CN218047240U - Automatic processing equipment of nitrogen trifluoride batch distillation tower tail gas - Google Patents

Automatic processing equipment of nitrogen trifluoride batch distillation tower tail gas Download PDF

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Publication number
CN218047240U
CN218047240U CN202222497973.3U CN202222497973U CN218047240U CN 218047240 U CN218047240 U CN 218047240U CN 202222497973 U CN202222497973 U CN 202222497973U CN 218047240 U CN218047240 U CN 218047240U
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tower
communicated
adsorption
nitrogen trifluoride
tail gas
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薛哲
申永明
宋富财
纪振红
武建鹏
骆华江
刘旭
张周
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Peric Special Gases Co Ltd
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Peric Special Gases Co Ltd
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Abstract

The utility model provides an automatic processing equipment of nitrogen trifluoride batch fractionating tower tail gas, including batch fractionating equipment, batch fractionating equipment side intercommunication has the anti-suck-back tower, and the anti-suck-back tower side communicates in proper order has three adsorption towers, and the side intercommunication of the adsorption tower farthest away from the anti-suck-back tower has the caustic wash tower, and the caustic wash tower bottom intercommunication has the collection tank, and collection tank side intercommunication has the circulating pump, and the exit end intercommunication of circulating pump has the shower, and the exit end of shower extends to in the caustic wash tower upper portion, and the caustic wash tower top is provided with blow-down pipe; the bottom ends of the three adsorption towers are communicated to a discharge pipeline together, the discharge pipeline is communicated to a storage tank, and the top ends of the three adsorption towers are communicated with a pure water conveying pipeline. The utility model discloses a tertiary adsorption tower absorbs nitrogen trifluoride tail gas, and rethread caustic wash tower carries out neutralization treatment to waste gas, has effectively reduced the useless solid production of calcium fluoride, reduces nitrogen trifluoride tail gas treatment cost, can satisfy requirements such as green, environmental protection.

Description

Automatic processing equipment of nitrogen trifluoride batch distillation tower tail gas
Technical Field
The utility model belongs to the technical field of the automatic processing equipment of tail gas, concretely relates to automatic processing equipment of nitrogen trifluoride batch distillation column tail gas.
Background
At present, in domestic nitrogen trifluoride production, a molten salt mixture of hydrogen fluoride and ammonium bifluoride is mainly electrolyzed at high temperature, or a mixture of hydrogen fluoride and ammonia is mainly adopted to prepare nitrogen trifluoride. The electrolysis process has the advantages of high process maturity, simple process, high yield and the like. However, the nitrogen trifluoride gas produced by the electrolysis process contains many by-products and other impurities, such as hydrogen fluoride, polyfluoride, and redox impurities containing fluorine and nitrogen, which are volatilized at high temperature due to electrolysis. These impurities are complex in composition and are often fluorine-containing substances, particularly, a large amount of hydrogen fluoride. Hydrogen fluoride is highly corrosive and toxic, and the traditional treatment method is absorption treatment by lime water, which can generate a large amount of calcium fluoride to cause secondary pollution. Meanwhile, if the fluorine-containing gas is not treated by a special method, the environmental pollution is serious.
Therefore, an automatic treatment device for tail gas of a nitrogen trifluoride batch rectifying tower is provided to solve the problems.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the technical problem that not enough to above-mentioned prior art provides an automatic processing equipment of nitrogen trifluoride batch distillation column tail gas, this automatic processing equipment simple structure, convenient to use, excellent in use effect can popularize and apply.
In order to solve the technical problem, the utility model discloses a technical scheme is: the utility model provides an automatic processing equipment of nitrogen trifluoride batch distillation tower tail gas, its characterized in that includes nitrogen trifluoride batch distillation equipment, batch distillation equipment side intercommunication has the anti-suck-back tower, the anti-suck-back tower side communicates in proper order has three adsorption towers, and three adsorption towers are according to preventing the suck-back tower from nearly to far away being in proper order for one-level adsorption tower, second grade adsorption tower, tertiary adsorption tower, and the waste gas absorption mode that one-level adsorption tower, second grade adsorption tower, tertiary adsorption tower adopted is the filler absorption, adopts regular metal buckled plate as the filler, and the filler material is stainless steel, and the absorption mode is the mixing absorption, through second connecting pipe series connection intercommunication between the adsorption towers, tertiary adsorption tower side intercommunication has the alkaline washing tower, and the alkaline washing tower adopts the filler absorption, and its volume is the same with the adsorption tower volume, and the absorption liquid is potassium hydroxide or sodium hydroxide solution, and the absorption mode is the spray absorption, adopts regular metal buckled plate as the filler, and the filler material is stainless steel, all be provided with the alkaline washing tower in adsorption tower and the alkaline washing tower, and the waste gas that nitrogen trifluoride pretreatment process produced by the batch distillation equipment in proper order through the anti-suck-back, the absorption tower is followed in proper order and the industrial waste gas emission that tertiary adsorption tower is accorded with the packing layer, carries out the industrial standard and obtains.
The bottom end of the alkaline washing tower is communicated with a collecting tank, the side end of the collecting tank is communicated with a circulating pump, the outlet end of the circulating pump is communicated with a spraying pipe, the outlet end of the spraying pipe extends into the upper portion of the alkaline washing tower, two spray heads are equidistantly installed in the alkaline washing tower on the spraying pipe, the top end of the alkaline washing tower is provided with a vent pipe, spraying liquid sequentially enters the collecting tank from the lower portion of the alkaline washing tower and then enters the circulating pump through the collecting tank, the spraying liquid enters the upper portion of the alkaline washing tower from the spraying pipe under the action of the circulating pump and is sprayed, the spraying liquid after spraying enters the collecting tank again, circulating spraying is formed, and purifying quality is guaranteed.
The bottom ends of the three adsorption towers are communicated with a discharge pipeline, the discharge pipeline is communicated with a storage tank, and the top ends of the three adsorption towers are communicated with pure water conveying pipelines. Absorption liquid of the adsorption tower is supplemented through a pure water conveying pipeline, and acid liquor generated by absorbing waste gas enters a storage tank through a discharge pipeline to be stored.
Preferably, the batch distillation equipment is communicated with the anti-suck-back tower through a delivery pipe, and an automatic valve is arranged on the delivery pipe, so that the flow of waste gas can be conveniently controlled.
Preferably, the anti-reverse absorption tower is communicated with the first-stage adsorption tower through a first connecting pipe, and the alkaline washing tower is communicated with the third-stage adsorption tower through a third connecting pipe.
Preferably, a manual valve is arranged on the discharge pipeline.
Compared with the prior art, the utility model has the following advantage:
the utility model discloses a tertiary adsorption tower absorbs nitrogen trifluoride tail gas, and rethread caustic wash tower carries out neutralization treatment to waste gas, has effectively reduced the useless solid production of calcium fluoride, reduces nitrogen trifluoride tail gas treatment cost, can satisfy requirements such as green, environmental protection.
The present invention will be described in further detail with reference to the accompanying drawings and examples.
Drawings
Fig. 1 is a schematic diagram of the connection of the device of the present invention.
FIG. 2 is a schematic diagram of the structure of the alkaline washing tower of the present invention.
Description of the reference numerals:
1-batch rectification equipment; 2, preventing the reverse absorption tower; 3, conveying the pipe;
4-automatic valve; 5-a first connecting pipe; 6, a storage tank;
7-a discharge line; 8-second connecting pipe; 9-pure water conveying pipeline;
10-an alkaline washing tower; 11-a third connecting tube; 12-a collection tank;
13-a circulation pump; 14-a spray pipe; 15-a blow-down pipe;
16-a filler layer; 17-an adsorption column; 171-first stage adsorption column;
172-second stage adsorption column; 173-three-stage adsorption tower.
Detailed Description
In order to make the above objects, features and advantages of the present invention more comprehensible, embodiments of the present invention are described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. The present invention can be embodied in many different forms other than those specifically described herein, and it will be apparent to those skilled in the art that similar modifications can be made without departing from the spirit and scope of the invention, and it is therefore not to be limited to the specific embodiments disclosed below.
It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only and do not represent the only embodiments.
As shown in fig. 1-2, the utility model provides an automatic processing equipment of nitrogen trifluoride batch distillation tower tail gas, including nitrogen trifluoride batch distillation equipment 1, 1 side intercommunication of batch distillation equipment has anti-suck-back tower 2, anti-suck-back tower 2 side communicates in proper order has three adsorption tower 17, and three adsorption tower 17 is according to preventing suck-back tower 2 from being near to far away for one-level adsorption tower 171, second grade adsorption tower 172, tertiary adsorption tower 173, and the waste gas absorption mode that one-level adsorption tower 171, second grade adsorption tower 172, tertiary adsorption tower 173 adopted is the filler absorption, adopts regular metal buckled plate as the filler, and the filler material is stainless steel, and the absorption liquid is the pure water, and the absorption mode is mixing absorption, through the second connecting pipe 8 intercommunication that establishes ties between the adsorption tower 17, tertiary adsorption tower 173 side intercommunication has alkali wash tower 10, and alkali wash tower 10 adopts the filler absorption, and its volume is the same with adsorption tower 17 volume, and the absorption liquid is potassium hydroxide or sodium hydroxide solution, and the regular absorption mode is spray absorption, adopts the metal buckled plate as the filler material as the filler, the filler material is stainless steel, absorption tower 10 and the absorption tower 10 all is provided with the anti-wash tower that the industrial waste gas absorption tower that 16, the absorption tower that the industrial waste gas absorption tower that absorbs in advance, the absorption tower that the process of first grade adsorption tower 171, the absorption tower that the waste gas treatment tower that the absorption tower is carried out in proper order obtains the industrial waste gas absorption tower 171, the intermittent type adsorption tower 173, the industrial waste gas treatment tower, the absorption tower that the one-wash tower that the industrial waste gas treatment process of absorption tower that absorbs.
The bottom end of the alkaline tower 10 is communicated with a collecting tank 12, the side end of the collecting tank 12 is communicated with a circulating pump 13, the outlet end of the circulating pump 13 is communicated with a spray pipe 14, the outlet end of the spray pipe 14 extends into the upper portion of the alkaline tower 10, two spray heads are equidistantly installed in the alkaline tower 10 on the spray pipe 14, the top end of the alkaline tower 10 is provided with a vent pipe 15, spray liquid sequentially enters the collecting tank 12 from the lower portion of the alkaline tower and then enters the circulating pump 13 from the collecting tank 12, and enters the upper portion of the alkaline tower from the spray pipe 14 under the action of the circulating pump 13 to be sprayed, and the sprayed spray liquid enters the collecting tank 12 again to form circulating spraying, so that the purification quality is ensured.
The bottom ends of the three adsorption towers 17 are communicated with a discharge pipeline 7 together, the discharge pipeline 7 is communicated with a storage tank 6, and the top ends of the three adsorption towers 17 are communicated with a pure water conveying pipeline 9. The absorption liquid of the adsorption tower 17 is supplemented by a pure water conveying pipeline 9, and acid liquor generated by absorbing waste gas enters the storage tank 6 through a discharge pipeline 7 for storage.
In this embodiment, the batch distillation equipment 1 is communicated with the anti-suck-back tower 2 through a delivery pipe 3, and an automatic valve 4 is arranged on the delivery pipe 3, so that the flow of the waste gas can be conveniently controlled.
In this embodiment, the anti-reverse absorption tower 2 is communicated with the first-stage adsorption tower 171 through a first connection pipe 5, and the alkaline washing tower 10 is communicated with the third-stage adsorption tower 173 through a third connection pipe 11.
In this embodiment, the discharge pipeline 7 is provided with a manual valve.
The utility model discloses in when operating, carry out following step in proper order:
(1) Introducing high-pressure nitrogen into the nitrogen trifluoride pretreatment batch rectifying device, and introducing all hydrogen fluoride waste gas in the nitrogen trifluoride batch rectifying device 1 into the suck-back prevention tower 2 for buffer treatment, so that pressure fluctuation in the system is effectively buffered and stabilized, and meanwhile, liquid return of a subsequent aqueous solution is avoided;
(2) Hydrogen fluoride waste gas obtained through buffering treatment in the step (1) is sequentially introduced into each stage of adsorption tower 17 from the bottom of the tower along a first connecting pipe 5, the hydrogen fluoride waste gas is contacted with adsorption liquid on the surface of a filler of the adsorption tower 17 in the adsorption tower 17 and is sequentially absorbed by a first-stage adsorption tower 171, a second-stage adsorption tower 172 and a third-stage adsorption tower 173, so that hydrogen fluoride components in the waste gas can be effectively absorbed, when the system works, the adsorption tower 17 continuously supplements water through a pure water conveying pipeline 9, and acid liquid generated by absorbing the waste gas enters a storage tank 6 through a discharge pipeline 7 for storage;
(3) And (3) introducing the waste gas obtained by absorption in the step (2) into the alkaline washing tower 10 from the tower bottom along the third connecting pipe 11, contacting the residual waste gas with a sodium hydroxide or potassium hydroxide solution in the alkaline washing tower 10 on the surface of the packing layer 16, and performing a neutralization reaction with the residual waste gas in the waste gas, so as to effectively remove the residual acidic components in the waste gas, and finally obtaining the gas which meets the industrial gas emission standard and directly discharging the gas into the atmosphere.
The spray liquid enters the collecting tank 12 from the lower part of the alkaline tower in sequence, then enters the circulating pump 13 from the collecting tank 12, enters the upper part of the alkaline tower from the spray pipe 14 under the action of the circulating pump 13 for spraying, and the sprayed spray liquid enters the collecting tank 12 again to form circulating spraying.
The utility model discloses in, intermittent type rectification process ends, and when intermittent type rectification equipment temperature reached-85 ℃, start the exhaust-gas treatment procedure, the dewar bottle was automatic steps up to 0.4MPa, and automatic valve 4 is automatic to be opened, and nitrogen trifluoride intermittent type rectification equipment 1 can be poured into to high-pressure nitrogen gas. And when the temperature of the batch distillation equipment reaches-50 ℃, closing the treatment process.
The above description is only for the preferred embodiment of the present invention, and is not intended to limit the present invention in any way. Any simple modifications, changes and equivalent changes made to the above embodiments according to the technical spirit of the present invention all fall within the protection scope of the technical solution of the present invention.

Claims (7)

1. The automatic treatment equipment for the tail gas of the nitrogen trifluoride batch distillation tower is characterized by comprising batch distillation equipment (1), wherein the side end of the batch distillation equipment (1) is communicated with a reverse absorption tower (2), the side end of the reverse absorption tower (2) is sequentially communicated with three adsorption towers (17), the adsorption towers (17) are communicated in series through second connecting pipes (8), the side end, farthest from the reverse absorption tower (2), of each adsorption tower (17) is communicated with an alkaline washing tower (10), the bottom end of each alkaline washing tower (10) is communicated with a collecting tank (12), the side end of each collecting tank (12) is communicated with a circulating pump (13), the outlet end of each circulating pump (13) is communicated with a spraying pipe (14), the outlet end of each spraying pipe (14) extends into the upper portion of the alkaline washing tower (10), and the top end of the alkaline washing tower (10) is provided with an emptying pipe (15);
the bottom ends of the three adsorption towers (17) are communicated with a discharge pipeline (7) together, the discharge pipeline (7) is communicated with a storage tank (6), and the top ends of the three adsorption towers (17) are communicated with pure water conveying pipelines (9).
2. The automatic treatment equipment for the tail gas of the nitrogen trifluoride batch rectification tower as claimed in claim 1, wherein the batch rectification equipment (1) is communicated with the anti-suck-back tower (2) through a conveying pipe (3), and an automatic valve (4) is arranged on the conveying pipe (3).
3. The automatic treatment equipment for tail gas of a nitrogen trifluoride batch rectification tower as claimed in claim 1, wherein the suck-back prevention tower (2) is communicated with the adsorption tower (17) nearest to the suck-back prevention tower (2) through a first connecting pipe (5).
4. The automatic processing equipment of nitrogen trifluoride batch rectification tower tail gas according to claim 1, characterized in that the caustic tower (10) is communicated with the adsorption tower (17) farthest from the suck-back prevention tower (2) through a third connecting pipe (11).
5. The automatic treatment equipment for the tail gas of the nitrogen trifluoride batch rectification tower as claimed in claim 1, wherein a manual valve is arranged on the discharge pipeline (7).
6. The automatic treatment equipment for tail gas of a nitrogen trifluoride batch rectification tower as claimed in claim 1, wherein at least two spray heads are equidistantly installed on the spray pipe (14) in the alkaline tower (10).
7. The automatic treatment equipment for the tail gas of the nitrogen trifluoride batch rectification tower according to claim 1, characterized in that the volumes of the adsorption tower (17) and the alkaline tower (10) are the same, packing layers (16) are arranged in the adsorption tower (17) and the alkaline tower (10), regular corrugated metal plates are adopted as packing in the adsorption tower (17) and the alkaline tower (10), and the packing is made of stainless steel.
CN202222497973.3U 2022-09-21 2022-09-21 Automatic processing equipment of nitrogen trifluoride batch distillation tower tail gas Active CN218047240U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202222497973.3U CN218047240U (en) 2022-09-21 2022-09-21 Automatic processing equipment of nitrogen trifluoride batch distillation tower tail gas

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202222497973.3U CN218047240U (en) 2022-09-21 2022-09-21 Automatic processing equipment of nitrogen trifluoride batch distillation tower tail gas

Publications (1)

Publication Number Publication Date
CN218047240U true CN218047240U (en) 2022-12-16

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CN (1) CN218047240U (en)

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