CN217880081U - Mass flow control device - Google Patents
Mass flow control device Download PDFInfo
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- CN217880081U CN217880081U CN202221240330.4U CN202221240330U CN217880081U CN 217880081 U CN217880081 U CN 217880081U CN 202221240330 U CN202221240330 U CN 202221240330U CN 217880081 U CN217880081 U CN 217880081U
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Abstract
The utility model discloses a mass flow control device, including air inlet, gas outlet, flow sensor, flow control valve, laminar flow reposition of redundant personnel component and controlling means, flow sensor is used for detecting gas flow value, and flow sensor is connected with controlling means, and flow control valve is connected with controlling means, the utility model discloses a valve aperture threshold value contrast of setting for in valve aperture that inspection module among the controlling means will obtain and the controlling means, whether detection quality flow control device is unusual, has replaced mass flow meter to a certain extent and has given supplementary judgement, realizes on-line monitoring and off-line detection's function for operating personnel need not to investigate each part of equipment comprehensively after whole technology, can save a large amount of efforts cost.
Description
Technical Field
The utility model belongs to the technical field of flow control, a mass flow control device is related to.
Background
In the actual use process of the existing mass flow control device, abnormity, such as blockage in the mass flow control device, can occur. When an abnormality occurs in the mass flow control device, a situation in which the flow rate displayed by the mass flow control device fluctuates is easily found and judged; however, another situation is that the mass flow control device shows no abnormality in the flow stability, but the actual flow rate has a large deviation, which may cause the actual output of the flow rate to be inaccurate, thereby causing an abnormality in the process. The existing mass flow control device cannot feed back an alarm in time. For the problems, two schemes are commonly used for checking at present, firstly, all parts of equipment are checked comprehensively after the whole process is finished, a large amount of energy and cost are needed, and production is influenced; secondly, through the technical scheme that a mass flow controller is connected with a Mass Flow Meter (MFM) in series, the mass flow controller can be monitored in real time by detecting the flow abnormity according to the degree difference of the mass flow controller and the MFM, but only abnormity can be found and cannot be processed, and the cost is increased by additionally connecting the mass flow meter in series. In addition, if the mass flow control device is contaminated with dust, liquid, or the like, the mass flow meters connected in series may be contaminated to cause detection abnormality, and the mass flow meters may be additionally damaged.
Disclosure of Invention
The utility model discloses an overcome prior art not enough, provide a but quality flow control device of self-checking anomaly, timely feedback.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
the utility model provides a mass flow control device, includes air inlet, gas outlet, flow sensor, flow control valve, laminar flow reposition of redundant personnel component and controlling means, flow sensor is used for detecting the gas flow value, and flow sensor is connected with controlling means, and flow control valve is connected with controlling means, controlling means still includes detection module and unusual feedback module, detection module is used for carrying out the abnormal detection to the pipeline between air inlet and the gas outlet, and unusual feedback module is used for feeding back detection module's unusual result.
Further, the control device sets a valve opening threshold value, and the detection module performs abnormality detection based on the valve opening obtained by the control device and the valve opening threshold value.
Further, the control device obtains the valve opening degree based on a gas flow value detected by the flow sensor.
Further, the abnormity feedback module comprises an alarm device.
Furthermore, a storage module is arranged in the control device, the valve opening threshold is stored in the storage module in a configuration file or directly arranged in a control file of the control device, and the valve opening threshold is set as a single valve opening threshold or a valve opening threshold group consisting of a plurality of valve opening thresholds.
Further, flow sensor, flow control valve, laminar flow reposition of redundant personnel component and controlling means install at this internal, and air inlet and gas outlet setting are at the both ends of body, and air inlet and gas outlet communicate with this internal pipeline respectively, and the pipeline includes main gas circuit and divides the gas circuit, and flow sensor installs at the branch gas circuit for detect the gas flow value of dividing the gas circuit of flowing through.
Furthermore, the connection point of the gas distribution path and the main gas path is set as a gas distribution point and a gas combination point, the main gas path and the gas distribution path are respectively communicated at the gas distribution point and the gas combination point, and the main gas path is respectively communicated with the gas inlet and the gas outlet.
Further, the control device is connected with a control center of the main device or/and an external terminal device, and the abnormal feedback module transmits the feedback signal to the control center of the main device or/and the external terminal device.
Furthermore, the laminar flow dividing element and the flow control valve are respectively arranged on the main gas path, the laminar flow dividing element is arranged between a gas dividing point and a gas combining point, the flow control valve is arranged between the gas combining point and the gas outlet, a multi-component flow channel is arranged in the laminar flow dividing element, and the flow dividing channel is parallel to the flow direction of the gas in the main gas path.
Furthermore, the air distribution path is of a U-like pipeline structure, and the opening direction of the U-shaped air distribution path faces the main air path.
To sum up, the utility model discloses an useful part lies in:
1) The utility model discloses a valve aperture threshold value contrast of setting for in valve aperture that inspection module among the controlling means will obtain and the controlling means, whether detection quality flow control device is unusual, has replaced mass flow meter to a certain extent and has given supplementary judgement, realizes the function of on-line monitoring and off-line measuring for operating personnel need not to investigate each part of equipment comprehensively after whole technology, can save a large amount of efforts costs.
2) The utility model discloses a set up unusual feedback module, this unusual feedback module reports to the police or the technology interference operation to the abnormal condition that the test module inspection obtained for can in time feed back when unusual problem appears in the process, remind operating personnel to handle abnormal condition in real time, thereby solved the problem that quality flow control device can't in time discover unusually, avoided making equipment technology unusual unable in time report to the police because of quality flow control device is unusual, finally lead to the heavy phenomenon of loss tragedy.
Drawings
Fig. 1 is a schematic view of the device of the present invention.
Fig. 2 is a schematic view of the device of the present invention.
The following are marked in the figure: the device comprises a body 1, an air inlet 10, an air distribution path 11, a main air path 12, an air outlet 13, an air distribution point 111, an air combination point 112, a flow sensor 2, a flow control valve 3, a laminar flow diversion element 4 and a diversion channel 41.
Detailed Description
The following description of the embodiments of the present invention is provided for illustrative purposes, and other advantages and effects of the present invention will be readily apparent to those skilled in the art from the disclosure herein. The present invention can be implemented or applied by other different specific embodiments, and various details in the present specification can be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention. It is to be noted that the features in the following embodiments and examples may be combined with each other without conflict.
It should be noted that the drawings provided in the following embodiments are only for illustrating the basic concept of the present invention, and the components related to the present invention are only shown in the drawings rather than drawn according to the number, shape and size of the components in actual implementation, and the form, amount and ratio of the components in actual implementation may be changed at will, and the layout of the components may be more complicated.
In the embodiment of the present invention, all the directional indicators (such as upper, lower, left, right, front, rear, horizontal, and vertical … …) are only used to explain the relative position relationship between the components in a specific posture, the motion situation, and the like, and if the specific posture is changed, the directional indicator is changed accordingly.
Because of reasons such as installation error, the parallel relation that the embodiment of the present invention refers to may actually be the approximate parallel relation, and the perpendicular relation may actually be the approximate perpendicular relation.
The first embodiment is as follows:
as shown in fig. 1-2, a mass flow control device includes an air inlet 10, an air outlet 13, a flow sensor 2, a flow control valve 3, a laminar flow diversion element 4, and a control device, where the flow sensor 2 is used to detect an air flow value, the flow sensor 2 is connected to the control device, the flow control valve 3 is connected to the control device, the control device further includes a detection module and an anomaly feedback module, the detection module is used to detect an anomaly of a pipeline between the air inlet 10 and the air outlet 13, and the anomaly feedback module is used to feed back an anomaly result of the detection module.
The flow sensor 2, the flow control valve 3, the laminar flow dividing element 4 and the control device (not shown) are installed in the body 1, the air inlet 10 and the air outlet 13 are arranged in the body 1, wherein the air inlet 10 and the air outlet 13 are located at two ends of the body 1, the air inlet 10 and the air outlet 13 are respectively communicated with a pipeline in the body 1, air flows along the air inlet 10, the pipeline and the air outlet 13 in sequence, the pipeline of the embodiment comprises a main air path 12 and a branch air path 11, the flow sensor 2 is installed in the branch air path 11, a connection point of the branch air path 11 and the main air path 12 is set as a gas dividing point 111 and a gas combining point 112, the main air path 12 and the branch air path 11 are communicated with each other at a gas dividing point 111 and a gas combining point 112 respectively, and the air inlet 10 and the air outlet 13 are communicated with the main air path 12.
In this embodiment, branch gas circuit 11 sets up to the pipeline structure of type U, and the opening direction of U type is towards main gas circuit 12, has increased gaseous circulation route at branch gas circuit 11, and flow sensor 2 detects the gas flow value that divides gas circuit 11 to the flow, and the structural design through dividing gas circuit 11 has greatly improved flow sensor 2's detection accuracy and accuracy.
The laminar flow dividing element 4 and the flow control valve 3 are respectively installed on the main gas path 12, the laminar flow dividing element 4 is installed between a gas dividing point 111 and a gas combining point 112, the flow control valve 3 is installed between the gas combining point 112 and the gas outlet 13, the multi-component flow channels 41 are arranged in the laminar flow dividing element 4, the multi-component flow channels 41 are preferably parallel to each other, and the dividing channels 41 are parallel or approximately parallel to the flow direction of the gas in the main gas path 12, so as to ensure the circulation efficiency of the gas.
The gas flows through the pipeline as shown by an arrow in fig. 1, the gas passes through the main gas path 12 along the gas inlet 10, as shown by an arrow a in fig. 1, part of the gas passes through the diversion channel 41, as shown by an arrow b in fig. 1, the other part of the gas passes through the gas diversion point 111 and is diverted by the gas diversion path 11, the gas flow rate value is detected by the flow sensor 2 and then is merged into the main gas path 12 through the gas merging point 112, and the gas passing through the main gas path 12 and the gas passing through the gas diversion path 11 are merged and then flow out of the gas outlet 13 through the flow control valve 3.
The detection module is used for detecting the corresponding relation between the valve opening and the valve opening threshold, the corresponding valve openings are different due to different introduced gas flow values, the corresponding valve opening thresholds are also different, and according to actual products, the valve opening threshold can be a single valve opening threshold, namely a valve opening threshold corresponding to a group of introduced gas flow values, or a valve opening threshold group consisting of a plurality of groups of different valve opening thresholds. The detection module can be arranged in the control device, for example, a single chip microcomputer is adopted for detection, and an external detection circuit mode can also be adopted.
The control device can be internally provided with a storage module, the valve opening threshold is stored in the storage module in a configuration file or is directly arranged in a control program of the control device, and at the moment, a detection module of the control device can directly compare and judge the obtained valve opening based on the valve opening threshold.
In this embodiment, the valve opening corresponding to the flow rate of the gas introduced in the normal state is set to be Ho, H o = A ± d, the valve opening threshold is set to H b ，H b A, = a ± e, a is percentage of opening, d is precision value of flowmeter, d is related to flow value of introduced gas and flowmeter itself, e is set valve opening fluctuation threshold, and e is set valve opening fluctuation threshold>D and e can be set according to actual conditions and actual needs, and are not described herein.
The flow sensor 2 detects the gas flow value of the gas distribution path 11, the control device adjusts and acquires the valve opening of the flow control valve 3 through voltage or current based on the comparison control loop according to the gas flow value obtained by the flow sensor 2, and the adjusted valve opening is set to be H t ，H t If B is the opening percentage, the detection module performs abnormity detection on the obtained valve opening and the valve opening threshold value, and if H is the opening percentage, the detection module performs abnormity detection on the obtained valve opening and the valve opening threshold value t At H o Is fluctuated within a certain range, the fluctuation range is set according to the actual situation, and H t At H b In the range, e.g. H t Does not exceed the set valve opening threshold value H b When the pipeline is in normal state, if H t Over H b Range, when the pipeline is in an abnormal state.
The detection module obtains the abnormal result of the pipeline abnormality and can preliminarily judge that the main gas path 12 or the branch gas path 11 is abnormal. Taking the example of the main air passage 12 and/or the branch air passage 11 being blocked, generally, when the branch air passage 11 is blocked, the flow sensor 2 detects that the gas flow rate value of the branch air passage 11 is smaller than that in the normal state, the valve opening of the flow control valve 3 is reduced, and B is smaller than a, and when the main air passage 12 is blocked, the gas flow flows into the branch air passage 11 to be larger, the control valve opening of the flow control valve 3 is larger, and B is larger than a. Since the corresponding relationship between the flow sensor and the valve opening of different flowmeters has different settings, the comparison between the valve opening and the valve opening threshold value in this embodiment is only one of the comparison schemes.
The control device further comprises an abnormity feedback module, the abnormity feedback module is connected with the detection module, and the abnormity feedback module feeds back on the basis of an abnormity result of the detection module. The anomaly feedback module can take a variety of forms, for example, the anomaly feedback module can include an audible or visual alarm. The method for the alarm device to feed back the pipeline abnormality can adopt the prior art, such as an abnormality feedback circuit, or a warning signal device, such as an alarm, or be connected with the control end of the main equipment to interfere the operation of the main equipment, such as suspending the operation of the main equipment or closing the air inlet 10.
Preferably, the control device is further connected with a control center of the main device or/and external terminal equipment, the control device transmits data to the control center or/and the external terminal equipment, and a worker checks the data from the control center or the external terminal equipment and handles an abnormal state, so that the problem that the quality flow control device cannot find the abnormality in time, the abnormality can be fed back in time when the abnormality occurs in the process, and the problem that the equipment process is abnormal and the process cannot alarm in time due to the abnormality of the flow meter, and finally the problem of disastrous loss is solved. Through the technical scheme of this application, need not to examine equipment each part comprehensively after whole technology, can save a large amount of energy costs.
In this embodiment, the connection between the abnormality feedback module and the detection module, the connection between the flow control valve 3 and the control device, and the connection between the control device and the control center or/and the external terminal device may be an electrical connection or a communication connection, and the connection is not limited as long as the communication or the signal transmission between the abnormality feedback module and the detection module can be realized.
In this embodiment, the gas flow value detected by the flow sensor 2, the valve opening Ht of the flow control valve 3, and the like may be transmitted in a signal form by data processing according to the prior art, or may be transmitted by other possible methods, which will not be further described herein.
In this embodiment, the method for detecting the gas flow value by the flow sensor 2 can adopt the prior art, and the method for controlling the valve opening by the flow control valve 3 can adopt the prior art, for example, the method for detecting the fluid flow by the flow sensor in the application number 2021105943581 and the method for controlling the valve opening by the flow control valve 3 are not further described herein.
It is obvious that the described embodiments are only some of the embodiments of the present invention, and not all of them. Based on the embodiments of the present invention, all other embodiments obtained by a person skilled in the art without creative efforts shall fall within the protection scope of the present invention.
Claims (10)
1. The utility model provides a mass flow control device, includes air inlet, gas outlet, flow sensor, flow control valve, laminar flow reposition of redundant personnel component and controlling means, flow sensor is used for detecting gas flow value, and flow sensor is connected with controlling means, and flow control valve is connected with controlling means, its characterized in that: the control device further comprises a detection module and an abnormity feedback module, wherein the detection module is used for carrying out abnormity detection on the pipeline between the air inlet and the air outlet, and the abnormity feedback module is used for feeding back an abnormity result of the detection module.
2. A mass flow control apparatus according to claim 1, wherein the control apparatus sets a valve opening threshold value, and the detection module performs abnormality detection based on the valve opening obtained by the control apparatus and the valve opening threshold value.
3. A mass flow control device according to claim 1, wherein said control means obtains the valve opening degree based on a gas flow value detected by a flow sensor.
4. A mass flow control device according to claim 1, wherein the anomaly feedback module includes an alarm device.
5. A mass flow control apparatus according to claim 2, wherein the control apparatus is provided with a storage module, the valve opening threshold is stored in the storage module in a configuration file or directly in a control file of the control apparatus, and the valve opening threshold is set as a single valve opening threshold or a valve opening threshold set of a plurality of valve opening thresholds.
6. A mass flow control device according to claim 1, wherein the flow sensor, the flow control valve, the laminar flow dividing element and the control device are installed in the body, the gas inlet and the gas outlet are provided at both ends of the body, the gas inlet and the gas outlet are respectively communicated with a pipeline in the body, the pipeline comprises a main gas path and a gas dividing path, and the flow sensor is installed in the gas dividing path and is used for detecting a gas flow value flowing through the gas dividing path.
7. A mass flow control device according to claim 6, wherein the connection points of the gas-dividing path and the main gas path are set to a gas-dividing point and a gas-combining point, the main gas path and the gas-dividing path are respectively communicated at the gas-dividing point and the gas-combining point, and the main gas path is respectively communicated with the gas inlet and the gas outlet.
8. A mass flow control apparatus according to claim 1, wherein the control apparatus is connected to a control center of a main apparatus or/and an external terminal apparatus, and the anomaly feedback module transmits the feedback signal to the control center of the main apparatus or/and the external terminal apparatus.
9. A mass flow control device according to claim 6, wherein the laminar flow dividing element and the flow control valve are respectively mounted on the main gas path, the laminar flow dividing element is mounted between a gas dividing point and a gas combining point, the flow control valve is mounted between a gas combining point and the gas outlet, and the laminar flow dividing element is provided with a multi-component flow path therein, the flow dividing path being parallel to the flow direction of the gas on the main gas path.
10. A mass flow control device according to claim 6, wherein said gas distribution passage is provided in a U-like pipe structure with the opening direction of the U facing the main gas passage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221240330.4U CN217880081U (en) | 2022-05-23 | 2022-05-23 | Mass flow control device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221240330.4U CN217880081U (en) | 2022-05-23 | 2022-05-23 | Mass flow control device |
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| Publication Number | Publication Date |
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| CN217880081U true CN217880081U (en) | 2022-11-22 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202221240330.4U Active CN217880081U (en) | 2022-05-23 | 2022-05-23 | Mass flow control device |
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| CN (1) | CN217880081U (en) |
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- 2022-05-23 CN CN202221240330.4U patent/CN217880081U/en active Active
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