CN217597498U

CN217597498U - Special knife rest for wafer scriber

Info

Publication number: CN217597498U
Application number: CN202123419827.0U
Authority: CN
Inventors: 魏余红; 黄燕荣
Original assignee: Dongguan Kezhuo Robot Co ltd
Current assignee: Guangdong Kezhuo Semiconductor Equipment Co ltd
Priority date: 2021-12-30
Filing date: 2021-12-30
Publication date: 2022-10-18
Anticipated expiration: 2031-12-30

Abstract

The utility model discloses a special knife rest of wafer scribing machine, including knife rest base and scribing sword, knife rest base's left side fixedly connected with is used for the connecting seat of being connected with the scribing machine main part, the installation cavity has been seted up to the inside of connecting seat, the inside of installation cavity is provided with flexible motor, flexible chamber has been seted up to knife rest base's inside, the inside grafting in flexible chamber has the knife rest pole that extends knife rest base, the inside threaded hole of seting up in left side of knife rest pole, the inside threaded connection of screw hole has flexible threaded spindle, the inside of knife rest pole is provided with stop gear. The special tool rest for the wafer scribing machine is novel in structure and ingenious in conception, can simplify the replacement process of the scribing knife, achieves the effect of facilitating replacement of the scribing knife, further avoids time waste, and improves the scribing efficiency of wafers.

Description

Special knife rest for wafer scriber

Technical Field

The utility model relates to a wafer processing equipment technical field specifically is a special knife rest of wafer scriber.

Background

The wafer is a silicon wafer used for manufacturing a silicon semiconductor circuit, the raw material of the wafer is silicon, high-purity polycrystalline silicon is dissolved and doped into a silicon crystal seed crystal, and then the silicon crystal seed crystal is slowly pulled out to form cylindrical monocrystalline silicon. After the silicon crystal bar is ground, polished and sliced, a silicon wafer, namely a wafer, is formed.

At the present stage, when a dicing saw is used for dicing a wafer, the dicing saw needs to be replaced alternately to realize the grooving and cutting-off operation on the wafer, and the replacement process of the dicing saw is complicated, so that the time waste is caused, and the dicing efficiency of the wafer is influenced.

SUMMERY OF THE UTILITY MODEL

To the above situation, for overcoming prior art's defect, the utility model provides a special knife rest of wafer scriber, this special knife rest of wafer scriber, novel structure thinks about ingeniously, can simplify the change process of scribing sword, reaches the effect of being convenient for change the scribing sword, and then avoids the waste in time, improves the scribing efficiency of wafer.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a special knife rest of wafer scribing machine, includes knife rest base and scribing sword, knife rest base's left side fixedly connected with is used for the connecting seat of being connected with the scribing machine main part, the installation cavity has been seted up to the inside of connecting seat, the inside of installation cavity is provided with flexible motor, flexible chamber has been seted up to knife rest base's inside, the inside grafting in flexible chamber has the knife rest pole that extends knife rest base, the inside threaded hole that sets up in left side of knife rest pole, the inside threaded connection of screw hole has flexible threaded shaft, the inside of knife rest pole is provided with stop gear.

Preferably, the tool rest base is slidably connected with the tool rest bar.

Preferably, the left side of the telescopic threaded shaft extends to the inside of the mounting cavity and is fixedly connected with the telescopic motor.

Preferably, the scribing knife is disposed outside the knife rest bar.

Preferably, stop gear is including seting up at the inside gear chamber of tool rest pole and the spacing motor of fixed connection on tool rest pole right side, the left side fixedly connected with of spacing motor extends to the pivot of gear intracavity portion, the left side fixedly connected with action wheel of pivot, the upper and lower both sides of action wheel are meshed respectively from the driving wheel, from the back of the body side of driving wheel respectively fixedly connected with spacing threaded shaft, the outside threaded connection of spacing threaded shaft has the spacing pipe of screw thread.

Preferably, the upper side and the lower side of the cutter frame rod are respectively provided with a through hole which is communicated with the gear cavity and is matched with the threaded limiting pipe.

Preferably, the threaded limiting pipe is arranged inside the through hole and is in sliding connection with the inner wall of the through hole.

Preferably, a protective shell is arranged on the outer side of the limiting motor.

The utility model has the advantages that:

1. when the scribing knife needs to be assembled, the scribing knife is firstly sleeved outside the knife rest rod and is placed on the left side of the threaded limiting pipe, then the limiting motor is started, the rotating shaft is driven by the limiting motor to rotate, the rotating shaft drives the driving wheel to rotate, the driving wheel is meshed with the driven wheel and drives the driven wheel to rotate, the driven wheel drives the limiting threaded shaft to rotate, the limiting threaded shaft drives the threaded limiting pipes on two sides to move back and extend out of the through hole when rotating, then the threaded limiting pipe can be clamped on the right side of the scribing knife, finally, the telescopic motor is started, the telescopic threaded shaft is driven by the telescopic motor to rotate, the knife rest rod drives the scribing knife to move left under the cooperation effect of the threaded limiting pipe, the scribing knife is clamped between the knife rest base and the threaded limiting pipe, further fixing of the scribing knife is completed, scribing operation of a wafer is facilitated, when the scribing knife needs to be replaced, the limiting motor is controlled to drive the rotating shaft to rotate, the threaded limiting pipes on two sides can be driven to move towards the inside of the through hole, the threaded limiting pipes on the outside of the knife rest rod can be smoothly after the scribing knife is lost, and the wafer replacement efficiency can be improved.

Drawings

The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention, and together with the description serve to explain the invention and not to limit the invention. In the drawings:

FIG. 1 is a schematic view of the overall structure of the present invention;

fig. 2 is a schematic view of the cutter holder bar assembly of the present invention;

fig. 3 is a schematic view of the through hole structure assembly of the present invention.

Reference numbers in the figures: 1. a tool holder base; 2. a connecting seat; 3. a mounting cavity; 4. a telescopic motor; 5. a telescopic cavity; 6. a cutter frame rod; 7. a threaded hole; 8. a telescopic threaded shaft; 9. a gear cavity; 10. a limiting motor; 11. a protective shell; 12. a rotating shaft; 13. a driving wheel; 14. a driven wheel; 15. a limiting threaded shaft; 16. a threaded limit pipe; 17. a through hole; 18. a scribing knife.

Detailed Description

The technical solution of the present invention will be clearly and completely described with reference to the accompanying drawings. In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance.

Example one

As shown in fig. 1-3, a special tool rest for a wafer scribing machine comprises a tool rest base 1 and a scribing cutter 18, wherein a connecting seat 2 for connecting with a scribing machine main body is fixedly connected to the left side of the tool rest base 1, a mounting cavity 3 is formed inside the connecting seat 2, a telescopic motor 4 is arranged inside the mounting cavity 3, a telescopic cavity 5 is formed inside the tool rest base 1, a tool rest rod 6 extending out of the tool rest base 1 is inserted into the telescopic cavity 5, the scribing cutter 18 is arranged outside the tool rest rod 6, the tool rest rod 6 is connected with the tool rest base 1 in a sliding manner, so that the tool rest rod 6 can slide left and right and can be prevented from rotating, a threaded hole 7 is formed inside the left side of the tool rest rod 6, a telescopic threaded shaft 8 is connected to the inner thread of the threaded hole 7, and the left side of the telescopic threaded shaft 8 extends into the mounting cavity 3 and is fixedly connected with the telescopic motor 4, drive flexible threaded shaft 8 through flexible motor 4 and rotate, the inside of knife rest pole 6 is provided with stop gear, stop gear is including seting up at the inside gear chamber 9 of knife rest pole 6 and the spacing motor 10 of fixed connection on knife rest pole 6 right side, the left side fixedly connected with of spacing motor 10 extends to the inside pivot 12 of gear chamber 9, the left side fixedly connected with action wheel 13 of pivot 12, the upper and lower both sides of action wheel 13 mesh respectively from driving wheel 14, from the looks back of the body side respectively fixedly connected with spacing threaded shaft 15 of driving wheel 14, the outside threaded connection of spacing threaded shaft 15 has the spacing pipe of screw thread 16, the through-hole 17 with gear chamber 9 intercommunication and with the spacing pipe of screw thread 16 adaptation is seted up respectively to the upper and lower both sides of knife rest pole 6, the spacing pipe of screw thread 16 sets up in the inside of through-hole 17 and with through-hole 17 inner wall sliding connection.

When the scribing knife 18 needs to be assembled, firstly, the scribing knife 18 is sleeved outside the knife rest rod 6 and is arranged on the left side of the threaded limiting tube 16, then the limiting motor 10 is started, the rotating shaft 12 is driven by the limiting motor 10 to rotate, the rotating shaft 12 drives the driving wheel 13 to rotate, the driving wheel 13 is meshed with the driven wheel 14 and drives the driven wheel 14 to rotate, the driven wheel 14 drives the limiting threaded shaft 15 to rotate, the limiting threaded shaft 15 drives the threaded limiting tubes 16 on two sides to move back and forth and extend out of the through hole 17 when rotating, further, the threaded limiting tube 16 can be clamped on the right side of the scribing knife 18, finally, the telescopic motor 4 is started, the telescopic threaded shaft 8 is driven by the telescopic motor 4 to rotate, the knife rest rod 6 is driven to move left by the cooperation with the threaded hole 7 when the telescopic threaded shaft 8 rotates, the knife rest rod 6 drives the scribing knife 18 to move left under the cooperation of the threaded limiting tube 16, the scribing knife rest rod 18 is clamped between the knife rest base 1 and the threaded limiting tube 16, further, the fixing of the scribing knife 18 is completed, the scribing knife can conveniently cut wafers, when the scribing knife 18 needs to be replaced, the scribing knife can be conveniently, the scribing knife rest rod can achieve the effect that the scribing knife 18 is achieved after the scribing knife 12 smoothly when the scribing knife rest rod does not rotate, and the scribing knife 18, and the scribing knife can be replaced, and the scribing knife can be conveniently, and the efficiency can be improved.

Example two

Referring to fig. 2, as another preferred embodiment, the difference from the first embodiment is that a protective shell 11 is disposed on the outer side of the limit motor 10, and the limit motor 10 is protected by the protective shell 11, so as to prevent the limit motor 10 from being damaged accidentally.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described in the foregoing embodiments, or equivalents may be substituted for elements thereof. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. The utility model provides a special knife rest of wafer scribing machine, includes knife rest base (1) and scribing sword (18), its characterized in that: the utility model discloses a dicing saw, including knife rest base (1), installation cavity (3) have been seted up to the inside of connecting seat (2), the inside of installation cavity (3) is provided with flexible motor (4), flexible chamber (5) have been seted up to the inside of knife rest base (1), it has knife rest pole (6) of extending knife rest base (1) to peg graft in the inside of flexible chamber (5), the inside threaded hole (7) of seting up in left side of knife rest pole (6), the inside threaded connection of screw hole (7) has flexible threaded shaft (8), the inside of knife rest pole (6) is provided with stop gear.

2. The tool rest special for the wafer dicing saw according to claim 1, wherein: the knife rest rod (6) is connected with the knife rest base (1) in a sliding mode.

3. The tool rest special for the wafer dicing saw according to claim 1, wherein: the left side of the telescopic threaded shaft (8) extends to the inside of the mounting cavity (3) and is fixedly connected with the telescopic motor (4).

4. The tool rest special for the wafer dicing saw according to claim 1, characterized in that: the scribing knife (18) is arranged on the outer side of the knife rest rod (6).

5. The tool rest special for the wafer dicing saw according to claim 1, wherein: stop gear is including offering at inside gear chamber (9) of knife rest pole (6) and fixed connection spacing motor (10) on knife rest pole (6) right side, the left side fixedly connected with of spacing motor (10) extends to inside pivot (12) of gear chamber (9), the left side fixedly connected with action wheel (13) of pivot (12), the upper and lower both sides of action wheel (13) mesh respectively from driving wheel (14), from the looks back of the body side fixedly connected with spacing screw thread axle (15) respectively of driving wheel (14), the outside threaded connection of spacing screw thread axle (15) has screw thread spacing pipe (16).

6. The tool rest special for the wafer dicing saw according to claim 5, wherein: the upper side and the lower side of the cutter frame rod (6) are respectively provided with a through hole (17) which is communicated with the gear cavity (9) and is matched with the thread limiting pipe (16).

7. The tool rest special for a wafer dicing saw according to any one of claims 5 to 6, wherein: the thread limiting pipe (16) is arranged in the through hole (17) and is in sliding connection with the inner wall of the through hole (17).

8. The tool rest special for the wafer dicing saw according to claim 5, wherein: and a protective shell (11) is arranged on the outer side of the limiting motor (10).