CN217287863U - Tail gas treatment device - Google Patents
Tail gas treatment device Download PDFInfo
- Publication number
- CN217287863U CN217287863U CN202220066697.2U CN202220066697U CN217287863U CN 217287863 U CN217287863 U CN 217287863U CN 202220066697 U CN202220066697 U CN 202220066697U CN 217287863 U CN217287863 U CN 217287863U
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- corrosion
- resistant
- pipe
- water tank
- spray tower
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- 230000007797 corrosion Effects 0.000 claims abstract description 138
- 238000005260 corrosion Methods 0.000 claims abstract description 138
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 59
- 239000007921 spray Substances 0.000 claims abstract description 44
- 238000001514 detection method Methods 0.000 claims abstract description 28
- 239000012530 fluid Substances 0.000 claims abstract description 22
- 230000003628 erosive effect Effects 0.000 claims description 9
- 238000003780 insertion Methods 0.000 claims description 7
- 230000037431 insertion Effects 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 6
- 239000007789 gas Substances 0.000 description 28
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 22
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 16
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000003912 environmental pollution Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 239000013589 supplement Substances 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 231100001261 hazardous Toxicity 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006386 neutralization reaction Methods 0.000 description 1
- 239000002574 poison Substances 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000004753 textile Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000009941 weaving Methods 0.000 description 1
Images
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
- Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters
Landscapes
- Treating Waste Gases (AREA)
Abstract
The utility model provides a tail gas treatment device, include: a first spray tower comprising a first water tank; the second spray tower comprises a second water tank; the second spray tower is communicated with the first spray tower; further comprising: a first corrosion resistant storage device; the first fluid conveying module is respectively connected with the first water tank and the first corrosion-resistant storage device; the first PH value detection device is fixed in the first water tank; a second corrosion resistant storage device; the second fluid conveying module is respectively connected with the second water tank and the second corrosion-resistant storage device; and the second PH value detection device is fixed in the second water tank. The PH value of the solution in the water tank of the corresponding spray tower is detected in real time through the PH value detection device, the solution can be supplemented in time, automatic addition can be achieved through each fluid conveying module, and danger is reduced.
Description
[ technical field ] A method for producing a semiconductor device
The utility model relates to a weaving equipment field, especially a tail gas processing apparatus.
[ background of the invention ]
In the chemical fiber textile production, a large amount of tail gas is generated, and the tail gas contains a large amount of alkaline poison or pollutants, can not be directly discharged, and needs to be treated.
The existing tail gas treatment equipment comprises a first spray tower and a second spray tower which are communicated, the tail gas is firstly conveyed into the first spray tower, hydrochloric acid solution is sprayed on the tail gas, and harmless treatment such as primary acid-base neutralization and the like is carried out on the tail gas; and then the tail gas is conveyed to a second spray tower, and hydrogen peroxide is sprayed on the tail gas until the tail gas reaches the standard and then the tail gas can be discharged.
Wherein, the hydrochloric acid solution or hydrogen peroxide is stored in respective water tanks of the first spray tower or the second spray tower, and is recycled in the spray towers for use, and is replaced at intervals.
In the tail gas treatment process, the pH value of the hydrochloric acid solution or the hydrogen peroxide is gradually increased and neutralized along with the cyclic spraying of the hydrochloric acid solution or the hydrogen peroxide and the tail gas, and on the other hand, the hydrochloric acid solution or the hydrogen peroxide is also consumed in the tail gas spraying process. Therefore, the corresponding hydrochloric acid solution or hydrogen peroxide solution needs to be supplemented into the respective water tanks of the first spray tower and the second spray tower in time, the PH value in the spray towers is reduced to meet the requirement, otherwise, the tail gas treatment cannot reach the standard, and the environmental pollution is easily caused.
In the prior art, the traditional mode is to directly add hydrochloric acid solution or hydrogen peroxide solution with corresponding concentration into the water tanks of each spray tower by manpower, and the following defects exist:
firstly, the PH value of the tail gas generated by producing different products is not fixed, and the pH value of the tail gas is usually directly poured into a water tank by using a fixed concentration through a manual operation mode, the volume of the added solution is estimated, so that the PH value of the solution in the spray tower is difficult to control, the precision is low, the error is large, and the risk of environmental pollution is caused because the tail gas treatment cannot reach the standard.
Secondly, manual operation, when replenishing the solution each time, need take out hydrochloric acid solution or hydrogen peroxide solution in corresponding storage jar, then pour into the basin again, it is inefficient, and because hydrochloric acid solution or hydrogen peroxide solution itself are the hazardous articles, there is certain potential safety hazard in whole operation process.
Finally, manual operation needs workers to detect the PH value irregularly, when the PH value of the solution in the spray tower is not satisfactory, the workers cannot know the PH value timely, hysteresis exists, and tail gas treatment cannot reach the standard easily.
[ Utility model ] A method for manufacturing a semiconductor device
The to-be-solved technical problem of the utility model lies in providing a tail gas processing apparatus, detects the PH value of solution in the spray column in real time to realize automatic supplementary solution, the precision is high, and efficient.
The utility model discloses a realize like this: an exhaust gas treatment device comprising:
a first spray tower comprising a first water tank;
the second spray tower comprises a second water tank; the second spray tower is communicated with the first spray tower;
further comprising:
a first corrosion resistant storage device;
the first fluid conveying module is respectively connected with the first water tank and the first corrosion-resistant storage device;
the first PH value detection device is fixed in the first water tank;
a second corrosion resistant storage device;
the second fluid conveying module is respectively connected with the second water tank and the second corrosion-resistant storage device;
and the second PH value detection device is fixed in the second water tank.
Further, the first fluid delivery module comprises:
a first power plant including a first outlet end and a first inlet end; a first corrosion-resistant suction pipe is fixed at the first inlet end; the first corrosion-resistant suction tube is inserted into the first corrosion-resistant storage device;
the first corrosion-resistant pipe is fixed on the first water tank and communicated with the first water tank;
and the inlet end of the second corrosion-resistant pipe is connected with the first outlet end in an airtight mode, and the outlet end of the second corrosion-resistant pipe is connected with the first corrosion-resistant pipe in a non-airtight mode.
Further, the first corrosion-resistant pipe is a corrosion-resistant metal pipe and is vertically arranged;
the second corrosion-resistant pipe is a PVC corrosion-resistant hose, and a hard first corrosion-resistant insertion pipe is further arranged at one end of the outlet;
the outer diameter of the first corrosion-resistant cannula is smaller than the inner diameter of the first corrosion-resistant tube;
the first corrosion resistant cannula is non-hermetically inserted into the first corrosion resistant tube.
Further, the first power device is a pump.
Further, the second fluid delivery module comprises:
a second power plant including a second outlet end and a second inlet end; a second corrosion-resistant suction pipe is fixed at the second inlet end; the second erosion resistant suction pipe is inserted into the second erosion resistant storage device;
the third corrosion-resistant pipe is fixed on the second water tank and communicated with the second water tank;
and the inlet end of the fourth corrosion-resistant pipe is connected with the second outlet end in an airtight mode, and the outlet end of the fourth corrosion-resistant pipe is connected with the third corrosion-resistant pipe in a non-airtight mode.
Further, the third corrosion-resistant pipe is a corrosion-resistant metal pipe and is vertically arranged;
the fourth corrosion-resistant pipe is a PVC corrosion-resistant hose, and a hard second corrosion-resistant insertion pipe is further arranged at the outlet end of the fourth corrosion-resistant pipe;
the outer diameter of the second corrosion-resistant insertion pipe is smaller than the inner diameter of the third corrosion-resistant pipe;
the second corrosion resistant insert tube is non-hermetically inserted into the third corrosion resistant tube.
Further, the second power device is a pump.
Further, the first PH detecting device and the second PH detecting device are both PH meters.
The utility model has the advantages that: an exhaust gas treatment device comprising: a first spray tower comprising a first water tank; the second spray tower comprises a second water tank; the second spray tower is communicated with the first spray tower; further comprising: a first corrosion resistant storage device; the first fluid conveying module is respectively connected with the first water tank and the first corrosion-resistant storage device; the first PH value detection device is fixed in the first water tank; a second corrosion resistant storage device; the second fluid conveying module is respectively connected with the second water tank and the second corrosion-resistant storage device; and the second PH value detection device is fixed in the second water tank. The PH value of the solution in the water tank of the corresponding spray tower is detected in real time through the PH value detection device, the solution can be supplemented in time, automatic addition can be achieved through each fluid conveying module, and danger is reduced.
[ description of the drawings ]
The invention will be further described with reference to the following examples with reference to the accompanying drawings.
Fig. 1 is a perspective view of the tail gas treatment device of the present invention.
Fig. 2 is an exploded view of the first corrosion resistant insert tube and the first corrosion resistant tube, or the second corrosion resistant insert tube and the third corrosion resistant tube of the present invention.
Fig. 3 is a control schematic diagram of the present invention.
Description of the reference numerals:
a first spray tower 1, a first water tank 11;
a second spray tower 2, a second water tank 21;
a control valve 3;
a first corrosion-resistant storage device 4;
a first fluid delivery module 5, a first power plant 51, a first outlet end 511, a first inlet end 512, a first corrosion-resistant suction tube 513, a first corrosion-resistant tube 52, a second corrosion-resistant tube 53, an inlet end 531, an outlet end 532, a first corrosion-resistant cannula 533;
a first pH value detection device 6;
a second corrosion-resistant storage device 7;
a second fluid delivery module 8, a second power plant 81, a second outlet port 811, a second inlet port 812, a second corrosion resistant suction tube 813, a third corrosion resistant tube 82, a fourth corrosion resistant tube 83, an inlet port 831, an outlet port 832, a second corrosion resistant cannula 833;
and a second PH detection device 9.
[ detailed description ] A
In the description of the present invention, it should be understood that the description indicating the orientation or the positional relationship is based on the orientation or the positional relationship shown in the drawings, and is only for convenience of description and simplification of the description, but does not indicate or imply that the indicated device or element must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the scope of the present invention.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
The utility model discloses the general concept of implementation as follows:
each PH sensing device may be communicatively coupled to a control system, such as a PLC, for the fluid delivery module and the production line. The PH value of the solution in the water tank of the corresponding spray tower is detected in real time through the corresponding PH value detection device, the solution can be supplemented in time, automatic addition can be realized through each fluid conveying module, and danger is reduced.
Please refer to fig. 1 to 3.
An exhaust gas treatment device comprising:
a first spray tower 1 including a first water tank 11;
a second spray tower 2 including a second water tank 21; the second spray tower 2 is communicated with the first spray tower 1; in a specific embodiment, a control valve 3 can be further arranged between the first spray tower 1 and the second spray tower 2, so that the maintenance is convenient.
Further comprising:
a first corrosion-resistant storage device 4; for example, a PVC corrosion resistant can may be used.
A first fluid delivery module 5 connected to the first water tank 11 and the first corrosion-resistant storage apparatus 4, respectively;
a first PH detection device 6 fixed in the first water tank 11; for detecting the PH of the solution in the first tank 11;
a second corrosion-resistant storage device 7; for example, a corrosion resistant tank of PVC may be used.
A second fluid transfer module 8 connected to the second water tank 21 and the second corrosion-resistant storage device 7, respectively;
and a second PH detection device 9 fixed in the second water tank 21. For detecting the PH of the solution in the second tank 21.
The first fluid delivery module 5 comprises:
a first power plant 51 comprising a first outlet end 511 and a first inlet end 512; a first erosion-resistant suction tube 513 is secured to the first inlet end 512; the first erosion resistant suction pipe 513 is inserted into the first erosion resistant storage device 4;
a first corrosion resistant pipe 52 fixed to the first water tank 11 and communicating with the first water tank 11;
a second corrosion resistant tube 53 having an inlet end 531 hermetically connected to the first outlet end 511 and an outlet end 532 non-hermetically connected to the first corrosion resistant tube 52. It should be noted that the outlet end 532 is not hermetically connected to the first corrosion resistant pipe 52 because: what adopt at first in concrete production is the gas tightness and connect, but discovery in the use, first basin 11 and first corrosion-resistant storage device 4 can constitute the siphon system, and the siphonage appears easily, causes and after first power device 51 stops working, continues to automatic replenishment solution in first basin 11 because of the siphonage, causes the solution PH in the basin not accurate, causes first basin 11 to fill with solution simultaneously and spills over easily, produces the potential safety hazard. And after adopting the non-airtight connection, the second corrosion-resistant pipe 53 is communicated with the outside air, so that the siphon phenomenon between the first water tank 11 and the first corrosion-resistant storage device 4 is eliminated, and the solution can be supplemented through the first power device 51 to realize the automatic control of suction or stop. The same applies for the following non-gas tight connection of the fourth corrosion resistant pipe 83 and the third corrosion resistant pipe 82.
The first corrosion-resistant pipe 52 is a corrosion-resistant metal pipe or a PVC corrosion-resistant hard pipe and is vertically arranged;
the second corrosion-resistant pipe 53 is a PVC corrosion-resistant hose, and a hard first corrosion-resistant insertion pipe 533 is further arranged at one outlet end 532;
the outer diameter of the first corrosion resistant cannula 533 is less than the inner diameter of the first corrosion resistant tube 52; i.e. both are in clearance fit, so that both are non-airtight.
The first corrosion resistant cannula 533 is non-hermetically inserted into the first corrosion resistant tube 52.
The first power unit 51 is a pump.
The second fluid transport module 8 comprises:
a second power plant 81 including a second outlet port 811 and a second inlet port 812; a second corrosion-resistant suction tube 813 is secured to the second inlet end 812; the second erosion-resistant suction pipe 813 is inserted into the second erosion-resistant storage unit 7;
a third corrosion resistant pipe 82 fixed to the second water tank 21 and communicating with the second water tank 21;
the fourth corrosion resistant tube 83, the inlet 831 and the second outlet 811 are hermetically connected, and the outlet 832 is non-hermetically connected to the third corrosion resistant tube 82.
The third corrosion-resistant pipe 82 is a corrosion-resistant metal pipe or a PVC corrosion-resistant hard pipe and is vertically arranged;
the fourth corrosion-resistant pipe 83 is a PVC corrosion-resistant hose, and a hard second corrosion-resistant cannula 833 is further arranged at the outlet end 832;
the outer diameter of the second corrosion resistant cannula 833 is less than the inner diameter of the third corrosion resistant tube 82; i.e. both are a clearance fit so that they are not hermetically connected.
The second corrosion-resistant insert tube 833 is non-hermetically inserted into the third corrosion-resistant tube 82.
The second power device 81 is a pump.
The first PH detection device 6 and the second PH detection device 9 are both PH meters.
Has a use mode:
the first corrosion-resistant storage device 4 and the second corrosion-resistant storage device 7 adopt PVC corrosion-resistant storage tanks and are respectively provided with a raw material supplement inlet and a suction pipe orifice; the suction nozzle is used for inserting the first corrosion-resistant suction pipe 513 or the second corrosion-resistant suction pipe 813 for sucking the solution; the material replenishing inlet is used for replenishing the solution in the storage tank.
The first corrosion-resistant storage device 4 and the second corrosion-resistant storage device 5 can be original solution storage tanks respectively by using storage tanks, or can be arranged beside a spray tower separately. The volume of the storage tank is larger than that of the water tank.
The first power device 51, the second power device 81, the first PH value detection device 6 and the second PH value detection device 9 are respectively in communication connection with a control system of a production line, such as a PLC, so that unified control is realized.
The hydrochloric acid solution is filled in the first water tank 11; the hydrogen peroxide is filled in the second water tank 21.
The upper limit and the lower limit of the first PH detection device 6 and the second PH detection device 9 are set in advance in the PLC.
Taking the first PH detection device 6 as an example, if the upper limit PH is 5 and the lower limit PH is 3, when detecting that the PH in the first water tank is 5, the first PH detection device 6 feeds back to the PLC, and the PLC receives the PH and controls the first power device 51 to replenish the hydrochloric acid solution into the first water tank 11 until the first PH detection device 6 detects that the PH of the solution in the first water tank 11 is 3, which indicates that the PH of the solution meets the requirement, and the PLC controls the first power device 51 to stop operating. Similarly, the second PH can be set according to the actual use requirement as well as the detection device 9.
Namely the signal of the upper limit value corresponding to the solution to be supplemented;
the lower limit value corresponds to a signal that the pH of the solution in the water tank meets the requirement and the solution is stopped to be supplemented. The whole process realizes automatic detection of the pH value and can automatically supplement the solution in time.
And the tail gas is conveyed to the first spray tower 1 according to the prior art, is firstly sprayed for the first time, then enters the second spray tower 2 for the second time, and can be discharged after meeting the requirements.
Although specific embodiments of the present invention have been described, it will be understood by those skilled in the art that the specific embodiments described are illustrative only and are not limiting upon the scope of the invention, and that equivalent modifications and variations can be made by those skilled in the art without departing from the spirit of the invention, which is to be limited only by the claims appended hereto.
Claims (8)
1. An exhaust gas treatment device comprising:
a first spray tower comprising a first water tank;
the second spray tower comprises a second water tank; the second spray tower is communicated with the first spray tower;
the method is characterized in that: further comprising:
a first corrosion resistant storage device;
the first fluid conveying module is respectively connected with the first water tank and the first corrosion-resistant storage device;
the first PH value detection device is fixed in the first water tank;
a second corrosion resistant storage device;
the second fluid conveying module is respectively connected with the second water tank and the second corrosion-resistant storage device;
and the second PH value detection device is fixed in the second water tank.
2. The exhaust gas treatment device according to claim 1, wherein: the first fluid delivery module comprises:
a first power plant including a first outlet end and a first inlet end; a first corrosion-resistant suction pipe is fixed at the first inlet end; the first corrosion-resistant suction tube is inserted into the first corrosion-resistant storage device;
the first corrosion-resistant pipe is fixed on the first water tank and communicated with the first water tank;
and the inlet end of the second corrosion-resistant pipe is connected with the first outlet end in an airtight mode, and the outlet end of the second corrosion-resistant pipe is connected with the first corrosion-resistant pipe in a non-airtight mode.
3. An exhaust gas treatment device according to claim 2, wherein: the first corrosion-resistant pipe is a corrosion-resistant metal pipe and is vertically arranged;
the second corrosion-resistant pipe is a PVC corrosion-resistant hose, and one end of the outlet is also provided with a hard first corrosion-resistant insertion pipe;
the outer diameter of the first corrosion-resistant cannula is smaller than the inner diameter of the first corrosion-resistant tube;
the first corrosion resistant cannula is non-hermetically inserted into the first corrosion resistant tube.
4. An exhaust gas treatment device according to claim 2, wherein: the first power device is a pump.
5. The exhaust gas treatment device according to claim 1, wherein: the second fluid delivery module includes:
a second power plant including a second outlet end and a second inlet end; a second corrosion-resistant suction pipe is fixed at the second inlet end; the second erosion resistant suction pipe is inserted into the second erosion resistant storage device;
the third corrosion-resistant pipe is fixed on the second water tank and communicated with the second water tank;
and the inlet end of the fourth corrosion-resistant pipe is connected with the second outlet end in an airtight mode, and the outlet end of the fourth corrosion-resistant pipe is connected with the third corrosion-resistant pipe in a non-airtight mode.
6. An exhaust gas treatment device according to claim 5, wherein: the third corrosion-resistant pipe is a corrosion-resistant metal pipe and is vertically arranged;
the fourth corrosion-resistant pipe is a PVC corrosion-resistant hose, and a hard second corrosion-resistant insertion pipe is further arranged at the outlet end of the fourth corrosion-resistant pipe;
the outer diameter of the second corrosion-resistant insertion pipe is smaller than the inner diameter of the third corrosion-resistant pipe;
the second corrosion resistant insert tube is non-hermetically inserted into the third corrosion resistant tube.
7. An exhaust gas treatment device according to claim 5, wherein: the second power device is a pump.
8. The exhaust gas treatment device according to claim 1, wherein: the first pH value detection device and the second pH value detection device are both pH value measuring instruments.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220066697.2U CN217287863U (en) | 2022-01-12 | 2022-01-12 | Tail gas treatment device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220066697.2U CN217287863U (en) | 2022-01-12 | 2022-01-12 | Tail gas treatment device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217287863U true CN217287863U (en) | 2022-08-26 |
Family
ID=82925402
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220066697.2U Active CN217287863U (en) | 2022-01-12 | 2022-01-12 | Tail gas treatment device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217287863U (en) |
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2022
- 2022-01-12 CN CN202220066697.2U patent/CN217287863U/en active Active
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 350200 Binhai Industrial Zone, Changle District, Fuzhou City, Fujian Province Patentee after: Fujian Hengshen Synthetic Fiber Technology Co.,Ltd. Country or region after: China Address before: 350218 Binhai Industrial Zone, Changle City, Fuzhou City, Fujian Province Patentee before: CHANGLE HENGSHEN SYNTHETIC FIBER Co.,Ltd. Country or region before: China |