CN217509092U

CN217509092U - Rotary transmission target microfocus X-ray source

Info

Publication number: CN217509092U
Application number: CN202221175723.1U
Authority: CN
Inventors: 席立; 薛开元; 李营; 李绍领; 温慧鑫; 王先达; 方岱宁
Original assignee: Beijing Institute of Technology BIT
Current assignee: Beijing Institute of Technology BIT
Priority date: 2022-05-13
Filing date: 2022-05-13
Publication date: 2022-09-27
Anticipated expiration: 2032-05-13

Abstract

The utility model discloses a little focus X ray source of rotatory transmission target installs the electron beam system in the cavity, and the electron beam system arranges with positive pole target pivot homonymy, and the motor in the rotatory positive pole target system passes through bevel gear drive positive pole target rotation, designs the target micro-structure, and the metal target of the rotatory positive pole target of the perpendicular bombardment of electron beam system transmission, cooling system are used for cooling off the positive pole target. The light emitting principle of the transmission type X-ray source is adopted, the micro focus is realized, the imaging resolution is improved, and the X-ray emitting angle is increased compared with the existing rotating anode target X-ray source; the electron beam bombards the rotating anode target, so that the effective heat dissipation volume is large, and the heat dissipation efficiency and the anode target power are improved; the defects of low imaging efficiency of a transmission type X-ray source during high-resolution imaging, low resolution, poor image quality and the like of a reflection type X-ray source during rapid imaging are overcome; the imaging resolution, the X-ray source brightness and the X-ray flux are improved, and the imaging time is reduced.

Description

Rotary transmission target microfocus X-ray source

Technical Field

The utility model relates to an X ray source technical field especially indicates a rotatory transmission target microfocus X ray source.

Background

Currently, the X-ray sources applied to the industrial CT system are mainly divided into two types according to the difference of the anode target materials: reflective X-ray sources and transmissive X-ray sources. The reflective X-ray source with the special design is also called as a rotating target X-ray source, a certain inclination angle is formed between the reflective target surface and an incident electron beam, the reflective X-ray source has a larger heat dissipation volume, and can bear accelerated electrons with higher voltage, and the anode target surface of a partial reflective X-ray source is driven to rotate by a rotor, so that the heat dissipation volume is further increased; the anode target of the transmission type X-ray source is a thin film, the target surface is perpendicular to an incident electron beam, and smaller focal spot size and larger radiation angle can be obtained.

Utility model patent publication No. CN109473329A discloses a transmission type X-ray source, including: the X-ray source is a typical transmission type X-ray source, an electron beam bombards a structural region on a substrate after being focused to generate X rays, and the X rays penetrate through an X-ray window after penetrating through the substrate. Like the existing transmission type X-ray source which adopts a metal film as a target material, the target material is fixed, and electron beams bombard a fixed local area on a target surface, so that the effective heat dissipation volume is small, the brightness of the transmission target microfocus X-ray source is low, the X-ray flux is low, a long time is needed for high-resolution imaging to expose a sample so as to obtain a sufficient image signal-to-noise ratio, several hours or even more than ten hours may be needed for one-time high-resolution three-dimensional scanning imaging, the exposure time is long, and the imaging efficiency is low.

The utility model discloses a utility model patent with publication number CN106981409A discloses a reflection type X ray source device, including three-pole type X ray source, vacuum cavity, vacuum pump unit, positive pole high voltage power supply, grid high pressure and pulse drive unit, vacuum environment monitoring unit and control platform, three-pole type X ray source sets up in the vacuum cavity. The power of the electron beam of the X-ray source is positively correlated with the focal spot size of the focused electron beam, i.e. the larger the power, the larger the focal spot size. The best resolution of the reflection type X-ray source is generally larger than 5 mu m, the resolution is low, the focal spot size of the X-ray source is large, and the X-ray emission angle is small.

Utility model publication No. CN211720806U discloses a rotary X-ray transmissive anode target, comprising a vacuum chamber, a rotary target and a bearing assembly; the electron beam output from the accelerator bombards the outer edge of the target surface of the rotating target along a beam pipe of the vacuum cavity, part of energy is converted into X rays which are emitted to a working area through a transmission window on the vacuum cavity, and the residual energy is deposited to an annular area on the outer edge of the rotating target in the form of heat through the high-speed rotation of the rotating target. The patent relates to several rotary X-ray transmission conversion targets, when an anode target rotating shaft and an electron beam system are arranged on the same side, a magnetic field generated by an electromagnetic coil for driving a rotor can influence the track of the electron beam, and the stability of the system is poor; when the anode target rotating shaft and the electron beam system are arranged on the opposite side, the component for driving the anode target to rotate can limit the X-ray window to be close to the sample, so that unnecessary X-ray intensity attenuation is caused, and the final imaging quality and the final imaging efficiency are negatively influenced.

SUMMERY OF THE UTILITY MODEL

The utility model provides a rotary transmission target microfocus X-ray source, the prior X-ray source has the following problems of low power of the transmission X-ray source, low X-ray flux, long imaging time and low imaging efficiency; the reflective X-ray source has large focal spot size, small X-ray emission angle, low imaging resolution and poor image quality; the magnetic field generated by the electromagnetic coil driving the rotor influences the electron beam track, the stability of the system is poor, and the intensity of X-rays is attenuated.

In order to solve the above technical problem, an embodiment of the present invention provides the following solutions:

on the one hand, the embodiment of the utility model provides a rotatory transmission target microfocus X ray source, including the cavity, install electron beam system, rotatory anode target system and cooling system in the cavity, electron beam system and the setting of arranging of positive pole target pivot in the rotatory anode target system homonymy, the motor in the rotatory anode target system passes through bevel gear drive and drives the positive pole target rotation, the electron beam that electron beam system sent strikes the metal target of rotatory positive pole target perpendicularly, cooling system is used for cooling the positive pole target;

the electron beam system comprises a ceramic base and a passage piece, wherein the rear end of the ceramic base is communicated with a high-voltage tube head, and the front end of the ceramic base is coaxially and sequentially provided with a cathode, a first anode and a second anode; a first focusing lens and a second focusing lens are sequentially arranged at the rear end of the passage piece, a third focusing lens is arranged at the front end of the passage piece, the focusing lenses are coaxially arranged, and an electron beam channel coaxial with the cathode is arranged in the passage piece;

the anode target comprises a heat-conducting substrate, and a metal target material is arranged on the heat-conducting substrate.

Preferably, the path member includes a first path member, a second path member is installed at a front end of the first path member, the first focusing lens and the second focusing lens are sleeved on the first path member, and the third focusing lens is sleeved at a front end of the second path member;

and a first electron beam channel is arranged in the passage part, a second electron beam channel is arranged in the second passage part, and the electron beam channels are coaxially communicated.

Preferably, the rotating anode target system comprises a bevel gear transmission device arranged in the cavity, the motor drives the driving bevel gear to rotate, and the driven bevel gear drives the anode target to rotate.

Preferably, the cavity is of a unitary construction.

Preferably, the cavity is formed by detachably connecting at least two cavity bodies, and a vacuum system is installed on the cavity bodies in a communicated manner.

Preferably, the X-ray source further comprises a control system.

Preferably, the cooling system comprises a cooling cavity installed in the cavity, a cooling medium is arranged in the cooling cavity, and a cooling water circulation machine is communicated with the cooling cavity and circulates the cooling medium.

The utility model discloses an above-mentioned scheme includes following beneficial effect at least:

in the above scheme, the utility model adopts the light-emitting principle of the transmission-type X-ray source, and adopts the electron optical system to focus the electron beam, thereby reducing the diameter of the focal spot, improving the imaging resolution and increasing the X-ray emission angle; the anode target rotates while the electron beam bombards the target material, so that the effective heat dissipation volume is increased, the heat dissipation efficiency and the anode target power are improved, and the heat dissipation efficiency and the anode target power are further improved by arranging the cooling system at the anode target; the defects of low imaging efficiency of a transmission type X-ray source during high-resolution imaging, low resolution, poor image quality and the like of a reflection type X-ray source during rapid imaging are overcome; the utility model provides improve the luminance and the X ray flux that have improved the X ray source when imaging resolution ratio, reduced the imaging time. The bevel gear is adopted for transmission, the influence of the magnetic field of the electromagnetic coil in a driving device (a high-precision stepping motor) on the track of the electron beam is eliminated, and meanwhile, the design that the rotor and the electron beam system are arranged on the same side is adopted, so that an X-ray window of the ray source can be close to a sample, and unnecessary X-ray intensity attenuation is avoided.

Drawings

Fig. 1 is a schematic structural view of a rotary transmission target microfocus X-ray source according to the present invention;

FIG. 2 is a schematic structural diagram of an electron beam system of a rotary transmission target microfocus X-ray source according to the present invention;

FIG. 3 is a schematic structural diagram of a rotary anode target system of the rotary transmission target microfocus X-ray source according to the present invention;

FIG. 4 is a front view of the anode target of the rotary transmission target microfocus X-ray source of the present invention;

FIG. 5 is a left side view of the anode target of the rotary transmission target microfocus X-ray source of the present invention;

FIG. 6 is a schematic view of an electron beam system of a rotary transmission target microfocus X-ray source of the present invention;

FIG. 7 is a schematic view of an electron beam system of a rotary transmission target microfocus X-ray source in accordance with the present invention;

fig. 8 is a flow chart of a method for generating radiation by the rotary transmission target microfocus X-ray source according to the present invention.

Reference numerals:

100. a first cavity; 200. a second cavity; 300. a third cavity;

101. a high pressure tubing head; 102. a ceramic base; 103. a cathode needle tip; 104. a first anode; 105. a second anode; 106. vacuum pump/gauge;

201. a first focusing lens; 202. a second focusing lens; 203. a third focusing lens; 2041. a first oxygen-free copper tube; 2042. a second oxygen-free copper tube; 2043. a first diaphragm; 2044. a second diaphragm;

301. an anode target; 3011. a first surface; 3012. a thermally conductive substrate; 3013. a metal target material; 302. a motor; 303. a magnetic fluid seal; 304. a bevel gear transmission; 305. cooling the cavity; 306. an X-ray window.

Detailed Description

Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.

As shown in fig. 1-8, the embodiment of the utility model provides a rotatory transmission target microfocus X ray source, including the cavity, install electron beam system, rotatory anode target system and cooling system in the cavity, the electron beam system arranges the setting with positive pole target 301 homonymy in the rotatory anode target system, and motor 302 in the rotatory anode target system passes through bevel gear transmission 304 drive anode target 301 rotatory, and the electron beam of electron beam system transmission bombards rotatory anode target 301 perpendicularly, and cooling system is used for cooling off anode target 301.

As shown in fig. 1-2, in the embodiment of the present invention, the cavity is designed in an open manner, and the cavity is formed by at least two cavity bodies that can be disassembled and connected, and the cavity bodies are communicated with each other and installed with a vacuum system. The cavity comprises a first cavity 100, a second cavity 200 and a third cavity 300 which are detachably connected in sequence. Preferably, the first chamber 100, the second chamber 200 and the third chamber 300 are connected by hinges, static vacuum sealing is realized by using sealing rings, and the sealing rings between the chambers are periodically coated with vacuum grease to ensure the vacuum degree of the system. The replacement of consumables (such as the cathode tip 103 and the anode target 301) and the installation and maintenance of each element are facilitated. In another embodiment of the present invention, the cavity is designed to be closed, and the cavity is of an integral structure. Specifically, the cavity comprises at least two cavity body coupling, connects through welded mode between each cavity, has guaranteed that the system maintains higher stability, prevents that the vacuum from leaking.

As shown in fig. 1-6, in the embodiment of the present invention, the electron beam system includes a ceramic base and a passage member, a high-voltage tube head 101 is installed in the rear end of the ceramic base 102, and a cathode needle point, a first anode 104, and a second anode 105 are coaxially installed in sequence at the front end of the ceramic base 102; the rear end of the channel piece is sequentially provided with a first focusing lens 201 and a second focusing lens 202, the front end is provided with a third focusing lens 203, the focusing lenses are coaxially arranged, and the channel piece is internally provided with an electron beam channel which is coaxial with the cathode needle point. The ceramic base 102 is made of an insulating ceramic material. The ceramic base 102 is mounted in the first chamber 100 and the passage member is mounted in the second chamber 200 such that the high pressure tip 101 is located at the rear of the X-ray source arrangement. All parts within the electron beam system are coaxially arranged such that the central axes of the elements mounted in the second chamber 200 coincide with the central axes of the elements arranged in the first chamber 100. The high voltage tube head 101 is connected to a high voltage power supply, which is connected to the high voltage tube head 101 through a high voltage cable and a flange, for providing an electron beam acceleration voltage between the cathode tip and the anode.

As shown in fig. 1-2, in another embodiment of the present invention, the passage member includes a first copper tube 2041 without oxygen, a second copper tube 2042 without oxygen is installed at the front end of the first copper tube 2041 without oxygen, a first focusing lens 201 and a second focusing lens 202 are sleeved on the first copper tube 2041 without oxygen, and a third focusing lens 203 is sleeved at the front end of the second copper tube 2042 without oxygen; a first electron beam channel is arranged in the first oxygen-free copper tube 2041, a second electron beam channel is arranged in the second oxygen-free copper tube 2042, and the electron beam channels are coaxially communicated.

Specifically, the material of the cathode tip adopts a LaB6 tip, and other cathode tip materials including but not limited to tungsten filament, molybdenum tip, carbon nanotube and the like are selected as the cathode tip as an electron source.

Specifically, the first anode 104 and the second anode 105 are of a grid structure, electrons are extracted by an electric field between the first anode 104 and the cathode tip, accelerated to a predetermined electron kinetic energy by the electric field between the second anode 105 and the cathode tip, and guided to the anode target first surface 3011.

In the embodiment of the present invention, the first focusing lens 201, the second focusing lens 202, and the third focusing lens 203 are electron optical elements, and are powered by a high-precision dc power supply to generate a magnetic field. In another embodiment of the present invention, the first focusing lens 201, the second focusing lens 202, and the third focusing lens 203 are electrostatic lenses.

In the embodiment of the present invention, the first focusing lens 201, the second focusing lens 202 and the third focusing lens 203 are used to focus the electron beam, so that the beam spot diameter of the electron beam finally reaching the first surface 3011 of the anode target is less than or equal to 30 μm. In another embodiment of the invention, the focal spot has a diameter of 0.5-10 μm. The third focusing lens 203 of the present invention is an electron objective lens, which focuses the electron beam on the anode target first surface 3011, and the third focusing lens 203 should have a longer focal length than the first focusing lens 201 and the second focusing lens 202.

The embodiment of the utility model provides an in, the electron beam passageway adopts the oxygen-free copper pipe, reduces the electron beam motion in-process backscatter electron and reflection electron to the influence of electron beam stability, and the oxygen-free copper pipe has still played the effect of filtering/gathering outer electron. As shown in fig. 7, in another embodiment of the present invention, a first diaphragm 2043 and a second diaphragm 2044 are disposed behind the focal points of the first focusing lens 201 and the second focusing lens 202 to filter outer electrons.

In the embodiment of the present invention, the control system adjusts the output value of the high-precision current source, changes the focusing effect of the electron optical system on the electron beam, and realizes that the spot focal spot diameter is adjustable from 0.5 μm to 30 μm, in another embodiment of the present invention, the third focusing lens 203 is a magnetic four-stage lens, and the control system adjusts the output value of the high-precision current source, so that the electron beam is finally the line-type focal spot on the first surface 3011 of the anode target.

As shown in fig. 3-5, the utility model discloses rotatory anode target 301 system includes bevel gear transmission 304 at the cavity internal installation, and motor 302 drive bevel gear rotates, and driven bevel gear drives anode target 301 rotatory, and driven bevel gear drives the rotation of anode target pivot, and then anode target pivot drives anode target 301 and rotates. Specifically, the motor 302 is a high-precision stepping motor, and the high-precision stepping motor 302 is mounted at the top of the third cavity 300 and provides driving force for the rotation of the anode target 301 through a bevel gear 304. Specifically, the rotary anode target 301 system further comprises a magnetic fluid seal 303, and the magnetic fluid seal 303 provides dynamic vacuum seal for a transmission shaft connected with the high-precision stepping motor 302.

Specifically, the bevel gear transmission device 304 selects a spiral bevel gear with a spiral angle and a tooth trace as a curve, so that the influence of self-excited vibration generated by gear meshing on the structural shape of the electron beam focus on the first surface 3011 of the anode target is reduced. The bevel gears use gears with larger modulus, and can also reduce self-excited vibration generated by gear meshing. The high-precision stepping motor 302 can keep the rotating speed of the rotating anode target 301 at a high level, the device runs normally, and the rotating speed of the anode target 301 is kept above 100 r/min.

The anode target 301 of the present invention includes a heat conductive substrate 3012, and a metal target 3013 is disposed on the heat conductive substrate 3012, and specifically, the metal target 3013 is disposed on the first surface 3011 of the heat conductive substrate 3012. The metal target 3013 faces the central axis of the focusing lens, the width of the metal target 3013 ranges from 1 μm to 10 μm, and the width of the metal target 3013 is preferably 1 μm. The electron beam generated by the cathode tip is accelerated by an acceleration voltage, and then is compressed by a focusing lens and focused on the metal target 3013 on the anode target 301, and reacts with the metal target 3013 to generate X-rays. The heat conductive substrate 3012 has a disk shape. In the embodiment of the present invention, the heat conducting substrate 3012 and the metal target 3013 are made of different materials. The thermally conductive base material should have a thermal conductivity of at least 30W/(m · K), with preferred materials including diamond, and alternative materials including but not limited to graphite, silicon carbide, silicon nitride, high temperature ceramic composites, and the like. The metal target 3013 is in an annular structure, is embedded in the surface of the heat conducting substrate 3012 along the circumferential direction of the heat conducting substrate 3012, and is thermally connected to the heat conducting substrate 3012. The thickness of the material of the heat-conducting substrate 3012 ranges from 100 μm to 1000 μm, and the thickness of the material of the heat-conducting substrate 3012 is preferably 250 μm; the thickness of the metal target 3013 is in the range of 5 μm to 50 μm, and the thickness of the metal target 3013 is preferably 10 μm. The metal target material should at least produce X-rays having a predetermined energy spectrum when bombarded by an electron beam, preferred materials include tungsten, alternative materials include, but are not limited to, chromium, copper, aluminum, rhodium, molybdenum, gold, platinum, iridium, cobalt, tantalum, titanium, rhenium, tantalum carbide, titanium carbide, and alloys or combinations comprising one or more of the foregoing.

The utility model provides two methods for realizing high-resolution imaging of a micro-focus, wherein the first method can focus an electron beam through an electron optical system, so that the size of a focal spot is 0.5-30 mu m when the electron beam reaches the first surface 3011 of an anode target, and further the high-resolution imaging of the micro-focus is realized; in the second method, the width of the metal target 3013 on the first surface 3011 of the anode target can be given, so as to achieve an ideal effective action area of the electron beam and the metal target 3013, when the linear focal spot acts, the length direction of the linear focal spot is perpendicular to the tangential direction of the metal target 3013, the width range of the metal target 3013 is 1-10 μm, and thus, the micro-focus high-resolution imaging is realized;

the utility model is provided with an X-ray window 306 at the front end of the third cavity 300, and the X-ray generated by the action of the rotary anode target 301 and the electron beam vertically passes through the X-ray window 306; the material of the X-ray window 306 should at least have a low absorption of X-rays and have a certain intensity. In an embodiment of the present invention, the material of the X-ray window 306 is diamond. In another embodiment of the present invention, the material of the X-ray window 306 includes, but is not limited to, beryllium, silicon, boron nitride, silicon carbide, and other low atomic number materials or composite materials.

In an embodiment of the invention, the thickness of the X-ray window 306 is 70 μm. In another embodiment of the present invention, the thickness of the X-ray window 306 ranges between 30 μm and 1500 μm.

The utility model discloses cooling system includes the cooling cavity 305 of installation in the cavity, is equipped with coolant in the cooling cavity 305, and cooling cavity 305 and recirculated cooling medium are connected to the cooling water circulating machine intercommunication. Specifically, the cooling system further includes a sealing water pipe, and the sealing water pipe communicates the cooling cavity 305 and the cooling circulation water machine. The cooling chamber 305 cools the anode target 301, and specifically, the cooling chamber 305 cools the metal target 3013 of the anode target 301.

The utility model discloses when the cavity adopted open design, the device was supporting to have installation vacuum system. The vacuum system mainly comprises a vacuum pump set, a vacuum gauge, a sealing ring and the like. The vacuum pump group comprises a preceding stage mechanical pump and a turbo molecular pump, the preceding stage mechanical pump is positioned outside the device, the turbo molecular pump is positioned at the top of the first cavity 100 of the device and is connected with the first cavity 100 through a flange, and the first cavity 100, the second cavity 200 and the third cavity 300 of the vacuum system provide a pressure not lower than 1 multiplied by 10 ^-6 Pa ultrahigh vacuum environment; the vacuum gauge is inserted into the first chamber 100 of the apparatus via a flange at the top thereof to detect the vacuum environment.

In the embodiment of the present invention, the vacuum pump set maintains the vacuum degree in the vacuum chamber higher than 1 × 10 ^-6 Pa. In another embodiment of the present invention, the vacuum pump set maintains the vacuum degree in the vacuum chamber at 1 × 10 ^-9 Pa and 1X 10 ^-2 Pa.

As shown in fig. 8, an embodiment of the present invention provides a method for generating radiation by a rotary transmission target microfocus X-ray source, including a rotary transmission target microfocus X-ray source, the method including:

s100, maintaining the vacuum state of the cavity, conducting heating current by the cathode needle point 103, and starting preheating; the anode target 301 rotates at a predetermined rotation speed; starting a cooling system;

s200, applying an electric field by a high-voltage power supply, and accelerating electron beams emitted by the cathode needle point to preset electron kinetic energy through the high-voltage electric field; the first focusing lens 201, the second focusing lens 202 and the third focusing lens 203 focus the electron beams and focus the electron beams to the anode target 301 in a predetermined shape and size; the electron beam vertically bombards the metal target material 3013 of the anode target 301, and the bombardment energy of the electron beam is converted into heat energy and X rays; after passing through the anode target 301, the X-ray passes through the X-ray window 306 and is irradiated in a cone beam shape.

In step S100, when the apparatus according to the embodiment of the present invention is operated, the backing mechanical pump is first turned on, and the vacuum degree of the vacuum chamber is pumped and exhausted to 1 × 10 by the backing mechanical pump ^-2 Pa above, starting a turbo molecular pump to pump and discharge the vacuum degree of the vacuum cavity to 1 × 10 ^-6 Pa or above, and maintaining the vacuum degree until the device stops operating.

In step S100, the rotation speed of the anode target 301 is maintained at 100r/min or more.

In step S100, the cooling-cycle water machine is started, and the circulation of the cooling medium is started.

Particularly, the method for generating the rays by the rotary transmission target microfocus X-ray source provided by the embodiment of the utility model is controlled by a control system and is automated.

The utility model overcomes the defects of low imaging efficiency when the transmission X-ray source is used for high-resolution imaging, low resolution, poor image quality and the like when the reflection X-ray source is used for rapid imaging; the device improves the imaging resolution ratio, improves the brightness and X-ray flux of the X-ray source, further improves the imaging efficiency and reduces the imaging time. Specifically, the method comprises the following steps:

1. the light emitting principle of a transmission type X-ray source is adopted, an electron optical system is adopted to focus electron beams, the diameter of a focal spot is reduced, a microfocus is realized, the imaging resolution is improved, and the X-ray emitting angle is increased;

2. the anode target 301 rotates while the electron beam bombards the target material, so that the heat dissipation volume is increased, and the heat dissipation efficiency and the power of the anode target 301 are improved; a cooling system is arranged at the anode target 301, so that the heat dissipation efficiency and the power of the anode target 301 are improved;

3. the bevel gear transmission is adopted, the influence of the magnetic field of the electromagnetic coil in the driving device (the high-precision stepping motor 302) on the track of the electron beam is eliminated, and meanwhile, the design that the anode target rotating shaft and the electron beam system are arranged on the same side is adopted, so that the X-ray window 306 of the ray source can be close to a sample, and unnecessary X-ray intensity attenuation is avoided;

4. the annular structure on the first surface 3011 of the anode target 301 enables the structural shape of the action position of the electron beam not to change along with the rotation of the anode target 301, so that the light extraction stability is ensured;

5. by adopting the magnetic fluid dynamic seal, the high-precision motor 302 can drive the rotary anode target 301 to rotate at a high speed and keep a higher vacuum degree at the same time, so that the device is ensured to work for a long time without damage;

6. the device can adopt a three-section open design, so that consumable replacement and element installation and maintenance are facilitated; and the stability of the working environment of the electron beam system in the vacuum cavity can be ensured by adopting a closed design.

The foregoing is a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of improvements and decorations can be made without departing from the principle of the present invention, and these improvements and decorations should also be regarded as the protection scope of the present invention.

Claims

1. A rotary transmission target micro-focus X-ray source is characterized by comprising a cavity, wherein an electron beam system, a rotary anode target system and a cooling system are arranged in the cavity, the electron beam system and an anode target rotating shaft in the rotary anode target system are arranged on the same side, a motor in the rotary anode target system drives an anode target to rotate through a bevel gear transmission device, an electron beam emitted by the electron beam system vertically bombards a metal target material of the rotary anode target, and the cooling system is used for cooling the anode target;

the anode target comprises a heat-conducting substrate, and a metal target microstructure is arranged on the heat-conducting substrate.

2. The rotary transmission target microfocus X-ray source according to claim 1, wherein the passage member comprises a first passage member, a second passage member is mounted at the front end of the first passage member, the first focusing lens and the second focusing lens are sleeved on the first passage member, and the third focusing lens is sleeved at the front end of the second passage member;

3. The rotary transmission target microfocus X-ray source of claim 1, wherein the rotary anode target system comprises a bevel gear transmission mounted in the cavity, wherein a motor drives a driving bevel gear to rotate, and a driven bevel gear drives the anode target to rotate.

4. The rotary transmissive target microfocus X-ray source of claim 1, wherein the cavity is a unitary structure.

5. The rotary transmissive target microfocus X-ray source of claim 1, wherein; the cavity is formed by detachably connecting at least two cavity bodies, and a vacuum system is arranged on the cavity bodies in a communicated manner.

6. The rotary transmissive target microfocus X-ray source of claim 1, further comprising a control system.

7. The rotary transmission target microfocus X-ray source of claim 1, wherein the cooling system comprises a cooling cavity mounted in the cavity, a cooling medium is disposed in the cooling cavity, and a cooling water circulator is connected to the cooling cavity and circulates the cooling medium.