CN217819073U - Novel crystal growth furnace temperature testing device - Google Patents
Novel crystal growth furnace temperature testing device Download PDFInfo
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- CN217819073U CN217819073U CN202222061868.5U CN202222061868U CN217819073U CN 217819073 U CN217819073 U CN 217819073U CN 202222061868 U CN202222061868 U CN 202222061868U CN 217819073 U CN217819073 U CN 217819073U
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Abstract
The utility model belongs to the technical field of PVT method crystal growth, in particular to a novel temperature testing device of a crystal growth furnace, which comprises a furnace body, a heating inner cylinder and a cover plate, wherein the heating inner cylinder is embedded in the furnace body, and the cover plate is detachably connected at the position of an opening end at the top of the heating inner cylinder; the side wall of the furnace body is provided with an assembly hole, the assembly hole extends to the inner surface of the heating inner cylinder, and the inner wall of the heating inner cylinder is compounded with a heat preservation felt protection plate; the opening position of the assembly hole is fixedly connected with an assembly block, and a platinum thermocouple sensor detection head is inserted into the jack position on the surface of the assembly block. The temperature measuring method is not influenced by the blockage of the exhaust hole by the Sic evaporation gas, and the crucible temperature can be monitored in the complete process. According to the summary of a large amount of data, the relation between the actual temperature of the crucible and the surface of the thermal field can be deduced, so that the actual temperature of the crucible can be measured, the temperature of the crucible can be monitored in the whole process of the process, and an effective basis is provided for controlling the crystal growth process.
Description
Technical Field
The utility model relates to a PVT method crystal growth technical field specifically is a novel long brilliant stove temperature test device.
Background
The PVT method crystal growth technology is a method for realizing crystal growth by taking a gas phase as a parent phase or a transmission medium aiming at special properties such as certain high melting point, low solubility and the like, so that the growth by a liquid phase method is difficult to realize. At present, the crystal growth technology adopts a mainstream heating mode, and induction heating is induction coil heating. The electromagnetic generating device is formed by winding the copper pipe, the current passing through the coil is adjusted by setting the coil distance and the coil diameter, and the heating power, the heating temperature, the axial temperature gradient and the radial temperature gradient are controlled by setting the current passing frequency. The current crystal growth furnace comprises a vacuum cavity, a cooling system such as the vacuum cavity, an electromagnetic heating system, an air pressure control system, a material conveying system and the like. The induction coil is provided with a current, high-frequency magnetic lines of force are generated in the coil area according to a Faraday electromagnetic induction law, the high-frequency magnetic lines of force penetrate through a conductor in the magnetic lines of force to excite free electrons, the free electrons are acted by the magnetic lines of force to form eddy current movement, and the conductor material is heated to a specified temperature.
The temperature condition of the process growth stage cannot be reflected in a direct temperature measurement mode because the graphite crucible is heated to over 2200 ℃ during production. At present, most methods adopted by the industry are infrared temperature-sensing testers. However, in the heating process, the SiC gas is solidified after being diffused out of the crucible, and a mesh structure is formed in the cavity of the thermal insulation layer, so that temperature measurement holes are blocked, and the temperature of the crucible cannot be evaluated in the whole process.
In order to solve the problems, the application provides a novel temperature testing device for a crystal growth furnace.
SUMMERY OF THE UTILITY MODEL
Objects of the invention
For solving the technical problem who exists among the background art, the utility model provides a novel long brilliant stove temperature test device has the degree of accuracy that improves temperature measurement and result of use's characteristics.
(II) technical scheme
In order to solve the technical problem, the utility model provides a novel temperature testing device for a crystal growth furnace, which comprises a furnace body, a heating inner cylinder and a cover plate, wherein the heating inner cylinder is embedded in the furnace body, and the cover plate is detachably connected to the position of an opening at the top of the heating inner cylinder;
the side wall of the furnace body is provided with an assembly hole, the assembly hole extends to the inner surface of the heating inner cylinder, and the inner wall of the heating inner cylinder is compounded with a heat preservation felt protection plate;
the opening position of the assembling hole is fixedly connected with an assembling block, a jack position on the surface of the assembling block is inserted with a platinum thermocouple sensor detection head, and one side of the platinum thermocouple sensor detection head is electrically connected with a temperature display;
the temperature display is installed on the surface of the assembling seat, and a water cooling piece is inserted in the assembling seat.
Preferably, the detection head of the platinum thermocouple sensor is inserted into the assembly hole in the side wall of the furnace body, and the insertion end of the detection head of the platinum thermocouple sensor extends to the surface of the protection plate of the heat preservation felt.
Preferably, the upper surface and the lower surface of the assembling block are fixedly connected with clamping tables.
Preferably, the outside joint of assembly piece has the setting element, the setting element includes clamping ring and fixture block, the fixture block symmetry is installed on the clamping ring surface, the clamping ring passes through fixture block and ka tai looks joint.
Preferably, the water cooling part comprises a liquid storage tank, a booster pump and a water cooling tank, the liquid suction end of the booster pump is in conduction connection with the liquid storage tank, and the liquid spraying end of the booster pump is in conduction connection with the water cooling tank.
Preferably, the water cooling tank is inserted into the cavity of the assembling seat, and a drainage joint is arranged on the side wall of the water cooling tank.
The above technical scheme of the utility model has following profitable technological effect:
the temperature measuring method is not influenced by the blockage of the exhaust hole by the Sic evaporation gas, and the crucible temperature can be monitored in the complete process. According to the summary of a large amount of data, the relation between the actual temperature of the crucible and the surface of the thermal field can be deduced, so that the actual temperature of the crucible can be measured, the temperature of the crucible can be monitored in the whole process of the process, and an effective basis is provided for controlling the crystal growth process.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic view of the connection structure of the furnace body and the heating inner cylinder of the present invention;
fig. 3 is a schematic view of the connection structure of the furnace body and the platinum thermocouple sensor detection head of the present invention.
Reference numerals:
1. a furnace body; 101. an assembly hole; 2. heating the inner cylinder; 201. a heat preservation felt protection plate; 3. a cover plate; 4. a liquid storage tank; 5. a booster pump; 6. a water cooling tank; 7. assembling a seat; 8. a temperature display; 9. a platinum thermocouple sensor detection head; 10. assembling the block; 11. clamping a platform; 12. pressing a ring; 13. and (7) clamping blocks.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in detail with reference to the accompanying drawings. It should be understood that the description is intended to be illustrative only and is not intended to limit the scope of the present invention. Moreover, in the following description, descriptions of well-known structures and techniques are omitted so as to not unnecessarily obscure the concepts of the present invention.
Fig. 1 is a schematic view of the overall structure of the present invention;
example 1
As shown in fig. 1, fig. 2 and fig. 3, the novel temperature testing device for the crystal growth furnace provided by the present invention comprises a furnace body 1, a heating inner tube 2 and a cover plate 3, wherein the heating inner tube 2 is embedded in the furnace body 1, and the cover plate 3 is detachably connected to the top opening end position of the heating inner tube 2;
the side wall of the furnace body 1 is provided with an assembly hole 101, the assembly hole 101 extends to the inner surface of the heating inner cylinder 2, and the inner wall of the heating inner cylinder 2 is compounded with a heat preservation felt protection plate 201;
an opening position of the assembling hole 101 is fixedly connected with an assembling block 10, a jack position on the surface of the assembling block 10 is inserted with a platinum thermocouple sensor detection head 9, and one side of the platinum thermocouple sensor detection head 9 is electrically connected with a temperature display 8;
the temperature display 8 is arranged on the surface of the assembling seat 7, and a water cooling piece is inserted into the assembling seat 7.
It should be noted that, the sensor connecting wire is used to electrically connect the platinum thermocouple sensor detection head 9 with the temperature display 8, and the heat preservation effect of the heat preservation blanket protection plate 201 can prevent the temperature outside the heat preservation blanket protection plate 201 from reaching a very high temperature, so the platinum thermocouple sensor detection head 9 is placed on the surface of the heat preservation blanket protection plate 201, the temperature of the heating inner cylinder 2 at the inner side of the heat preservation blanket protection plate 201 is measured through the platinum thermocouple sensor detection head 9, and the temperature is displayed on the surface of the temperature display 8 in real time, so that the temperature measurement effect is good; the same batch of heat preservation felt protection plates 201 are used, a space is reserved for an original thermal field, the space is matched with the thermal field with the thermocouple in a negative tolerance size, the density, the weight and the heat conductivity of a thermal field block of the thermocouple are measured before each production, and the consistency of the temperature measured by the thermocouple is ensured.
Example 2
In this embodiment, as shown in fig. 3, the platinum thermocouple sensor detection head 9 is inserted into the assembly hole 101 in the side wall of the furnace body 1, the insertion end of the platinum thermocouple sensor detection head 9 extends to the surface of the protection plate 201 of the heat insulation felt, the upper surface and the lower surface of the assembly block 10 are fixedly connected with the clamping table 11, a positioning piece is clamped outside the assembly block 10, the positioning piece comprises a pressing ring 12 and a clamping block 13, the clamping block 13 is symmetrically installed on the surface of the pressing ring 12, and the pressing ring 12 is clamped with the clamping table 11 through the clamping block 13.
It should be noted that, when the platinum thermocouple sensor detection head 9 is installed relative to the furnace body 1, the detection end of the platinum thermocouple sensor detection head 9 is inserted into the jack position on the surface of the assembly block 10 until the assembly block 10 blocks and limits the boss position of the platinum thermocouple sensor detection head 9, the positioning piece is pushed relative to the platinum thermocouple sensor detection head 9, the pressing ring 12 is pressed to the boss position along the platinum thermocouple sensor detection head 9, the fixture block 13 of the pressing ring 12 is clamped on the surface of the clamping table 11 of the assembly block 10, the platinum thermocouple sensor detection head 9 is pressed and fixed, and the stability is good.
Example 3
In this embodiment, as shown in fig. 3, the water cooling piece includes liquid reserve tank 4, booster pump 5 and water-cooling tank 6, the imbibition end and the liquid reserve tank 4 turn-on connection of booster pump 5, the hydrojet end and the water-cooling tank 6 turn-on connection of booster pump 5, water-cooling tank 6 pegs graft inside the cavity of mount pad 7, 6 lateral walls of water-cooling tank are provided with the drainage connector.
It should be noted that the water cooling part includes a liquid storage tank 4, a booster pump 5 and a water cooling tank 6, the water cooling tank 6 is inserted into the cavity of the assembly seat 7, the booster pump 5 boosts the water inside the water cooling tank 6, the water enters the water cooling tank 6, and the water cooling tank 6 cools the assembly seat 7 of the temperature display 8 and protects the temperature display 8 from heat.
It is to be understood that the above-described embodiments of the present invention are merely illustrative of or explaining the principles of the invention and are not to be construed as limiting the invention. Therefore, any modifications, equivalents, improvements and the like which are made without departing from the spirit and scope of the present invention should be considered within the protection scope of the present invention. Further, it is intended that the appended claims cover all such variations and modifications as fall within the scope and boundaries of the appended claims or the equivalents of such scope and boundaries.
Claims (6)
1. A novel temperature testing device for a crystal growth furnace comprises a furnace body (1), a heating inner cylinder (2) and a cover plate (3), and is characterized in that the heating inner cylinder (2) is embedded in the furnace body (1), and the cover plate (3) is detachably connected to the position of an opening at the top of the heating inner cylinder (2);
the side wall of the furnace body (1) is provided with an assembly hole (101), the assembly hole (101) extends to the inner surface of the heating inner cylinder (2), and the inner wall of the heating inner cylinder (2) is compounded with a heat preservation felt protection plate (201);
an opening position of the assembling hole (101) is fixedly connected with an assembling block (10), a jack position on the surface of the assembling block (10) is inserted with a platinum thermocouple sensor detection head (9), and the platinum thermocouple sensor detection head (9) is electrically connected with a temperature display (8);
the temperature display (8) is arranged on the surface of the assembling seat (7), and a water cooling piece is inserted into the assembling seat (7).
2. The novel crystal growth furnace temperature testing device as claimed in claim 1, wherein the platinum thermocouple sensor detection head (9) is inserted into the assembly hole (101) in the side wall of the furnace body (1), and the insertion end of the platinum thermocouple sensor detection head (9) extends to the surface of the heat preservation felt protection plate (201).
3. The novel crystal growth furnace temperature testing device as claimed in claim 1, wherein the upper surface and the lower surface of the assembling block (10) are fixedly connected with clamping tables (11).
4. The novel crystal growth furnace temperature testing device as claimed in claim 1, wherein a positioning member is clamped outside the assembling block (10), the positioning member comprises a pressing ring (12) and clamping blocks (13), the clamping blocks (13) are symmetrically installed on the surface of the pressing ring (12), and the pressing ring (12) is clamped with the clamping table (11) through the clamping blocks (13).
5. The novel crystal growth furnace temperature testing device as claimed in claim 1, wherein the water cooling part comprises a liquid storage tank (4), a booster pump (5) and a water cooling tank (6), a liquid suction end of the booster pump (5) is in conduction connection with the liquid storage tank (4), and a liquid spraying end of the booster pump (5) is in conduction connection with the water cooling tank (6).
6. The novel crystal growth furnace temperature testing device as claimed in claim 5, wherein the water cooling tank (6) is inserted into the cavity of the assembling seat (7), and a drainage joint is arranged on the side wall of the water cooling tank (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222061868.5U CN217819073U (en) | 2022-08-05 | 2022-08-05 | Novel crystal growth furnace temperature testing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222061868.5U CN217819073U (en) | 2022-08-05 | 2022-08-05 | Novel crystal growth furnace temperature testing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217819073U true CN217819073U (en) | 2022-11-15 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222061868.5U Active CN217819073U (en) | 2022-08-05 | 2022-08-05 | Novel crystal growth furnace temperature testing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217819073U (en) |
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2022
- 2022-08-05 CN CN202222061868.5U patent/CN217819073U/en active Active
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