CN217377322U - System for utilize accessory substance preparation mixed raw materials in polycrystalline silicon production - Google Patents
System for utilize accessory substance preparation mixed raw materials in polycrystalline silicon production Download PDFInfo
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- CN217377322U CN217377322U CN202221317154.XU CN202221317154U CN217377322U CN 217377322 U CN217377322 U CN 217377322U CN 202221317154 U CN202221317154 U CN 202221317154U CN 217377322 U CN217377322 U CN 217377322U
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Abstract
The utility model relates to the technical field of polysilicon production, in particular to a system for preparing mixed raw materials by utilizing byproducts in the polysilicon production, which comprises a fractionating tower; an inlet I of the mixer is communicated with the top output end of the fractionating tower through a flow path I; a first flow meter and a first regulating valve are arranged on the first flow path; the inlet II is communicated with the tower kettle output end of the fractionating tower through a flow path II; a second flow meter and a second regulating valve are arranged on the second flow path; the inlet III is communicated with a pure trichlorosilane source through a flow path III; a third flow meter and a third regulating valve are arranged on the third flow path; the storage container is communicated with the output port of the mixer; the input end of the delivery pump is communicated with the storage container; the online chromatograph is communicated with the output end of the delivery pump; and the automatic control system is respectively connected with the regulating valve I, the regulating valve II, the regulating valve III and the online chromatograph so as to acquire information and control. The utility model can ensure the stability of the content of dichlorosilane in the trichlorosilane raw material of the reduction furnace.
Description
Technical Field
The utility model relates to a polycrystalline silicon production technical field especially relates to a system for utilize accessory substance preparation mixed raw materials in polycrystalline silicon production.
Background
In the process of producing the polycrystalline silicon by the improved Siemens method, the reduction furnace adopts a vapor deposition method for production. Due to the limitation of the conversion rate, trichlorosilane cannot completely react, and byproducts such as dichlorosilane and the like are generated in the process of generating polycrystalline silicon through reaction, so that the reduction recycled material contains components such as trichlorosilane, dichlorosilane and the like. Practice proves that the addition of a proper amount of dichlorosilane in the feeding is favorable for inhibiting side reactions, the primary conversion rate of the trichlorosilane is improved, and the deposition rate of polycrystalline silicon in the reduction furnace is improved.
The existing production system mixes the mixture of trichlorosilane and dichlorosilane in the reduction reclaimed materials with the high-purity trichlorosilane separated and purified from the synthetic materials according to a fixed proportion, and the mixed mixture is directly sent to a reduction furnace for polycrystalline silicon production. Due to the production instability of the reduction furnace, the content of dichlorosilane in the reduction recovery material trichlorosilane is not fixed; in addition, the feeding amount of the reduction furnace greatly fluctuates with the amount of the furnace opening, and the conventional production system cannot stably control the content of dichlorosilane in the trichlorosilane, so that the reduction utilization rate of the trichlorosilane is influenced.
SUMMERY OF THE UTILITY MODEL
In view of this, the utility model provides a system for utilize byproduct preparation mixed raw materials in polycrystalline silicon production, main aim at guarantee the stability of dichlorosilane component content in the trichlorosilane raw materials of reducing furnace, promote the reduction utilization ratio of trichlorosilane.
In order to achieve the above object, the utility model mainly provides the following technical scheme:
the embodiment of the utility model provides a system for preparing mixed raw materials by using byproducts in polysilicon production, which comprises a fractionating tower, a mixer, a storage container, a delivery pump, an online chromatograph and an automatic control system;
the input end of the fractionating tower is used for inputting a mixed material of trichlorosilane and dichlorosilane; the tower kettle output end of the fractionating tower is used for outputting trichlorosilane materials; the tower top output end of the fractionating tower is used for outputting dichlorosilane materials;
the mixer is provided with a first inlet, a second inlet, a third inlet and an output port, and is used for mixing the materials input from the first inlet, the second inlet and the third inlet and outputting the materials through the output port; the inlet I of the mixer is communicated with the top output end of the fractionating tower through a flow path I; a first flow meter is arranged on the first flow path; the first flow path is provided with a first regulating valve;
the inlet II is communicated with the tower kettle output end of the fractionating tower through a flow path II; a second flow meter is arranged on the second flow path; a second adjusting valve is arranged on the second flow path;
the inlet III is communicated with a pure trichlorosilane source through a flow path III; a third flow meter is arranged on the third flow path; a third adjusting valve is arranged on the third flow path;
the storage container is communicated with the output port;
the input end of the delivery pump is communicated with the storage container; the output end of the delivery pump can be communicated with the reduction furnace;
the online chromatograph is communicated with the output end of the delivery pump and is used for detecting the content of dichlorosilane;
the automatic control system is respectively connected with the first flowmeter, the first regulating valve, the second flowmeter, the second regulating valve, the third flowmeter, the third regulating valve and the online chromatograph to collect information and control the first regulating valve, the second regulating valve and the third regulating valve.
Further, the first regulating valve is an electric regulating valve.
Further, the second regulating valve is an electric regulating valve.
Further, the third regulating valve is an electric regulating valve.
Further, the structures of the first regulating valve, the second regulating valve and the third regulating valve are the same.
Further, the first flowmeter, the second flowmeter and the third flowmeter have the same structure.
Further, the storage container is of a tank-shaped structure.
Borrow by above-mentioned technical scheme, the utility model discloses the system of utilizing the accessory substance preparation mixed raw materials in the polycrystalline silicon production has following advantage at least:
the method ensures the stability of the content of the dichlorosilane component in the trichlorosilane raw material of the reducing furnace, and improves the reduction utilization rate of the trichlorosilane.
The above description is only an outline of the technical solution of the present invention, and in order to make the technical means of the present invention more clearly understood and to be implemented in accordance with the content of the specification, the following detailed description will be given of preferred embodiments of the present invention in conjunction with the accompanying drawings.
Drawings
Fig. 1 is a schematic diagram of a system for preparing mixed raw materials by using byproducts in the production of polycrystalline silicon according to an embodiment of the present invention.
Shown in the figure:
the system comprises a fractionating tower 1, a first flow path 2, a second flow path 3, a first flow meter 4, a first regulating valve 5, a second flow meter 6, a second regulating valve 7, a third regulating valve 8, a third flow meter 9, a third flow path 10, a storage container 11, a delivery pump 12, an online chromatograph 13, an automatic control system 14 and a mixer 15.
Detailed Description
To further illustrate the technical means and effects of the present invention adopted to achieve the intended purpose of the present invention, the following detailed description is given with reference to the accompanying drawings and preferred embodiments, in order to explain the detailed embodiments, structures, features and effects of the present invention. In the following description, different "one embodiment" or "an embodiment" refers to not necessarily the same embodiment. Furthermore, the particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.
As shown in fig. 1, a system for preparing a mixed raw material by using byproducts in the production of polycrystalline silicon according to an embodiment of the present invention includes a fractionating tower 1, a mixer 15, a storage container 11, a transfer pump 12, an online chromatograph 13, and an automatic control system 14;
the input end of the fractionating tower 1 is used for inputting a mixed material of trichlorosilane and dichlorosilane; the tower kettle output end of the fractionating tower 1 is used for outputting trichlorosilane materials; the tower top output end of the fractionating tower 1 is used for outputting dichlorosilane materials;
the mixer 15 is provided with an inlet I, an inlet II, an inlet III and an output port, and is used for mixing the materials input by the inlet I, the inlet II and the inlet III and outputting the materials through the output port; an inlet I of the mixer 15 is communicated with the top output end of the fractionating tower 1 through a flow path I2; the flow path I2 is provided with a flow meter I4 for monitoring the flow rate in the flow path I2; the flow path I2 is provided with a regulating valve I5 for regulating the flow in the flow path I2; the inlet II is communicated with the tower kettle output end of the fractionating tower 1 through a flow path II 3; a second flowmeter 6 is arranged on the second flow path 3 and used for monitoring the flow in the second flow path 3; a second adjusting valve 7 is arranged on the second flow path 3 and used for adjusting the flow in the second flow path 3; the inlet III is communicated with a pure trichlorosilane source through a flow path III 10; a third flowmeter 9 is arranged on the third flow path 10 and used for monitoring the flow in the third flow path; the third flow path 10 is provided with a third regulating valve 8 for regulating the flow rate in the third flow path 10.
The storage container 11 is communicated with the output port and is used for storing the mixture; this embodiment is preferred, and storage container 11 is jar column structure, and the structure is reliable, and convenient for material selection.
The input end of the delivery pump 12 is communicated with the storage container 11; the output end of the delivery pump 12 can be communicated with a reduction furnace and used for delivering the mixture to the reduction furnace. The online chromatograph 13 is communicated with the output end of the delivery pump 12 and is used for detecting the content of dichlorosilane in the mixture output by the delivery pump 12. The automatic control system 14 is respectively connected with the first flow meter 4, the first regulating valve 5, the second flow meter 6, the second regulating valve 7, the third flow meter 9, the third regulating valve 8 and the online chromatograph 13 so as to acquire information and control the first regulating valve 5, the second regulating valve 7 and the third regulating valve 8. In the preferred embodiment, the first regulating valve 5 is an electric regulating valve to facilitate regulation and control. Preferably, the second regulating valve 7 is an electric regulating valve, so that regulation and control are convenient. Preferably, the third regulating valve 8 is an electric regulating valve, so as to facilitate regulation and control. It is further preferred that the first, second and third control valves 5, 7, 8 are identical in construction to facilitate system set-up and control. In the present embodiment, the flow meters one 4, two 6 and three 9 are preferably identical in structure to facilitate system setup and control.
The utility model discloses a system for utilize accessory substance preparation mixed raw materials in polycrystalline silicon production that an embodiment provided ensures the stability of dichlorosilane component content in the trichlorosilane raw materials of reducing furnace, promotes trichlorosilane's reduction utilization ratio.
Reducing a mixture of recovered trichlorosilane and dichlorosilane, separating the mixture through a fractionating tower 1, outputting the trichlorosilane in a tower kettle of the fractionating tower 1 through a second flow path 3, outputting the dichlorosilane on the tower top of the fractionating tower 1 through a first flow path 2, respectively entering a mixer 15, mixing the mixture with pure trichlorosilane input through a third flow path 10, independently controlling the flow rate of the three flow paths entering the mixer 15, and further realizing control on the content of the dichlorosilane; a delivery pump 12 is provided at the outlet of the storage container 11; a small strand of material is led out from the output end of the delivery pump 12 and is sampled by an online chromatograph 13 to detect the content of dichlorosilane on line; the automatic control system 14 automatically collects data, compares the data with the dichlorosilane content value of the set requirement, automatically matches the material flow of the three groups of flow paths by using the set calculation program, and automatically controls the material content of each strand, thereby achieving the purpose of stably controlling the content of the dichlorosilane in the storage container 11.
In addition, the required content of the dichlorosilane component can be set and automatically controlled according to different growth stages of the polycrystalline silicon in the reduction furnace, and the aim of meeting the requirement of the silicon rod growth of the reduction furnace on the content of the dichlorosilane is fulfilled.
The utility model discloses a system for utilize accessory substance preparation mixed raw materials in polycrystalline silicon production that an embodiment provided can real-time detection and control the content of dichlorosilane in the trichlorosilane raw materials who sends into the reduction furnace to can control dichlorosilane content automatically as required, to the stable production of reduction furnace, energy saving and consumption reduction, improvement production efficiency all have very big promotion effect, have higher economic benefits.
The utility model discloses a system for utilize accessory substance preparation mixed raw materials in polycrystalline silicon production that an embodiment provided can improve reduction furnace production efficiency, has reduced because the fluctuation of dichlorosilane content and the furnace conditions that produces are unusual, has satisfied the stable requirement of vapor deposition reaction to raw materials component content in the reduction furnace, and the control value of dichlorosilane content differs within 5% with the setting value, has kept the better stability of component content, has improved economic benefits.
Further still, although the terms first, second, etc. may be used herein to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another. For example, a first element could be termed a second element, and, similarly, a second element could be termed a first element, with such terms being used only to distinguish one element from another. Without departing from the scope of the exemplary embodiments. Similarly, the terms first, second, etc. do not denote any order or order, but rather the terms first, second, etc. are used to distinguish one element from another. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
In the description of the present invention, unless expressly stated or limited otherwise, the terms "mounted," "connected," and "fixed" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral part; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
The utility model discloses the standard part that uses all can purchase from the market, and dysmorphism piece all can be customized according to the description with the record of attached drawing, and the concrete connected mode of each part all adopts conventional means such as ripe bolt, rivet, welding among the prior art, and machinery, part and equipment all adopt prior art, and conventional model, including the connected mode of circuit connection conventional among the adoption prior art, here detailed description no longer.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention in any way, and any simple modification, equivalent change and modification made by the technical spirit of the present invention to the above embodiments are all within the scope of the technical solution of the present invention.
Claims (7)
1. A system for preparing mixed raw materials by using byproducts in polycrystalline silicon production is characterized by comprising a fractionating tower, a mixer, a storage container, a delivery pump, an online chromatograph and an automatic control system;
the input end of the fractionating tower is used for inputting a mixed material of trichlorosilane and dichlorosilane; the tower kettle output end of the fractionating tower is used for outputting trichlorosilane materials; the tower top output end of the fractionating tower is used for outputting dichlorosilane materials;
the mixer is provided with a first inlet, a second inlet, a third inlet and an output port, and is used for mixing the materials input from the first inlet, the second inlet and the third inlet and outputting the materials through the output port; the inlet I of the mixer is communicated with the top output end of the fractionating tower through a flow path I; a first flow meter is arranged on the first flow path; the first flow path is provided with a first regulating valve;
the inlet II is communicated with the tower kettle output end of the fractionating tower through a flow path II; a second flow meter is arranged on the second flow path; a second adjusting valve is arranged on the second flow path;
the inlet III is communicated with a pure trichlorosilane source through a flow path III; a third flow meter is arranged on the third flow path; a third adjusting valve is arranged on the third flow path;
the storage container is communicated with the output port;
the input end of the delivery pump is communicated with the storage container; the output end of the delivery pump can be communicated with the reduction furnace;
the online chromatograph is communicated with the output end of the delivery pump and is used for detecting the content of dichlorosilane;
the automatic control system is respectively connected with the first flowmeter, the first regulating valve, the second flowmeter, the second regulating valve, the third flowmeter, the third regulating valve and the online chromatograph to collect information and control the first regulating valve, the second regulating valve and the third regulating valve.
2. The system for preparing mixed raw material using byproduct in polysilicon production according to claim 1,
the first regulating valve is an electric regulating valve.
3. The system for preparing mixed raw material using byproduct in polysilicon production according to claim 2,
and the second regulating valve is an electric regulating valve.
4. The system for preparing mixed raw material using by-products in the production of polycrystalline silicon according to claim 3,
and the third regulating valve is an electric regulating valve.
5. The system for preparing mixed raw material using byproduct in polysilicon production according to claim 4,
the first regulating valve, the second regulating valve and the third regulating valve are identical in structure.
6. The system for preparing mixed raw material using byproduct in polysilicon production according to claim 1,
the first flowmeter, the second flowmeter and the third flowmeter have the same structure.
7. The system for preparing mixed raw material using byproduct in polysilicon production according to claim 1,
the storage container is of a tank-shaped structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221317154.XU CN217377322U (en) | 2022-05-27 | 2022-05-27 | System for utilize accessory substance preparation mixed raw materials in polycrystalline silicon production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221317154.XU CN217377322U (en) | 2022-05-27 | 2022-05-27 | System for utilize accessory substance preparation mixed raw materials in polycrystalline silicon production |
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| Publication Number | Publication Date |
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| CN217377322U true CN217377322U (en) | 2022-09-06 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202221317154.XU Active CN217377322U (en) | 2022-05-27 | 2022-05-27 | System for utilize accessory substance preparation mixed raw materials in polycrystalline silicon production |
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- 2022-05-27 CN CN202221317154.XU patent/CN217377322U/en active Active
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