CN217641255U - Wafer magazine unlocking mechanism and loading attachment - Google Patents

Abstract

The utility model discloses a wafer magazine unlocking mechanism and loading attachment, wafer magazine unlocking mechanism include transfer line, driving piece, unlocking piece and rotating member, the transfer line includes transmission portion and rotation portion, the driving piece is connected with transmission portion for drive transfer line translation, unlocking piece tip has the lock key, rotating member one end is connected with unlocking piece, the other end is connected with rotation portion, the rotating member bypasses the axis rotation that unlocking piece is located along with the translation of transmission portion; the feeding device comprises a wafer material box unlocking mechanism. The utility model discloses in, the mode that adopts the transfer line translation is with the power transmission of driving piece to unlocking piece, and the transfer line has certain rigidity, is difficult for being blocked in the motion process and pauses, has overcome the defect that unblanks not in place, and the translation motion of transfer line converts the rotary motion of unlocking piece into, because unlocking piece and the coaxial rotation of rotating member, the rotating member is efficient to the power transmission of unlocking piece, and the wafer magazine unblanks smoothly, and getting of wafer is put efficiently.

Description

Wafer magazine unlocking mechanism and loading attachment

Technical Field

The utility model relates to a wafer production and detection technology field especially relate to a wafer magazine unlocking mechanism and loading attachment.

Background

The wafer is used for making the silicon wafer that the silicon semiconductor circuit used, and the wafer is generally concentrated and is deposited in the magazine, realizes batch material loading and unloading to the wafer through transporting the magazine, and the box lid of magazine is locked on the box body, when getting and putting the wafer, need open the lock earlier and open the lid again, and in the correlation technique, the unlocking mechanism sets up unreasonablely, is obstructed easily at the in-process of unblanking, leads to unblanking not in place, influences the efficiency of getting and putting of wafer.

SUMMERY OF THE UTILITY MODEL

The utility model discloses aim at solving one of the technical problem that exists among the prior art at least. Therefore, the utility model provides a wafer magazine unlocking mechanism unblanks smoothly, and getting of wafer is efficient.

The utility model discloses still provide a loading attachment who has above-mentioned wafer magazine release mechanism.

According to the utility model discloses a wafer magazine release mechanism of first aspect embodiment for unblanking of wafer magazine, include:

the transmission rod comprises a transmission part and a rotating part, and the rotating part is positioned on the side part of the transmission part;

the driving piece is connected with the transmission part and is used for driving the transmission rod to translate;

the unlocking part is provided with a lock key at the end part, and the lock key can be inserted into the lock cylinder of the wafer material box;

rotating member, one end with open latch fitting fixed connection, the other end with the rotation portion is connected, the rotating member sets up to, follows the translation of transmission portion winds open latch fitting place axis and rotate.

According to the utility model discloses wafer magazine unlocking mechanism has following beneficial effect at least:

the embodiment of the utility model provides an in wafer magazine canceling release mechanical system, adopt the mode of transfer line translation with the power transmission of driving piece to the latch fitting, the transfer line has certain rigidity, and difficult obstructed card is dunked in the motion process, overcome the defect that does not target in place of unblanking, through setting up the rotating member, the translation motion who makes the transfer line converts the rotary motion of latch fitting into, because latch fitting and the coaxial rotation of rotating member, the rotating member is efficient to the power transmission of latch fitting, the wafer magazine unblanks smoothly, the getting of wafer is efficient.

According to the utility model discloses a some embodiments, the rotating member is equipped with the spout, the spout is followed the length direction of rotating member sets up, the rotation portion peg graft in the spout.

According to some embodiments of the utility model, the portion of rotating has shaft part and spacing section, spacing section connect in the shaft part deviates from the one end of transmission portion, spacing section for the outer wall of shaft part sets up for outstanding, the shaft part is worn to locate in the spout, the rotating member is located transmission portion with between the spacing section, and can with spacing section supports and holds.

According to some embodiments of the utility model, the rotating member includes connecting portion and flexible cover, the lock key connect in the tip of connecting portion, flexible cover is located the connecting portion are outside.

According to some embodiments of the invention, the locking member is inserted into the opening member, and the locking member is inserted into the opening member from the side opposite to the side of the rotating member.

According to some embodiments of the utility model, still include the guide, the guide is followed the translation direction setting of transmission portion, transmission portion with guide sliding connection.

According to some embodiments of the utility model, the piece that opens the lock the rotating member with the rotation portion all is provided with two, two the rotation portion connect respectively in the both ends of transmission portion, the driving piece connect in the center department of transmission portion.

According to some embodiments of the utility model, still include the response piece, the response piece set up in on the translation route of transmission portion, the response piece is used for detecting the displacement of transmission portion, the response piece with the driving piece communication is connected, the driving piece sets up to, according to the detection information of response piece, the switching stops the state.

According to some embodiments of the utility model, the transfer line still includes switching portion, switching portion with transmission portion connects, switching portion for the protruding setting of lateral part of transmission portion, switching portion with the driving piece is connected, the response piece with switching portion is located same one side of transmission portion.

According to the utility model discloses a loading attachment of second aspect embodiment, include:

the wafer magazine unlocking mechanism in the embodiment of the first aspect;

the wafer material box unlocking mechanism is connected with the uncovering mechanism, and the uncovering mechanism is used for opening a box cover of the wafer material box;

and the material taking mechanism is positioned on the side part of the cover opening mechanism and is used for taking and placing the wafer.

Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.

Drawings

The invention will be further described with reference to the following drawings and examples, in which:

fig. 1 is a schematic structural view of an embodiment of the wafer cassette unlocking mechanism of the present invention;

FIG. 2 is a schematic view of the wafer magazine unlocking mechanism and the lock cylinder of the magazine shown in FIG. 1;

FIG. 3 is a schematic structural view of one embodiment of the rotating member of FIG. 1;

FIG. 4 is a schematic view of the wafer magazine unlocking structure and the wafer magazine;

fig. 5 is a cross-sectional view of one embodiment of the rotating member of fig. 1.

Reference numerals are as follows:

the transmission rod 100, the transmission part 110, the rotating part 120, the adapter part 130, the shaft section 121 and the limiting section 122; the locking device comprises a driving piece 200, an unlocking piece 300, a lock key 310, a connecting part 320 and a flexible sleeve 330; the rotary member 400, the chute 410; a locking member 500; a guide member 600; a slider 700; the sensing member 800.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are exemplary only for explaining the present invention, and should not be construed as limiting the present invention.

In the description of the present invention, it should be understood that the orientation or positional relationship indicated with respect to the orientation description, such as up, down, front, rear, left, right, etc., is based on the orientation or positional relationship shown in the drawings, and is only for convenience of description and simplification of description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.

In the description of the present invention, a plurality of means is one or more, a plurality of means is two or more, and the terms greater than, less than, exceeding, etc. are understood as not including the number, and the terms greater than, less than, within, etc. are understood as including the number. If the first and second are described for the purpose of distinguishing technical features, they are not to be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of the technical features indicated.

In the description of the present invention, unless there is an explicit limitation, the words such as setting, installation, connection, etc. should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above words in combination with the specific contents of the technical solution.

In the description of the present invention, reference to the description of the terms "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

Referring to fig. 1, the embodiment of the utility model provides a wafer magazine unlocking mechanism (hereinafter referred to as unlocking mechanism) for unblanking of wafer magazine is provided, as shown in fig. 4, the wafer magazine includes box body and lid, and the lid locks on the box body, and the lid has the lock core, realizes the locking of lid or opens with the locking through opening of lock core. The unlocking mechanism comprises a transmission rod 100, a driving piece 200, an unlocking piece 300 and a rotating piece 400, wherein the end part of the unlocking piece 300 is provided with a lock key 310, the lock key 310 is matched with the lock core of the box cover, and when the lock key 310 is inserted into the lock core and rotates, the lock core can be locked or unlocked; the driving member 200 is used for providing power for the rotation of the unlocking member 300, specifically, the driving member 200 is connected with the transmission rod 100, the transmission rod 100 comprises a transmission part 110 and a rotation part 120, the rotation part 120 is located at the side part of the transmission part 110, the driving member 200 is connected with the transmission part 110, the transmission part 110 drives the whole transmission rod 100 to translate through the driving of the driving member 200, one end of the rotating member 400 is fixedly connected with the unlocking member 300, the other end of the rotating member is connected with the rotation part 120, when the transmission part 110 translates, the rotating member 400 drives the unlocking member 300 to rotate, and the two coaxially rotate, and the rotating member 400 can rotate along the axis of the unlocking member 300; therefore, the driving piece 200 drives the transmission rod 100 to translate, so that the unlocking piece 300 rotates along with the rotating piece 400, and the opening or the locking of the box cover is realized.

Therefore, the embodiment of the utility model provides a wafer magazine release mechanism, adopt the mode of transfer line 100 translation with driving piece 200 power transmission to unlocking piece 300, transfer line 100 has certain rigidity, and difficult card pause that blocks that hinders in the motion process, overcome the defect of not in place unblanking, through setting up rotating member 400, make the translation motion of transfer line 100 convert the rotary motion of unlocking piece 300, because unlocking piece 300 and rotating member 400 coaxial rotation, rotating member 400 is efficient to the power transmission of unlocking piece 300, wafer magazine unblanks smoothly, the getting of wafer is efficient.

It should be noted that, if power transmission is performed through the synchronous belt, the synchronous belt has certain elasticity, so that the synchronous belt is easily blocked and generates clamping stagnation in the movement process, and the situation that unlocking is not in place is easily caused; the embodiment of the utility model provides an in to the mode that drives the translation of transfer line 100 with driving piece 200 carries out power transmission to unlocking piece 300, the member has higher rigidity usually, can not warp among the transmission process, consequently, transmission efficiency and transmission precision are high, can realize that the magazine unblanks fast to the precision of unblanking is high.

Further, the driving member 200 may be an air cylinder, a linear motor, or the like, and an output end of the driving member 200 is connected to the transmission portion 110 and drives the transmission portion 110 to translate. The rotating part 120 and the transmission part 110 may be integrally connected or fixedly connected by means of screw fastening, welding, or adhesion. In one embodiment, the rotating portion 120 is detachably connected to the transmission portion 110, the mounting position of the rotating portion 120 can be changed along the length direction of the transmission portion 110, when a plurality of rotating portions 120 are provided, the unlocking mechanism can unlock a wafer magazine having a plurality of lock cylinders, and by changing the mounting position of the rotating portion 120, the distance between adjacent rotating portions 120 can be adjusted to be suitable for unlocking different wafer magazines with different distances between the lock cylinders.

As shown in fig. 2 and 4, the wafer magazine has two lock cylinders, two unlocking members 300, two rotating members 400 and two rotating portions 120 in the unlocking mechanism are provided, the two rotating portions 120 are respectively connected to two ends of the transmission portion 110, the driving member 200 is connected to the center of the transmission portion 110, when the transmission portion 110 translates, the two rotating portions 120 can be synchronously driven to rotate in the same direction, the two unlocking members 300 unlock the two lock cylinders at the same time, and the unlocking efficiency is high.

In one embodiment, as shown in fig. 1 and 3, the rotating member 400 has a sliding slot 410, the sliding slot 410 is disposed along a length direction of the rotating member 400, the rotating portion 120 is inserted into the sliding slot 410, when the transmission portion 110 translates, the rotating portion 120 moves synchronously and abuts against a groove wall of the sliding slot 410, the rotating portion 120 moves in the sliding slot 410, and the rotating member 400 rotates around an axis of the unlocking member 300 by pushing the groove wall of the sliding slot 410, so as to achieve unlocking or locking.

As shown in fig. 3 and 5, the rotating portion 120 has a shaft segment 121 and a limiting segment 122, the limiting segment 122 is connected to one end of the shaft segment 121 away from the transmission portion 110, the limiting segment 122 is disposed to protrude from an outer wall of the shaft segment 121, the shaft segment 121 penetrates through the sliding slot 410, the rotating member 400 is located between the transmission portion 110 and the limiting segment 122, the limiting segment 122 can abut against a side wall of the rotating member 400, one side of the rotating member 400 is limited by the transmission portion 110, and the other side of the rotating member 400 is limited by the limiting segment 122, so that the shaft segment 121 is stably connected to the sliding slot 410, and the rotating portion 120 is prevented from falling off from the sliding slot 410.

It is contemplated that the surface of shaft segment 121 and the inner wall of chute 410 may be smoothed, such as by sanding, applying a smooth paint, etc. In addition, the spacing section 122 can be arranged at one end of the shaft section 121, the connecting section of the rotating part 120 is respectively limited by the spacing section 122 and the transmission part 110, or the spacing section 122 is provided with two connecting sections which are respectively connected to two ends of the shaft section 121, so that the two spacing sections 122 are respectively abutted against two sides of the rotating part 400, the shaft section 121 is limited in the sliding groove 410, the shaft section 121 is prevented from shaking along the axial direction thereof, and the stability of the power transmission of the rotating part 120 to the rotating part 400 is improved.

The unlocking member 300 may be integrally connected to the rotating member 400, or may be fixedly connected thereto by means of bonding or welding. In one embodiment, the unlocking member 300 is detachably coupled to the rotating member 400, and the unlocking member 300 can be replaced by detaching the unlocking member 300, so that the unlocking member 300 is adapted to different types of lock cylinders; specifically, as shown in fig. 3, the unlocking mechanism further includes a locking member 500, one end of the unlocking member 300 is inserted into the rotating member 400, the locking member 500 is inserted into the space between the rotating member 400 and the unlocking member 300 along the direction perpendicular to the rotation axis of the rotating member 400, the locking member 500 locks the rotating member 400 and the unlocking member 300 to fix them relatively, when the unlocking member 300 needs to be detached, the locking member 500 is pulled out, and the unlocking member 300 can be replaced, and the locking member 500 can be selected as a pin or a threaded fastener.

As shown in fig. 3, the unlocking member 300 further includes a connecting portion 320 and a flexible sleeve 330, the key 310 is connected to an end of the connecting portion 320, the other end of the connecting portion 320 is inserted into the rotating member 400, and the flexible sleeve 330 is sleeved outside the connecting portion 320; as shown in fig. 4, the lock core is located the box body of magazine, and has the certain distance between the lid, after lock key 310 inserts the lock core, other parts of unlocking mechanism have the risk of colliding with the lid of magazine, the utility model discloses an in the embodiment, through setting up flexible cover 330, make the lid butt of flexible cover 330 and magazine, avoid out-of-lock piece 300 and the rigid contact of magazine, lead to magazine or out-of-lock piece 300 to damage to the contact of flexible cover 330 and lid can prevent other parts and lid contact, avoid out-of-lock piece 300 when rotating, cause the wearing and tearing of lid.

As shown in fig. 1, the unlocking mechanism further includes a guide member 600, the guide member 600 is disposed along the translation direction of the transmission portion 110, the transmission portion 110 is slidably connected to the guide member 600, the guide member 600 guides the translation of the transmission portion 110, so as to improve the smoothness and accuracy of the movement of the transmission portion 110, and because the transmission rod 100 is of a rod-shaped structure, the guide member 600 can also support the transmission portion 110, so as to improve the structural strength of the whole unlocking mechanism; further, when two rotating parts 120 are provided, the guide 600 is located between the two transmission parts 110 to avoid the rotation of the rotating parts 120 and ensure the supporting effect on the transmission parts 110.

In addition, the unlocking mechanism further comprises a sliding piece 700, the sliding piece 700 is connected with the guide piece 600 in a sliding mode, the transmission part 110 is fixedly connected with the sliding piece 700, and the transmission part 110 and the sliding piece 700 synchronously move along the guide piece 600; the guide 600 may be fixed to a device for opening the lid of the cartridge or to the lid of the cartridge.

As shown in fig. 1, the unlocking structure further includes a sensing element 800, the sensing element 800 is disposed on the translation path of the transmission portion 110, the sensing element 800 is used for detecting the moving distance of the transmission portion 110, the sensing element 800 is in communication connection with the driving element 200, and the driving element 200 is set to switch the start/stop state of the driving element according to the detection information of the sensing element 800. Under the general condition, the lock core can accomplish after rotating 90 degrees and unblank or lock, through the detection to transmission 110 displacement, makes transmission 110 stop moving after the distance is predetermine in the removal, and unlocking piece 300 rotates corresponding angle simultaneously, and the turned angle that can avoid appearing unlocking piece 300 is too big, damages the lock core, and perhaps turned angle undersize can not realize the condition of unblanking.

Specifically, when the magazine is unlocked, after the sensing member 800 detects that the transmission portion 110 has moved a preset distance, the information is transmitted to the system module, and the system module sends an instruction to the driving member 200, so that the driving member 200 stops driving the transmission portion 110; when the material box needs to be locked, the driving part 200 reversely drives the transmission part 110 to translate, and after the transmission part 110 translates for a preset distance, the driving part 200 stops driving to complete the locking of the material box.

The transmission rod 100 further includes an adapter portion 130, the adapter portion 130 is connected to the transmission portion 110, the adapter portion 130 protrudes from a side portion of the transmission portion 110, the driving member 200 is connected to the adapter portion 130, and the adapter portion 130 drives the transmission portion 110 to move synchronously, so that the adapter portion 130 and the transmission portion 110 have the same moving distance, the sensing member 800 and the adapter portion 130 are located on the same side of the transmission portion 110, the sensing member 800 can indicate the moving distance of the transmission portion 110 by directly detecting the moving distance of the adapter portion 130, and the detection convenience is high.

The embodiment of the utility model provides an in still provide a loading attachment, including foretell wafer magazine release mechanism, still including uncapping mechanism and feeding agencies, wafer magazine release mechanism connects in uncapping mechanism, and uncapping mechanism is used for opening the back at the lock core, opens the lid of wafer magazine, and feeding agencies is located the lateral part of uncapping mechanism, and feeding agencies can open the back at the lid, gets in the box body and puts the wafer.

The embodiments of the present invention have been described in detail with reference to the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made without departing from the spirit of the present invention within the knowledge of those skilled in the art. Furthermore, the embodiments of the present invention and features of the embodiments may be combined with each other without conflict.

Claims (10)

1. Wafer magazine unlocking mechanism for unblanking of wafer magazine, its characterized in that includes:

the transmission rod comprises a transmission part and a rotating part, and the rotating part is positioned on the side part of the transmission part;

the driving piece is connected with the transmission part and is used for driving the transmission rod to translate;

the unlocking part is provided with a lock key at the end part, and the lock key can be inserted into the lock cylinder of the wafer material box;

the rotating member, one end with open latch fitting fixed connection, the other end with the rotation portion is connected, the rotating member sets up to, follows the translation of transmission portion winds open latch fitting place axis rotates.

2. The wafer magazine unlocking mechanism of claim 1, wherein the rotary member is provided with a slide groove, the slide groove is arranged along a length direction of the rotary member, and the rotary portion is inserted into the slide groove.

3. The wafer magazine unlocking mechanism according to claim 2, wherein the rotating portion has a shaft section and a limiting section, the limiting section is connected to an end of the shaft section away from the transmission portion, the limiting section is disposed in a protruding manner relative to an outer wall of the shaft section, the shaft section is disposed in the chute in a penetrating manner, and the rotating member is located between the transmission portion and the limiting section and can be abutted against the limiting section.

4. The wafer magazine unlocking mechanism of claim 1 wherein the rotary member includes a connecting portion and a flexible sleeve, the locking key is connected to an end portion of the connecting portion, and the flexible sleeve is disposed outside the connecting portion.

5. The wafer magazine unlocking mechanism according to claim 1, further comprising a locking member, one end of the unlocking member being inserted into the inside of the rotary member, the locking member being inserted into the rotary member and the unlocking member in a direction perpendicular to the rotation axis of the rotary member.

6. The wafer magazine unlocking mechanism of claim 1, further comprising a guide member disposed along a translation direction of the transmission portion, wherein the transmission portion is slidably connected to the guide member.

7. The wafer magazine unlocking mechanism according to claim 1, wherein the number of the unlocking member, the number of the rotating member and the number of the rotating portions are two, the two rotating portions are respectively connected to both ends of the transmission portion, and the driving member is connected to a center of the transmission portion.

8. The wafer magazine unlocking mechanism of claim 1, further comprising a sensing element, wherein the sensing element is arranged on a translation path of the transmission portion and used for detecting a moving distance of the transmission portion, the sensing element is in communication connection with the driving element, and the driving element is configured to switch on/off states according to detection information of the sensing element.

9. The wafer magazine unlocking mechanism of claim 8, wherein the transmission rod further comprises an adapter portion, the adapter portion is connected with the transmission portion, the adapter portion is arranged in a protruding mode relative to the side portion of the transmission portion, the adapter portion is connected with the driving member, and the sensing member and the adapter portion are located on the same side of the transmission portion.

10. Loading attachment, its characterized in that includes:

the wafer pod unlocking mechanism of any one of claims 1 to 9;

the wafer material box unlocking mechanism is connected with the cover opening mechanism, and the cover opening mechanism is used for opening a box cover of the wafer material box;

and the material taking mechanism is positioned on the side part of the cover opening mechanism and is used for taking and placing the wafer.

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