CN217132441U - Sputtering film pressure sensor sensitive element mounting structure - Google Patents
Sputtering film pressure sensor sensitive element mounting structure Download PDFInfo
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- CN217132441U CN217132441U CN202220994049.3U CN202220994049U CN217132441U CN 217132441 U CN217132441 U CN 217132441U CN 202220994049 U CN202220994049 U CN 202220994049U CN 217132441 U CN217132441 U CN 217132441U
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- 238000004544 sputter deposition Methods 0.000 title claims abstract description 16
- 238000003466 welding Methods 0.000 claims description 10
- 238000009434 installation Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 4
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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CN202220994049.3U CN217132441U (en) | 2022-04-27 | 2022-04-27 | Sputtering film pressure sensor sensitive element mounting structure |
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CN202220994049.3U CN217132441U (en) | 2022-04-27 | 2022-04-27 | Sputtering film pressure sensor sensitive element mounting structure |
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CN217132441U true CN217132441U (en) | 2022-08-05 |
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CN202220994049.3U Active CN217132441U (en) | 2022-04-27 | 2022-04-27 | Sputtering film pressure sensor sensitive element mounting structure |
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TR01 | Transfer of patent right |
Effective date of registration: 20240515 Address after: Building 10, 2nd Floor, MEMS Industrial Park, 158 Zhongrun Avenue, High tech Zone, Zibo City, Shandong Province, 255000 RMB Patentee after: Yuhong Minxin (Shandong) Electronic Technology Co.,Ltd. Country or region after: China Address before: 255086 first floor, building 10, MEMS Industrial Park, No. 158, Zhongrun Avenue, high tech Zone, Zibo City, Shandong Province Patentee before: Shandong Weihang Minxin Electronic Technology Co.,Ltd. Country or region before: China |
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TR01 | Transfer of patent right |