CN217902056U - Four-fan device for beam detection - Google Patents
Four-fan device for beam detection Download PDFInfo
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- CN217902056U CN217902056U CN202221998575.3U CN202221998575U CN217902056U CN 217902056 U CN217902056 U CN 217902056U CN 202221998575 U CN202221998575 U CN 202221998575U CN 217902056 U CN217902056 U CN 217902056U
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Abstract
The utility model discloses a four devices for beam detects includes: the flange piece is arranged in the beam pipeline; the detection piece is arranged in the flange piece and used for bearing beam impact and changing the beam passing posture; the detection piece consists of a plurality of detection copper blocks; the detection copper blocks are provided with wedge angles which are mutually adaptive, so that the detection copper blocks surround a unique outlet and are not in contact with each other, and when the beam passes through the detection piece, the beam is blocked by the detection copper blocks and only passes through the unique outlet. The utility model discloses a detection piece intercommunication detector that comprises a plurality of detection copper billet accomplishes the detection achievement to the line current, through the angle of contract that is equipped with mutual adaptation on a plurality of detection copper billets, make a plurality of detection copper billets enclose into only export, and each other contactless, when the line current passes the detection piece, the line current is blockked by a plurality of detection copper billets, only pass through from only exporting, not only satisfied the detection needs, and make the line current only pass through from only exporting in the testing process, make during the wafer irradiation, it is more even.
Description
Technical Field
The utility model relates to a beam current detection area specifically is a four devices for beam current detects.
Background
Various beams are widely applied to the fields of particle accelerators, medical treatment, chip irradiation modification, nuclear physics research, electron microscopes, controlled nuclear fusion, nuclear fuel treatment and the like, and play more and more important roles in many aspects.
Taking the patent number CN 204666822U as an example, it discloses and an improved deflection beam current measuring system, by designing a center area deflection plate, and uniformly arranging magnets and D-type boxes around the center area deflection plate, the magnets are connected with stripping targets, the center of the center area deflection plate is provided with a measuring device, the measuring device leads a measuring line to the stripping target, the stripping target achieves the detection effect by the way of connecting the conversion box and the PLC controller, however, during the detection, the beam current easily irradiates the wafer through the gap between the magnets and the D-type boxes, so that the wafer irradiation is not uniform enough.
Therefore, it is a problem to be solved at present to provide a detection device capable of detecting beam flow and deflection angle direction and simultaneously performing uniform irradiation on a wafer.
SUMMERY OF THE UTILITY MODEL
Utility model purpose: the four-fan device for beam detection is provided to solve the problems in the prior art.
The technical scheme is as follows: a four-fan apparatus for beam detection, comprising:
the flange piece is arranged in the beam pipeline;
the detection piece is arranged in the flange piece and used for bearing beam impact and changing the beam passing posture;
the detection piece consists of a plurality of detection copper blocks;
the plurality of detection copper blocks are provided with wedge angles which are mutually matched, so that the plurality of detection copper blocks surround a unique outlet and are not in contact with each other, and when the beam passes through the detection piece, the beam is blocked by the plurality of detection copper blocks and only passes through the unique outlet.
The utility model discloses a detection piece intercommunication detector that comprises a plurality of detection copper billet accomplishes the detection achievement to the line current, through the angle of contract that is equipped with mutual adaptation on a plurality of detection copper billets, make a plurality of detection copper billets enclose into only export, and each other contactless, when the line current passes the detection piece, the line current is blockked by a plurality of detection copper billets, only pass through from only exporting, not only satisfied the detection needs, and make the line current only pass through from only exporting in the testing process, make during the wafer irradiation, it is more even.
Due to the detection requirement, when a plurality of copper blocks are contacted with each other, the copper blocks are mutually conducted, the beam current strikes the copper blocks, and when the copper blocks are mutually conducted, the detection effect is influenced;
therefore, the application relates to a wedge angle, so that a plurality of copper blocks for detection are compact in structure and can be installed in a flange piece, and the flange piece can be installed in a beam pipeline; meanwhile, mutual contact among a plurality of detection copper blocks is avoided, mutual conduction among the detection copper blocks is avoided, and then the detection effect of beam current is prevented from being influenced.
Meanwhile, the wedge angle is designed, so that when the plurality of detection copper blocks are used, the detection copper blocks surround a unique outlet, the beam passes through the unique outlet and irradiates the wafer, and the wafer irradiation is more uniform;
when the detecting piece is used, due to the wedge angle, even if gaps are reserved among the detecting copper blocks, the detecting copper blocks are not in contact with each other, due to the wedge angle design, when the detecting piece is used, beam current can only pass through the only outlet, and the rest part of the detecting piece is blocked by the detecting copper blocks.
In a further embodiment, the side part of the flange part is communicated with a detection column, and the end part of the detection column is provided with a detection joint.
In a further embodiment, the plurality of detection copper blocks are respectively connected with a detection cable, and the detection cable penetrates through the detection column to be connected with the detection joint.
In a further embodiment, a ceramic cushion layer is padded between the plurality of detection copper blocks and the flange piece;
and the plurality of detection copper blocks are connected with the flange piece through ceramic bolts.
In a further embodiment, the detection junction is externally connected to a detector.
The detector can be selected in the prior art and is mainly used for detecting the beam flux on a plurality of detection copper blocks.
Has the advantages that: the utility model discloses a four fan devices for line detection, the utility model discloses a detection piece intercommunication detector of constituteing by a plurality of detection copper billets accomplishes the detection achievement to the line, through the angle of contract that is equipped with mutual adaptation on a plurality of detection copper billets, make a plurality of detection copper billets enclose into only export, and each other contactless, when the line passes the detection piece, the line is blockked by a plurality of detection copper billets, only pass through from only export, not only satisfied the detection needs, and make the line only pass through from only export in the testing process, make the wafer irradiation, and is more even.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a schematic view of a flange member of the present invention.
Fig. 3 is a schematic view of the detecting member of the present invention.
Fig. 4 is a schematic view of the working state of the detector of the present invention.
Fig. 5 is a schematic diagram of the structure of the copper block detection of the utility model.
The reference signs are:
1. a flange member; 2. a detection member; 21. a ceramic bolt; 22. a ceramic cushion layer; 23. a first detection copper block; 24. a second detection copper block; 25. thirdly, detecting the copper block; 26. fourthly, detecting a copper block; 3. a detection column; 4. and detecting the joint.
Detailed Description
The present application relates to a four-fan apparatus for beam detection, which is explained in detail by the following embodiments.
A four-fan apparatus for beam detection, comprising:
the flange part 1 is arranged in the beam pipeline;
the detection piece 2 is arranged in the flange piece 1 and used for bearing beam impact and changing the beam passing posture;
the detection piece 2 consists of a plurality of detection copper blocks;
the detecting copper blocks are provided with wedge angles which are mutually matched, so that the detecting copper blocks surround a unique outlet and are not in contact with each other, and when the beam passes through the detecting piece 2, the beam is blocked by the detecting copper blocks and only passes through the unique outlet.
Due to detection requirements, when a plurality of copper blocks are contacted with each other, the copper blocks are mutually conducted, beam current is applied to the copper blocks, and when the copper blocks are mutually conducted, the detection effect is influenced;
therefore, the application relates to a wedge angle, so that a plurality of copper blocks to be detected are compact in structure and can be arranged in the flange part 1, and the flange part 1 can be arranged in a beam pipeline; meanwhile, mutual contact among a plurality of detection copper blocks is avoided, mutual conduction among the detection copper blocks is avoided, and then the detection effect of beam current is prevented from being influenced.
Meanwhile, the wedge angle is designed, so that when the plurality of detection copper blocks are used, the detection copper blocks surround a unique outlet, the beam passes through the unique outlet and irradiates the wafer, and the wafer irradiation is more uniform;
when the detection piece 2 is used, in order to ensure accurate detection effect, gaps need to be reserved among the detection copper blocks, so that the detection copper blocks are not in contact with each other, and at the moment, except for a specified outlet, part of beam current can irradiate the wafer through the gaps, so that the wafer irradiation is not uniform enough, and finished products are affected;
however, due to the design of the wedge angle, a slope is formed, so that when the detection piece 2 is used (namely when the detection piece 2 is looked at right side), only a unique outlet is reserved in the detection piece 2, and due to the fact that the gap cannot be seen from the view angle relation, the beam can only pass through the unique outlet at the moment, and the rest part of the beam is blocked by each detection copper block.
The side part of the flange part 1 is communicated with a detection column 3, and the end part of the detection column 3 is provided with a detection joint 4.
The detection copper blocks are respectively connected with detection cables, and the detection cables penetrate through the detection columns 3 to be connected with the detection joints 4.
A ceramic cushion layer 22 is padded between the plurality of detection copper blocks and the flange part 1;
designing a ceramic cushion layer 22, mainly to avoid the formation of conduction relations between a plurality of detection copper blocks and the flange piece 1 and to avoid the formation of the conduction relations to influence the detection effect;
a plurality of detection copper blocks are connected with the flange part 1 through ceramic bolts 21; the ceramic bolts 21 are designed to prevent a plurality of detection copper blocks from forming a conduction relation with the flange part 1 on one hand, and to bear high temperature on the other hand;
when the conductive bolt material of metal such as iron is not considered, the traditional non-conductive bolt such as plastic is easy to melt when being struck by the beam, and at the moment, the high temperature generated when the beam is struck on the bolt is borne by the ceramic, so that the deformation is avoided.
The detection joint 4 is externally connected with a detector.
The detector may be selected from the prior art and is primarily used to detect beam flux over several detection copper blocks.
Taking the example that the detecting element 2 is composed of four groups of detecting copper blocks (optimal mode), the mode is obtained by combining the cost and the effect of detecting the deflection direction of the beam;
the four groups of detection copper blocks are respectively a first detection copper block 23, a second detection copper block 24, a third detection copper block 25 and a fourth detection copper block 26;
when the detection piece 2 is installed in the beam pipeline, the end surfaces of a first detection copper block 23, a second detection copper block 24, a third detection copper block 25 and a fourth detection copper block 26 in the detection piece 2 are parallel to the end surface of the beam pipeline.
The first detection copper block 23 and the third detection copper block 25 have the same structure and are symmetrically arranged;
the second detection copper block 24 and the fourth detection copper block 26 have the same structure and are symmetrically arranged;
the bottom areas of the first detection copper block 23 and the third detection copper block 25 are larger than the top areas, so that the first detection copper block 23, the third detection copper block 25, the second detection copper block 24 and the fourth detection copper block 26 enclose a unique outlet surface to form a slope surface, and a wedge angle is formed;
both sides of the second detection copper block 24 and the fourth detection copper block 26 are also provided with grooves matched with the slopes of the first detection copper block 23 and the third detection copper block 25 to form a wedge angle, when the first detection copper block 23, the second detection copper block 24, the third detection copper block 25 and the fourth detection copper block 26 are closed, the slopes and the grooves are tightly attached, so that no gap exists when the detection piece 2 formed by the first detection copper block 23, the second detection copper block 24, the third detection copper block 25 and the fourth detection copper block 26 is looked at from the upper sides of the first detection copper block 23, the second detection copper block 24, the third detection copper block 25 and the fourth detection copper block 26, namely the beam only is emitted from a unique outlet when the beam passes through the detection piece 2;
and the rest parts are blocked and absorbed by the first detection copper block 23, the second detection copper block 24, the third detection copper block 25 and the fourth detection copper block 26 so as to detect the beam deflection direction.
Description of the working principle: connecting a plurality of detection copper blocks into the flange part 1 through ceramic bolts 21, and placing a ceramic cushion layer 22 between the plurality of detection copper blocks and the flange; putting the flange part 1 and the detection part 2 into a beam pipeline together, and installing the flange part 1 in the beam pipeline; the beam current moves in the beam current pipeline, part of the beam current strikes a plurality of detection copper blocks, and part of the beam current is emitted through a unique outlet; after the beam is emitted through the only outlet, the wafer is uniformly irradiated; the external detector detects the beam flow on each detection copper block through the detection joint 4 and the detection cable, and obtains the beam deflection direction, the beam flow detected on the detection copper block in which direction is large, and the beam deflects the direction at the moment, so that the beam direction and the beam flow are adjusted.
The preferred embodiments of the present invention have been described in detail with reference to the accompanying drawings, however, the present invention is not limited to the details of the above embodiments, and the technical solutions of the present invention can be subjected to various equivalent transformations within the scope of the technical idea of the present invention, and these equivalent transformations all belong to the protection scope of the present invention.
Claims (5)
1. A four-fan apparatus for beam detection, comprising:
the flange piece (1) is arranged in the beam pipeline;
the detection piece (2) is arranged in the flange piece (1) and is used for bearing beam impact and changing the beam passing attitude;
the device is characterized in that the detection piece (2) consists of a plurality of detection copper blocks;
the detection copper blocks are provided with wedge angles which are mutually adaptive, so that the detection copper blocks surround a unique outlet and are not in contact with each other, and when the beam passes through the detection piece (2), the beam is blocked by the detection copper blocks and only passes through the unique outlet.
2. The four-fan device for beam current detection as claimed in claim 1, wherein: the flange piece (1) lateral part intercommunication has detection post (3), the tip that detects post (3) is equipped with detection joint (4).
3. The four-fan device for beam current detection as claimed in claim 1, wherein: the detection copper blocks are respectively connected with detection cables, and the detection cables penetrate through the detection columns (3) to be connected with the detection joints (4).
4. The four-fan device for beam current detection as claimed in claim 1, wherein: a ceramic cushion layer (22) is padded between the plurality of detection copper blocks and the flange piece (1);
the plurality of detection copper blocks are connected with the flange piece (1) through ceramic bolts (21).
5. The four-fan device for beam current detection as claimed in claim 2, wherein: the detection joint (4) is externally connected with a detector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221998575.3U CN217902056U (en) | 2022-08-01 | 2022-08-01 | Four-fan device for beam detection |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221998575.3U CN217902056U (en) | 2022-08-01 | 2022-08-01 | Four-fan device for beam detection |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217902056U true CN217902056U (en) | 2022-11-25 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221998575.3U Active CN217902056U (en) | 2022-08-01 | 2022-08-01 | Four-fan device for beam detection |
Country Status (1)
| Country | Link |
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| CN (1) | CN217902056U (en) |
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2022
- 2022-08-01 CN CN202221998575.3U patent/CN217902056U/en active Active
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Address after: Room 301-181, Block A, Xidong Chuanrong Building, No. 78 Danshan Road, Anzhen Street, Xishan District, Wuxi City, Jiangsu Province, 214000 Patentee after: Guodian Investment Nuclear Core (Wuxi) Technology Co.,Ltd. Address before: 214104 room 301-181, block a, Xidong Chuang Rong building, No. 78, Danshan Road, anzhen street, Xishan District, Wuxi City, Jiangsu Province Patentee before: Wuxi nuclear power Chuangxin Technology Co.,Ltd. |
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