CN218034897U

CN218034897U - Scriber main shaft blade non-contact height measurement mechanism

Info

Publication number: CN218034897U
Application number: CN202222182311.7U
Authority: CN
Inventors: 廖招军; 李旺军; 张智广; 于飞
Original assignee: Suzhou Teste Semiconductor Equipment Co ltd
Current assignee: Suzhou Teste Semiconductor Equipment Co ltd
Priority date: 2022-08-19
Filing date: 2022-08-19
Publication date: 2022-12-13
Anticipated expiration: 2032-08-19

Abstract

The application discloses scribing machine main shaft blade non-contact height finding mechanism, include the support frame of being connected with scribing machine longmen frame, install in the supporting component on the support frame, be provided with the determine module on the supporting component, the determine module includes vertical supporting shoe and locates the connecting plate of supporting shoe both sides, both sides be provided with the assembly groove between the connecting plate, the upside of assembly groove be provided with the optical fiber sensor that the connecting plate is connected, optical fiber sensor's top is provided with the protection casing that opens and shuts. This application novel in design, simple structure, convenient to use not only can clear up blade and optical fiber sensor before detecting, can detect whether target in place the blade through optical fiber sensor moreover to give the system with the signalling that detects, calculate blade wearing and tearing volume by the system, make testing result have the characteristics that the precision is high, stability is good, the security is high, and can adapt to the blade height finding of the different models of different producers.

Description

Non-contact height measuring mechanism for main shaft blade of scribing machine

Technical Field

The application relates to the field of scribing machines, in particular to a non-contact height measuring mechanism for a main shaft blade of a scribing machine.

Background

Dicing saw is also called wafer cutting machine, and is mainly used for dicing semiconductor wafers, integrated circuits, QFNs, light emitting diodes, LED chips, solar cells, electronic substrates and other electronic elements.

During processing, the system controls the Z axis to drive the main shaft blade to descend so as to cut and process the wafer, the cutter is continuously worn during the processing, and the Z axis returns to a fixed certain position after each processing is finished. If the amount of tool wear is not measured, the corresponding cutting depth will slowly become shallow, resulting in the wafer not being cut through. Therefore, the abrasion condition of the cutter needs to be known, so that the system can control the cutter to descend to a proper position for compensation, and the cut-through depth of the wafer is ensured to be constant; and therefore, a corresponding blade wear amount detection operation is required.

The traditional blade abrasion detection adopts a contact type height measurement method, a certain voltage is connected between a blade and a workbench, an A/D conversion circuit and an R/V conversion circuit are connected, whether the blade is in contact with the workbench or not is judged finally in a mode of calculating resistance through voltage change, and then the abrasion loss of a cutter is calculated through a calculation formula. On one hand, the height measurement method has the defects that the resistance values of different types of blades of different manufacturers are often different greatly, the span from dozens of ohms to hundreds of kiloohms is very large, and the high-precision height measurement can still be difficult to realize when the blades with large resistance and small resistance are switched; on the other hand, the air spindle generates induced electromotive force in the spindle metal shell, and is easily influenced by surrounding environments such as water and air, so that the voltage between the blade and the workbench is changed by a certain value when the blade is not in contact with the workbench, and the accuracy of height measurement is influenced. Or a loop is formed when the blade is contacted with the workbench, the current signal is converted into a falling edge signal or a rising edge signal through the conversion circuit, the system captures the pulse signal, so that whether the blade is contacted with the workbench or not is judged, and the abrasion loss of the blade is calculated through the pulse position. Whatever the way, the principle is contact height measurement. The disadvantages of this method are: (1) The blade and the workbench are damaged to a certain degree at the height measurement contact point; (2) If the system reaction is not timely or the signal is out of order after the contact, the blade cannot be lifted in time, the blade can cut into the workbench, the machine is seriously damaged, and safety accidents are caused.

SUMMERY OF THE UTILITY MODEL

The application aims to provide a scribing machine spindle blade non-contact height measuring mechanism, which has the advantages of high precision, good stability and high safety.

In order to achieve the above purpose, the present application provides the following technical solutions:

a non-contact height measuring mechanism for a main shaft blade of a dicing saw comprises a support frame connected with a gantry frame of the dicing saw, wherein the support frame is installed on a support assembly, a detection assembly is arranged on the support assembly and comprises a vertical support block and connecting plates arranged on two sides of the support block, an assembly groove is formed between the connecting plates, an optical fiber sensor connected with the connecting plates is arranged on the upper side of the assembly groove, an open-close protective cover is arranged at the top of the optical fiber sensor and connected with a driving assembly arranged on the support assembly, an optical fiber routing block connected with the support block is arranged on the lower side of the assembly groove, and a cleaning pipe and an air blowing pipe facing the optical fiber sensor are arranged at the top of the support block.

Realize above-mentioned technical scheme, when carrying out the height finding, open the protection casing of optical fiber sensor top by drive assembly earlier, then by the Z axle actuating mechanism on the dicing saw, drive main shaft and the epaxial blade of owner move down, when treating that the blade moves optical fiber sensor's upside, spray water to the blade through external water source by the scavenge pipe, scrap when grinding on the clearance blade, treat after the blade washs, spray air on the blade through external air supply by the gas blow pipe, with remaining water stain and dust on clearance blade and the optical fiber sensor, so that when the blade moves down, can be through the height of the accurate measurement blade of optical fiber sensor.

As a preferred scheme of this application, the top of connecting plate is provided with the connecting block that exceeds the supporting shoe, the connecting block with optical fiber sensor is connected.

Realize above-mentioned technical scheme for locate the top of detecting component with optical fiber sensor, so that optical fiber sensor can be better the height of detection main shaft blade.

As a preferred scheme of this application, the both sides of optic fibre walk the line piece be provided with the trough that the connecting plate is connected.

The technical scheme is realized so that the optical fiber sensors on two sides can be conveniently wired in the wiring grooves on two sides of the optical fiber wiring block.

As a preferred scheme of the application, the supporting component comprises a transverse supporting block and a supporting plate, wherein the transverse supporting block is arranged at the top of the supporting frame and connected with the supporting block, and the supporting plate is vertically arranged on the transverse supporting block.

In order to realize the technical scheme, the design of the transverse supporting block is used for installing the supporting plate on one hand and the supporting block on the other hand, and the design of the supporting plate is used for installing the driving component.

As a preferred embodiment of the present application, the driving assembly includes a driving member disposed on one side of the supporting plate and a driving rod disposed on the other side of the supporting plate and connected to the output shaft of the driving member and the protecting cover.

Realize above-mentioned technical scheme, pass through the actuating lever that the output shaft drive is connected by the driving piece and rotate, make the protection casing that the actuating lever is connected open or close.

As an priority scheme of this application, the draw-in groove has been seted up to the bottom of actuating lever, the centre of draw-in groove be provided with driving piece output shaft's assembly groove, the downside of draw-in groove is provided with the locking hole.

According to the technical scheme, the assembly groove in the clamping groove is clamped on the output shaft, and then the driving rods on two sides of the clamping groove are locked on two sides of the output shaft through screws in the locking holes.

As a preferred scheme of the application, two groups of pipeline mounting holes are arranged on the supporting block, wherein one group of pipeline mounting holes are provided with cleaning pipes, and the other group of pipeline mounting holes are provided with air blowing pipes; each group of pipeline mounting holes comprises a connecting hole transversely arranged on the supporting block, an assembling hole arranged on the upper side of the connecting hole and used for mounting a cleaning pipe or an air blowing pipe, and a through hole arranged on the lower side of the connecting hole and penetrating through the bottom of the supporting block; and locking holes connected with the assembling holes are formed in the two sides of the supporting block.

After the technical scheme is realized, the cleaning pipe and the air blowing pipe are arranged in the assembly hole, the cleaning pipe and the air blowing pipe are adjusted to preset positions, the cleaning pipe and the air blowing pipe are fixed on the supporting block by utilizing screws installed on the locking hole, the connecting hole is provided with the plug for communicating the assembly hole with the through hole, and the bottom of the through hole is provided with a threaded connector for installing a water pipe joint and an air pipe joint.

The beneficial effect of this application is:

the non-contact height measuring mechanism for the main shaft blade of the dicing saw in the embodiment comprises a supporting frame connected with a gantry rack of the dicing saw, wherein the supporting frame is installed on a supporting component, a detection component is arranged on the supporting component and comprises a vertical supporting block and connecting plates arranged on two sides of the supporting block, an assembly groove is formed between the connecting plates on two sides, an optical fiber sensor connected with the connecting plates is arranged on the upper side of the assembly groove, an open-close protective cover is arranged at the top of the optical fiber sensor and connected with a driving component arranged on the supporting component, an optical fiber wiring block connected with the supporting block is arranged on the lower side of the assembly groove, and a cleaning pipe and an air blowing pipe facing the optical fiber sensor are arranged at the top of the supporting block. This application modern design, simple structure, convenient to use not only can clear up blade and optical fiber sensor before detecting, can detect whether target in place through optical fiber sensor moreover to give the system with the signalling that detects, calculate blade wearing and tearing volume by the system, make the testing result have the characteristics that the precision is high, stability is good, the security is high, and can adapt to the blade height finding of the different models of different producers.

Drawings

Fig. 1 is a schematic diagram relating to the present application.

Fig. 2 is a schematic view of the structure to which the present application relates.

Fig. 3 is a schematic view of a detection assembly according to the present application.

Fig. 4 is a schematic view of a support block to which the present application relates.

In the figure: 1. a support frame; 2. a support assembly; 201. a transverse support block; 202. a support plate; 3. a detection component; 301. a supporting block; 3011. connecting holes; 3012. an assembly hole; 3013. a through hole; 302. a connecting plate; 303. an optical fiber routing block; 304. a wiring groove; 4. an optical fiber sensor; 5. a protective cover; 6. a drive assembly; 601. a drive member; 7. cleaning the tube; 8. an air blowing pipe; 9. a drive rod; 901. a card slot; 902. assembling the groove; 903. a locking hole; 904. and a limiting block.

Detailed Description

The technical solutions in the embodiments of the present application will be described clearly and completely with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only some embodiments of the present application, and not all embodiments. All other embodiments obtained by a person of ordinary skill in the art based on the embodiments in the present application without making any creative effort belong to the protection scope of the present application.

Example (b):

the utility model provides a scribing machine main shaft blade non-contact height finding mechanism, refer to fig. 1, fig. 2, fig. 3 and fig. 4, including installing in support frame 1 of scribing machine gantry rack one side, supporting component 2 is installed at the top of support frame 1, install detection element 3 on the supporting component 2, detection element 3 includes supporting shoe 301 of vertical installation and installs the connecting plate 302 in supporting shoe 301 both sides, be provided with the assembly groove between the connecting plate 302 of both sides, the optical fiber sensor 4 of being connected with connecting plate 302 is installed to the upside of assembly groove, protection casing 5 is installed at the top of optical fiber sensor 4, protection casing 5 is connected with the drive assembly 6 of installing on supporting component 2, drive assembly 6 is used for driving protection casing 5, make protection casing 5 open and shut in the top of optical fiber sensor 4, in order to open or close optical fiber sensor 4, the optical fiber routing block 303 of being connected with supporting shoe 301 is installed to the assembly groove downside, the trough 304 of being connected with connecting plate 302 is seted up to the both sides of optical fiber sensor block 303 is walked the line, in order to walk the line optical fiber sensor 4, in order to facilitate optical fiber sensor 4 and blade clearance, install purge tube 7 and blow pipe 8 towards optical fiber sensor 301 at the top of supporting shoe 301. In this embodiment, in order to facilitate detecting the height of the spindle blade, the top of the connecting plate 302 is provided with a connecting block higher than the supporting block 301, the connecting block is used for installing the optical fiber sensors 4 for connection, and the optical fiber sensors 4 are provided with two connecting plates 302 respectively located on two sides, and the heights of the two optical fiber sensors 4 are the same. In other embodiments, the optical fiber sensor 4 can be installed on the two side connection plates 302 in a high-low manner, the optical fiber sensor 4 at the high position can be used for opening the pipeline connected with the cleaning pipe 7 when detecting the blade, and the optical fiber sensor 4 at the low position can be used for closing the pipeline connected with the cleaning pipe 7 and opening the pipeline connected with the air blowing pipe 8 when detecting the blade, and can be used for detecting the height of the blade.

Referring to fig. 1 and 2, the support assembly 2 includes a lateral support block 201 disposed at the top of the support frame 1 and connected to the support block 301, and a support plate 202 vertically mounted on the lateral support block 201. In the present embodiment, the transverse support block 201 is designed for mounting the support plate 202 on the one hand and the support block 301 on the other hand, while the support plate 202 is designed for mounting the drive assembly 6.

Referring to fig. 1 and 2, the driving assembly 6 includes a driving member 601 mounted on one side of the supporting plate 202 and a driving rod 9 mounted on the other side of the supporting plate 202, a locking groove 901 is formed on one side of the bottom of the driving rod 9, an assembling groove 902 connected to an output shaft of the driving member 601 is formed in the middle of the locking groove 901, and a locking hole 903 is formed on the lower side of the locking groove 901. In this embodiment, utilize the assembly groove 902 card on draw-in groove 901 on the output shaft, then through the screw in the locking hole 903, with the actuating lever 9 locking of its draw-in groove 901 both sides in the both sides of output shaft to fix actuating lever 9 on the output shaft of actuating lever 601, in addition, actuating lever 601 adopts revolving cylinder, revolving cylinder is when using, through the actuating lever 9 that the output shaft drive is connected, drive the protection casing 5 of connecting by actuating lever 9 and open or close, for the convenience of the rotation limit of actuating lever 9, stopper 904 is installed to one side of actuating lever 9. In other embodiments, the drive 601 may employ a servo motor.

Referring to fig. 2, 3 and 4, two sets of pipeline mounting holes are formed in the supporting block 301, wherein one set of pipeline mounting holes is provided with the cleaning pipe 7, and the other set of pipeline mounting holes is provided with the blowing pipe 8; each group of pipeline mounting holes comprise connecting holes 3011 transversely arranged on the supporting block 301, assembling holes 3012 arranged on the upper sides of the connecting holes 3011 and used for mounting cleaning pipes 7 or air blowing pipes 8, through holes 3013 arranged on the lower sides of the connecting holes 3011 and penetrating through the bottom of the supporting block 301, and threaded interfaces arranged at the bottoms of the through holes 3013 and used for mounting water pipe joints and air pipe joints. In this embodiment, the number of the assembly holes 3012 on each group of pipeline mounting holes is two, the two assembly holes correspond to the two sides of the optical fiber sensors 4 and the two sides of the blade on the two sides respectively, the two sides of the supporting block 301 are provided with the locking holes 903 connected with the assembly holes 3012 for screws to lock the cleaning pipe 7 and the blowing pipe 8 in the assembly holes 3012, plugs are installed on one sides of the connecting holes 3011 and the side faces of the supporting block 301 for communicating with the assembly holes 3012 on the same group, specifically, after the cleaning pipe 7 and the blowing pipe 8 are placed in the assembly holes 3012, the cleaning pipe 7 and the blowing pipe 8 are adjusted to preset positions, and then the cleaning pipe is fixed on the supporting block 301 by using the screws installed on the locking holes 903. In other embodiments, the number of the assembly holes 3012 in each group of the pipe installation holes may be set to three, corresponding to both sides of the spindle blade and the optical fiber sensor 4 and the end of the spindle blade, respectively.

Specifically, when in actual use, earlier open the protection casing 5 of optical fiber sensor 4 top by drive assembly 6, then by the Z axle actuating mechanism on the scribing machine, drive main shaft and the epaxial blade of owner move down, when treating that the blade moves optical fiber sensor 4's upside, spray water to the blade through external water source by scavenge pipe 7, scrap when grinding on the clearance blade, after treating that the blade is washd, spray air to the blade through external air supply by gas blow pipe 8, with remaining water stain on clearance blade and the optical fiber sensor 4, so that when the blade moves down, can be through the height of the accurate measurement blade bottom of optical fiber sensor 4.

It will be evident to those skilled in the art that the application is not limited to the details of the foregoing illustrative embodiments, and that the present application may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the application being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Claims

1. The non-contact height measuring mechanism for the main shaft blade of the dicing saw comprises a support frame (1) connected with a gantry frame of the dicing saw, wherein the support frame (1) is installed on a support assembly (2), the support assembly (2) is provided with a detection assembly (3), the non-contact height measuring mechanism is characterized in that the detection assembly (3) comprises a vertical support block (301) and connecting plates (302) arranged on two sides of the support block (301), an assembly groove is formed between the connecting plates (302), an optical fiber sensor (4) connected with the connecting plates (302) is arranged on the upper side of the assembly groove, an opening and closing protective cover (5) is arranged at the top of the optical fiber sensor (4), the protective cover (5) is connected with a driving assembly (6) arranged on the support assembly (2), an optical fiber routing block (303) connected with the support block (301) is arranged on the lower side of the assembly groove, and a cleaning pipe (7) and an air blowing pipe (8) facing the optical fiber sensor (4) are arranged at the top of the support block (301).

2. The non-contact type height measuring mechanism for the main shaft blade of the dicing saw according to claim 1, wherein a connecting block higher than the supporting block (301) is arranged on the top of the connecting plate (302), and the connecting block is connected with the optical fiber sensor (4).

3. The non-contact type height measurement mechanism for the main shaft blade of the dicing saw according to claim 1, wherein the two sides of the optical fiber routing block (303) are provided with routing grooves (304) connected with the connecting plate (302).

4. The non-contact height measuring mechanism of the main shaft blade of the dicing saw according to claim 1, wherein the supporting component (2) comprises a transverse supporting block (201) arranged on the top of the supporting frame (1) and connected with the supporting block (301), and a supporting plate (202) vertically arranged on the transverse supporting block (201).

5. The non-contact type height measuring mechanism for the main shaft blade of the dicing saw according to claim 4, wherein the driving assembly (6) comprises a driving member (601) arranged on one side of the supporting plate (202) and a driving rod (9) arranged on the other side of the supporting plate (202) and connected with the output shaft of the driving member (601) and the protective cover (5).

6. The non-contact height measuring mechanism for the main shaft blade of the dicing saw according to claim 5, wherein a clamping groove (901) is formed in the bottom of the driving rod (9), an assembling groove (902) connected with an output shaft of the driving member (601) is formed in the middle of the clamping groove (901), and a locking hole (903) is formed in the lower side of the clamping groove (901).

7. The non-contact height measuring mechanism for the main shaft blade of the dicing saw as claimed in claim 1, wherein the supporting block (301) is provided with two sets of pipe mounting holes, one set of the pipe mounting holes is provided with the cleaning pipe (7), and the other set of the pipe mounting holes is provided with the blowing pipe (8); each group of pipeline mounting holes comprises a connecting hole (3011) transversely arranged on the supporting block (301), an assembling hole (3012) arranged on the upper side of the connecting hole (3011) and used for mounting a cleaning pipe (7) or an air blowing pipe (8), and a through hole (3013) arranged on the lower side of the connecting hole (3011) and penetrating through the bottom of the supporting block (301); and locking holes (903) connected with the assembling holes (3012) are formed in two sides of the supporting block (301).