CN217163582U

CN217163582U - Dust removal system of process vacuum dust-free chamber

Info

Publication number: CN217163582U
Application number: CN202122945407.XU
Authority: CN
Inventors: 梁锋; 刘云飞
Original assignee: Shanghai Jingsheng Electromechanical Engineering Co ltd
Current assignee: Shanghai Jingsheng Electromechanical Engineering Co ltd
Priority date: 2021-11-26
Filing date: 2021-11-26
Publication date: 2022-08-12
Anticipated expiration: 2031-11-26

Abstract

The application discloses process vacuum dust-free chamber dust pelletizing system, including dust-free chamber, collecting vat, vacuum pump, fixed pipe, connecting pipe, control valve, fixed plate, baffle, backup pad, mounting panel, filter screen, deflector, vibrating motor, through-hole, electric putter, apron, opening, screw, fan and honeycomb duct. The circulating circulation and the vacuumizing treatment of air in the dust-free room can be realized by arranging the fixing pipe and the connecting pipe, the effective removal of dust in the dust-free room can be ensured, the influence on the normal use of the vacuum dust-free room due to the poor dust removal effect is avoided, and the cleanliness of the dust-free room is improved; this application can realize effectively collecting through filterable dust to can guarantee the whole dustless environment of dust free chamber, follow-up processing is conveniently carried out through the dust of collecting, improves the convenience of use.

Description

Dust removal system of process vacuum dust-free chamber

Technical Field

The application relates to the technical field of application of vacuum clean rooms, in particular to a dust removal system of a process vacuum clean room.

Background

The vacuum dust-free chamber is a dust-free chamber under a vacuum environment, and a vacuum state is realized through a vacuum system, and the vacuum system is a complete set of vacuum system which is composed of a vacuum pump, a PLC program control system, an air storage tank, a vacuum pipeline, a vacuum valve, an overseas filtering assembly and the like. At present, the system is widely applied to industries such as electronic semiconductor industry, photoelectric backlight module, machining and the like, a main vacuum pump set starts to work through a starting system, a vacuum pump stops running automatically until the vacuum degree in a vacuum tank reaches a set upper limit value, the vacuum pump is stopped automatically, the vacuum in a central vacuum system is maintained by automatically stopping a vacuum check valve on a pipeline, if the vacuum degree in the vacuum tank is reduced and is lower than a set lower limit value due to work requirements, a standby vacuum pump set is started automatically, and therefore circulation is repeated, the vacuum degree of the vacuum system can maintain a stable vacuum source, and production requirements are met.

The process vacuum dust-free chamber is a vacuum state in the dust-free chamber in the process, and because dust may exist in the dust-free chamber after the dust-free chamber is used, the dust is easy to exist in the dust-free chamber after the dust-free chamber is vacuumized, the dust is difficult to be completely removed in the process of vacuumizing, and the production quality of the process of the dust-free chamber is reduced. Therefore, the dust removal system for the vacuum clean room is provided for solving the problems.

Disclosure of Invention

The embodiment provides a dust removal system for a process vacuum clean room, which is used for solving the problem that effective dust removal of the process vacuum clean room in the prior art is difficult to realize.

According to one aspect of the application, a dust removal system of a process vacuum dust-free chamber is provided, which comprises a dust-free chamber, a collecting tank, a vacuum pump and a fixing plate;

the utility model discloses a dust free chamber, including dust free chamber, collecting vat, fixed pipe bottom and connecting pipe, fixed pipe and connecting pipe, the collecting vat top and vacuum pump fixed connection, the vacuum pump is through fixed pipe and dust free chamber top fixed connection, fixed pipe bottom and connecting pipe intercommunication, fixed pipe and connecting pipe all are equipped with the control valve, dust free chamber lateral wall passes through fixed plate and baffle fixed connection, fixed plate and baffle junction overlap joint have the backup pad, dust free chamber bottom and mounting panel fixed connection, mounting panel and baffle all with filter screen fixed connection, the mounting panel top is sealed with the backup pad laminating, mounting panel lateral wall and deflector fixed connection, the opening that corresponds relatively is all seted up to dust free chamber and collecting vat between the deflector.

Furthermore, the side wall of the dust-free chamber is fixedly connected with a plurality of vacuum pumps, and the vacuum pumps are respectively communicated with the bottom end and the top end of the dust-free chamber through fixed pipes.

Furthermore, baffle and dust free chamber bottom fixed connection, be formed with the interval that is used for placing the dust screen between baffle and the mounting panel, the quantity of baffle and mounting panel all is two, two be equipped with two symmetric distribution's deflector between the mounting panel.

Further, the guide plate top is the slope column structure, guide plate bottom and vibrating motor fixed connection, the guide plate surface is connected with the apron laminating, the apron corresponds with the opening each other.

Further, a plurality of through-holes have evenly been seted up on the backup pad surface, the backup pad passes through screw and mounting panel fixed connection, the backup pad bottom is through electric putter and apron fixed connection.

Furthermore, collecting vat one side and fan fixed connection, the fan communicates with the collecting vat is inside, the collecting vat opposite side is run through fixedly with the honeycomb duct.

Through the above-mentioned embodiment of this application, a dust pelletizing system has been adopted, the problem that the dust in the dustless room of processing procedure vacuum is difficult to realize effectively cleaing away is solved, set up the backup pad bottom the dustless room, and circulation through the circulation of air realization dustless room air of adjusting vacuum pump, can realize the effective filtration of dust in air transportation process, it is qualified to guarantee the dustless indoor dust content rate, carry out dustless indoor vacuum treatment again after the dust is clear away, the production efficiency of dustless room is improved, can effectively collect through filterable dust, avoid arranging to the dustless room and lead to the dust quantitative change problem, also make things convenient for the centralized processing of dust after the dust clearance, guarantee the cleanliness factor of dustless room, and the production quality is improved.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without inventive exercise.

FIG. 1 is an overall perspective view of one embodiment of the present application;

FIG. 2 is a schematic front view of an embodiment of the present application;

FIG. 3 is a schematic side view of an embodiment of the present application.

In the figure: 1. the device comprises a dust-free chamber, 2, a collecting tank, 3, a vacuum pump, 4, a fixed pipe, 5, a connecting pipe, 6, a control valve, 7, a fixed plate, 8, a partition plate, 9, a supporting plate, 10, a mounting plate, 11, a filter screen, 12, a guide plate, 13, a vibrating motor, 14, a through hole, 15, an electric push rod, 16, a cover plate, 17, an opening, 18, a screw, 19, a fan, 20 and a guide pipe.

Detailed Description

In order to make the technical solutions better understood by those skilled in the art, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only partial embodiments of the present application, but not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

It should be noted that the terms "first," "second," and the like in the description and claims of this application and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It should be understood that the data so used may be interchanged under appropriate circumstances such that embodiments of the application described herein may be used. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.

In this application, the terms "upper", "lower", "left", "right", "front", "rear", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings. These terms are used primarily to better describe the present application and its embodiments, and are not used to limit the indicated devices, elements or components to a particular orientation or to be constructed and operated in a particular orientation.

Moreover, some of the above terms may be used to indicate other meanings besides the orientation or positional relationship, for example, the term "on" may also be used to indicate some kind of attachment or connection relationship in some cases. The specific meaning of these terms in this application will be understood by those of ordinary skill in the art as appropriate.

Furthermore, the terms "mounted," "disposed," "provided," "connected," and "sleeved" are to be construed broadly. For example, it may be a fixed connection, a removable connection, or a unitary construction; can be a mechanical connection, or an electrical connection; may be directly connected, or indirectly connected through intervening media, or may be in internal communication between two devices, elements or components. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.

It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The present application will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.

The dust removal system in this embodiment can be applied to various dust removal systems, for example, the following dust removal system is provided in this embodiment, and the dust removal system in this embodiment can be used as the following dust removal system.

Including electric telescopic handle, fixed lock, motor, vacuum pump and filter core, electric telescopic handle's lower extreme is connected with the device main part, and the front side of device main part has the dodge gate through hinge connection to install fixed lock and handle on the dodge gate, the universal wheel is installed to the below of device main part, the inside of device main part is provided with the filter, and the upside of filter is connected with electric telescopic handle, motor and vacuum pump are installed to the inside downside of device main part, be provided with the protection network on the filter, the outside edge of filter is fixed with the sealing washer, the dodge gate is provided with sealed the pad with the junction of device main part, the inside of filter is fixed with the filter core of crossing. Preferably, the electric telescopic rod is positioned at the center of the upper end of the device main body, and the electric telescopic rod is in sealing connection with the device main body. Preferably, the filter plate upper side central point puts and is the welding between electric telescopic handle's the lower extreme, and the filter plate size equals with the inside size of device main part. Preferably, the middle of the filter plate is of a hollow structure, and the middle of the edge of the filter plate is of an opening structure. Preferably, the protective net is positioned at the upper side and the lower side of the filter plate, and the edge of the filter plate is in sealing connection with the device main body through a sealing ring. Preferably, the filter core is embedded into the filter plate, and the planar size of the filter core is larger than that of the protective net.

Of course, the present embodiment can also be used for dust removing systems with other structures. The following describes the dust removal system according to an embodiment of the present application.

The dust removing system is a Chinese utility model patent (application number: CN 201821869879.3). Wherein the dust pelletizing system in this application can be used for the dust pelletizing system in the above-mentioned patent.

Referring to fig. 1-3, a dust removing system for a vacuum clean room in a manufacturing process includes a clean room 1, a collecting tank 2, a vacuum pump 3 and a fixing plate 7;

the utility model discloses a dust free chamber, including dust free chamber 1, collecting vat 2, connecting pipe 5, fixed pipe 7 and baffle 8, fixed pipe 4 and connecting pipe 5 are equipped with control valve 6, dust free chamber 1 lateral wall passes through fixed plate 7 and baffle 8 fixed connection, fixed plate 7 and baffle 8 junction overlap joint have backup pad 9, dust free chamber 1 bottom and mounting panel 10 fixed connection, mounting panel 10 and baffle 8 all with filter screen 11 fixed connection, mounting panel 10 top is sealed with backup pad 9 laminating, mounting panel 10 lateral wall and deflector 12 fixed connection, dust free chamber 1 between deflector 12 and collecting vat 2 have all seted up opening 17 that corresponds relatively.

The side wall of the dust-free chamber 1 is fixedly connected with a plurality of vacuum pumps 3, and the vacuum pumps 3 are respectively communicated with the bottom end and the top end of the dust-free chamber 1 through fixed pipes 4 and are used for conveying air in the dust-free chamber 1; the partition plate 8 is fixedly connected with the bottom end of the dust-free chamber 1, an interval for placing a dustproof gauze is formed between the partition plate 8 and the mounting plates 10, the number of the partition plate 8 and the number of the mounting plates 10 are two, two guide plates 12 which are symmetrically distributed are arranged between the two mounting plates 10 and used for mounting the support plate 9, and dust can be filtered; the top end of the guide plate 12 is of an inclined structure, the bottom end of the guide plate 12 is fixedly connected with the vibration motor 13, the surface of the guide plate 12 is attached to a cover plate 16, the cover plate 16 corresponds to the opening 17, and the guide plate 12 is used for collecting dust and discharging the dust from the opening 17 into the collecting tank 2; a plurality of through holes 14 are uniformly formed in the surface of the supporting plate 9, the supporting plate 9 is fixedly connected with the mounting plate 10 through screws 18, and the bottom of the supporting plate 9 is fixedly connected with a cover plate 16 through an electric push rod 15 and used for mounting the supporting plate 9; collecting vat 2 one side and fan 19 fixed connection, fan 19 and the inside intercommunication of collecting

vat

2, 2 opposite sides of collecting vat run through fixedly with honeycomb duct 20, and fan 19 is used for the discharge of the interior dust of collecting vat 2, conveniently carries out centralized processing.

When the dust-free cleaning device is used, electrical components appearing in the dust-free cleaning device are externally connected with a power supply and a control switch when the dust-free cleaning device is used, a control valve 6 on a fixed pipe 4 is opened, a control valve 6 at a connecting pipe 5 is closed, air in the dust-free chamber 1 is extracted through the work of a vacuum pump 3 and then is conveyed into the dust-free chamber 1 again through the fixed pipe 4, in the circulating air process, the air with dust is discharged to the two sides of a guide plate 12 from a through hole 14 and is filtered through a mounting plate 10 and a filter screen 11 at a partition plate 8, a dust-proof gauze is arranged between the mounting plate 10 and the partition plate 8 to effectively separate the dust, so that the dust stays between the guide plates 12, after the dust amount in the dust-free chamber 1 reaches the standard, the dust on the surface of the guide plate 12 is shaken down into a collecting tank 2 through the work of a vibration motor 13, after the operation is finished, a cover plate 16 is driven to be attached to the guide plate 12 through the extension of an electric push rod 15, realize the sealed of opening 17 department, open control valve 6 on the connecting pipe 5 again and close control valve 6 on the fixed pipe 4, make the vacuum pump 3 during operation take the air out, realize the vacuum environment in the dust free chamber 1, the dust through cleaing away stores through collecting vat 2, long-time back of using is through opening fan 19, make the dust of collecting blow off through honeycomb duct 20 department, and then realize the collection of dust, clean environment in the dust free chamber 1 can be guaranteed to the while, through unscrewing screw 18, take off backup pad 9, realize taking out of dustproof gauze between baffle 8 and the mounting panel 10.

The application has the advantages that:

1. the circulating circulation and the vacuumizing treatment of air in the dust-free room can be realized by arranging the fixing pipe and the connecting pipe, the effective removal of dust in the dust-free room can be ensured, the influence on the normal use of the vacuum dust-free room due to the poor dust removal effect is avoided, and the cleanliness of the dust-free room is improved;

2. this application can realize effectively collecting through filterable dust to can guarantee the whole dustless environment of dust free chamber, follow-up processing is conveniently carried out through the dust of collecting, improves the convenience of use.

It is well within the skill of those in the art to implement, without undue experimentation, the present application is not directed to software and process improvements, as they relate to circuits and electronic components and modules.

The above description is only a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. The utility model provides a process vacuum dust free chamber dust pelletizing system which characterized in that: comprises a dust-free chamber (1), a collecting tank (2), a vacuum pump (3) and a fixing plate (7);

the dust free chamber is characterized in that a collecting tank (2) is fixedly mounted at the bottom of the dust free chamber (1), the top of the collecting tank (2) is fixedly connected with a vacuum pump (3), the vacuum pump (3) is fixedly connected with the top of the dust free chamber (1) through a fixed pipe (4), the bottom of the fixed pipe (4) is communicated with a connecting pipe (5), the fixed pipe (4) and the connecting pipe (5) are respectively provided with a control valve (6), the side wall of the dust free chamber (1) is fixedly connected with a partition board (8) through a fixed plate (7), a supporting plate (9) is lapped at the joint of the fixed plate (7) and the partition board (8), the bottom end of the dust free chamber (1) is fixedly connected with a mounting plate (10), the mounting plate (10) and the partition board (8) are fixedly connected with a filter screen (11), the top of the mounting plate (10) is sealed with the supporting plate (9) in a laminating manner, the side wall of the mounting plate (10) is fixedly connected with a guide plate (12), the dust-free chamber (1) and the collecting groove (2) between the guide plates (12) are provided with corresponding openings (17).

2. The system of claim 1, wherein: the side wall of the dust-free chamber (1) is fixedly connected with a plurality of vacuum pumps (3), and the vacuum pumps (3) are respectively communicated with the bottom end and the top end of the dust-free chamber (1) through fixing pipes (4).

3. The system of claim 1, wherein: baffle (8) and dust free chamber (1) bottom fixed connection, be formed with the interval that is used for placing the dustproof gauze between baffle (8) and mounting panel (10), the quantity of baffle (8) and mounting panel (10) all is two, two be equipped with two symmetric distribution's deflector (12) between mounting panel (10).

4. The system of claim 1, wherein: the top end of the guide plate (12) is of an inclined structure, the bottom end of the guide plate (12) is fixedly connected with the vibration motor (13), the surface of the guide plate (12) is attached to the cover plate (16), and the cover plate (16) corresponds to the opening (17).

5. The system of claim 1, wherein: a plurality of through holes (14) are uniformly formed in the surface of the supporting plate (9), the supporting plate (9) is fixedly connected with the mounting plate (10) through screws (18), and the bottom of the supporting plate (9) is fixedly connected with the cover plate (16) through an electric push rod (15).

6. The system of claim 1, wherein: collecting vat (2) one side and fan (19) fixed connection, fan (19) and collecting vat (2) inside intercommunication, collecting vat (2) opposite side and honeycomb duct (20) are run through fixedly.