CN217641282U

CN217641282U - Wafer clamp base

Info

Publication number: CN217641282U
Application number: CN202221486343.XU
Authority: CN
Inventors: 廖彬; 张昌文; 周铁军; 曾琦; 翁吉露; 王驭辉
Original assignee: Guangdong Vital Micro Electronics Technology Co Ltd
Current assignee: Guangdong Vital Micro Electronics Technology Co Ltd
Priority date: 2022-06-14
Filing date: 2022-06-14
Publication date: 2022-10-21
Anticipated expiration: 2032-06-14

Abstract

The utility model relates to the technical field of semiconductor processing, and provides a wafer clamp base, which comprises a base body; the top surface of the seat body is provided with a first partition and a second partition, the first partition is provided with a positioning step, and the second partition is provided with a clamping groove and a framework groove; the clamping groove is formed in the edge, far away from the first partition, of the second partition, the framework groove is formed in the middle of the first partition, and the framework groove extends along the long axis direction of the first partition. The utility model discloses can guarantee to place at every turn that wafer anchor clamps all can accurate location, and improve the processing cleaning efficiency of wafer.

Description

Wafer clamp base

Technical Field

The utility model relates to a semiconductor processing technology field especially relates to a wafer anchor clamps base.

Background

With the continuous improvement of production level, production automation plays an increasingly important role in industrial production, and is a level important factor for measuring an enterprise. The semiconductor industry has been rapidly developed in recent decades, and semiconductor photoelectric devices have become an indispensable part of our production and life. The processing production level of semiconductor raw materials and devices directly represents the development level of the semiconductor industry, so that high-precision, efficient and stable mechanical automation equipment becomes an important standard of the development level of the semiconductor industry.

Along with automatic upgrading, the automatic cleaning mode is gradually implemented in the existing cleaning mode, in the automatic cleaning process, automatic equipment uses a wafer clamp to take and place a wafer, the wafer and the clamp thereof are required to be placed at the same position every time, and the wafer is not easy to fall after being horizontally placed, so that the wafer clamp needs to specially design a base suitable for the wafer clamp to be placed, and the placing position of the wafer clamp is ensured to be fixed.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a wafer anchor clamps base can guarantee to place at every turn that wafer anchor clamps all can accurate location, and improves the processing cleaning efficiency of wafer.

In order to solve the above technical problem, the present invention provides a wafer clamp base, which comprises a base body; the top surface of the seat body is provided with a first partition and a second partition, the first partition is provided with a positioning step, and the second partition is provided with a clamping groove and a framework groove; the clamping groove is formed in the edge, far away from the first partition, of the second partition, the framework groove is formed in the middle of the first partition, and the framework groove extends along the long axis direction of the first partition.

Preferably, the base body is a rectangular parallelepiped structure, and the first partition and the second partition are sequentially arranged along a long axis direction of the base body.

Preferably, the seat body is provided with a round corner structure.

Preferably, the first partition is overlapped with the bottom surface of the positioning step, and the side surface of the positioning step, which is close to the second partition, is recessed to form a clamping part.

Preferably, the clamping portions are of a symmetrical structure, one end of the framework groove extends to the edge of the seat body, and the other end of the framework groove extends to the clamping portions.

Preferably, the thickness of the positioning step is greater than that of the seat body.

Preferably, the width of the skeleton groove is smaller than the width of the card slot, and the depth of the skeleton groove is smaller than the depth of the card slot.

Preferably, the length of the first partition is greater than the length of the second partition.

Preferably, the base body is provided with a clamping hole near the bottom surface of the second partition.

Preferably, the number of the clamping holes is two, and the two clamping holes are symmetrically arranged.

The utility model discloses following beneficial effect has:

the wafer clamp base of the utility model is provided with the positioning step, when the wafer clamp is placed on the base, the positioning step can be abutted against the wafer clamp, so that the wafer clamp is accurately positioned, and the wafer clamp is ensured to be placed at one position every time; meanwhile, the framework grooves and the clamping grooves are formed, different types of wafer clamps can be adaptively matched, the clamps and the frameworks corresponding to the clamps can be conveniently inserted into the clamping grooves and the framework grooves, and the crystal clamps can be horizontally placed on the base.

Drawings

Fig. 1 is a schematic structural diagram of a wafer chuck base according to an embodiment of the present invention.

Reference numerals are as follows:

1. a base body; 2. positioning a step; 3. a card slot; 4. a framework groove; 5. and (6) clamping the hole.

Detailed Description

The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

In the description of the present application, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience in describing the present application and simplifying the description, but do not indicate or imply that the referred device or element must have a particular orientation, be constructed in a particular orientation, and be operated, and thus should not be construed as limiting the present application.

In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood in a specific case by those of ordinary skill in the art.

Referring to fig. 1, a preferred embodiment of the present invention provides a wafer chuck base, which includes a base body 1; the top surface of the seat body 1 is provided with a first partition and a second partition, the first partition is provided with a positioning step 2, and the second partition is provided with a clamping groove 3 and a framework groove 4; the clamping groove 3 is arranged at the edge of the second partition, which is far away from the first partition, the framework groove 4 is arranged in the middle of the first partition, and the framework groove 4 extends along the long axis direction of the first partition.

In some preferred embodiments of the present invention, the base 1 is a rectangular parallelepiped structure, and the first partition and the second partition are sequentially arranged along the long axis direction of the base 1. Specifically, the wafer clamp slides into the first partition along one side of the long axis of the seat body 1, and slides on the first partition until the wafer clamp is abutted to the positioning step.

In some preferred embodiments of the present invention, the seat body 1 is configured as a round structure. In particular, the rounded corner structure can avoid scratching surrounding equipment or wafers.

In some preferred embodiments of the present invention, the first partition overlaps with the bottom surface of the positioning step 2, and the side surface of the positioning step 2 near the second partition is recessed to form the engaging portion. The clamping part prevents the wafer base from sliding along the long axis direction of the base body 1, and simultaneously prevents the wafer base from sliding towards the short axis direction, thereby improving the positioning accuracy.

In some preferred embodiments of the present invention, the fastening portion is a symmetrical structure, one end of the frame slot 4 extends to the edge of the seat body 1, and the other end extends to the fastening portion. Specifically, the frame slots 4 extend to the edge of the seat body 1, so that the wafer clamp can be conveniently and directly inserted into the seat body 1 in a sliding manner from the edge.

In some preferred embodiments of the present invention, the thickness of the positioning step is greater than the thickness of the seat body 1.

In some preferred embodiments of the present invention, the width of the frame groove 4 is smaller than the width of the slot 3, and the depth of the frame groove 4 is smaller than the depth of the slot 3.

In some preferred embodiments of the present invention, the length of the first partition is greater than the length of the second partition.

In some preferred embodiments of the present invention, the seat body 1 is provided with a fastening hole 5 near the bottom surface of the second partition. Specifically, the locking hole 5 can fix the position of the seat body 1.

In some preferred embodiments of the present invention, the two card holes 5 are provided, and the two card holes 5 are symmetrically disposed.

To sum up, the preferred embodiment of the present invention provides a wafer clamp base, which is compared with the prior art:

the base of the wafer clamp is provided with the positioning step 2, when the wafer clamp is placed on the base, the positioning step 2 can be abutted against the wafer clamp, so that the wafer clamp is accurately positioned, and the wafer clamp is ensured to be placed at one position each time; set up skeleton groove 4 and draw-in groove 3 simultaneously, can the different types of wafer anchor clamps of adaptability cooperation, make things convenient for checkpost and skeleton that the anchor clamps correspond to insert and establish in draw-in groove 3 and skeleton groove 4, guarantee that the crystal anchor clamps level is placed on the base.

The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of modifications and replacements can be made without departing from the technical principle of the present invention, and these modifications and replacements should also be regarded as the protection scope of the present invention.

Claims

1. A wafer clamp base is characterized by comprising a base body (1); the top surface of the seat body (1) is provided with a first partition and a second partition, the first partition is provided with a positioning step (2), and the second partition is provided with a clamping groove (3) and a framework groove (4); the clamping grooves (3) are formed in the edges, far away from the first partition, of the second partition, the framework grooves (4) are formed in the middle of the first partition, and the framework grooves (4) extend in the long axis direction of the first partition.

2. The wafer holder pedestal of claim 1, wherein: the base body (1) is of a cuboid structure, and the first partition and the second partition are sequentially arranged along the long axis direction of the base body (1).

3. The wafer holder pedestal of claim 2, wherein: the seat body (1) is arranged to be of a round angle structure.

4. The wafer holder pedestal of claim 1, wherein: the first partition is overlapped with the bottom surface of the positioning step (2), and the side surface of the positioning step (2) close to the second partition is sunken to form a clamping part.

5. The wafer holder pedestal of claim 4, wherein: the clamping parts are of symmetrical structures, one end of the framework groove (4) extends to the edge of the seat body (1), and the other end of the framework groove extends to the clamping parts.

6. The wafer holder pedestal of claim 1, wherein: the thickness of the positioning step (2) is larger than that of the seat body (1).

7. The wafer holder pedestal of claim 1, wherein: the width of the framework groove (4) is smaller than that of the clamping groove (3), and the depth of the framework groove (4) is smaller than that of the clamping groove (3).

8. The wafer holder pedestal of claim 1, wherein: the length of the first partition is greater than the length of the second partition.

9. The wafer holder pedestal of claim 1, wherein: and a clamping hole (5) is formed in the bottom surface, close to the second partition, of the seat body (1).

10. The wafer holder pedestal of claim 9, wherein: the number of the clamping holes (5) is two, and the two clamping holes (5) are symmetrically arranged.