CN217766134U - Perovskite film defect detection equipment - Google Patents
Perovskite film defect detection equipment Download PDFInfo
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- CN217766134U CN217766134U CN202221671563.XU CN202221671563U CN217766134U CN 217766134 U CN217766134 U CN 217766134U CN 202221671563 U CN202221671563 U CN 202221671563U CN 217766134 U CN217766134 U CN 217766134U
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Abstract
The utility model relates to a perovskite battery technical field, concretely relates to defect detecting equipment of perovskite membrane. The defect detection equipment for the perovskite film comprises a sealed cabin, a first detection unit, a second detection unit and a signal processing unit; the first detection unit comprises a first conveying device, a first laser source emitting device, a first sensor, a camera and a first portal frame; the second detection unit comprises a second conveying device, a second laser source emitting device, a second sensor, an optical detector and a second portal frame; the signal processing unit is respectively connected with the camera and the optical detector. Through the cooperation of each unit, can carry out nondestructive test to large tracts of land perovskite film, high-efficient, can further improve the film forming quality of perovskite.
Description
Technical Field
The utility model relates to a perovskite battery technical field particularly, relates to a defect detecting equipment of perovskite membrane.
Background
The perovskite novel solar cell has high visible light absorption, simple film forming process and fast improvement of photoelectric conversion efficiency, and is concerned worldwide. The coating method has the advantages of low cost, large production quantity, good continuity and the like, and is one of the most industrialized deposition techniques in the field of perovskite solar cells, but the control of the uniformity of a large-area thin film and the reduction of the defect density of the thin film are still a challenge.
Quality inspection in the process of trial production and mass production of large-area uniformly prepared perovskite film layers is generally performed by manual appearance inspection and destructive inspection in a laboratory, so that the efficiency is low, and the quality is difficult to guarantee.
The prior art has the following defects for the defect detection of perovskite films: 1) From the range of 200-2500nm, the wavelength of light is changed step by step so that the detection process needs a certain time to complete; 2) Detection of absorbance for large area thin films is not feasible due to the need for a full wavelength light source and monochromator.
In view of this, the utility model discloses it is special.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a defect detecting equipment of perovskite membrane, through the cooperation of each unit, can carry out nondestructive test to large tracts of land perovskite film, it is high-efficient, can further improve the film forming quality of perovskite.
In order to realize the above purpose of the utility model, the following technical scheme is adopted:
the defect detection equipment for the perovskite film comprises a sealed cabin, a first detection unit and a second detection unit; the first detection unit and the second detection unit are arranged in the sealed cabin;
the first detection unit comprises a first conveying device, a first laser source emitting device, a first sensor, a camera and a first portal frame; the first conveying device comprises a first frame and a first conveying component; the first portal frame comprises a first beam and two first supports, and the first portal frame spans the first conveying device; the first laser source emitting device is used for forming a continuous laser source, and the continuous laser source is arranged on the first beam; the first sensor is positioned on the first gantry and directly below the continuous laser source; the camera is arranged below the first conveying part and opposite to the continuous laser source;
the second detection unit comprises a second conveying device, a second laser emitting device, a second sensor, a light detector and a second portal frame; the second conveying device comprises a second rack and a second conveying component; the second portal frame comprises a second beam and two second supports, and the second portal frame spans the second conveying device; the second laser emitting device is used for forming a pulse laser source, and the pulse laser source is arranged on the second beam; the second sensor is positioned on the second frame and is right below the pulse laser source; the light detector is arranged below the second transmission component and opposite to the pulse laser source;
the first conveying device and the second conveying device are in the same conveying direction and are sequentially arranged.
In one embodiment, the first laser source emitting device comprises a 445nm continuous laser, a first optical splitter and a first optical fiber connected in sequence.
In one embodiment, the continuous laser source is 7-9 beams.
In one embodiment, the first frame includes two first conveyor frames arranged in parallel, and a first support chassis supporting the two first conveyor frames; the first conveying part is arranged between the two first conveying racks;
the first conveying member is a plurality of parallel first conveying rollers.
In one embodiment, the first sensor is provided on either of the opposing faces of the two first conveyor frames.
In one embodiment, the second laser emitting device comprises a 450nm picosecond pulse laser, a second beam splitter and a second optical fiber which are connected in sequence.
In one embodiment, the pulsed laser source is 7-9 beams.
In one embodiment, the second frame includes two second conveyor frames arranged in parallel, and a second support chassis supporting the two second conveyor frames; the second conveying part is arranged between the two second conveying racks;
the second conveying part is a plurality of second conveying rollers which are parallel.
In one embodiment, the second sensor is provided on either of the opposing faces of the two second conveyor frames.
In one embodiment, the defect inspection apparatus for perovskite film further comprises a post-processing unit;
the post-processing unit includes an image analysis system and a signal processing system.
In one embodiment, the sealed cabin is provided with a feeding port and a discharging port on opposite wall surfaces along the conveying direction of the first conveying device or the second conveying device.
Compared with the prior art, the beneficial effects of the utility model are that:
through the cooperation of each unit, can carry out nondestructive test to large tracts of land perovskite film, high-efficient, can further improve the film forming quality of perovskite.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the technical solutions in the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is an overall schematic view of a defect detecting apparatus for perovskite film of one embodiment;
FIG. 2 is an overall schematic view of a defect detecting apparatus for perovskite film of another embodiment;
FIG. 3 is a schematic structural diagram of a first detecting unit;
FIG. 4 is a schematic structural diagram of a second detecting unit;
FIG. 5 is a schematic connection diagram of a first laser source emitting device;
fig. 6 is a schematic connection diagram of a second laser source emitting device.
Reference numerals:
1-capsule, 101-feed inlet, 102-discharge outlet, 2-first detection unit, 201-first transfer device, 2010-first rack, 2011-first transfer component, 2012-first transfer rack, 2013-first support chassis, 202-continuous laser source, 203-first sensor, 204-camera, 205-first portal frame, 2051-first beam, 2052-first support, 3-second detection unit, 301-second transfer device, 3010-second rack, 3011-second transfer component, 3012-second transfer rack, 3013-second support chassis, 302-pulsed laser source, 303-second sensor, 304-photodetector, 305-second portal frame, 3051-second beam, 3052-second support, 4-post-processing unit, 5-laser source assembly, 6-first laser source emitting device, 601-continuous laser, 602-first beam splitter, 603-first optical fiber, 7-second fiber, 7-3052-second laser source emitting device, 703-laser beam, and fiber laser splitter.
Detailed Description
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate the position or positional relationship based on the position or positional relationship shown in the drawings, or the position or positional relationship which is usually placed when the product of the present invention is used, and are only for convenience of description and simplification of the description, but do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood as a specific case by those skilled in the art.
The defect detection equipment for the perovskite film comprises a sealed cabin, a first detection unit and a second detection unit; the first detection unit and the second detection unit are arranged in the sealed cabin;
the first detection unit comprises a first conveying device, a first laser source emitting device, a first sensor, a camera and a first portal frame; the first conveying device comprises a first rack and a first conveying part; the first portal frame comprises a first beam and two first supports, and the first portal frame spans the first conveying device; the first laser source emitting device is used for forming a continuous laser source, and the continuous laser source is arranged on the first beam; the first sensor is positioned on the first frame and is right below the continuous laser source; the camera is arranged below the first conveying part and opposite to the continuous laser source;
the second detection unit comprises a second conveying device, a second laser emitting device, a second sensor, a light detector and a second portal frame; the second conveying device comprises a second rack and a second conveying component; the second portal frame comprises a second beam and two second supports, and the second portal frame spans the second conveying device; the second laser emitting device is used for forming a pulse laser source, and the pulse laser source is arranged on the second beam; the second sensor is positioned on the second frame and is right below the pulse laser source; the light detector is arranged below the second transmission part and opposite to the pulse laser source;
the first conveying device and the second conveying device are in the same conveying direction and are sequentially arranged.
The preparation process of the perovskite solar module comprises the following steps: the method comprises the steps of front electrode preparation, P1 laser scribing, first carrier transmission layer preparation, perovskite absorption layer preparation, second carrier transmission layer preparation, P2 laser scribing, back electrode preparation, P3 laser scribing, insulation and edge clearing, guide line, packaging, wire box mounting, testing and packaging. The defect detection equipment for the perovskite film is applied after the perovskite absorption layer is prepared and before the second carrier transmission layer is prepared.
The intensity of luminescence is proportional to the concentration of the locally produced non-equilibrium minority carriers, and the defect is a strong recombination center of the minority carriers, so that the minority carrier concentration in the region is reduced to weaken the fluorescence effect, and the region is represented as a dark point, a line or a certain region on the coating pin, and the region with less recombination in the sample wafer is represented as a brighter region. Therefore, the presence of defects and impurities in the sample can be judged by PL.
The device has two laser light sources, the wavelength stability is within the range of +/-5 nm, the output power is 1-1000mw, the power stability is less than 1 percent, and the light beam emission angle is less than 1 degree. The laser light source generates 8 point light sources through the light splitter, and the point light sources are fixedly arranged on the portal frame and are positioned right above the perovskite photovoltaic module; and an optical fiber is arranged right below the point light source at the lower side of the perovskite photovoltaic module to guide an optical signal into the optical detector.
For semiconductor thin film solar cells, characterization of the fluorescence lifetime is helpful for studying carrier diffusion length/distance; the carrier recombination process, i.e. free electron-hole luminescence, is also a process directly related to its performance. The planar heterojunction perovskite solar cell has strong photoelectric properties except for a perovskite layer, and an electron transport layer and a hole transport layer are required to provide independent transport channels for electrons and holes. The structure of the composition is divided into a p-i-n type structure and an n-i-p type structure, wherein the perovskite layer forms two interfaces with the electron transport layer and the hole transport layer respectively, and the rapid separation of electrons and holes is realized on the two interfaces.
The perovskite solar cell has better absorption in a blue-green light wave band, the band gap of the material is mainly concentrated near 1.6eV, and the stable PL collection can be easily realized by matching a blue laser as a PL excitation source.
In addition, the fluorescence life attenuation scale of the perovskite solar cell mainly covers subnanosecond to several microseconds, a picosecond laser is used as an excitation source, and TRPL measurement with a spectral range covering 470-870 nm and a time scale covering 100 ps-10 mu s can be realized by combining a time domain measurement method of TCSPC (time-related single photon counting).
It should be noted that the detection principle in the second detection unit is based on the detection principle of TCSPC photo detector in the prior art. The fluorescence lifetime test is TCSPC (time dependent single photon counting), and a large number of photon statistics are fit to the fluorescence lifetime curve. TCSPC is built based on this concept of single photon statistics. The TCSPC photo detector mainly comprises a pulse laser, a high-sensitivity photon detector and a TCSPC card. The laser and the detector can output synchronous electric signals when emitting laser and detecting photons, the TCSPC card is used for detecting, acquiring and calculating the micro time and macro time of each fluorescence photon, and the fluorescence life curve is statistically constructed. The photon detector comprises an optical prism, a motor for controlling the angle of the prism and a signal receiver.
Aiming at the physical characteristics of the perovskite, a 445nm continuous laser and a 450nm picosecond pulse laser are adopted as excitation sources, so that the excitation efficiency is ensured, and the PL measurement range of a wider waveband is considered. The 320mm focal length image correction spectrometer is provided with a low-noise refrigeration type photomultiplier which outputs a synchronous electric signal when detecting photons, a high-sensitivity TCSPC measuring method is matched to realize nanosecond microsecond life scale, and a fluorescence life attenuation curve is fitted through a fourth-order index; through automatic assembly line device, realize that large tracts of land perovskite battery carries out real-time detection in transmission process to the realization is to the control of volume production process.
In one embodiment, the defect inspection apparatus for perovskite film further comprises a post-processing unit; the post-processing unit includes an image analysis system and a signal processing system.
In one embodiment, the image analysis system is a conventional analysis system of the prior art; for analyzing the images taken by the camera.
In one implementation, the evaluation of the AI of the film quality is realized by comprehensively adopting three technologies of deep learning, a traditional algorithm and a rule algorithm, and the evaluation system specifically comprises a stereogram synthesis module based on the traditional visual algorithm, a foreground segmentation module based on self-supervision learning, an area positioning module based on the traditional vision, a defect learning module based on the deep learning, and auxiliary modules such as image input and post-processing. The multi-defect classification identification is realized through a combined algorithm solution, and the characteristics of zero killing omission and extremely low killing rate are realized; (1) the quality of the perovskite film can be detected in the process of forming the perovskite film; (2) defects of the coating process can be detected such as: pin holes, streaks, white streaks, and the like. In one embodiment, the deep learning, conventional algorithm specifically includes: image input, stereogram synthesis, foreground segmentation, region positioning, defect detection and post-processing algorithm.
In one embodiment, the light detector is connected to a signal processing system. The signal processing system comprises a TCSPC card as in the prior art. I.e. the pulsed laser source and the photo detector in the second detection system cooperate with the TCSPC card in the signal processing system, the same principle as the TCSPC photo detector of the prior art, to obtain the fluorescence lifetime decay curve.
In one embodiment, the first laser source emitting device comprises a 445nm continuous laser, a first optical splitter and a first optical fiber connected in sequence. Adopt 445nm continuous laser emission light source, reuse first optical splitter with the light source divide into the multibeam, a plurality of first optic fibre and the many light beam one-to-one that the optical splitter divides, the light-emitting port of a plurality of first optic fibre is vertical setting downwards, the perovskite subassembly place plane in the perpendicular to detection promptly. The first optical fiber is fixed to the first beam, which means that the continuous laser source is fixed to the first beam.
In one embodiment, the 445nm continuous laser and the first beam splitter are located on one side of the first conveyor.
In one embodiment, the continuous laser source is 7-9 beams, for example 8 beams.
The first conveyor is used for conveying the perovskite component for detection.
In one embodiment, the first frame includes two first conveyor frames arranged in parallel, and a first support chassis supporting the two first conveyor frames; the first conveying part is arranged between the two first conveying racks.
In one embodiment, the first conveying member is a plurality of parallel first conveying rollers.
In one embodiment, the first sensor is provided on either of the opposing faces of the two first conveyor frames.
In one embodiment, the second laser emitting device comprises a 450nm picosecond pulse laser, a second beam splitter and a second optical fiber which are connected in sequence. The 450nm picosecond pulse laser emits pulse laser, the light is divided into a plurality of beams by the second light splitter, the pulse laser is guided to the upper part of the second conveying device by the second optical fiber, namely, the second optical fiber is fixed on the second cross beam, and the light outlet port of the second optical fiber is vertically downward, namely, is vertical to the plane where the perovskite component in detection is located. It is understood that a pulsed laser source is fixed to the second beam.
In one embodiment, the 450nm picosecond pulse laser and the second beam splitter are located on one side of the second conveyor.
In one embodiment, the pulsed laser source is 7-9 beams; for example 8 beams.
The second conveying device is used for conveying the perovskite component for detection. In one embodiment, the second frame includes two second conveyor frames arranged in parallel, and a second support chassis supporting the two second conveyor frames; the second conveying component is arranged between the two second conveying racks. In one embodiment, the second conveying member is a plurality of parallel second conveying rollers.
In one embodiment, the second sensor is disposed on either of the opposing faces of the two second conveyor stands.
In one embodiment, the first beam splitter and the second beam splitter are both conventional beam splitters in the prior art.
In one embodiment, the defect detection device for perovskite film further comprises a display device for images and data.
In one embodiment, the sealed cabin is provided with a feeding port and a discharging port on opposite wall surfaces along the conveying direction of the first conveying device or the second conveying device. The sealed cabin forms a closed space, and the inside of the sealed cabin is provided with a black antireflection coating. In one embodiment, the feed port is adjacent to the first detection unit; the discharge port is close to the second detection unit.
In the defect detection apparatus for perovskite film, the first detection unit is used for detecting the film forming quality of a perovskite layer in a perovskite component, and can detect defects of a coating process such as: pin holes, streaks, white streaks, and the like. The second detection unit is used for further detecting a perovskite layer in the perovskite component, further combining a signal processing system in the prior art and obtaining a fluorescence life curve, can assist in judging the film forming quality of the perovskite according to the fluorescence life curve, helps personnel to analyze and optimize the process of the perovskite, and further improves the film forming quality of the perovskite.
The following is further illustrated with reference to specific examples.
Example 1
The defect detection equipment for the perovskite film, as shown in fig. 1, 3, 4, 5 and 6, comprises a sealed cabin 1, a first detection unit 2 and a second detection unit 3; the first detection unit 2 and the second detection unit 3 are arranged in the sealed cabin 1.
The first detection unit 2 comprises a first conveying device 201, a first laser source emitting device 6, a first sensor 203, a camera 204 and a first portal frame 205; the first transfer device 201 comprises a first frame 2010 and a first transfer part 2011; the first gantry 205 comprises a first beam 2051 and two first supports 2052, the first gantry 205 spans the first conveyor 201; the first laser source emitting device 6 comprises a 445nm continuous laser 601, a first optical splitter 602 and a first optical fiber 603 which are connected in sequence and used for forming a continuous laser source 202, wherein the continuous laser source 202 is arranged on the first beam 2051 and vertically arranged downwards; the first sensor 203 is located on the first gantry 2010 and directly below the continuous laser source 202; the camera 204 is below the first transfer member 2011 and is disposed opposite the continuous laser source 202.
The continuous laser source 202 is 8 beams.
The first frame 2010 includes two first transfer frames 2012 arranged in parallel, and a first support chassis 2013 supporting the two first transfer frames 2012; the first conveying part 2011 is arranged between the two first conveying racks 2012; the first transfer member 2011 is a plurality of parallel first transfer rollers. The first sensor 203 is provided on either of opposite surfaces of the two first transfer frames 2012.
The second detection unit 3 comprises a second conveyor 301, a second laser source emitting device 7, a second sensor 303, a light detector 304 and a second gantry 305; the second conveying device 301 includes a second frame 3010 and a second conveying member 3011; the second portal frame 305 comprises a second beam 3051 and two second brackets 3052, and the second portal frame 305 spans across the second conveyor 301; the second laser source emitting device 7 comprises a 450nm picosecond pulse laser 701, a second optical splitter 702 and a second optical fiber 703 which are sequentially connected and used for forming a pulse laser source 302, and the pulse laser source 302 is arranged on the second beam 3051 and vertically arranged downwards; the second sensor 303 is located on the second frame 3010 and directly below the pulsed laser source 302; the photodetector 304 is disposed below the second conveyance member 3011 and opposite to the pulsed laser source 302.
The pulsed laser source 302 is 8 beams.
The second frame 3010 includes two second transfer frames 3012 arranged in parallel, and a second support chassis 3013 supporting the two second transfer frames 3012; the second conveying component 3011 is arranged between the two second conveying racks 3012; the second conveying member 3011 is a plurality of parallel second conveying rollers. The second sensors 303 are being disposed on either opposing face of the two second conveyor racks 3012.
Along the conveying direction of the first conveying device 201 or the second conveying device 301, a feeding port 101 and a discharging port 102 are respectively arranged on opposite wall surfaces of the sealed cabin 1.
The first conveying device 201 and the second conveying device 301 have the same conveying direction and are arranged in sequence; namely, the first detecting unit 2 in fig. 3 and the second detecting unit 3 in fig. 4 are connected in sequence; the first detecting unit 2 is close to the feeding hole 101, and the second detecting unit 3 is close to the discharging hole 102.
Further, a post-processing unit 4 is also included; the post-processing unit 4 comprises an image analysis system and a signal processing system, as shown in fig. 2.
Example 2
The method for detecting the defect of the perovskite film by using the defect detection device of the perovskite film in the embodiment 1 comprises the following steps:
the feeding port 101 of the sealed cabin 1 is opened, the perovskite component 5 to be detected enters the sealed cabin 1, the feeding port 101 is closed, the perovskite component 5 to be detected is firstly detected by the first detection unit 2, namely the first conveying device 201 runs, and the perovskite component 5 moves under the action of the first conveying part 2011; when the front end of the perovskite component 5 moves to the first sensor 203, the 445nm continuous laser 601 emits laser light, 8 continuous laser light sources 202 are formed through the first beam splitter 602 and the first optical fiber 603, and simultaneously, the high-sensitivity high-resolution camera 204 senses light along with the movement of the perovskite component 5, and then the light is analyzed through the image analysis system of the post-processing unit 4, so that the quality of the perovskite film forming process can be detected, and defects in the coating process can be detected, such as: pin holes, streaks, white streaks, and the like.
Next, the perovskite component 5 moves into the second detection unit 3 for detection, that is, the second conveyor 301 is started, the perovskite component 5 moves under the action of the second conveyor component 3011, when the perovskite component moves to the second sensor 303, the 450nm picosecond pulse laser 701 emits pulse laser, 8 pulse laser sources 302 are formed through the second beam splitter 702 and the second optical fiber 703, the moving perovskite component 5 is irradiated with the pulse laser, and meanwhile, the optical detector 304 receives signals, transmits the signals to the signal processing unit for processing, and draws a fluorescence lifetime curve.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention.
Claims (10)
1. The defect detection equipment for the perovskite film is characterized by comprising a sealed cabin, a first detection unit and a second detection unit; the first detection unit and the second detection unit are arranged in the sealed cabin;
the first detection unit comprises a first conveying device, a first laser source emitting device, a first sensor, a camera and a first portal frame; the first conveying device comprises a first frame and a first conveying component; the first portal frame comprises a first beam and two first supports, and the first portal frame spans the first conveying device; the first laser source emitting device is used for forming a continuous laser source, and the continuous laser source is arranged on the first beam; the first sensor is positioned on the first frame and is right below the continuous laser source; the camera is arranged below the first conveying part and opposite to the continuous laser source;
the second detection unit comprises a second conveying device, a second laser emitting device, a second sensor, a light detector and a second portal frame; the second conveying device comprises a second rack and a second conveying component; the second portal frame comprises a second beam and two second supports, and the second portal frame spans the second conveying device; the second laser emitting device is used for forming a pulse laser source, and the pulse laser source is arranged on the second beam; the second sensor is positioned on the second frame and is right below the pulse laser source; the light detector is arranged below the second transmission component and opposite to the pulse laser source;
the first conveying device and the second conveying device are in the same conveying direction and are sequentially arranged.
2. The apparatus for defect detection of perovskite film as defined in claim 1, wherein said first laser source emitting means comprises a 445nm continuous laser, a first beam splitter and a first optical fiber connected in this order.
3. The apparatus for defect inspection of perovskite film as defined in claim 1, wherein said continuous laser source is 7-9 beams.
4. The defect inspection apparatus for perovskite film as defined in claim 1, wherein said first frame comprises two first conveyor frames disposed in parallel, and a first support chassis supporting the two first conveyor frames; the first conveying part is arranged between the two first conveying racks;
the first conveying member is a plurality of parallel first conveying rollers.
5. The apparatus for defect inspection of perovskite film as defined in claim 4, wherein said first sensor is provided on either of the opposing faces of two of said first conveyor frames.
6. The apparatus for detecting defects in a perovskite film as defined in claim 1, wherein the second laser emitting device comprises a 450nm picosecond pulse laser, a second beam splitter and a second optical fiber connected in this order;
the pulse laser source is 7-9 beams.
7. The apparatus for defect inspection of a perovskite film according to claim 1, wherein the second frame comprises two second conveyor frames disposed in parallel, and a second support chassis supporting the two second conveyor frames; the second conveying part is arranged between the two second conveying racks;
the second conveying part is a plurality of parallel second conveying rollers.
8. The apparatus for defect inspection of perovskite film as defined in claim 7, wherein said second sensor is provided on either of the opposing faces of two of said second conveyor frames.
9. The defect inspection apparatus for perovskite film as defined in claim 1, further comprising a post-processing unit;
the post-processing unit includes an image analysis system and a signal processing system.
10. The apparatus for detecting defects in a perovskite film as defined in claim 1, wherein a feed port and a discharge port are provided on opposite wall surfaces of the capsule in the conveying direction of the first conveying means or the second conveying means, respectively.
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