CN217424276U - Repeatability precision measuring device based on image processing - Google Patents
Repeatability precision measuring device based on image processing Download PDFInfo
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- CN217424276U CN217424276U CN202220640612.7U CN202220640612U CN217424276U CN 217424276 U CN217424276 U CN 217424276U CN 202220640612 U CN202220640612 U CN 202220640612U CN 217424276 U CN217424276 U CN 217424276U
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- 238000012545 processing Methods 0.000 title claims abstract description 16
- 230000033001 locomotion Effects 0.000 claims abstract description 55
- 239000004579 marble Substances 0.000 claims abstract description 43
- 238000005259 measurement Methods 0.000 claims abstract description 22
- 238000002955 isolation Methods 0.000 claims description 10
- 238000003466 welding Methods 0.000 claims 1
- 238000000034 method Methods 0.000 description 11
- 230000007613 environmental effect Effects 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 3
- 238000007405 data analysis Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
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- 238000005286 illumination Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
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- 238000011160 research Methods 0.000 description 2
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- 230000004075 alteration Effects 0.000 description 1
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- 230000008602 contraction Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
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Abstract
The utility model discloses a repeatability precision measuring device based on image processing, including high accuracy industry camera subassembly, marble platform supporting component, accurate motion platform subassembly and data acquisition and control assembly, high accuracy industry camera subassembly includes: the high-precision industrial camera comprises a high-precision industrial camera, an industrial camera fixing plate, a zoom adjustable focus lens, a light source fixing plate and an LED standard annular light source. The industrial camera is fixed on an industrial camera fixing plate through screws, the lens is connected to the high-precision industrial camera through threads, and the light source fixing plate is fixed on the marble gantry through screws. The utility model discloses the repeatability precision measurement device based on image processing who builds, the repeatability precision error that produces when the accurate motion platform unipolar direction of measurable quantity moves, the utility model discloses the repeatability precision measurement device based on image processing who builds can realize the measurement to accurate motion platform XOY two-dimensional plane repeatability precision error.
Description
Technical Field
The utility model relates to a repeatability precision measurement field based on image processing specifically is repeatability precision measurement device based on image processing.
Background
With the vigorous development of the semi-conductor industry in China, the market demand of the precision motion platform as a main part of the semi-conductor industry is greatly increased.
The technical iteration in the general semiconductor industry puts higher requirements on the precision of a precision motion platform system. The system can be divided into low-end, middle-end, high-end and ultrahigh-end precise motion systems according to the precision requirement. For a precision motion platform, positioning precision and repeatability precision are main indexes for evaluating performance capability of the precision motion platform. The precision motion platform usually comprises an XY axis guide rail, a linear motor drive and a grating ruler position feedback device to form the whole system. The grating ruler is easy to be affected by the working environment as a position feedback device, and can generate expansion and contraction under the change of the working environment condition, so that a repeatability precision error is generated. The measurement of the repeatability precision error is an important method for detecting the motion precision of the platform, and generally, the measurement is carried out by adopting a laser interferometer, on one hand, the laser interferometer needs to build a light path assembly on an XOY two-dimensional plane of the precision motion platform, wherein the debugging link of the light path is complex in the process of measuring the repeatability precision error by the laser interferometer, so that the measurement progress is slow. On the other hand, the laser interferometer is susceptible to environmental factors in the measurement process, so that the measurement precision is reduced.
According to the technical scheme, a light path assembly is built on an XOY two-dimensional plane of a precision motion platform, and the debugging link of a light path is a complex process, which usually results in slow measurement progress. The laser interferometer is susceptible to environmental factors during measurement, thereby reducing measurement accuracy.
Therefore, based on the above technical problems, it is necessary for those skilled in the art to develop a repetitive accuracy measuring device based on image processing.
SUMMERY OF THE UTILITY MODEL
The to-be-solved technical problem of the utility model is to provide repeatability precision measurement device based on image processing to there is technical scheme to solve and to build the light path subassembly at accurate motion platform XOY two-dimensional plane, and the debugging link of light path is complicated process, can lead to measuring the progress slowly usually. The laser interferometer is susceptible to the influence of environmental factors in the measurement process, so that the measurement precision is reduced.
In order to solve the technical problem, the utility model discloses a technical scheme does:
the repeatability precision measuring device based on image processing comprises a high-precision industrial camera component, a marble platform supporting component, a precision motion platform component and a data acquisition and control component;
the high precision industrial camera assembly comprises: the high-precision industrial camera is fixed on the industrial camera fixing plate through screws, the lens is connected to the high-precision industrial camera through threads, the light source fixing plate is fixed on the marble gantry through screws, the LED standard annular light source is fixed on the light source fixing plate through screws, the LED standard annular light source can be connected to the data acquisition and control assembly to provide stable and uniform illumination light, so that a measured object has high contrast, the industrial camera is connected to the data acquisition and control assembly through a network cable interface, and images are processed and identified through built-in algorithm software.
Preferably, the marble platform support assembly includes: marble platform, marble longmen, lower margin, vibration isolation post, bottom plate, marble stand. The marble platform is fixed on the vibration isolation columns through screws, the vibration isolation columns are fixed on the ground feet through bolts, the ground feet are welded on the bottom plate, the marble stand columns are connected to the marble platform through bolts, and the marble gantry is fixed on the marble stand columns through bolts.
Preferably, the precision motion platform assembly comprises: XY motion platform, Chunk sucking disc, calibration board. The XY motion platform is fixed on the marble platform through screws, the Chunk sucker is fixed on the XY motion platform through screws, and the calibration plate is placed on the Chunk sucker.
By adopting the technical scheme, the method has the following beneficial effects:
1. the utility model discloses the repeatability precision measuring device based on image processing who builds, the repeatability precision error that produces when measurable quantity precision motion platform unipolar direction moves.
2. The utility model discloses the repeatability precision measurement device based on image processing who builds can realize the measurement to accurate motion platform XOY two-dimensional plane repeatability precision error.
3. The utility model discloses in the measuring method of the accurate motion platform XOY two-dimensional plane repeatability precision error who adopts, only need through platform controller control accurate motion platform with "meter" font motion mode reciprocating motion on the XOY two-dimensional plane, simplified accurate motion platform repeatability precision error measuring process, made things convenient for accurate motion platform repeatability precision error measuring research, richened accurate motion platform XOY two-dimensional plane repeatability precision error's measuring method.
4. The utility model discloses well high accuracy industry camera is difficult for receiving the influence of environmental factor as measuring tool to the measurement accuracy error of measuring tool itself can be reduced.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below. It should be apparent that the drawings in the following description are merely exemplary, and that other embodiments can be derived from the drawings provided by those of ordinary skill in the art without inventive effort.
The structure, proportion, size and the like shown in the present specification are only used for matching with the content disclosed in the specification, so as to be known and read by people familiar with the technology, and are not used for limiting the limit conditions which can be implemented by the present invention, so that the present invention has no technical essential significance, and the modification of any structure, the change of proportion relation or the adjustment of size all fall within the scope which can be covered by the technical content disclosed by the present invention without affecting the efficacy and the purpose which can be achieved by the present invention.
FIG. 1 is a schematic three-dimensional structure;
FIG. 2 is a schematic diagram of a high precision industrial camera assembly;
fig. 3 is a schematic view of a marble slab support assembly;
FIG. 4 is a schematic view of a precision motion stage assembly;
FIG. 5 is a schematic view of calibration of the calibration plate.
In the figure: 1-high precision industrial camera component, 1.1-high precision industrial camera, 1.2-camera fixing plate, 1.3-zoom adjustable lens, 1.4-light source fixing plate, 1.5-LED standard annular light source, 2-marble platform supporting component, 2.1-marble platform, 2.2-gantry marble, 2.3-ground feet, 2.4-vibration isolation columns, 2.5-bottom plate, 2.6-marble upright column, 3-precision motion platform component, 3.1-XY motion platform, 3.2-Chunk sucker, 3.3-calibration plate, 4-data acquisition and control component.
Detailed Description
The following describes the present invention with reference to the accompanying drawings. It should be noted that the description of the embodiments is provided to help understanding of the present invention, but the present invention is not limited thereto. In addition, the technical features related to the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
Referring to fig. 1-5, the repeatability precision measuring device based on image processing of the present invention comprises a high precision industrial camera component 1, a marble platform supporting component 2, a precision motion platform component 3, and a data acquisition and control component 4;
the high-precision industrial camera assembly 1 includes: the high-precision industrial camera comprises a high-precision industrial camera 1.1, an industrial camera fixing plate 1.2, a zoom adjustable lens 1.3, a light source fixing plate 1.4 and an LED standard annular light source 1.5, wherein the industrial camera 1.1 is fixed on the industrial camera fixing plate 1.2 through screws, the lens 1.3 is connected onto the high-precision industrial camera 1.1 through threads, the light source fixing plate 1.4 is fixed on a marble gantry 2.2 through screws, the LED standard annular light source 1.5 is fixed on the light source fixing plate 1.4 through screws, the LED standard annular light source 1.5 can be connected onto a data acquisition and control assembly 4 to provide stable and uniform illumination light, so that an object to be detected has high contrast, the industrial camera 1.1 is connected onto the data acquisition and control assembly 4 through a network cable interface, and images are processed and recognized through built-in algorithm software.
Further, the marble platform support member 2 includes: marble platform 2.1, marble longmen 2.2, lower margin 2.3, vibration isolation post 2.4, bottom plate 2.5, marble stand 2.6. The marble platform 2.1 is fixed on the vibration isolation columns 2.4 through screws, the vibration isolation columns 2.4 are fixed on the ground feet 2.3 through bolts, the ground feet 2.3 are welded on the bottom plate 2.5, the marble upright columns 2.6 are connected to the marble platform 2.1 through bolts, and the marble gantry 2.2 is fixed on the marble upright columns 2.6 through bolts.
Further, the precision motion platform assembly 3 comprises: XY motion platform 3.1, Chunk sucking disc 3.2, calibration plate 3.3. The XY motion platform 3.1 is fixed on the marble platform 2.1 through screws, the Chunk sucker 3.2 is fixed on the XY motion platform 3.1 through screws, and the calibration plate 3.3 is placed on the Chunk sucker 3.2.
The working principle is as follows: mark point in Chunk suction cup 3.2 at the center of the camera is marked as initial Mark (X) by high precision industrial camera assembly 1 while the device is static X0 ,Y X0 ) Then, the precision motion platform component 2 is controlled by the data acquisition and control component to reciprocate towards the X direction, wherein the motion stroke of the platform is controlled in the visual field range of the high-precision industrial camera component 1 each time and controls the same motion stroke, when the platform reciprocates back to the initial position each time, the high-precision industrial camera component 1 can carry out position data acquisition on the Mark point at the center of the camera, and the position data acquisition is recorded as (X) X1 ,Y X1 )、(X X2 ,Y X2 )……(X Xn ,Y Xn ). And obtaining a Mark point moving along the X direction by a data transmission system, and obtaining the discrete degree of the Mark point in the X direction by data analysis.
Mark point in Chunk suction cup 3.2 at the center of the camera is marked as initial Mark (X) by high precision industrial camera assembly 1 when the device is static Y0 ,Y Y0 ) Then the precision motion platform component 2 is controlled by the data acquisition and control component to reciprocate towards the Y direction, wherein the motion stroke of the platform is controlled at high precision in the industryThe camera assembly 1 is in a visual field range and controls the same movement stroke, and the high-precision industrial camera assembly 1 acquires position data of a Mark point in the center of the camera when reciprocating back to the initial position every time, and the position data is recorded as (X) Y1 ,Y Y1 )、(X Y2 ,Y Y2 )……(X Yn ,Y Yn ). And obtaining a Mark point at the center of the Y-direction motion camera of the platform through a data transmission system, and obtaining the discrete degree of the Mark point in the Y direction through data analysis.
In the same operating situation, the Mark point in the Chunk suction cup 3.2, which is in the center of the camera, is marked as an initial Mark (X) by the high-precision industrial camera assembly 1 when the device is stationary 0 ,Y 0 ) The precise motion platform assembly 2 is controlled to reciprocate in X and Y directions and XY45 degrees diagonal directions respectively in a 'meter' shaped motion mode through the control cabinet 5, wherein the motion stroke of the platform is controlled in the visual field range of the high-precision industrial camera assembly 1 each time, the same motion stroke is controlled through the platform controller, the high-precision industrial camera assembly 1 can carry out position data acquisition on a Mark point in the center of the camera when reciprocating back to the initial position each time, N Mark points on an XOY two-dimensional plane are obtained through a data transmission system, and the dispersion degree of the Mark points on the XOY two-dimensional plane is obtained through data analysis.
Through the operation, one of the two-dimensional precision measurement device can measure the repeatability precision error generated by the motion of the precision motion platform assembly 2 in the XY direction, the other can measure the repeatability precision error of the precision motion platform assembly 2 in the XOY two-dimensional plane, on one hand, the high-precision industrial camera assembly 1 is not easily influenced by environmental factors as a measuring tool, so that the measuring precision error of the measuring tool can be reduced, and on the other hand, the high-precision industrial camera assembly 1 is used as the measuring tool, so that the measuring process is simple and quick, and the research on the measurement of the repeatability precision error of the precision motion platform is facilitated.
The embodiments of the present invention have been described in detail with reference to the accompanying drawings, but the present invention is not limited to the described embodiments. It will be apparent to those skilled in the art that various changes, modifications, substitutions and alterations can be made in the embodiments without departing from the principles and spirit of the invention, and the scope of the invention is to be accorded the full scope of the claims.
Claims (3)
1. Repeatability precision measurement device based on image processing, including high accuracy industry camera subassembly (1), marble platform supporting component (2), precision motion platform subassembly (3) and data acquisition and control assembly (4), its characterized in that: the high-precision industrial camera assembly (1) comprises: the high-precision industrial camera comprises a high-precision industrial camera (1.1), an industrial camera fixing plate (1.2), a zoom adjustable lens (1.3), a light source fixing plate (1.4) and an LED standard annular light source (1.5), wherein the industrial camera (1.1) is fixed on the industrial camera fixing plate (1.2) through screws, the lens (1.3) is connected onto the high-precision industrial camera (1.1) through threads, the light source fixing plate (1.4) is fixed on a marble gantry (2.2) through screws, the LED standard annular light source (1.5) is fixed on the light source fixing plate (1.4) through screws, and the LED standard annular light source (1.5) can be connected onto a data acquisition and control component (4).
2. The apparatus for measuring repeatability precision based on image processing according to claim 1, wherein: the marble platform support assembly (2) comprises: marble platform (2.1), marble longmen (2.2), lower margin (2.3), vibration isolation post (2.4), bottom plate (2.5), marble stand (2.6), marble platform (2.1) passes through the fix with screw on vibration isolation post (2.4), vibration isolation post (2.4) pass through the bolt fastening on lower margin (2.3), lower margin (2.3) welding is on bottom plate (2.5), marble stand (2.6) pass through bolted connection to marble platform (2.1), marble longmen (2.2) pass through the bolt fastening on marble stand (2.6).
3. The apparatus for measuring repeatability precision based on image processing according to claim 1, wherein: the precision motion platform assembly (3) comprises: the device comprises an XY motion platform (3.1), a Chunk sucker (3.2) and a calibration plate (3.3), wherein the XY motion platform (3.1) is fixed on a marble platform (2.1) through screws, the Chunk sucker (3.2) is fixed on the XY motion platform (3.1) through screws, and the calibration plate (3.3) is placed on the Chunk sucker (3.2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220640612.7U CN217424276U (en) | 2022-03-23 | 2022-03-23 | Repeatability precision measuring device based on image processing |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220640612.7U CN217424276U (en) | 2022-03-23 | 2022-03-23 | Repeatability precision measuring device based on image processing |
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| Publication Number | Publication Date |
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| CN217424276U true CN217424276U (en) | 2022-09-13 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202220640612.7U Expired - Fee Related CN217424276U (en) | 2022-03-23 | 2022-03-23 | Repeatability precision measuring device based on image processing |
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| CN (1) | CN217424276U (en) |
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