CN217280723U

CN217280723U - Position correction and clamping device suitable for substrate

Info

Publication number: CN217280723U
Application number: CN202220209206.5U
Authority: CN
Inventors: 宋勇超; 周伟; 黄蓉; 陈楚杰; 胡洋; 黄金鹏; 李志强; 俞勤; 曹汉富
Original assignee: Shenzhen Hi Test Semiconductor Equipment Co ltd
Current assignee: Shenzhen Hi Test Semiconductor Equipment Co ltd
Priority date: 2022-01-25
Filing date: 2022-01-25
Publication date: 2022-08-23
Anticipated expiration: 2032-01-25

Abstract

The utility model relates to a semiconductor manufacturing equipment field specifically provides a position correction and clamping device suitable for base plate, including the buffer platform, the top of buffer platform has a plurality of inside sunken and with base plate complex adsorption tank, the bottom of adsorption tank is seted up there is the gas pocket, the inside of buffer platform has the gas circuit passageway, gas circuit passageway and gas pocket intercommunication, the both sides of adsorption tank have run through the buffer platform in vertical direction and the relative through-hole that sets up; the clamping assembly is fixed at the bottom of the buffer table and comprises a driving piece fixed at the bottom of the buffer table and a clamping part fixedly connected with the driving piece and used for clamping and fixing the substrate, the clamping part penetrates through the through hole, and the driving piece drives the clamping part to be far away from or close to the substrate; and the vacuum generator is connected with the air channel and is used for pumping air in the adsorption tank away to fix the substrate. The utility model discloses a position correction and clamping device precision height suitable for base plate just can fix the base plate well.

Description

Position correction and clamping device suitable for substrate

Technical Field

The utility model relates to a semiconductor manufacturing equipment field especially relates to a position correction and clamping device and automatic unloading system of processing of going up suitable for base plate.

Background

With the continuous development of modern industry, the automation level of the semiconductor industry is gradually improved. In an automatic semiconductor processing system, a buffer device is generally required to be arranged between a workbench and a substrate conveying device between the loading and unloading of substrates, so that the substrates can be conveyed to the workbench more quickly, and the phenomenon that the processing device has a vacuum period due to the time required for conveying the substrates from a material box to the workbench is avoided. However, the existing buffer table is generally formed by a metal plate with a limiting structure, and the buffer table has the large defects that the precision requirement for taking and placing is too high, the buffer table cannot be well fixed, and the deviation of the substrate during placement cannot be corrected.

In view of the above, there is a need in the art for a new solution to solve the above technical problems.

SUMMERY OF THE UTILITY MODEL

The utility model provides a position correction and clamping device suitable for base plate to solve the problem that exists among the prior art.

The utility model provides a position correction and clamping device suitable for base plate, include:

the top of the buffer table is provided with a plurality of adsorption grooves which are inwards sunken and matched with the substrate, the bottom of each adsorption groove is provided with an air hole, an air channel is arranged inside the buffer table and communicated with the air holes, and through holes which penetrate through the buffer table in the vertical direction and are oppositely arranged are formed in two sides of each adsorption groove;

the clamping assembly is fixed at the bottom of the cache table and comprises a driving piece fixed at the bottom of the cache table and a clamping part fixedly connected with the driving piece and used for clamping and fixing the substrate, the clamping part penetrates through the through hole, and the driving piece drives the clamping part to be far away from or close to the substrate;

and the vacuum generator is connected with the air channel and is used for pumping air in the adsorption tank away to fix the substrate.

Preferably, the clamping part comprises a first clamping block and a second clamping block which are arranged oppositely, the first clamping block and the second clamping block are respectively arranged corresponding to the through holes on two sides of the adsorption groove, and the driving piece drives the first clamping block and the second clamping block to move linearly towards opposite directions so as to be away from or close to the adsorption groove simultaneously.

Preferably, the centre gripping subassembly is still including locating the guide rail of the bottom of buffer table, the guide rail along first grip block with the direction of motion setting of second grip block, the outside cover of guide rail is equipped with first slider and second slider, first grip block passes through first slider with the driving piece is connected, the second grip block passes through the second slider with the driving piece is connected.

Preferably, the first clamping block comprises a horizontal part fixedly connected with the first sliding block and a vertical part vertically arranged with the horizontal part, and the vertical part is arranged through the through hole; the first clamping block and the second clamping block are identical in structure and are symmetrically arranged.

Preferably, the adsorption tank sets up a plurality ofly, and is a plurality of the adsorption tank is in buffer memory bench array distributes, every the both sides in adsorption tank all are equipped with the through-hole.

Preferably, each row of the adsorption grooves is correspondingly provided with one clamping assembly, and the first clamping block and the second clamping block are correspondingly provided with vertical parts at the positions of the through holes.

Preferably, the air passage channel has a first opening and a second opening on the surface of the buffer table, the first opening is connected with the vacuum generator, and a sealing plug is covered on the second opening.

Preferably, the position correcting and clamping device for the substrate further comprises a supporting column arranged at the bottom of the buffer table.

The utility model has the advantages that: the utility model discloses a position correction and clamping device suitable for base plate sets up the adsorption tank at the buffer bench, and the adsorption tank passes through the gas pocket and sweetgum fruit passageway is connected with vacuum generator, and the bottom of buffer bench sets up the centre gripping subassembly, and when the base plate was placed at the buffer bench, vacuum generator took out the air in the adsorption tank from fixed baseplate, and the centre gripping subassembly is corrected and fixed baseplate. Through the arrangement, the accurate position of the substrate can be ensured, the displacement can not occur, and the problems that the substrate cannot be fixed or fails to be taken and placed due to position deviation and the like are avoided; meanwhile, the precision of the position of the substrate is increased, the substrate taking and placing are more efficient, and the processing precision and efficiency of the whole processing system are improved.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.

Fig. 1 is a schematic structural diagram of a position calibration and clamping device for a substrate according to an embodiment of the present invention;

fig. 2 is a schematic structural view of another angle of the position correcting and clamping device for the substrate according to the embodiment of the present invention;

fig. 3 is a schematic structural view of a clamping assembly according to an embodiment of the present invention;

fig. 4 is a schematic structural diagram of a substrate according to an embodiment of the present invention.

Detailed Description

In order to facilitate understanding of the present invention, the present invention will be described more fully hereinafter with reference to the accompanying drawings. The preferred embodiments of the present invention are shown in the drawings. The invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.

It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.

Please refer to fig. 1-2, which are schematic structural views of a position calibration and clamping device 50 according to an embodiment of the present invention. The utility model discloses position correction and clamping device 50 are used for placing base plate 201, and position correction and clamping device 50 include: a buffer table 51, a clamping assembly 52 fixed at the bottom of the buffer table 51, and a vacuum generator. It should be noted that, as shown in fig. 4, the substrate 201 is a carrier for carrying a material, the material to be processed is attached to the substrate 201, and the substrate 201 may be glass.

Specifically, the top of the buffer stage 51 has a plurality of suction grooves 511 recessed inwards, and the suction grooves 511 cooperate with the substrate 201 to form a sealed space, wherein the number of the suction grooves 511 may be one or more. The bottom of the adsorption tank 511 is provided with an air hole 512, and the inside of the buffer table 51 is provided with an air passage (not shown) communicated with the air hole 512. The adsorption groove 511 has through holes 513 penetrating the buffer table 51 in the vertical direction and disposed opposite to each other, that is, the adsorption groove 511 has through holes 513 penetrating the buffer table 51 on both left and right sides. In this embodiment, the adsorption grooves 511 are provided in a plurality, the adsorption grooves 511 are distributed on the buffer table 51 in an array, and through holes 513 are provided on both left and right sides of each adsorption groove 511. In this embodiment, the number of the adsorption grooves 511 is specifically set to 4, and the adsorption grooves are in an array of 2 × 2 on the buffer stage 51.

The clamping assembly 52 is used for clamping and fixing the substrate 201, the clamping assembly 52 comprises a driving member 521 fixed at the bottom of the buffer table 51 and a clamping portion 522 fixedly connected with the driving member 521, and the driving member 521 is used for driving the clamping portion 522 to clamp and fix the substrate 201. The clamping portion 522 is disposed through the through hole 513. When the driver 521 drives the clamping part 522 to move away from the substrate 201, the clamping part 522 releases the substrate 201; when the driver 521 drives the clamping portion 522 to approach the substrate 201, the clamping portion 522 fixes the substrate 201. In the present embodiment, the driver 521 is a cylinder. In other embodiments, the driver 521 may also be a motor or the like.

The vacuum generator is connected with the gas path channel. When the substrate 201 is placed on the adsorption tank 511, the substrate 201 and the adsorption tank 511 form a sealed space, and the vacuum generator is used for pumping out air in the adsorption tank 511, so that the substrate 201 is fixed on the adsorption tank 511 under the action of atmospheric pressure. Specifically, the air passage is formed by punching a side surface of the buffer stage 51, and such a manufacturing process is simpler. Since the air passage is formed by punching on the side surface, the air passage has a first opening 514a and a second opening 514b on the surface of the buffer table 51. Wherein the first opening 514a is used for connecting with a vacuum generator, and the second opening 514b is covered by a sealing plug (not shown) for sealing. In other embodiments, the second opening 514b may be used for connecting with the vacuum generator, and the first opening 514a may be covered with a sealing plug.

When the substrate 201 is placed on the suction groove 511 on the buffer stage 51, the driving unit 521 drives the clamping unit 522 to approach the substrate 201, and corrects the position of the substrate 201 and fixes the substrate; the vacuum generator extracts air from the adsorption tank 511 to form a vacuum environment, and the substrate 201 is further fixed by the atmospheric pressure. In other embodiments, the vacuum generator may first suck and fix the substrate 201, and the driving member 521 drives the clamping portion 522 to approach the substrate 201, so as to correct and further fix the substrate 201. Besides the implementation steps described above, there may be other control processes, and the control processes are not limited herein.

The utility model discloses position correction and clamping device 50 sets up adsorption tank 511 on buffer memory platform 51, and adsorption tank 511 passes through gas pocket 512 and sweetgum fruit passageway and is connected with vacuum generator, and buffer memory platform 51's bottom sets up centre gripping subassembly 52, and when base plate 201 was placed on buffer memory platform 51, vacuum generator took out the air in adsorption tank 511 from fixed base plate 201, and centre gripping subassembly 52 is corrected and fixed base plate 201. Through the arrangement, the substrate 201 can be ensured to be accurate in position, displacement cannot occur, and the problems that fixing cannot be achieved or picking and placing fails due to position deviation and the like are avoided; meanwhile, the precision of the position of the substrate 201 is increased, the substrate 201 is more efficiently taken and placed, and the processing precision and efficiency of the whole processing system are improved.

Further, please refer to fig. 3, fig. 3 is a schematic structural diagram of the clamping assembly 52 according to an embodiment of the present invention. The holding portion 522 includes a first holding block 5221 and a second holding block 5222, which are disposed oppositely, and the first holding block 5221 and the second holding block 5222 are disposed correspondingly to the through hole 513 on two sides of the adsorption groove 511, i.e., the first holding block 5221 and the second holding block 5222 are disposed on two opposite sides of the adsorption groove 511, specifically on the left and right sides of the adsorption groove 511. The driving member 521 drives the first and

second clamping blocks

5221 and 5222 to move linearly in opposite directions to simultaneously move away from or close to the adsorption groove 511.

Further, in order to make the movement of the first and second holding blocks 5221 and 5222 more accurate, the holding assembly 52 further includes a guide rail 523 provided at the bottom of the buffer stage 51. The guide rail 523 is disposed along the moving direction of the first and second clamping blocks 5221 and 5222, and the first and

second sliders

524 and 525 are sleeved outside the guide rail 523. The first retainer block 5221 is coupled to the driver 521 via a first slider 524, and the second retainer block 5222 is coupled to the driver 521 via a second slider 525. The driving member 521 drives the first slider 524 and the second slider 525 to move along the guide rail 523 in opposite directions, so as to drive the first holding block 5221 and the second holding block 5222 to move. The first and second holding blocks 5221 and 5222 have the same structure and are symmetrically disposed, and the structure of the first holding block 5221 will be described as an example. The first clamping block 5221 comprises a horizontal portion 5221a fixedly connected to the first slider 524 and a vertical portion 5221b arranged perpendicular to the horizontal portion 5221a, the vertical portion 5221b being arranged to penetrate the through hole 513.

In this embodiment, since the number of the adsorption grooves 511 is plural, the through holes 513 are provided on both left and right sides of each adsorption groove 511, and one holding member 52 is provided for each row of the adsorption grooves 511. That is, the substrate 201 is fixed by one holding unit 52 for each row of the suction grooves 511. In order to realize a function of clamping and fixing a plurality of substrates 201 by one clamping assembly 52, the first clamping block 5221 and the second clamping block 5222 are provided with a vertical portion 5221b at the position of each through hole 513. With the above arrangement, the effect of fixing a plurality of substrates by one chucking assembly 52 can be achieved.

Further, the position calibration and clamping device 50 of the present embodiment further includes a supporting column 53 disposed at the bottom of the buffer table 51.

The above only is the partial embodiment of the utility model discloses a not therefore restriction the utility model discloses a protection scope, all utilize the utility model discloses equivalent device or equivalent flow transform that the content of description and drawing was done, or direct or indirect application in other relevant technical field, all the same reason is included in the patent protection scope of the utility model.

Claims

1. A kind of position correction and clamping device suitable for base plate, used for placing the base plate, characterized by that, including:

2. The apparatus of claim 1, wherein the clamping portion comprises a first clamping block and a second clamping block, the first clamping block and the second clamping block are disposed opposite to each other, the first clamping block and the second clamping block are disposed corresponding to the through holes on two sides of the suction groove, respectively, and the driving member drives the first clamping block and the second clamping block to move linearly in opposite directions to simultaneously move away from or close to the suction groove.

3. The apparatus of claim 2, wherein the clamping assembly further comprises a guide rail disposed at a bottom of the buffer stage, the guide rail is disposed along a moving direction of the first clamping block and the second clamping block, a first slider and a second slider are sleeved outside the guide rail, the first clamping block is connected to the driving member through the first slider, and the second clamping block is connected to the driving member through the second slider.

4. The apparatus according to claim 3, wherein the first clamping block comprises a horizontal portion fixedly connected to the first slide block and a vertical portion disposed perpendicular to the horizontal portion, the vertical portion disposed through the through hole; the first clamping block and the second clamping block are identical in structure and are symmetrically arranged.

5. The apparatus of claim 4, wherein a plurality of suction grooves are formed on the substrate, the suction grooves are distributed on the buffer stage in an array, and the through holes are formed on both sides of each suction groove.

6. The apparatus of claim 5, wherein a clamping assembly is disposed in each row of the suction grooves, and the first clamping block and the second clamping block are disposed in each through hole and have a vertical portion.

7. The apparatus as claimed in claim 1, wherein the gas path channel has a first opening and a second opening on the surface of the buffer stage, the first opening is connected to the vacuum generator, and the second opening is covered with a sealing plug.

8. The apparatus of claim 1, further comprising a support column disposed at a bottom of the buffer stage.