CN217980690U - Device for reducing signal background of hydrogen-nitrogen mass spectrometer leak detector - Google Patents

Device for reducing signal background of hydrogen-nitrogen mass spectrometer leak detector Download PDF

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CN217980690U
CN217980690U CN202220850792.1U CN202220850792U CN217980690U CN 217980690 U CN217980690 U CN 217980690U CN 202220850792 U CN202220850792 U CN 202220850792U CN 217980690 U CN217980690 U CN 217980690U
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hydrogen
cover body
working cavity
mass spectrometer
leak detector
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刘雨
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Anhui Nuoyi Technology Co ltd
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Anhui Nuoyi Technology Co ltd
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Abstract

The utility model belongs to the technical field of relate to vacuum leak hunting, a device for reducing hydrogen nitrogen mass spectrometer leak detector signal background is specifically disclosed. The device comprises a hydrogen-nitrogen mass spectrometer leak detector for detecting the air tightness of a workpiece to be detected; the workpiece to be detected is placed in a working cavity of the detection assembly; the working cavity of the detection assembly is communicated with a gas supply assembly for providing hydrogen-nitrogen mixed gas for the detection of a workpiece to be detected; the hydrogen-nitrogen mass spectrometer leak detector is communicated with a working cavity of the detection assembly; the device also comprises a dehydrogenation component; the dehydrogenation component is connected with the detection component and used for removing the original hydrogen in the working cavity of the detection component. The device is simple in structure, can get rid of unnecessary hydrogen in the testing environment moreover, promotes the precision that hydrogen nitrogen mass spectrum leak detector detected.

Description

Device for reducing signal background of hydrogen-nitrogen mass spectrometer leak detector
Technical Field
The utility model belongs to the technical field of relate to vacuum leak hunting, concretely relates to reduce device at hydrogen nitrogen mass spectrometer leak detector signal background.
Background
The mixed gas of 5% hydrogen and 95% nitrogen is a safe non-combustible gas, which is a standard reduction protective gas for steel making, so that the mixed gas is easy to buy and does not need to be mixed by itself. Compared with helium leakage detection, the hydrogen-nitrogen mixed gas leakage detection technology has the greatest advantage of low gas cost which is only about 1/10-1/20 of helium. With the shortage of helium supply and the higher price, the advantage of low cost of the hydrogen-nitrogen mixture is more prominent. The leakage detection principle of the hydrogen-nitrogen mixed gas is as follows: the metal hydride film is permeable only to hydrogen atoms. When the metal surface is heated, the hydrogen molecules are separated into atoms which are adsorbed by the membrane, and the adsorbed hydrogen atoms generate a small voltage which is amplified by the amplifier and transmitted to the indicator.
The background value refers to a relatively stable radiation level or sound volume formed by the environment, and the requirement on the aspect of leak detection sensitivity can be met only by gas with the content as small as possible in the air. The gas with the least content in the air is less in the material gas outlet, so the background pressure is small and the output background current is small.
In the atmosphere, the nitrogen content is about 78.084%, the helium content is about 0.00052%, and the others are about 0.001421%, while the hydrogen content is about 0.00005%, it is seen that the hydrogen content is small, i.e. less than helium, so the background is small and suitable for detection, but because of the water vapor in the atmosphere, the water vapor ionization can also generate hydrogen, so the actual hydrogen background is much higher.
Therefore, no matter in the water vapor in the working cavity of the detection cavity or the water vapor remained on the surface of the detection object, hydrogen is possibly generated under ionization, the extra hydrogen can cause the hydrogen background to be too high in the actual detection, the interference is caused on the detection precision of the hydrogen-nitrogen mass spectrometer leak detector, and the detection result of the product is influenced. Therefore, a solution is urgently needed.
SUMMERY OF THE UTILITY MODEL
For solving the technical problem, the utility model provides a reduce device at hydrogen nitrogen mass spectrometer leak detector signal background, the device is simple structure not only, can get rid of the unnecessary hydrogen among the testing environment moreover, promotes the precision that hydrogen nitrogen mass spectrometer leak detector detected.
In order to achieve the above purpose, the utility model adopts the following technical proposal:
a device for reducing the signal background of a hydrogen-nitrogen mass spectrometer leak detector is characterized by comprising a hydrogen-nitrogen mass spectrometer leak detector for detecting the air tightness of a workpiece to be detected; the workpiece to be detected is placed in a working cavity of the detection assembly; the working cavity of the detection assembly is communicated with a gas supply assembly for providing hydrogen-nitrogen mixed gas for the detection of a workpiece to be detected; the hydrogen-nitrogen mass spectrometer leak detector is communicated with a working cavity of the detection assembly; also includes a dehydrogenation assembly; the dehydrogenation component is connected with the detection component and used for removing the original hydrogen in the working cavity of the detection component.
Preferably, the detection assembly comprises an upper cover body and a lower cover body; the workpiece to be detected is placed between the upper cover body and the lower cover body, one surface of the workpiece to be detected is in fit connection with the upper cover body, and the other surface of the workpiece to be detected is in fit connection with the lower cover body; a notch is formed in the connecting surface of the upper cover body and the workpiece to be detected, the notch is opposite to the workpiece to be detected, and a working cavity of the upper cover body is formed; the connecting surface of the lower cover body and the workpiece to be detected is a concave surface, the concave surface is opposite to the workpiece to be detected, and a working cavity of the lower cover body is formed; the dehydrogenation assembly comprises a first heating wire tube and a second heating wire tube; the first heating wire pipe is arranged in the inner wall of the working cavity of the upper cover body; the second heating wire tube is arranged in the inner wall of the working cavity of the lower cover body.
Preferably, the dehydrogenation assembly further comprises an inert gas displacement valve; one end of the inert gas replacement valve is communicated with the working cavity of the upper cover body and the working cavity of the lower cover body respectively, and the other end of the inert gas replacement valve is communicated with the inert gas high-pressure bottle.
Preferably, the device also comprises a connecting pipe; one end of the connecting pipe is communicated with the working cavity of the lower cover body, and the other end of the connecting pipe is communicated with the hydrogen-nitrogen mass spectrometer leak detector.
Preferably, the side edge of the lower cover body is vertically connected with the side edge of the bottom of the vertical plate; the side edge of the top of the vertical plate is vertically connected with the first horizontal plate; a driving motor is arranged on the first horizontal plate; a driving rod of the driving motor penetrates through the first horizontal plate and then is connected with the upper surface of the second horizontal plate; the lower surface of the second horizontal plate is connected with the top of the upper cover body.
Preferably, the device also comprises two vertical sliding rods; the top ends of the two vertical slide bars are connected with two sides of the bottom end of the first horizontal plate, the bottom ends of the two vertical slide bars are connected with the upper surfaces of two sides of the lower cover body, two ends of the second horizontal plate are sleeved on the two vertical slide bars, and the second horizontal plate drives the upper cover body to synchronously slide up and down in a reciprocating manner along the rod bodies of the vertical slide bars under the driving of the driving rod of the driving motor.
Preferably, the gas supply assembly comprises a hydrogen-nitrogen charging mixed gas valve and a gas exhaust valve communicated with the upper cover body working cavity; and the hydrogen and nitrogen charging mixed gas valve is communicated with the hydrogen and nitrogen mixing gas high-pressure bottle, and the exhaust valve and the hydrogen and nitrogen charging mixed gas valve are both arranged on the first horizontal plate.
Preferably, the device also comprises a vacuum pump which is respectively communicated with the working cavity of the upper cover body and the working cavity of the lower cover body through two connecting pipelines, and the two connecting pipelines are respectively provided with an independent control valve; the first heating wire tube and the second heating wire tube are respectively electrically connected with the intelligent switch; the intelligent hydrogen-nitrogen mass spectrometer is characterized by also comprising a computer, wherein the computer is electrically connected with the intelligent switch, the vacuum pump and the hydrogen-nitrogen mass spectrometer leak detector.
Preferably, automatic zero setting software is arranged in the computer; the automatic zero setting software processes the analog electric signal of the hydrogen-nitrogen mass spectrometer leak detector, and realizes the dynamic zero setting of the signal of the hydrogen-nitrogen mass spectrometer leak detector, thereby improving the sensitivity of the hydrogen-nitrogen mass spectrometer leak detector.
Compared with the prior art, the beneficial effects of the utility model are that:
(1) The utility model discloses a set up first heating wire pipe and second heating wire pipe respectively in the inner wall of the upper cover body and lower cover body working chamber, when examining the work piece and place at the upper cover body under and between the cover body, heat for the working chamber of the upper cover body and the lower cover body respectively through first heating wire pipe and second heating wire pipe for the upper cover body can be evaporated with the inner wall of lower cover body working chamber and the vapor of examining the work piece surface. The problem that redundant hydrogen generated by water vapor ionization during detection interferes with detection is well solved, the structure is simple, and meanwhile, the precision of the detection result of the hydrogen-nitrogen mass spectrometer leak detector is improved.
(2) The utility model discloses a set up inert gas replacement valve to with the one end of inert gas replacement valve and the working chamber intercommunication of the upper shield body, the other end communicates with the inert gas high-pressure bottle, is provided with the discharge valve rather than the working chamber intercommunication simultaneously on the upper shield body. Through setting up like this, after the air in the upper shield body working chamber is heated by first heating wire pipe, the air in the upper shield body working chamber can be replaced out by the inert gas in the inert gas high-pressure bottle for do not have vapor in the inert gas in the upper shield body working chamber of completion replacement, thereby further promoted the precision of hydrogen nitrogen mass spectrometer leak detector testing result.
(3) The utility model discloses a set up the evacuation pump, and the evacuation pump communicates with the working chamber of the upper shield body working chamber and the lower cover body respectively through two connecting tubes, all is provided with independent control flap simultaneously on two connecting tubes. After the air in the lower cover body working cavity is heated by the second heating wire tube, the air in the upper cover body working cavity can be vacuumized by the vacuum pump, so that the lower cover body working cavity in a vacuum state does not have water vapor which interferes a detection result, and the accuracy of the detection result of the hydrogen-nitrogen mass spectrometer leak detector is further improved.
(4) The utility model discloses a set up the computer to be connected the computer with intelligent switch, evacuation pump, the equal electricity of hydrogen nitrogen mass spectrum leak detector, thereby realized automated processing, when waiting to examine the work piece and accomplish and examine time measuring, can obtain the result fast, thereby promoted the detection efficiency of device.
(5) The utility model discloses a be provided with the auto-zero software in the computer, handle the analog signal of telecommunication of hydrogen nitrogen mass spectrometer leak detector through the auto-zero software, realize the signal developments zero clearing of hydrogen nitrogen mass spectrometer leak detector, not only promote the sensitivity of hydrogen nitrogen mass spectrometer leak detector, further promoted the precision of hydrogen nitrogen mass spectrometer leak detector testing result simultaneously.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a schematic structural diagram of the detection assembly and the dehydrogenation assembly of the present invention.
Fig. 3 is a cross-sectional view of the detection assembly and the dehydrogenation assembly of the present invention.
The utility model discloses each reference numeral is as follows with the actual corresponding relation of part name:
a-workpiece to be detected 10-hydrogen nitrogen mass spectrum leak detector
21-driving motor 22-charging nitrogen mixed gas valve 23-exhaust valve 24-second horizontal plate
25-inert gas replacement valve 26-connecting pipe 27-lower cover body 28-upper cover body
29-first horizontal plate 31-first heating wire tube 32-second heating wire tube
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts all belong to the protection scope of the present invention.
Example 1
The device for reducing the signal background of the hydrogen-nitrogen mass spectrometer leak detector is characterized by comprising a hydrogen-nitrogen mass spectrometer leak detector 10 for detecting the air tightness of a workpiece A to be detected, wherein the workpiece A to be detected is placed in a working cavity of a detection assembly when being detected, the working cavity of the detection assembly is communicated with an air supply assembly, meanwhile, the hydrogen-nitrogen mass spectrometer leak detector 10 is communicated with the working cavity of the detection assembly, and a hydrogen-nitrogen mixed gas is injected into the working cavity of the detection assembly when the air supply assembly is used, so that the detection of the workpiece A to be detected by the hydrogen-nitrogen mixed gas is realized. Also includes a dehydrogenation assembly; the dehydrogenation component is connected with the detection component and used for removing the original hydrogen in the working cavity of the detection component, so that the hydrogen background in the working cavity of the detection component is reduced, and the precision of the hydrogen-nitrogen mass spectrometer leak detector is improved.
The detection assembly consists of a driving motor 21, a second horizontal plate 24, a connecting pipe 26, a lower cover body 27, an upper cover body 28 and a first horizontal plate 29; the side edge of the lower cover body 27 is vertically connected with the bottom side edge of the vertical plate; and the top side of the vertical plate is connected perpendicularly to the first horizontal plate 29. A driving motor 21 is arranged on the first horizontal plate 29, and a driving rod of the driving motor 21 passes through the first horizontal plate 29 and then is connected with the upper surface of the second horizontal plate 24; while the lower surface of the second horizontal plate 24 is attached to the top of the upper housing 28.
The detection assembly further comprises two vertical sliding rods, the top ends of the two vertical sliding rods are connected with the two sides of the bottom end of the first horizontal plate 29, the bottom ends of the two vertical sliding rods are connected with the upper surfaces of the two sides of the lower cover body 27, the two ends of the second horizontal plate 24 are sleeved on the two vertical sliding rods, and the second horizontal plate 24 drives the upper cover body 28 to synchronously slide up and down in a reciprocating mode along the rod bodies of the vertical sliding rods under the driving of the driving rod of the driving motor 21.
A workpiece A to be detected is placed between an upper cover body 28 and a lower cover body 27, one surface of the workpiece A to be detected is attached to the upper cover body 28, and the other surface is attached to the lower cover body 27. Meanwhile, a notch is formed on the connecting surface of the upper cover body 28 and the workpiece a to be detected, the notch is opposite to the workpiece a to be detected, and a working cavity of the upper cover body 28 is formed. The connecting surface of the lower mask body 27 to the workpiece a to be inspected is set to be a concave surface, which is opposed to the workpiece a to be inspected, and forms a working chamber of the lower mask body 27.
The dehydrogenation module is composed of an inert gas replacement valve 25, a first heating wire pipe 31, and a second heating wire pipe 32. A first heating wire tube 31 is installed in the inner wall of the working chamber of the upper enclosure 28, and a second heating wire tube 32 is installed in the inner wall of the working chamber of the lower enclosure 27. The arrangement well solves the problem that redundant hydrogen generated by water vapor ionization in detection interferes in detection, has a simple structure, and improves the precision of the detection result of the hydrogen-nitrogen mass spectrometer leak detector 10.
One end of the inert gas replacement valve 25 is respectively communicated with the working cavity of the upper cover 28 and the working cavity of the lower cover 27 through two independent connecting pipes, the other end is communicated with an inert gas high-pressure bottle, and the two independent connecting pipes are respectively provided with an opening and closing valve. Through the arrangement, after the air in the working cavity of the upper cover body 28 is heated by the first heating wire pipe 31, the air in the working cavity of the upper cover body 28 can be replaced by the inert gas in the inert gas high-pressure bottle, so that no water vapor exists in the inert gas in the working cavity of the upper cover body 28 after replacement is completed, and the precision of the detection result of the hydrogen-nitrogen mass spectrometer leak detector 10 is further improved.
The device also comprises a vacuum pumping pump which is respectively communicated with the working cavity of the upper cover body 28 and the working cavity of the lower cover body 27 through two connecting pipelines, and the two connecting pipelines are respectively provided with an independent control valve; after the air in the working cavity of the lower cover body 27 is heated by the second heating wire tube 32, the air in the working cavity of the upper cover body 27 can be pumped by a vacuum pump, so that the water vapor which interferes the detection result does not exist in the working cavity of the lower cover body 27 in a vacuum state, and the precision of the detection result of the hydrogen-nitrogen mass spectrometer leak detector 10 is further improved.
The first heating wire tube 31 and the second heating wire tube 32 are respectively electrically connected with the intelligent switch; the system also comprises a computer which is electrically connected with the intelligent switch, the vacuum pump and the hydrogen-nitrogen mass spectrometer leak detector 10.
The gas supply assembly comprises a hydrogen-filled nitrogen mixed gas valve 22 and a vent valve 23 communicated with the working cavity of the upper cover body 28; the charged mixed gas valve 22 is communicated with the hydrogen-nitrogen mixed gas high-pressure bottle, and the exhaust valve 23 and the charged mixed gas valve 22 are both installed on the first horizontal plate 29.
Also included is a connecting tube 26; one end of the connecting pipe 26 is communicated with the working cavity of the lower cover body 27, and the other end is communicated with the hydrogen-nitrogen mass spectrometer leak detector 10.
Automatic zero setting software is arranged in the computer; the automatic zero setting software processes the analog electrical signal of the hydrogen-nitrogen mass spectrometer leak detector 10, and realizes the dynamic zero setting of the signal of the hydrogen-nitrogen mass spectrometer leak detector 10, so that the sensitivity of the hydrogen-nitrogen mass spectrometer leak detector 10 is improved.
Example 2
The utility model discloses concrete operating procedure as follows:
s1: the computer controls the driving motor 21 to be started, the driving rod of the driving motor 21 drives the upper cover body 28 connected below the second horizontal plate 24 to move upwards along the rod body of the vertical slide bar, and after an operator places a workpiece A to be detected on the lower cover body 27, the driving rod drives the upper cover body 28 to move downwards along the rod body of the vertical slide bar until the workpiece A to be detected is in fit connection with the rod body of the vertical slide bar;
s2: the computer starts the intelligent switch, and a first heating wire tube 31 arranged in the inner wall of the working cavity of the upper cover body 28 heats the working cavity of the upper cover body 28, so that water vapor in the working cavity of the upper cover body 28 is evaporated; the second heating wire tube 32 installed in the inner wall of the working cavity of the lower cover 27 heats the working cavity of the lower cover 27, so that water vapor in the working cavity of the lower cover 27 is evaporated;
s3: opening a valve on a pipeline for communicating the vacuum pump with the working cavity of the lower cover body 27, and vacuumizing the heated air in the working cavity of the lower cover body 27; closing a valve on a pipeline for communicating the vacuum pump with the working cavity of the lower cover body 27, opening the inert gas replacement valve 25, and simultaneously opening an opening and closing valve on a connecting pipe between the inert gas replacement valve 25 and the working cavity of the lower cover body 27, wherein the inert gas in the inert gas high-pressure bottle enters the working cavity of the lower cover body 27;
s4: closing the opening and closing valve on the connecting pipe of the inert gas replacement valve 25 and the working cavity of the lower cover body 27, opening the opening and closing valve on the connecting pipe of the inert gas replacement valve 25 and the working cavity of the upper cover body 28, opening the exhaust valve 23, allowing the inert gas in the inert gas high-pressure bottle to enter the working cavity of the upper cover body 28, extruding the air in the working cavity of the upper cover body 28 by the inert gas and discharging the air along the exhaust valve 23 until the air in the working cavity of the upper cover body 28 is replaced;
s5: closing the exhaust valve 23, opening a valve on a pipeline for communicating the vacuum pump with the working cavity of the upper cover body 28, and simultaneously opening the vacuum pump to vacuumize the inert gas in the working cavity of the upper cover body 28;
s6: and (3) opening a hydrogen-nitrogen charging mixed gas valve 22, enabling the hydrogen-nitrogen mixed gas in the hydrogen-nitrogen mixed gas high-pressure bottle to enter the working cavity of the upper cover body 28, simultaneously opening the hydrogen-nitrogen mass spectrometer leak detector 10, and detecting the working cavity of the lower cover body 27 by the hydrogen-nitrogen mass spectrometer leak detector 10.
Of course, it will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, but is also intended to cover the same or similar structures that may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present specification describes embodiments, not every embodiment includes only a single embodiment, and such description is for clarity purposes only, and it is to be understood that all embodiments may be combined as appropriate by one of ordinary skill in the art to form other embodiments as will be apparent to those of skill in the art from the description herein.
The technology, shape and construction parts which are not described in detail in the present invention are known technology.

Claims (9)

1. A device for reducing the signal background of a hydrogen-nitrogen mass spectrometer leak detector is characterized by comprising a hydrogen-nitrogen mass spectrometer leak detector (10) for detecting the air tightness of a workpiece (A) to be detected; the workpiece (A) to be detected is placed in a working cavity of the detection assembly; the working cavity of the detection assembly is communicated with a gas supply assembly for providing hydrogen-nitrogen mixed gas for detection of a workpiece (A) to be detected; the hydrogen-nitrogen mass spectrometer leak detector (10) is communicated with a working cavity of the detection assembly; also includes a dehydrogenation assembly; the dehydrogenation component is connected with the detection component and used for removing the original hydrogen in the working cavity of the detection component.
2. The apparatus of claim 1, wherein said detection assembly comprises an upper shield body (28) and a lower shield body (27); the workpiece (A) to be detected is placed between the upper cover body (28) and the lower cover body (27), one surface of the workpiece (A) to be detected is attached and connected with the upper cover body (28), and the other surface of the workpiece (A) to be detected is attached and connected with the lower cover body (27); a notch is formed in the connecting surface of the upper cover body (28) and the workpiece (A) to be detected, the notch is opposite to the workpiece (A) to be detected, and a working cavity of the upper cover body (28) is formed; the connecting surface of the lower cover body (27) and the workpiece (A) to be detected is a concave surface, the concave surface is opposite to the workpiece (A) to be detected, and a working cavity of the lower cover body (27) is formed; the dehydrogenation assembly comprises a first heating wire tube (31) and a second heating wire tube (32); the first heating wire pipe (31) is arranged in the inner wall of the working cavity of the upper cover body (28); the second heating wire tube (32) is arranged in the inner wall of the working cavity of the lower cover body (27).
3. The apparatus of claim 2, wherein said dehydrogenation module further comprises an inert gas displacement valve (25); one end of the inert gas replacement valve (25) is communicated with the working cavity of the upper cover body (28) and the working cavity of the lower cover body (27) respectively, and the other end of the inert gas replacement valve is communicated with an inert gas high-pressure bottle.
4. An apparatus for reducing signal background in a hydrogen-nitrogen mass spectrometer leak detector as claimed in claim 2 or 3, further comprising a connecting tube (26); one end of the connecting pipe (26) is communicated with the working cavity of the lower cover body (27), and the other end of the connecting pipe is communicated with the hydrogen-nitrogen mass spectrometer leak detector (10).
5. The device for reducing the signal background of the hydrogen-nitrogen mass spectrometer leak detector as claimed in claim 4, wherein the side edge of the lower cover body (27) is vertically connected with the bottom side edge of the vertical plate; the top side edge of the vertical plate is vertically connected with a first horizontal plate (29); a driving motor (21) is arranged on the first horizontal plate (29); a driving rod of the driving motor (21) penetrates through the first horizontal plate (29) and then is connected with the upper surface of the second horizontal plate (24); the lower surface of the second horizontal plate (24) is connected with the top of the upper cover body (28).
6. The device for reducing the signal background of the hydrogen-nitrogen mass spectrometer leak detector as claimed in claim 5, further comprising two vertical slide bars; the top ends of the two vertical slide bars are connected with two sides of the bottom end of the first horizontal plate (29), the bottom ends of the two vertical slide bars are connected with the upper surfaces of two sides of the lower cover body (27), two ends of the second horizontal plate (24) are sleeved on the two vertical slide bars, and the second horizontal plate (24) synchronously drives the upper cover body (28) to slide up and down along the rod body of the vertical slide bar in a reciprocating mode under the driving of the driving rod of the driving motor (21).
7. The device for reducing the signal background of the hydrogen-nitrogen mass spectrometer leak detector according to claim 6, wherein the gas supply assembly comprises a hydrogen-nitrogen charging mixed gas valve (22) and a gas exhaust valve (23) communicated with the working chamber of the upper cover body (28); and the hydrogen and nitrogen charging mixed gas valve (22) is communicated with the hydrogen and nitrogen mixed gas high-pressure bottle, and the exhaust valve (23) and the hydrogen and nitrogen charging mixed gas valve (22) are both arranged on the first horizontal plate (29).
8. The device for reducing the signal background of the hydrogen-nitrogen mass spectrometer leak detector according to claim 7, further comprising a vacuum pump, wherein the vacuum pump is respectively communicated with the working cavity of the upper cover body (28) and the working cavity of the lower cover body (27) through two connecting pipelines, and the two connecting pipelines are respectively provided with an independent control valve; the first heating wire tube (31) and the second heating wire tube (32) are respectively electrically connected with the intelligent switch; the system also comprises a computer, wherein the computer is electrically connected with the intelligent switch, the vacuum pump and the hydrogen-nitrogen mass spectrometer leak detector (10).
9. The apparatus according to claim 8, wherein auto-zero software is provided in the computer; the automatic zero setting software processes the analog electric signal of the hydrogen-nitrogen mass spectrometer leak detector (10) to realize the dynamic zero setting of the signal of the hydrogen-nitrogen mass spectrometer leak detector (10), thereby improving the sensitivity of the hydrogen-nitrogen mass spectrometer leak detector (10).
CN202220850792.1U 2022-04-12 2022-04-12 Device for reducing signal background of hydrogen-nitrogen mass spectrometer leak detector Active CN217980690U (en)

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CN202220850792.1U CN217980690U (en) 2022-04-12 2022-04-12 Device for reducing signal background of hydrogen-nitrogen mass spectrometer leak detector

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Application Number Priority Date Filing Date Title
CN202220850792.1U CN217980690U (en) 2022-04-12 2022-04-12 Device for reducing signal background of hydrogen-nitrogen mass spectrometer leak detector

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