, and the vertical section of each connecting plate is smaller than that of each moving block.

Preferably, the surface of the diffusion furnace body is fixedly connected with two fixed seats, and the top of each fixed seat is provided with an arc surface matched with the diffusion furnace body.

Preferably, the connecting block consists of a limiting block and a cylinder, and the cylinder is positioned in the inner cavity of the groove.

Preferably, the shape of the groove is arc-shaped, and the diameter of the inner cavity is equal to the diameter of the connecting block cylinder.

Preferably, the surface of the double-shaft motor is fixedly connected with a mounting seat, the top of the mounting seat is in threaded connection with a bolt, and the heating device and the double-shaft motor are detachably connected through the bolt.

Compared with the prior art, the beneficial effects of the utility model are as follows:

1. the utility model discloses a photovoltaic board, lug one, lug two, the biax motor, the stock, regulating block one, regulating block two, the fixed block, the cooperation of connecting block and movable block is used, the effect of adjusting photovoltaic board has been played, this a heating device for diffusion furnace, possess the advantage with adjustable angle, in the in-service use process, can adjust its angle according to the position that the sun removed to the photovoltaic board of diffusion furnace surface installation, make the photovoltaic board can absorb the energy that the sun distributed all the time, and then improved the utilization ratio to solar energy, the practicality of diffusion furnace has been improved simultaneously, the problem that above-mentioned background art provided is solved.

2. The utility model discloses a setting of connecting plate, the effect of connecting the movable block has been played, make two movable blocks can carry out synchronous motion, setting through the fixing base, the effect of supporting the diffusion furnace body has been played, the stability of diffusion furnace body when placing has been improved, through the setting of recess, it is more smooth and easy when the connecting block moves about in the inner chamber of recess, cooperation through mount pad and bolt is used, the bolt is twisted to the user's accessible, separate heating device and biax motor, thereby convenient to use person changes the maintenance to biax motor.

Drawings

FIG. 1 is a schematic perspective view of the present invention;

fig. 2 is a perspective sectional view of the present invention with a partial structure.

In the figure: 1. a diffusion furnace body; 2. a heating device; 3. a photovoltaic panel; 4. a first bump; 5. a second bump; 6. a double-shaft motor; 7. a long rod; 8. a first adjusting block; 9. a second adjusting block; 10. a fixed block; 11. a groove; 12. connecting blocks; 13. a chute; 14. a moving block; 15. a guide hose; 16. a connecting plate; 17. a fixed seat.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-2, the present invention provides a technical solution: the utility model provides a heating device for be used for diffusion furnace, including diffusion furnace body 1, the fixed surface of diffusion furnace body 1 is connected with heating device 2, heating device 2's top is provided with photovoltaic board 3, the front side and the equal fixedly connected with lug 4 in rear side of photovoltaic board 3 bottom, the front side and the equal fixedly connected with lug two 5 in rear side of heating device 2 top, heating device 2's top fixedly connected with biax motor 6, two equal fixedly connected with stock 7 of output shaft of biax motor 6, the one end and the rotation of lug two 5 of stock 7 are connected, the fixed surface of stock 7 is connected with regulating block one 8, one side of regulating block one 8 is rotated and is connected with regulating block two 9, one side and lug one 4 of regulating block two 9 are rotated and is connected, the equal fixedly connected with fixed block 10 in the equal fixedly connected with four corners of heating device 2 top, recess 11 has been seted up at the top of fixed block 10, recess 11's inner chamber rotates and is connected with connecting block 12, connecting block 12 comprises stopper and cylinder, the cylinder is located recess 11's inner chamber, recess 11 shape is arc-arc, and inner chamber of recess 11, the both sides of recess 11 are connected with the electric flexible pipe 14, the both sides of the fixed block 13 of the fixed block 14, the top of the fixed block 13 of the electric telescopic link of the fixed block 14 is connected with the electric flexible pipe 14, the top of the fixed block 13, the top of the electric flexible pipe of the fixed block 13, the top of the fixed block 13, the electric connection of the electric heating device that the top of the fixed block 13, the electric flexible pipe is connected with the top of the fixed block 14.

The utility model discloses in: two fixing bases 17 of fixed surface of diffusion furnace body 1 are connected with, the cambered surface with 1 looks adaptation of diffusion furnace body is seted up at the top of fixing base 17, through fixing base 17's setting, has played the effect of supporting diffusion furnace body 1, has improved the stability of diffusion furnace body 1 when placing.

The utility model discloses in: the fixed surface of double-shaft motor 6 is connected with the mount pad, and the top threaded connection of mount pad has the bolt, and heating device 2 and double-shaft motor 6 can dismantle the connection through the bolt, uses through the cooperation of mount pad and bolt, and the bolt is moved to the user's accessible twist, separates heating device 2 and double-shaft motor 6 to convenient to use person changes the maintenance to double-shaft motor 6.

The utility model discloses in: connecting plates 16 are fixedly connected to the opposite sides of the two moving blocks 14, the vertical sections of the connecting plates 16 are smaller than those of the moving blocks 14, and the connecting plates 16 are arranged to play a role in connecting the moving blocks 14, so that the two moving blocks 14 can move synchronously.

The working principle is as follows: the utility model discloses during the use, the user is through starting biaxial motor 6, the output shaft of biaxial motor 6 drives stock 7 and rotates, stock 7 can drive regulating block one 8 when rotating and carry out angle modulation, regulating block one 8 drives regulating block two 9 and removes, make the contained angle between regulating block one 8 and the regulating block two 9 crescent, regulating block two 9 drives lug one 4 and removes when removing, lug one 4 drives photovoltaic board 3 and uses right side connecting block 12 to do the arc motion as the centre of a circle, make photovoltaic board 3's left side lift up gradually, reverse start biaxial motor 6, the output shaft of biaxial motor 6 drives stock 7 and rotates, and then make photovoltaic board 3 be the level and place, then start electric telescopic handle 18, electric telescopic handle 18's output drives left side movable block 14 and removes to the right side, make left side movable block 14 remove to the top of left side connecting block 12, carry on spacingly to it, then start biaxial motor 6, the output shaft of biaxial motor 6 drives stock 7 and rotates, stock 7 drives regulating block one 8 to do the arc motion, regulating block one 8 drives regulating block two 9 and removes, make regulating block two 9, regulating block 9 drive lug move, it moves to move to drive one 4, thereby the sunshine drives a sunshine 4 and drives a sunshine and makes the photovoltaic board 3, thereby the photovoltaic board can carry out the left side angle modulation according to the photovoltaic board 3 left side of photovoltaic board, thereby make photovoltaic board irradiation angle modulation.

It should be noted that, in this document, relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

The electrical components presented in the document are all electrically connected with an external master controller and 220V mains, and the master controller can be a conventional known device controlled by a computer or the like.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. A heating device for a diffusion furnace, comprising a diffusion furnace body (1), characterized in that: the surface of the diffusion furnace body (1) is fixedly connected with a heating device (2), the top of the heating device (2) is provided with a photovoltaic panel (3), the front side and the rear side of the bottom of the photovoltaic panel (3) are both fixedly connected with a first lug (4), the front side and the rear side of the top of the heating device (2) are both fixedly connected with a second lug (5), the top of the heating device (2) is fixedly connected with a double-shaft motor (6), two output shafts of the double-shaft motor (6) are both fixedly connected with a long rod (7), one end of the long rod (7) is rotatably connected with the second lug (5), the surface of the long rod (7) is fixedly connected with a first regulating block (8), one side of the first regulating block (8) is rotatably connected with a second regulating block (9), one side of the second regulating block (9) is rotatably connected with the first lug (4), four corners of the top of the heating device (2) are both fixedly connected with a fixed block (10), the top of the fixed block (10) is provided with a groove (11), an inner cavity of the groove (11) is rotatably connected with a connecting block (12), one side of the connecting block (12) is fixedly connected with a sliding chute (13), and two sliding chutes (13) are arranged on one side of the photovoltaic panel (3), the photovoltaic module is characterized in that two sides of the photovoltaic panel (3) are both electrically connected with guide hoses (15), one ends of the guide hoses (15) are electrically connected with the heating device (2), the top of the heating device (2) is fixedly connected with an electric telescopic rod (18), and the output end of the electric telescopic rod (18) is fixedly connected with a moving block (14).

2. A heating device for a diffusion furnace according to claim 1, characterized in that: one side of each of the two moving blocks (14) opposite to each other is fixedly connected with a connecting plate (16), and the vertical section of each connecting plate (16) is smaller than that of each moving block (14).

3. A heating device for a diffusion furnace according to claim 1, characterized in that: the surface of the diffusion furnace body (1) is fixedly connected with two fixing seats (17), and the top of each fixing seat (17) is provided with an arc surface matched with the diffusion furnace body (1).

4. The heating device for a diffusion furnace according to claim 1, wherein: the connecting block (12) is composed of a limiting block and a cylinder, and the cylinder is located in the inner cavity of the groove (11).

5. A heating device for a diffusion furnace according to claim 4, wherein: the shape of the groove (11) is arc-shaped, and the diameter of the inner cavity is equal to the diameter of the cylinder of the connecting block (12).

6. A heating device for a diffusion furnace according to claim 1, characterized in that: the surface fixed connection of biax motor (6) has the mount pad, and the top threaded connection of mount pad has the bolt, heating device (2) and biax motor (6) pass through the bolt and can dismantle the connection.