CN216937566U

CN216937566U - Cleaning jig

Info

Publication number: CN216937566U
Application number: CN202220003904.XU
Authority: CN
Inventors: 张池; 王梦; 王俊婷; 潘虎
Original assignee: BOE Technology Group Co Ltd; Mianyang BOE Optoelectronics Technology Co Ltd
Current assignee: BOE Technology Group Co Ltd; Mianyang BOE Optoelectronics Technology Co Ltd
Priority date: 2022-01-04
Filing date: 2022-01-04
Publication date: 2022-07-12
Anticipated expiration: 2032-01-04

Abstract

The utility model relates to a cleaning jig for cleaning an optical lens, comprising: the grinding device comprises a base platform, a grinding head and a grinding head, wherein a cylindrical bulge is convexly arranged on the base platform, one surface of the bulge, which is far away from the base platform, is a grinding surface, and the grinding surface is a plane parallel to the base platform; the dust-free cloth is placed on the grinding surface, and the area of the dust-free cloth is larger than that of the grinding surface; the pressing component comprises a pressing plate, a through hole is formed in the pressing plate, and when the pressing plate is pressed on the base station, the through hole is sleeved outside the bulge, so that the part, located on the grinding surface, of the dust-free cloth is kept flat; the fixture is provided with a first end and a second end which are opposite, a through hole is formed in the end face of the first end, a containing groove used for containing and fixing an optical lens is formed in the direction close to the second end along the through hole, and when the optical lens is contained in the containing groove, the surface to be cleaned of the optical lens is flush with the end face of the first end.

Description

Cleaning jig

Technical Field

The utility model relates to the technical field of cleaning, in particular to a cleaning jig.

Background

The Laser annealing machine (ELA) generates XeCL excimer Laser with the wavelength of 308nm, the XeCL excimer Laser is generated by a Laser (Laser) and transmitted to a process chamber through an optical path, and the Window lens is an optical lens which is totally transmitted by a Laser Tube sealed at two ends of a Laser generating Tube (Laser Tube), and comprises two Front and Rear. As the use time increases, the Window lens surface will have obvious laser Mark prints, and the laser prints on the Window lens surface need to be cleaned regularly. Because Mark marks on the surface of the Window lens are heavy, the Mark marks on the surface of the lens can be cleaned only by grinding the surface of the Window lens by using grinding powder. The cleaning jig for the Window lenses currently used has the defects of uneven stress and uneven grinding of the lenses in the grinding process, so that the transmittance of the cleaned Window lenses is uneven, the quality of the laser light passing through is uneven, and the ELA process is influenced. In addition, the jig used at present is made of metal, so that the lens is easily scratched in the cleaning process.

SUMMERY OF THE UTILITY MODEL

In order to solve the technical problems, the utility model provides a cleaning jig which solves the problem of uneven lens transmittance caused by uneven lens stress and uneven grinding in the cleaning process.

In order to achieve the above purpose, the embodiment of the utility model adopts the following technical scheme: a cleaning jig for cleaning an optical lens, comprising:

the grinding tool comprises a base table, a cylindrical protrusion is convexly arranged on the base table, one surface of the protrusion, which is far away from the base table, is a grinding surface, and the grinding surface is a plane parallel to the base table;

the dust-free cloth is placed on the grinding surface, and the area of the dust-free cloth is larger than that of the grinding surface;

the pressing component comprises a pressing plate, a through hole is formed in the pressing plate, when the pressing plate is pressed on the base platform, the through hole is sleeved outside the protrusion, and the part, located on the grinding surface, of the dust-free cloth is kept flat;

the fixture is provided with a first end and a second end which are opposite, a through hole is formed in the end face of the first end, a containing groove used for containing and fixing an optical lens is formed in the direction close to the second end along the through hole, and when the optical lens is contained in the containing groove, the surface to be cleaned of the optical lens is flush with the end face of the first end.

Optionally, a liquid collecting tank is further arranged on the base platform, and the liquid collecting tank is arranged around the protrusions.

Optionally, a convex ring is arranged on the pressing surface of the pressing plate, the convex ring is arranged around the through hole, when the pressing plate is pressed on the base platform, the convex ring can be inserted into the liquid collecting tank, and the side wall of the convex ring is in contact with the side wall of the liquid collecting tank to fix the dust-free cloth.

Optionally, the width of the convex ring in the direction parallel to the pressing surface is smaller than the width of the liquid collecting groove in the direction parallel to the base platform.

Optionally, the thickness of the convex ring in the direction perpendicular to the pressing surface is smaller than the depth of the liquid collecting groove.

Optionally, the base station includes a connection surface in press-contact with the press-fit surface of the press plate, and a distance between the grinding surface and the connection surface of the base station is smaller than a thickness of the press plate.

Optionally, the base station is provided with a registration hole, and a registration pin matched with the registration hole is convexly arranged on the pressing surface of the pressing plate.

Optionally, two opposite side walls of the accommodating groove are provided with notches.

Optionally, the elastic limiting part is further included, and a limiting groove is circumferentially arranged on the inner side wall of the accommodating groove to clamp the elastic limiting part.

Optionally, the limiting groove is a step groove, the step groove includes a first step surface parallel to the first direction and a second step surface connected to the first step surface, the first step surface is provided with a first sub-limiting groove, the second step surface is provided with a second sub-limiting groove, and the first direction is a direction from the first end to the second end;

the elastic limiting part comprises a first protrusion clamped with the first sub-limiting groove and a second protrusion clamped with the second sub-limiting groove.

Optionally, the elastic limiting part is a rubber ring.

Optionally, a cross-sectional area of the receiving groove in a direction parallel to the end surface of the first end is gradually reduced from the first end to the second end.

Optionally, the receiving groove is disposed through the clamp.

The utility model has the beneficial effects that: the cleaning jig provided by the utility model is used for cleaning the optical lens, so that the stress of the optical lens is more uniform in the cleaning process, and the transmittance of the optical lens is more uniform. The service life of the optical lens is effectively prolonged, the success rate of Laser PM (Laser maintenance) is improved, and the frequency of Laser Energy Drop is reduced.

Drawings

FIG. 1 is a schematic view of a base station according to an embodiment of the present invention;

FIG. 2 is a schematic structural diagram of a pressing member according to an embodiment of the present invention;

FIG. 3 is a first schematic view of a fixture according to an embodiment of the present invention;

FIG. 4 is a second schematic structural view of a clamp according to an embodiment of the present invention;

FIG. 5 is a third structural view of a jig in an embodiment of the utility model;

fig. 6 is a schematic structural diagram of an elastic limiting element according to an embodiment of the utility model;

FIG. 7 is a schematic structural view of a spacing groove in an embodiment of the utility model;

fig. 8 is a schematic structural diagram of a cleaning fixture in an embodiment of the utility model.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the drawings of the embodiments of the present invention. It is to be understood that the embodiments described are only a few embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the described embodiments of the utility model, are within the scope of the utility model.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

As shown in fig. 1 to 8, the present embodiment provides a cleaning fixture for cleaning an optical lens, including:

the grinding device comprises a base platform 1, wherein a cylindrical protrusion 11 is convexly arranged on the base platform 1, one surface of the protrusion 11, which is far away from the base platform 1, is a grinding surface, and the grinding surface is a plane parallel to the base platform 1;

the pressing component comprises a pressing plate 2, a through hole 21 is formed in the pressing plate 2, when the pressing plate 2 is pressed on the base platform 1, the through hole 21 is sleeved outside the protrusion 11, and the part, located on the grinding surface, of the dust-free cloth keeps flat;

the optical lens cleaning device comprises a clamp 3, wherein the clamp 3 is provided with a first end 31 and a second end 32 which are opposite, a through hole is formed in the end surface of the first end 31, an accommodating groove 33 for accommodating and fixing an optical lens is formed by extending along the through hole to the direction close to the second end 32, and when the optical lens is accommodated in the accommodating groove 33, the surface to be cleaned of the optical lens is flush with the end surface 36 of the first end 31.

The dust-free cloth is placed on the grinding surface, the press-fit component is pressed on the base station 1, the press-fit component is in press-fit with the base station 1 through the press plate 2, so that the part, located on the grinding surface, of the dust-free cloth is kept in a flat state, then the optical lens is accommodated and fixed in the accommodating groove 33 of the clamp 3, the clamp 3 is held by hand to move in a reciprocating mode (move in a direction parallel to the grinding surface) on the dust-free cloth located on the grinding surface, so that the optical lens is cleaned, and due to the fact that the grinding surface is a plane, due to the press plate 2 and the base station 1 in press-fit, the part, located on the grinding surface, of the dust-free cloth is kept in a flat state, so that the surface to be cleaned of the optical lens is evenly stressed, the cleaning effect is improved, and the transmittance of the optical lens is even.

The Laser tube uses special gas, and the special gas that needs to be renewed after the special gas life-span expires changes optical lens in step, if the lens transmissivity is unusual, changes special gas and optical lens back Laser energy not up to standard, then maintains the failure, adopts the clean tool clean optical lens of this embodiment for optical lens's transmissivity is even, has improved the success rate of Laser PM (Laser maintenance).

Referring to fig. 1, for example, a liquid collecting groove 12 is further disposed on the base platform 1, and the liquid collecting groove 12 is disposed around the protrusion 11.

When cleaning, it is necessary to apply abrasive powder and DI water (deionized water) to the dust-free cloth in order to clean the optical lens, and the sump 12 is used to collect waste liquid after cleaning to avoid environmental pollution.

Illustratively, the outer side wall of the protrusion 11 is reused as the side wall of the sump 12, but not limited thereto.

Exemplarily, a plurality of support columns 14 are arranged on one surface of the base platform 1, which is far away from the protrusion 11, the support columns 14 are arranged at four corners of the base platform 1 for supporting the base platform 1, and rubber is arranged on one surface of the base platform 1, which is far away from the support columns 14, so as to play a role in skid resistance.

Referring to fig. 2, illustratively, a convex ring 22 is disposed on the press-fit surface of the press plate 2, the convex ring 22 surrounds the through hole 21, when the press plate 2 is press-fit on the base platform 1, the convex ring 22 can be inserted into the liquid collecting tank 12, and the side wall of the convex ring 22 contacts with the side wall of the liquid collecting tank 12 to fix the dust-free cloth.

When the pressing plate 2 is pressed with the base station 1, the convex ring 22 is inserted into the liquid collecting groove 12, and the side wall of the convex ring 22 is in contact with the side wall of the liquid collecting groove 12, so that the part of the dust-free cloth on the grinding surface is kept in a flat state and can be fixed, and the dust-free cloth is prevented from being deviated in the cleaning process to influence the cleaning effect.

Illustratively, the width of the convex ring 22 in the direction parallel to the press-fit surface is smaller than the width of the sump 12 in the direction parallel to the base 1.

The convex ring 22 is a circular ring, the liquid collecting groove 12 is a circular ring-shaped groove, and the width of the convex ring 22 in the radial direction is smaller than that of the liquid collecting groove 12 in the radial direction.

When the pressing plate 2 is pressed on the base platform 1, the convex ring 22 can be inserted into the liquid collecting groove 12, and the side wall of the convex ring 22 is in contact with the side wall of the liquid collecting groove 12 far away from the bulge 11, so that the liquid collecting space of the liquid collecting groove 12 can be enlarged.

Illustratively, the thickness of the collar 22 in a direction perpendicular to the press-fit surface is less than the depth of the sump 12.

By adopting the scheme, after the pressing plate 2 and the base platform 1 are pressed, the convex ring 22 and the bottom of the liquid collecting groove 12 are provided with a gap, so that the liquid collecting space of the liquid collecting groove 12 can be enlarged, the cleaning time is prolonged, and the cleaning effect is improved.

Illustratively, the base table 1 includes a connecting surface in pressure contact with the pressing surface of the pressing plate 2, and the distance between the grinding surface and the connecting surface of the base table 1 is smaller than the thickness of the pressing plate 2.

Pressing plate 2 with behind the 1 pressfitting of base station, protruding 11 is located in the through-hole 21, part promptly the lateral wall of through-hole 21 forms and encloses and locate protruding 11 barricade all around is injectd the space that anchor clamps 3 drive optical lens and remove on dustless cloth refers to figure 8.

Referring to fig. 1 and 2, for example, the base 1 is provided with a registration hole 13, and a registration pin 23 that is matched with the registration hole 13 is convexly provided on a press-fit surface of the press plate 2.

Counterpoint hole 13 with the setting of counterpoint round pin 23 is convenient for clamp plate 2 with the counterpoint of base station 1, counterpoint hole 13 with counterpoint round pin 23 one-to-one sets up, the quantity in counterpoint hole 13 can be set for according to actual need, in this embodiment, follows a diagonal line of base station 1 the edge of base station 1 is provided with two counterpoint hole 13, the edge that corresponds the diagonal line of clamp plate 2 the edge of clamp plate 2 is provided with two counterpoint round pin 23, the effectual prevention, clean in-process, clamp plate 2 with the skew of base station 1, thereby guarantee the stability of dustless cloth, no fold to guarantee that the optical lens atress is even.

Referring to fig. 3 to 5, notches 34 are exemplarily formed on two opposite side walls of the receiving groove 33.

The provision of the notch 34 facilitates removal of the optical lens.

Exemplarily, the cleaning fixture further includes an elastic limiting member 4, and a limiting groove is circumferentially disposed on an inner sidewall of the accommodating groove 33 to engage with the elastic limiting member 4.

The elastic limiting part 4 is arranged, so that the connection stability of the optical lens is guaranteed, the optical lens and the clamp 3 are prevented from moving relatively in the cleaning process, the clamp 3 can synchronously drive the optical lens to move when moving, and the cleaning effect is improved.

Referring to fig. 7, for example, the limiting groove is a step groove, the step groove includes a first step surface parallel to a first direction and a second step surface connected to the first step surface, the first step surface is provided with a first sub-limiting groove 301, the second step surface is provided with a second sub-limiting groove 302, and the first direction is a direction from the first end 31 to the second end 32;

referring to fig. 6, the elastic limiting member 4 includes a first protrusion 41 engaged with the first sub-limiting groove 301 and a second protrusion 42 engaged with the second sub-limiting groove 302.

The first sub-limiting groove 301 and the second sub-limiting groove 302 are respectively matched with the corresponding first protrusion 41 and second protrusion 42, so as to effectively fix the elastic limiting member 4.

It should be noted that the size of the receiving groove 33 is to prevent the optical lens from rotating in the receiving groove 33, and to ensure that the optical lens is not rubbed and jammed during taking and placing.

Illustratively, the elastic limiting member 4 is a rubber ring, but not limited thereto.

Illustratively, the cross-sectional area of the receiving groove 33 in a direction parallel to the end face of the first end 31 is gradually reduced from the first end 31 to the second end 32.

Adopt above-mentioned scheme, can compress tightly optical lens guarantees optical lens holds and is fixed in the stability in holding tank 33.

Illustratively, the receiving groove 33 is provided through the clamp 3.

The holding tank 33 runs through the clamp 3 is arranged, the holding tank 33 is located the opening 35 of the second end 32 plays a role in light transmission, and the cleaning state of the optical lens is convenient to observe.

Illustratively, the outer surface of the clamp 3 is a curved surface, and the cross-sectional area of the clamp 3 in a direction parallel to the end surface of the first end 31 gradually decreases from the first end 31 to the second end 32, so as to facilitate the holding, but not limited thereto, for example, the clamp 3 may have a cylindrical structure.

The process of cleaning the optical lens by the cleaning jig comprises the following steps:

first, a dust-free cloth is placed on the grinding surface (in this embodiment, a ten-grade dust-free cloth is used);

the pressing plate 2 is pressed on the base platform 1 through the alignment hole 13 and the alignment pin 23, the dust-free cloth is pressed, and the part of the dust-free cloth on the grinding surface is kept in a flat state;

the part of the dust-free cloth, which is positioned on the grinding surface, is scattered with grinding powder, and deionized water is dripped, the usage amount of the grinding powder and the deionized water can be set according to actual needs, and the grinding powder and the deionized water can be continuously added in the cleaning process;

fixing an optical lens in the accommodating groove 33 of the fixture 3 so that the surface to be cleaned of the optical lens is flush with the end surface of the first end 31 of the accommodating groove 33, and fig. 8 shows a schematic view of the state that the optical lens 10 is fixed in the fixture 3 and is cleaned;

and (3) holding the clamp 3 by hand, and controlling the clamp 3 to move on the part of the dust-free cloth on the grinding surface so as to clean the surface to be cleaned of the optical lens.

It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the utility model, and these modifications and improvements are also considered to be within the scope of the utility model.

Claims

1. A cleaning jig is used for cleaning an optical lens, and is characterized by comprising:

the grinding device comprises a base platform, a grinding head and a grinding head, wherein a cylindrical bulge is convexly arranged on the base platform, one surface of the bulge, which is far away from the base platform, is a grinding surface, and the grinding surface is a plane parallel to the base platform;

2. The cleaning fixture according to claim 1, wherein a liquid collecting groove is further formed in the base platform, and the liquid collecting groove is arranged around the protrusion.

3. The cleaning fixture according to claim 2, wherein a protruding ring is disposed on the pressing surface of the pressing plate, the protruding ring surrounds the periphery of the through hole, the protruding ring can be inserted into the liquid collecting tank when the pressing plate is pressed on the base, and the side wall of the protruding ring contacts with the side wall of the liquid collecting tank to fix the dust-free cloth.

4. The cleaning fixture of claim 3, wherein the width of the raised ring in a direction parallel to the press-fit surface is less than the width of the sump in a direction parallel to the submount.

5. The cleaning fixture of claim 3, wherein the thickness of the raised ring in a direction perpendicular to the press-fit surface is less than the depth of the sump.

6. The cleaning jig according to claim 1, wherein the base includes a connection surface to be press-contacted with the press-fit surface of the press plate, and a distance between the abrasive surface and the connection surface of the base is smaller than a thickness of the press plate.

7. The cleaning fixture according to claim 1, wherein the base has a positioning hole, and the pressing surface of the pressing plate has a positioning pin protruding therefrom for engaging with the positioning hole.

8. The cleaning fixture according to claim 1, wherein the receiving groove has notches formed on two opposite sidewalls thereof.

9. The cleaning fixture according to claim 1, further comprising an elastic limiting member, wherein a limiting groove is circumferentially disposed on an inner sidewall of the accommodating groove for engaging with the elastic limiting member.

10. The cleaning fixture according to claim 9, wherein the limiting groove is a step groove, the step groove includes a first step surface parallel to a first direction and a second step surface connected to the first step surface, the first step surface is provided with a first sub-limiting groove, the second step surface is provided with a second sub-limiting groove, and the first direction is a direction from the first end to the second end;

11. The cleaning fixture of claim 9, wherein the elastic limiting member is a rubber ring.

12. The cleaning fixture according to claim 1, wherein a cross-sectional area of the receiving groove in a direction parallel to the end surface of the first end is gradually reduced from the first end to the second end.

13. The cleaning fixture of claim 1, wherein the receiving groove is disposed through the fixture.