CN216959696U

CN216959696U - Inertia motor

Info

Publication number: CN216959696U
Application number: CN202220611821.9U
Authority: CN
Inventors: 夏慧超; 龚威; 朱凯; ***; 梁德志; 张恬恬
Original assignee: Shanghai Yinguan Semiconductor Technology Co Ltd
Current assignee: Shanghai Yinguan Semiconductor Technology Co Ltd
Priority date: 2022-03-21
Filing date: 2022-03-21
Publication date: 2022-07-12
Anticipated expiration: 2032-03-21

Abstract

The utility model relates to the technical field of piezoelectric precision driving, and discloses an inertia motor. The inertial motor comprises a base and a rotor assembly, wherein the rotor assembly comprises a sliding block and a long slat arranged at the bottom of the sliding block, and the sliding block is slidably mounted on the base along a first direction; two drive assembly follow first direction symmetry install in on the base, drive assembly includes flexible piece, clutch block and piezoelectric drive spare, the flexible piece with piezoelectric drive spare fixed connection, the clutch block install in the top of flexible piece, just the top surface butt of clutch block in rectangular board, piezoelectric drive spare can drive the flexible piece is followed first direction deformation, so that the clutch block drives rectangular board is followed first direction removes. The utility model improves the bearing capacity of the rotor assembly, improves the controllability of main motion parameters such as the speed and the acceleration of the bidirectional movement of the rotor assembly and the like, and is convenient for accurately adjusting the driving performance of the driving assembly.

Description

Inertia motor

Technical Field

The utility model relates to the technical field of piezoelectric precision driving, in particular to an inertia motor.

Background

Because the inertia motor has the advantages of simple principle, compact structure, high precision, quick response and the like, the inertia motor is widely applied to high-end equipment in the fields of optical engineering, microelectronic manufacturing, aerospace technology, ultra-precision mechanical manufacturing, biomedicine and the like in recent years.

At present, most of inertia motors can realize bidirectional motion, but the bidirectional motion performance of the inertia motors is driven by only one group of drivers, so that the difference of main motion parameters such as speed, acceleration and the like is large, and the driving force is small.

Accordingly, there is a need for an inertia motor that solves the above-mentioned problems.

SUMMERY OF THE UTILITY MODEL

Based on the above, the present invention provides an inertial motor, which improves the bearing capacity of the mover assembly, improves the controllability of main motion parameters such as the speed and the acceleration of the bi-directional movement of the mover assembly, and facilitates and precisely adjusts the driving performance of the driving assembly.

In order to achieve the purpose, the utility model adopts the following technical scheme:

an inertial motor, comprising:

a base;

the rotor assembly comprises a sliding block and a long strip plate arranged at the bottom of the sliding block, and the sliding block is arranged on the base in a sliding mode along a first direction;

two drive assembly, install on the base along first direction symmetry, drive assembly includes flexible piece, clutch blocks and piezoelectric driving piece, flexible piece and piezoelectric driving piece fixed connection, and the clutch blocks is installed in the top of flexible piece, and the top surface butt of clutch blocks in rectangular board, and piezoelectric driving piece can drive flexible piece along first direction deformation to make the clutch blocks drive rectangular board and remove along first direction.

As a preferred technical scheme of the inertia motor, the base is provided with a mounting groove, the flexible piece and the piezoelectric driving piece are mounted in the mounting groove,

the driving assembly further comprises a rebound piece, a step wall is arranged in the mounting groove, and the rebound piece is arranged in the first direction and symmetrically arranged on two sides of the flexible piece and connected to the step wall; when the flexible piece deforms, the resilience piece generates resilience force.

As a preferred technical scheme of the inertia motor, the rebound part is a plate body, and the rebound part and the flexible part are integrally formed; or

The resilience piece is the cylinder, and the flexible piece is provided with the mounting hole, and the mounting hole is worn to locate by the resilience piece.

As an inertial motor's preferred technical scheme, the flexible piece is along first direction and piezoelectricity driving piece fixed connection, and the flexible piece is close to piezoelectricity driving piece one end and is provided with the constant head tank, and the tip of piezoelectricity driving piece is fixed in the constant head tank to the setting of resilience piece is in the both sides of constant head tank.

As an inertia motor's preferred technical scheme, drive assembly still includes pretension part, and pretension part includes push rod and jackscrew, and the push rod is installed and is kept away from flexible piece one end in piezoelectric driving spare, and the inner wall of mounting groove is provided with the connecting hole, and the connecting hole is located the push rod and deviates from piezoelectric driving spare one end, and jackscrew threaded connection is in connecting hole and tip butt in the push rod.

As a preferred technical scheme of the inertia motor, the piezoelectric driving piece is a piezoelectric ceramic stack, and the piezoelectric ceramic stack stretches and retracts along a first direction.

As an optimal technical scheme of the inertia motor, the bottom of the flexible piece is provided with an extension portion arranged along a first direction, an inserting hole is formed in the installation groove, and a first end of the extension portion is inserted into the inserting hole.

As an inertia motor's preferred technical scheme, be provided with supplementary muscle in the mounting groove, supplementary muscle is provided with the screw hole and is located the bottom of flexible piece, and screw threaded connection is in the screw hole, and screw butt flexible piece to adjust the height of clutch blocks.

As a preferred technical scheme of the inertia motor, a screw rod of the screw faces to the top of the flexible part, and a second end of the extension part abuts against the top surface of the head of the screw.

As an optimal technical scheme of the inertia motor, the inertia motor further comprises two linear guide rails, the two linear guide rails are symmetrically arranged on the base, and the sliding block is arranged between the two linear guide rails in a sliding mode.

The utility model has the beneficial effects that:

the utility model provides an inertial motor, wherein two driving assemblies are arranged on a base, the two driving assemblies are symmetrically arranged on the base along a first direction, a piezoelectric driving piece of each driving assembly can drive a flexible piece to deform along the first direction, and friction force is generated between a friction block and a long strip plate so as to drive a rotor assembly to move along the first direction. In the embodiment, the rotor assembly moves through the two driving assemblies, so that on one hand, the driving force for the rotor assembly is improved, and further the bearing capacity of the rotor assembly is improved; on the other hand, in the process of the bidirectional movement of the rotor assembly, the driving force born by the rotor assembly is kept consistent, the controllability of main motion parameters such as the speed and the acceleration of the bidirectional movement of the rotor assembly is improved, and the driving performance of the driving assembly is conveniently and accurately adjusted.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required to be used in the description of the embodiments of the present invention will be briefly described below, and it is obvious that the drawings in the description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings may be obtained according to the contents of the embodiments of the present invention and the drawings without creative efforts.

FIG. 1 is a schematic diagram of an inertial motor according to an embodiment of the present invention;

FIG. 2 is a schematic structural diagram of a base according to an embodiment of the present invention;

FIG. 3 is a schematic structural diagram of a mover assembly according to an embodiment of the present invention;

FIG. 4 is a schematic structural diagram of a drive assembly provided in accordance with an embodiment of the present invention;

FIG. 5 is a schematic view of a drive assembly mounted to a base according to an embodiment of the present invention;

FIG. 6 is a schematic view of the construction of a flexure in other embodiments of the utility model;

FIG. 7 is a cross-sectional view of an inertial motor provided in accordance with an embodiment of the present invention;

fig. 8 is a schematic diagram of the application of electricity to the piezoelectric actuator according to the embodiment of the present invention.

The figures are labeled as follows:

1. a base; 11. mounting grooves; 12. a step wall; 13. connecting holes; 14. auxiliary ribs; 15. a threaded hole; 2. a linear guide rail; 3. a mover assembly; 31. a slider; 32. a strip plate; 4. a drive assembly; 41. a flexible member; 411. an extension portion; 412. positioning a groove; 42. a resilient member; 43. a friction block; 44. a piezoelectric driver; 45. a pre-tightening component; 451. a push rod; 452. carrying out top thread; 46. and (4) screws.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the utility model and are not limiting of the utility model. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.

In the description of the present invention, unless expressly stated or limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, e.g., as meaning permanently connected, removably connected, or integral to one another; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.

In the description of the present embodiment, the terms "upper", "lower", "left", "right", and the like are used based on the orientations and positional relationships shown in the drawings, and are only for convenience of description and simplicity of operation, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used only for descriptive purposes and are not intended to have a special meaning.

As shown in fig. 1 to 5, the present embodiment provides an inertial motor including a base 1, a mover assembly 3, and a driving assembly 4. The mover assembly 3 comprises a slider 31 and a long strip plate 32 arranged at the bottom of the slider 31, and the slider 31 is slidably mounted on the base 1 along a first direction; two drive assembly 4 are installed on base 1 along first direction symmetry, and drive assembly 4 includes flexible 41, clutch blocks 43 and piezoelectric driving piece 44, and flexible 41 and piezoelectric driving piece 44 fixed connection, and clutch blocks 43 are installed in the top of flexible 41, and the top surface of clutch blocks 43 butt in rectangular board 32, and piezoelectric driving piece 44 can drive flexible 41 and follow first direction deformation to make clutch blocks 43 drive rectangular board 32 and follow first direction and remove. In this embodiment, the bottom surface of the friction block 43 is bonded to the top of the flexible member 41 to achieve a fixed connection. The base 1 is fixed on the damping table through screws.

Because two driving assemblies 4 are symmetrically installed on the base 1 along the first direction, the piezoelectric driving element 44 of each driving assembly 4 can drive the flexible element 41 to deform along the first direction, and then a friction force is generated between the friction block 43 and the strip plate 32 to drive the mover assembly 3 to move along the first direction. In the embodiment, the rotor assembly 3 moves through the two driving assemblies 4, so that on one hand, the driving force for the rotor assembly 3 is improved, and further the bearing capacity of the rotor assembly 3 is improved; on the other hand, in the process of the bi-directional movement of the rotor assembly 3, the driving force born by the rotor assembly 3 is kept consistent, the controllability of main motion parameters such as the speed and the acceleration of the bi-directional movement of the rotor assembly 3 is improved, and the driving performance of the driving assembly 4 is conveniently and accurately adjusted. In this embodiment, the flexible member 41 can only deform in the first direction, so that the piezoelectric driving member 44 is ensured to be subjected to only positive pressure and not to be subjected to acting forces in other directions, thereby prolonging the service life of the piezoelectric driving member 44 and the inertia motor.

In this embodiment, the upper surface of the sliding block 31 is an external load surface, the lower surface is a mounting surface of the long strip plate 32, the long strip plate 32 may be made of a wear-resistant ceramic material or a composite material, or may be made of a metal member with a surface coated with a ceramic material or a composite material, and is fixed to the bottom of the sliding block 31 by bonding, and the bottom surface of the long strip plate 32 is a friction surface. The inertia motor further comprises two linear guide rails 2, the two linear guide rails 2 are symmetrically arranged on the base 1, the sliding block 31 is slidably arranged between the two linear guide rails 2, the two linear guide rails 2 guide the sliding block 31 to move along the first direction, and the moving precision of the sliding block 31 is improved. Wherein, linear guide 2 can pass through screw and base 1 fixed connection.

Further, the base 1 is provided with a mounting groove 11, and the flexible member 41 and the piezoelectric driving member 44 are mounted in the mounting groove 11, so that the driving assembly 4 is fixed on the base 1.

Most of the rebound mechanisms in the existing inertia motor flexible structure swing flexibly, the movement track of the rebound mechanisms is an arc line, when the rebound mechanisms work, acting forces in other directions, namely tangential directions, can be generated on a driver, and the service life of piezoelectric ceramics is short due to the characteristic that the piezoelectric ceramics cannot be subjected to tensile stress and tangential force. Moreover, the conventional inertia motor is usually driven by a group of drivers and a flexible structure, and not only the load force but also the resistance generated by the deformation of the flexible structure need to be overcome when the motor moves in the forward direction; when the motor moves in the reverse direction, the elastic potential energy accumulated by the flexible structure due to the self deformation becomes a part of power source, so that the motion parameters are uncontrollable when the motor moves in the forward direction and the reverse direction, and the consistency of the bidirectional motion is poor.

In order to solve the above problem, as shown in fig. 4 and 5, the driving assembly 4 further includes resilient members 42, the step walls 12 are disposed in the mounting groove 11, and the resilient members 42 are disposed along a direction perpendicular to the first direction and symmetrically disposed on both sides of the flexible member 41 and connected to the step walls 12; when the flexible member 41 is deformed, the resilient member 42 generates a resilient force in the deformation direction, i.e., the first direction. During the movement of the mover assembly 3, the projection of the center of the resilient member 42 and the center of the piezoelectric driver 44 in the first direction coincide, and the resilient member 42 is substantially translated, so that the piezoelectric driver 44 is ensured to be only subjected to positive pressure and not to be subjected to acting force in other directions, and the service lives of the piezoelectric driver 44 and the inertial motor are prolonged. In addition, in this embodiment, the two driving assemblies 4 are symmetrically arranged along the first direction, so that the stress condition of the moving assembly 3 during forward movement is consistent with that during reverse movement, and the consistency of bidirectional movement is improved. Then, in this embodiment, the resilience force of the resilient member 42 is greater than the load force, so as to ensure that the piezoelectric driving member 44 is not subjected to tensile stress during the retraction process, thereby greatly improving the service life of the piezoelectric driving member 44 and further improving the service life of the inertial motor. Secondly, the resilience member 42 can be gradually deformed in an accumulative manner during the movement of the flexible member 41 in one direction, so that the resilience force is gradually increased, and power is provided for the friction block 43 to move in the other direction after the movement is finished.

In this embodiment, the resilient member 42 is a plate, the resilient member 42 and the flexible member 41 are integrally formed, and the plate is connected to the step wall 12 by bonding. In other embodiments, as shown in fig. 6, the resilient member 42 is a cylinder, the flexible member 41 is provided with a mounting hole, the resilient member 42 is arranged through the mounting hole, and the axis of the mounting hole is located on the central plane of the piezoelectric driving member 44 in the height direction.

Preferably, the flexible member 41 is fixedly connected to the piezoelectric driving member 44 along the first direction, one end of the flexible member 41 near the piezoelectric driving member 44 is provided with a positioning groove 412, the end of the piezoelectric driving member 44 is fixed in the positioning groove 412, so as to improve the installation accuracy of the piezoelectric driving member 44, and the resilient member 42 is disposed at two sides of the positioning groove 412, so that the resilient member 42 is disposed near the piezoelectric driving member 44, thereby avoiding the moment influence between the resilient member 42 and the piezoelectric driving member 44. In this embodiment, the piezoelectric driving element 44 is fixedly connected to the flexible element 41 by adhesion, the piezoelectric driving element 44 is a piezoelectric ceramic stack, the piezoelectric ceramic stack extends and retracts along a first direction, and the piezoelectric driving element 44 may also be made of a piezoelectric ceramic single crystal.

In order to improve the output performance of the driver, most of inertia motors pre-press the driver through a wedge-shaped or inclined-plane structure, but the size and the direction of the pre-pressing force are difficult to accurately adjust through the structure, so that the driving performance of the driver is difficult to adjust.

In order to solve the above problem, as shown in fig. 7, the driving assembly 4 further includes a pre-tightening unit 45, the pre-tightening unit 45 includes a push rod 451 and a push wire 452, the push rod 451 is installed at one end of the piezoelectric driving element 44 away from the flexible element 41 along a first direction, a connection hole 13 is formed in an inner wall of the installation groove 11, the connection hole 13 is located at one end of the push rod 451 away from the piezoelectric driving element 44, the push wire 452 is threadedly connected to the connection hole 13, and an end portion of the push wire 452 abuts against the push rod 451. During the preloading of the push rod 451 by the jack wire 452, the preload provided by the resilient member 42 to the piezoelectric driver 44 is adjusted by adjusting the depth of the screw-in of the jack wire 452. Because the moving direction of the jackscrew 452 is the same as the direction of the prepressing force, no force or displacement in other directions exists in the process of prepressing the piezoelectric driving piece 44, so that the adjusting precision of the prepressing force is improved, and the driving performance of the inertia motor is convenient to adjust.

Preferably, the first end of the connecting hole 13 is not threaded, the second end of the connecting hole 13 is threaded, and the push rod 451 partially extends into the first end of the connecting hole 13, so as to improve the mounting stability of the piezoelectric driver 44. The jack screw 452 is screwed into the connecting hole 13 through the second end of the connecting hole 13 and the preload provided by the resilient member 42 to the piezoelectric driver 44 in the initial state of depth adjustment by screwing the jack screw 452 into the connecting hole, so as to improve the driving performance of the piezoelectric driver 44.

Further, the bottom of the flexible part 41 is provided with an extension part 411 arranged along the first direction, an insertion hole is arranged in the mounting groove 11, and the first end of the extension part 411 is inserted into the insertion hole, so that the mounting stability of the flexible part 41 is improved. In this embodiment, a clamping table is disposed in the mounting groove 11, and the clamping table and the bottom wall of the mounting groove 11 form an insertion hole.

Preferably, as shown in fig. 2 and 7, an auxiliary rib 14 is disposed in the mounting groove 11, the auxiliary rib 14 is provided with a threaded hole 15 and is located at the bottom of the flexible member 41, a screw 46 is screwed in the threaded hole 15, and the screw 46 abuts against the flexible member 41 to adjust the height of the friction block 43. The screwing depth of the adjusting screw 46 can raise the position height of the friction block 43, so that the friction block is in friction contact with the bottom surface of the long strip plate 32, the positive pressure between the long strip plate and the friction block can be adjusted, and the friction force borne by the mover assembly 3 can be adjusted. In this embodiment, the screw of the screw 46 faces the top of the flexible member 41, the second end of the extension 411 abuts against the top surface of the head of the screw 46, and the lifting of the head of the screw 46 can drive the second end of the extension 411 to lift, so as to adjust the height of the friction block 43.

It should be noted that, as shown in fig. 8, the mover assembly 3 in this embodiment is driven by the two driving assemblies 4 simultaneously when moving in the forward and reverse directions along the first direction. For example: in operation, one of the piezoelectric drivers 44 (i.e., the first piezoelectric driver on the left side of fig. 5) applies a sawtooth voltage with a slow rise and a fast fall, and the other piezoelectric driver 44 (i.e., the second piezoelectric driver on the right side of fig. 5) applies a sawtooth voltage with a fast rise and a slow fall, so that the two groups of piezoelectric drivers 44 simultaneously provide power output to improve the load capacity of the inertia motor. Piezoelectric driving piece 44 is when deformation at a slow speed, rubbing block 43 drive runner assembly 3 removes, piezoelectric driving piece 44 is when deformation at a fast speed, rubbing block 43 slides relative rectangular slab 32, because two piezoelectric driving pieces 44 set up along first direction symmetry, so when two piezoelectric driving pieces 44 deformation at a slow speed, the opposite but displacement direction of corresponding rubbing block 43 of both voltage change condition is the same, provide drive power to runner assembly 3 jointly, through piezoelectric driving piece 44's a lot of deformation at a slow speed, realize runner assembly 3's stroke increase gradually.

It is to be noted that the foregoing is only illustrative of the preferred embodiments of the present invention and the technical principles employed. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the utility model. Therefore, although the present invention has been described in greater detail by the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the present invention, and the scope of the present invention is determined by the scope of the appended claims.

Claims

1. An inertial motor, comprising:

a base (1);

the rotor assembly (3) comprises a sliding block (31) and a long strip plate (32) arranged at the bottom of the sliding block (31), and the sliding block (31) is installed on the base (1) in a sliding mode along a first direction;

two drive assembly (4), follow first direction symmetry install in on base (1), drive assembly (4) include flexible piece (41), clutch blocks (43) and piezoelectricity driving piece (44), flexible piece (41) with piezoelectricity driving piece (44) fixed connection, clutch blocks (43) install in the top of flexible piece (41), just the top surface butt of clutch blocks (43) in rectangular board (32), piezoelectricity driving piece (44) can drive flexible piece (41) are followed first direction deformation, so that clutch blocks (43) drive rectangular board (32) are followed first direction removes.

2. An inertial motor according to claim 1, characterised in that the base (1) is provided with a mounting slot (11), the flexible member (41) and the piezoelectric drive member (44) being mounted in the mounting slot (11),

the driving assembly (4) further comprises a rebound part (42), a step wall (12) is arranged in the mounting groove (11), and the rebound parts (42) are arranged along the first direction and symmetrically arranged at two sides of the flexible part (41) and connected to the step wall (12); when the flexible part (41) is deformed, the rebound part (42) generates a rebound force.

3. An inertial motor according to claim 2, characterized in that said resilient member (42) is a plate, said resilient member (42) being integral with said flexible member (41); or

The rebound piece (42) is a cylinder, the flexible piece (41) is provided with a mounting hole, and the rebound piece (42) penetrates through the mounting hole.

4. An inertial motor according to claim 2, characterised in that the flexible member (41) is fixedly connected to the piezoelectric drive member (44) in the first direction, that a positioning slot (412) is provided at an end of the flexible member (41) close to the piezoelectric drive member (44), that an end of the piezoelectric drive member (44) is fixed in the positioning slot (412), and that the resilient member (42) is provided at both sides of the positioning slot (412).

5. The inertia motor of claim 4, wherein the driving assembly (4) further comprises a pre-tightening part (45), the pre-tightening part (45) comprises a push rod (451) and a jackscrew (452), the push rod (451) is installed at one end of the piezoelectric driving part (44) far away from the flexible part (41), a connecting hole (13) is formed in the inner wall of the installation groove (11), the connecting hole (13) is located at one end of the push rod (451) far away from the piezoelectric driving part (44), and the jackscrew (452) is in threaded connection with the connecting hole (13) and abuts against the push rod (451) at the end.

6. An inertial motor according to claim 1, characterised in that the piezoelectric drive (44) is a piezo-ceramic stack which expands and contracts in the first direction.

7. An inertial motor according to claim 2, characterised in that the bottom of the flexible member (41) is provided with an extension (411) arranged along the first direction, in that the mounting slot (11) is provided with a socket into which a first end of the extension (411) is plugged.

8. An inertial motor according to claim 7, characterized in that an auxiliary rib (14) is provided in the mounting groove (11), said auxiliary rib (14) being provided with a threaded hole (15) and being located at the bottom of the flexible member (41), a screw (46) being screwed into said threaded hole (15), said screw (46) abutting against the flexible member (41) to adjust the height of the friction block (43).

9. An inertial motor according to claim 8, characterised in that the screw (46) has its shank facing the top of the flexible member (41), the second end of the extension (411) abutting against the top face of the head of the screw (46).

10. An inertial motor according to claim 1, characterised by further comprising two linear guides (2), said two linear guides (2) being symmetrically mounted on said base (1), said slider (31) being slidably mounted between said two linear guides (2).