CN217846553U - Device for testing wafer - Google Patents
Device for testing wafer Download PDFInfo
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- CN217846553U CN217846553U CN202221949770.7U CN202221949770U CN217846553U CN 217846553 U CN217846553 U CN 217846553U CN 202221949770 U CN202221949770 U CN 202221949770U CN 217846553 U CN217846553 U CN 217846553U
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Abstract
The utility model provides a device for testing a wafer, which relates to the technical field of integrated circuit testing equipment and comprises a slide holder mounting seat, a slide holder lifting platform, a slide holder arranged on the slide holder lifting platform and a slide holder lifting mechanism arranged on the slide holder mounting seat and in transmission connection with the slide holder lifting platform; the slide holder lifting mechanism is used for driving the slide holder lifting platform to be close to or far away from the slide holder mounting seat; the slide glass lifting platform is provided with a first camera for detecting the position of the probe. The probe card has the advantages that the technical problem that the probe and the wafer pad are deviated due to the fact that the error between the mutual movement of the probe cleaning table and the wafer carrying table in the prior art is relieved, the error in the lifting direction when the wafer position and the first camera position are calibrated can be eliminated, deviation between the wafer pad and the probe is avoided, and the technical effect of accurate probe alignment of the wafer pad and the probe is achieved.
Description
Technical Field
The utility model belongs to the technical field of integrated circuit test equipment's technique and specifically relates to a device is used in wafer test.
Background
The wafer carrying platform is a platform for placing a wafer on the probe station. In the wafer testing process, the position of a bonding pad on a wafer needs to be detected through a second camera (namely an E1 camera), the position of a probe is detected through a first camera (namely an E2 camera), and the position between the second camera (E1) and the first camera (E2) is calibrated, so that the probe can be accurately pricked on the wafer bonding pad, and the wafer testing is completed.
In the prior art, the wafer carrying platform is arranged independently, and the first camera is arranged on the needle cleaning platform, and the arrangement has at least the following problems: in the needle aligning process of the first camera, the first camera moves vertically upwards along with the needle cleaning table to reach a specified position to perform needle aligning action; in the process of testing the wafer, the wafer reaches a designated position along with the lifting motion of the wafer carrying platform to perform needle insertion; because there is the error in clear needle platform elevating movement and slide holder elevating movement, consequently, need carry out corresponding compensation, if compensate improper easily arouse probe and wafer pad position deviation, lead to the wafer to scrap.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a device is used in wafer test to the clear needle platform that exists has been alleviated among the prior art and the error between slide holder motion, thereby has leaded to probe and the skew technical problem of wafer pad.
The utility model provides a device is used in wafer test, include: the slide glass lifting mechanism is arranged on the slide glass mounting seat and is in transmission connection with the slide glass lifting platform;
the slide holder lifting mechanism is used for driving the slide holder lifting platform to be close to or far away from the slide holder mounting seat;
the slide glass lifting platform is provided with a first camera for detecting the position of the probe.
Further, the slide holder lifting mechanism comprises a slide holder driving assembly and a slide holder guiding assembly;
the output end of the slide holder driving assembly is fixedly connected with the slide lifting table;
the slide holder guide assembly comprises a slide holder guide rail seat and a slide holder guide rail arranged on the slide holder guide rail seat;
the slide holder guide rail seat is detachably connected with the slide holder mounting seat;
the slide glass lifting platform is connected with the slide glass platform guide rail in a sliding manner.
Furthermore, the slide glass lifting platform is connected with the four slide glass guide rails in a sliding manner;
or the slide glass lifting platform is connected with the two slide glass platform guide rails in a sliding manner.
Furthermore, the slide holder guide rail seats are arranged in two groups and are arranged oppositely;
each slide holder guide rail seat is correspondingly provided with two groups of slide holder guide rails;
the slide holder guide rail is detachably connected to the slide holder guide rail seat; or the slide holder guide rail and the slide holder guide rail seat are integrally arranged.
Furthermore, two groups of slide holder guide rails corresponding to each slide holder guide rail seat are matched with a lifting sliding table in a sliding manner;
the slide glass lifting table is fixedly connected to the top end of each lifting sliding table.
Furthermore, the slide holder driving assembly comprises a slide holder driving piece and a slide holder lead screw in transmission connection with the slide holder driving piece;
the slide glass lifting platform is in threaded connection with the slide glass platform lead screw and drives the slide glass lifting platform to slide along the slide glass platform lead screw in a reciprocating manner through the rotation of the slide glass platform lead screw.
Furthermore, the slide holder driving piece is in transmission connection with the slide holder lead screw through an intermediate transmission mechanism;
the slide holder driving piece is arranged close to the side edge of the slide holder mounting seat;
and a screw hole for the lead screw of the slide holder to penetrate is formed in the center of the slide holder.
Furthermore, the slide holder is a sucker slide holder for sucking and fixing the slide.
Furthermore, the device for testing the wafer further comprises a mounting base, a camera mounting seat arranged on the mounting base and a second camera arranged on the camera mounting seat;
the slide holder mounting seat is connected to the mounting base in a sliding manner;
the second camera is located on the sliding track of the slide holder mounting seat and located above the slide holder.
Furthermore, the device for testing the wafer further comprises a needle cleaning table assembly, wherein the needle cleaning table assembly is connected to the mounting base in a sliding mode, and the sliding track of the needle cleaning table assembly is consistent with the sliding track of the slide holder mounting seat.
The utility model provides a device is used in wafer test has following beneficial effect:
the utility model provides a device for testing a wafer, which comprises a mounting seat of a slide stage, a slide elevating platform, a slide stage arranged on the slide elevating platform and a slide stage lifting mechanism arranged on the mounting seat of the slide stage and connected with the slide elevating platform in a transmission way; the slide glass lifting mechanism can drive the slide glass lifting platform to be close to or far away from the slide glass lifting platform mounting seat, namely, the lifting of the slide glass platform is realized.
Therefore, the slide holder and the first camera in the device for testing the wafer are driven by the same slide holder lifting mechanism, synchronous lifting motion can be realized, and by the arrangement, the error of the position of the wafer and the position of the first camera in the lifting direction during calibration can be eliminated, so that the wafer bonding pad and the probe cannot deviate, the accurate alignment of the wafer bonding pad and the probe is realized, and the test of the wafer is completed.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the technical solutions in the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a device for wafer testing according to an embodiment of the present invention;
fig. 2 is a front view of a wafer test apparatus provided in an embodiment of the present invention, the apparatus including an installation base, a second camera, and a needle cleaning table assembly.
Icon:
10-mounting a base;
100-slide holder mounting seat;
200-slide elevating platform;
300-a slide holder;
400-slide holder lifting mechanism; 410-stage drive assembly; 420-stage guide assembly; 411-slide stage driving motor; 421-slide holder guide rail seat; 422-slide guide rail; 423-lifting sliding table;
500-a first camera;
600-a camera mount;
700-a second camera;
800-needle cleaning table component.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined or explained in subsequent figures.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate the position or positional relationship based on the position or positional relationship shown in the drawings, or the position or positional relationship which is usually placed when the product of the present invention is used, and are only for convenience of description and simplification of the description, but do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another, and are not to be construed as indicating or implying relative importance.
Furthermore, the terms "horizontal", "vertical" and the like do not imply that the components are required to be absolutely horizontal or pendant, but rather may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.
In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Some embodiments of the present invention will be described in detail below with reference to the accompanying drawings. The embodiments described below and the features of the embodiments can be combined with each other without conflict.
Referring to fig. 1, the apparatus for testing a wafer according to the present embodiment includes a stage mounting base 100, a stage lifter 200, a stage 300 disposed on the stage lifter 200, and a stage lifter 400 disposed on the stage mounting base 100 and in transmission connection with the stage lifter 200; the slide holder lifting mechanism 400 is used for driving the slide holder lifting platform 200 to approach or depart from the slide holder mounting seat 100; the slide lift 200 is equipped with a first camera 500 for detecting the probe position.
In the device for testing a wafer according to the embodiment, the stage lifting mechanism 400 is in transmission connection with the slide glass lifting platform 200, so that the stage lifting mechanism 400 can drive the slide glass lifting platform 200 to approach or depart from the stage mounting base 100, that is, the stage 300 can be lifted or lowered, in the process, the first camera 500 is installed on the slide glass lifting platform 200, and the first camera 500 can detect the position of the probe, so that the first camera 500 can be driven to lift or lower while the stage 300 is lifted or lowered, and the detection of the position of the probe can be realized. It can be seen that the stage 300 and the first camera 500 in the apparatus for testing a wafer are driven by the same stage lifting mechanism 400, and can achieve synchronous lifting movement, so that the error in the lifting direction when the position of the wafer and the position of the first camera 500 are calibrated can be eliminated, and thus the wafer pad and the probe are not deviated, and the wafer pad and the probe are precisely aligned, and the wafer is tested.
It should be noted that the structure of the slide holder lifting mechanism 400 can be various, and the structure form that can drive the slide holder 300 to lift is within the protection scope of the present invention, for example, the cylinder, the oil cylinder, the electric push rod, the quadrilateral linkage mechanism, the scissor arm lifting mechanism, and the screw slider mechanism.
The structural form of the screw slider mechanism is selected in the embodiment.
Specifically, the slide holder lifting mechanism 400 includes a slide holder driving assembly 410, and an output end of the slide holder driving assembly 410 is fixedly connected to the slide lifting platform 200, and is configured to drive the slide lifting platform 200 to lift.
With reference to fig. 1, the stage driving assembly 410 includes a stage driving member and a stage lead screw (not shown) in transmission connection with the stage driving member; the slide glass lifting platform 200 is in threaded connection with the slide glass lead screw, and the slide glass lifting platform 200 is driven to slide back and forth along the slide glass lead screw by the rotation of the slide glass lead screw.
When the slide glass lifting platform 200 is in work, the slide glass lifting platform 200 can be driven to slide back and forth along the slide glass lifting platform screw rod by the rotation of the slide glass lifting platform screw rod because the slide glass lifting platform 200 is in threaded connection with the slide glass lifting platform screw rod, and the slide glass lifting platform 200 is lifted and lowered.
Alternatively, the stage drive member may be a stage drive motor 411.
Furthermore, the slide holder driving motor 411 is in transmission connection with the slide holder lead screw through an intermediate transmission mechanism, so that the slide holder driving motor 411 can be installed close to the side edge of the slide holder installation seat 100, and convenience is provided for subsequent detachment and reinstallation; the central position of slide glass elevating platform 200 sets up the screw hole that is used for supplying the lead screw to wear to establish, and slide glass elevating platform 200 sets up with slide glass platform lead screw is coaxial promptly, improves slide glass elevating platform 200 along the gliding stationarity of slide glass platform lead screw for slide glass elevating platform 200 can not produce easily and rock at the slip in-process.
Optionally, a nut may be installed at a screw hole of the slide glass lifting table 200, and the nut is in threaded connection with a screw of the slide glass table; or the screw hole is a threaded hole, and the screw hole is directly in threaded connection with the slide holder screw through the threaded hole.
The intermediate transmission mechanism may be a synchronous belt transmission mechanism or a gear transmission mechanism, and the slide glass lifting platform 200 and the slide glass platform screw are coaxially arranged while the slide glass platform driving motor 411 is installed near the side edge of the slide glass platform installation seat 100 by arranging the specific positions of the driving wheel and the driven wheel in the synchronous belt transmission mechanism or the gear transmission mechanism.
In this embodiment, the slide stage 300 is configured as a suction cup slide stage for adsorbing a fixed slide, so as to facilitate taking and placing the slide.
Further, referring to fig. 1, the stage lift mechanism 400 further includes a stage guide assembly 420 to enable the slide lift stage 200 to be vertically raised and lowered to prevent the slide lift stage 200 from being horizontally displaced.
In one embodiment of the present application, with continued reference to FIG. 1, the stage guide assembly 420 includes a stage guide rail seat 421 and a stage guide rail 422 disposed on the stage guide rail seat 421; the slide holder rail seat 421 is detachably connected to the slide holder mounting seat 100; the slide lift stage 200 is slidably coupled to the slide stage rail 422.
Alternatively, the stage rail seat 421 may be mounted to the stage mounting seat 100 by screws.
In this embodiment, the slide holder rails 422 are provided in four sets, the four sets of slide holder rails 422 are arranged in a rectangular shape, and the slide lifting platform 200 is slidably connected to the four sets of slide holder rails 422 at the same time.
In other embodiments, the slide holder rails 422 are provided in two sets, the two sets of slide holder rails 422 are diagonally arranged, and the slide lifting platform 200 is slidably connected to the two sets of slide holder rails 422 at the same time.
By arranging four groups or two groups of slide holder guide rails 422, the lifting stability of the slide holder 200 can be further improved, and the use safety can be ensured.
In this embodiment, the slide holder rail seats 421 are arranged in two groups and are opposite to each other; each slide holder guide rail seat 421 is correspondingly provided with two groups of slide holder guide rails 422; wherein, the slide holder guide rail 422 is detachably connected to the slide holder guide rail seat 421.
Alternatively, the stage rail 422 may be mounted to the stage rail base 421 by screws.
In other embodiments, the stage rail 422 is integrally disposed with the stage rail seat 421, that is, the stage rail 422 is directly machined on the stage rail seat 421.
In an embodiment of the present application, referring to fig. 1 again, two sets of slide rails 422 corresponding to each slide rail seat 421 are slidably fitted with a lifting slide table 423, and an accommodating space is left between each lifting slide table 423; slide glass elevating platform 200 fixed connection is in the top of each lift slip table 423, so set up, can be on the basis of guaranteeing overall structure overall arrangement compactness, for slide glass platform driving motor 411 and slide glass platform lead screw etc. arrange and provide great installation space relatively for overall structure overall arrangement is more reasonable.
On the basis of the above embodiments, referring to fig. 1 and fig. 2, the apparatus for testing a wafer further includes a mounting base 10, a camera mounting base 600 disposed on the mounting base 10, and a second camera 700 disposed on the camera mounting base 600, wherein the second camera 700 is used for detecting the pad position on the wafer; the slide holder mounting base 100 is slidably connected to the mounting base 10; the second camera 700 is located on the sliding track of the stage mount 100 and above the stage 300.
Referring to fig. 2, during inspection, the stage mount 100 may be slid leftward with respect to the mount base 10 so as to be slid to a position below the second camera 700, and the second camera 700 may inspect the pad position on the wafer on the chuck stage.
Wherein the specific position of the second camera 700 can be adjusted according to the height of the camera mount 600.
Referring to fig. 2, the apparatus for wafer testing further includes a needle cleaning stage assembly 800; the needle cleaning table assembly 800 is slidably connected to the mounting base 10, wherein the sliding track of the needle cleaning table assembly 800 is consistent with the sliding track of the slide holder mounting base 100, so that the needle cleaning table assembly 800 can slide along the same direction as the slide holder mounting base 100 to complete the related detection. Preferably, the needle cleaning station assembly 800 is located at an end of the stage mount 100 opposite the second camera 700.
It should be noted that the needle cleaning table assembly 800 mainly includes a needle cleaning table base, a needle cleaning table and a needle cleaning table lifting mechanism arranged therebetween, and the needle cleaning table lifting mechanism can be used for driving the needle cleaning table to lift; the specific structure of the needle cleaning table lifting mechanism can refer to the slide holder lifting mechanism 400, and will not be described herein again.
Further, the needle cleaning station assembly 800 may be selectable to select whether to equip for different customer needs.
In summary, a specific detection method of the device for testing a wafer of the present embodiment is as follows:
calibrating the wafer position and the camera position: the wafer is placed on the sucking disc slide holder, the sucking disc slide holder moves to the left below the second camera 700, and coordinates of each point of the bonding pad on the wafer are accurately calibrated through the second camera 700; the first camera 500 is lifted along with the sucker slide holder and mutually calibrated with the second camera 700, so that the position between the first camera 500 (E1) and the second camera 700 (E2) can be calibrated;
calibration of the first camera 500 position with the probe position: the chuck stage moves below the probes (not shown in the drawings), coordinates of the probes are precisely calibrated by the first camera 500, and the mutual position relationship between the wafer bonding pads and the probes can be calculated through the conversion of the coordinates of various positions, so that the bonding pads and the probes are precisely aligned, and the wafer test is further realized.
It should be noted that in actual use, the probe is located directly above the chuck stage at the position shown in fig. 2.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention.
Claims (10)
1. A device for testing a wafer, comprising: the slide glass lifting mechanism comprises a slide glass mounting seat (100), a slide glass lifting platform (200), a slide glass (300) arranged on the slide glass lifting platform (200) and a slide glass lifting mechanism (400) arranged on the slide glass mounting seat (100) and in transmission connection with the slide glass lifting platform (200);
the slide holder lifting mechanism (400) is used for driving the slide holder lifting platform (200) to be close to or far away from the slide holder mounting seat (100);
the slide glass lifting platform (200) is provided with a first camera (500) for detecting the position of the probe.
2. The apparatus according to claim 1, wherein the stage lift mechanism (400) comprises a stage drive assembly (410) and a stage guide assembly (420);
the output end of the slide holder driving assembly (410) is fixedly connected with the slide lifting table (200);
the slide holder guide assembly (420) comprises a slide holder guide rail seat (421) and a slide holder guide rail (422) arranged on the slide holder guide rail seat (421);
the slide holder guide rail seat (421) is detachably connected to the slide holder mounting seat (100);
the slide glass lifting platform (200) is connected to the slide glass platform guide rail (422) in a sliding manner.
3. The device for testing wafers as claimed in claim 2, wherein the slide holder guide rails (422) are provided in four sets, the four sets of the slide holder guide rails (422) are arranged in a rectangular shape, and the slide elevating platform (200) is simultaneously connected with the four sets of the slide holder guide rails (422) in a sliding manner.
4. The apparatus for testing wafers as set forth in claim 2, wherein the stage guides (422) are provided in two sets, the two sets of stage guides (422) are arranged diagonally, and the slide elevating stage (200) is simultaneously slidably connected to the two sets of stage guides (422).
5. The device for testing wafers as set forth in claim 3, wherein the slide rail seats (421) are arranged in two sets and are disposed oppositely;
each slide holder guide rail seat (421) is correspondingly provided with two groups of slide holder guide rails (422);
wherein, the slide holder guide rail (422) is detachably connected with the slide holder guide rail seat (421); or the slide holder guide rail (422) and the slide holder guide rail seat (421) are integrally arranged.
6. The device for testing wafers as claimed in claim 5, wherein the two sets of stage guide rails (422) corresponding to each stage guide rail seat (421) are slidably fitted with a lifting slide table (423);
the slide glass lifting platform (200) is fixedly connected to the top end of each lifting sliding platform (423).
7. The device for testing wafers as set forth in claim 2, wherein the stage drive assembly (410) comprises a stage drive member and a stage lead screw in driving connection with the stage drive member;
the slide glass lifting platform (200) is in threaded connection with the slide glass lead screw and drives the slide glass lifting platform (200) to slide back and forth along the slide glass lead screw through the rotation of the slide glass lead screw.
8. The apparatus for testing wafers as claimed in claim 7, wherein the stage driving member is in transmission connection with the stage screw via an intermediate transmission mechanism;
the slide holder driving piece is arranged close to the side edge of the slide holder mounting seat (100);
the central position of slide glass elevating platform (200) sets up the screw hole that is used for supplying slide glass platform lead screw to wear to establish.
9. The device for testing wafers as set forth in any one of claims 1 to 8, further comprising a mounting base (10), a camera mounting base (600) provided on the mounting base (10), and a second camera (700) provided on the camera mounting base (600);
the slide holder mounting seat (100) is connected to the mounting base (10) in a sliding manner;
the second camera (700) is located on the sliding track of the slide holder mounting seat (100) and located above the slide holder (300).
10. The device according to claim 9, further comprising a needle cleaning table assembly (800), wherein the needle cleaning table assembly (800) is slidably connected to the mounting base (10),
and the sliding track of the needle cleaning table component (800) is consistent with the sliding track of the slide holder mounting seat (100).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221949770.7U CN217846553U (en) | 2022-07-26 | 2022-07-26 | Device for testing wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221949770.7U CN217846553U (en) | 2022-07-26 | 2022-07-26 | Device for testing wafer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217846553U true CN217846553U (en) | 2022-11-18 |
Family
ID=84038426
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221949770.7U Active CN217846553U (en) | 2022-07-26 | 2022-07-26 | Device for testing wafer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217846553U (en) |
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2022
- 2022-07-26 CN CN202221949770.7U patent/CN217846553U/en active Active
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