CN216765018U - Vacuum furnace heat shield and vacuum furnace - Google Patents
Vacuum furnace heat shield and vacuum furnace Download PDFInfo
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- CN216765018U CN216765018U CN202220227165.2U CN202220227165U CN216765018U CN 216765018 U CN216765018 U CN 216765018U CN 202220227165 U CN202220227165 U CN 202220227165U CN 216765018 U CN216765018 U CN 216765018U
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Abstract
The utility model discloses a vacuum furnace heat shield and a vacuum furnace. The heat shield of the vacuum furnace comprises an inner wall, an outer wall and an annular connecting part, wherein the inner wall encloses a central cavity, two ends of the central cavity are provided with openings, and the central cavity is used for accommodating a heating body; the outer wall is sleeved outside the inner wall, and the outer wall and the inner wall are arranged at intervals; the annular connecting part is arranged between the inner wall and the outer wall and is respectively connected with the inner wall and the outer wall, and the annular connecting part divides the space between the inner wall and the outer wall into an upper cavity and a lower cavity which are respectively a first cavity and a second cavity; the first chamber is configured to receive a reducing feedstock piece; the second chamber is configured to receive an insulating material. The heat shield of the vacuum furnace can fully utilize the heat of the periphery of the heating body. The vacuum furnace can fully utilize the heat at the periphery of the heating body, thereby improving the utilization rate of energy and the production efficiency of rare earth metal.
Description
Technical Field
The utility model relates to a vacuum furnace heat shield and a vacuum furnace.
Background
At present, the metal samarium is prepared by adopting a vacuum carbon tube furnace in industry. In the process of preparing metal samarium through thermal reduction, a hollow heat-insulating layer or a heat-insulating material is generally arranged at the periphery of a heating body in order to prevent heat loss. The structure can not fully utilize the heat at the periphery of the heating body, and certain energy waste can be caused.
CN214039568U discloses a heat screen for high temperature reaction furnace, including metal oven, baffle, slide rail, installation layer, water pipe and fixed bed, the inside fixedly connected with molybdenum system insulating layer of fixed bed, the hollow insulating layer of inside fixedly connected with of molybdenum system insulating layer, one side fixedly connected with heat-resisting brick layer of hollow insulating layer inner wall, one side swing joint of slide rail has the sliding plate, one side fixedly connected with furnace gate of sliding plate. The heat shield for the high-temperature reaction furnace cuts off heat on a transmission path through the hollow heat insulation layer, so that the difficulty of heat overflow is improved, and the loss of heat is reduced. When heat passes through the hollow heat-insulating layer and the molybdenum heat-insulating layer, the heat is taken away by the water in the water pipe, so that the temperature of the metal furnace wall is at a relatively low temperature. The heat shield with the structure can not fully utilize the heat at the periphery of the heating body, and easily causes the waste of energy.
CN203960396U discloses a vacuum furnace for sapphire single crystal growth, which comprises a furnace body, wherein a large furnace cover is arranged on the furnace body, and a small furnace cover is arranged on the large furnace cover. The crucible in the furnace body is arranged on a crucible tray, the crucible tray is arranged on a tray top post, and the tray top post is erected on the furnace bottom. A crucible cover is arranged above the crucible, and an upper heat shield is arranged on the upper surface of the crucible cover. The heating body is arranged outside the crucible and connected with the electrode on the big furnace cover, and the lower part and the periphery of the heating body are provided with a lower heat shield and a side heat shield. Crucible, heat-generating body, side heat shield all set up to oval flat to produce the sapphire single crystal of oval flat, waste crystal when preventing to cut into slices. The vacuum furnace is provided with a plurality of heat shields, the structure is complex, and the heat on the periphery of the heating body can not be fully utilized.
SUMMERY OF THE UTILITY MODEL
In view of the above, an object of the present invention is to provide a heat shield for a vacuum furnace, which can make full use of heat around a heat generating body.
Another object of the present invention is to provide a vacuum furnace which can sufficiently utilize heat at the periphery of a heating element, thereby improving energy utilization and rare earth metal production efficiency.
In one aspect, the present invention provides a vacuum furnace heat shield comprising an inner wall, an outer wall, and an annular connection,
the inner wall is enclosed to form a central cavity, two ends of the central cavity are opened, and the central cavity is used for accommodating a heating element;
the outer wall is sleeved on the outer side of the inner wall, and the outer wall and the inner wall are arranged at intervals;
the annular connecting part is arranged between the inner wall and the outer wall and is respectively connected with the inner wall and the outer wall, and the annular connecting part divides the space between the inner wall and the outer wall into an upper chamber and a lower chamber which are respectively a first chamber and a second chamber;
the first chamber is configured to receive a reducing feedstock piece;
the second chamber is configured to receive an insulating material.
According to the vacuum furnace heat shield of the present invention, preferably, the annular connection portion is connected to a lower portion of the inner wall, and the annular connection portion is connected to a lower portion of the outer wall.
According to the vacuum furnace heat shield of the present invention, preferably, the inner wall and the outer wall are arranged in parallel with each other.
The heat shield of the vacuum furnace according to the present invention preferably further comprises a sealing ring disposed above the annular connecting portion and configured to seal the first chamber.
The vacuum furnace heat shield according to the present invention preferably further comprises an insulating layer provided on an outer periphery of the outer wall.
According to the heat shield of the vacuum furnace, the inner wall and the outer wall are both cylindrical, and the central axes of the inner wall and the outer wall are overlapped; the annular connecting part and the sealing ring are both of circular ring structures.
On the other hand, the utility model also provides a vacuum furnace, which comprises a furnace body and the vacuum furnace heat shield, wherein the vacuum furnace heat shield is arranged in the furnace body.
According to the vacuum furnace of the present invention, preferably, the vacuum furnace further comprises a furnace cover, a crucible, a heating body, an electrode, a first receiver, a second receiver, and a vacuum device;
the top of the furnace body is provided with an opening; the furnace cover is arranged at the top of the furnace body; the crucible is arranged in the furnace body and is used for containing and returning raw material blocks; the heating body is sleeved outside the crucible and used for heating the crucible; the electrode is connected with the heating body; the first receiver is arranged above the crucible and is used for condensing and collecting metal vapor escaping in the reduction process; the vacuum furnace heat shield is sleeved on the heating body and is used for containing the returned raw material blocks and preventing heat from diffusing outwards; the second receiver is arranged above the first chamber of the heat shield of the vacuum furnace and is used for condensing and collecting metal steam escaping in the reduction process; the vacuum device is arranged outside the furnace body and can vacuumize the inside of the furnace body.
According to the vacuum furnace of the present invention, preferably, the vacuum furnace further comprises an inflator, the inflator is disposed outside the furnace body, and the inflator is configured to be capable of inflating gas into the furnace body.
According to the vacuum furnace of the present invention, preferably, the vacuum furnace further comprises an annular heat insulating cover;
the crucible and the heating body are both of cylindrical structures, and the central axes of the crucible and the heating body are overlapped;
the annular heat insulation cover is arranged at the top of the heating body and used for preventing heat at the top of the heating body from diffusing.
The heat shield of the vacuum furnace can fully utilize the heat of the periphery of the heating body. The vacuum furnace can fully utilize the heat at the periphery of the heating body, thereby improving the utilization rate of energy and the production efficiency of rare earth metal.
Drawings
FIG. 1 is a schematic longitudinal cross-sectional view of a vacuum furnace heat shield according to the present invention.
FIG. 2 is a schematic longitudinal sectional view of a vacuum furnace according to the present invention.
FIG. 3 is a schematic cross-sectional view of the vacuum furnace shown in FIG. 2.
The reference numerals are illustrated below:
1-furnace body, 2-furnace lid, 3-crucible, 4-heating body, 5-electrode, 6-first receiver, 7-vacuum furnace heat shield, 71-inner wall, 72-outer wall, 73-annular connection, 74-heat insulation layer, 75-central cavity, 76-first chamber, 77-second chamber, 8-second receiver, 9-vacuum device, 10-reduction block.
Detailed Description
The utility model will be further described with reference to the following figures and specific examples, but the scope of the utility model is not limited thereto.
In the present invention, the drum-like structure means a hollow cylindrical structure having a closed bottom. The cylindrical structure means a hollow cylindrical structure open at both ends.
In one aspect, the present invention provides a heat shield for a vacuum furnace, which can sufficiently utilize peripheral heat of a heating body of the vacuum furnace. The vacuum furnace of the utility model is a vacuum heat treatment furnace, which can be any rare earth smelting furnace, such as a vacuum carbon tube furnace for preparing metal samarium.
On the other hand, the utility model also provides a vacuum furnace, which can fully utilize the heat at the periphery of the heating body to carry out reduction in the process of preparing rare earth metal by thermal reduction, thereby effectively reducing the energy consumption and improving the production efficiency of the rare earth metal. As described in detail below.
< Heat shield of vacuum furnace >
The heat shield of the vacuum furnace comprises an inner wall, an outer wall, an annular connecting part, an optional sealing ring and an optional heat insulating layer.
Inner wall
The inner wall of the utility model is of a cylindrical structure. The inner wall encloses a central cavity. The central cavity is open at both ends and used for accommodating the heating body. The transverse section of the central cavity can be in any shape as long as the transverse section is matched with the outer contour of the heating body. In certain embodiments, the inner wall is a cylindrical structure and the transverse cross-section of the central lumen is circular.
Outer wall
The outer wall of the utility model is sleeved outside the inner wall. The outer wall and the inner wall are arranged at intervals, so that a gap is reserved between the outer wall and the inner wall. According to some embodiments of the utility model, the inner wall and the outer wall are arranged parallel to each other. The outer wall is a cylindrical structure. In certain embodiments, the inner and outer walls are both cylindrical and the central axes of the inner and outer walls overlap.
Annular connection part
The annular connection of the present invention is disposed between the inner wall and the outer wall. The annular connecting portion is connected with the inner wall and the outer wall respectively. The annular connecting part can be integrally formed with the inner wall and the outer wall, and can also be welded or detachably connected. The transverse section of the annular connecting part is the same as the transverse section of the first chamber in shape and size.
The annular connecting part divides the space between the inner wall and the outer wall into an upper cavity and a lower cavity which are respectively a first cavity and a second cavity. The first chamber is for receiving a slug of feedstock. Thus, the utilization rate of energy and the production efficiency of rare earth metal can be improved. The second chamber is for receiving an insulating material. Therefore, the heat diffusion of the first cavity can be reduced, and the heat can be prevented from diffusing to the outside of the furnace body.
According to some embodiments of the utility model, the annular connection is disposed between the inner wall and the outer wall. The annular connecting part is connected with the lower part of the inner wall and the lower part of the outer wall. The distance A from the connecting point of the annular connecting part and the inner wall to the bottom end of the inner wall is equal to the distance B from the connecting point of the annular connecting part and the outer wall to the bottom end of the outer wall.
In the utility model, the inner wall, the outer wall and the annular connecting part are respectively made of metal materials with certain hardness and high temperature resistance; preferably, the metal material is titanium, molybdenum, tungsten, niobium, tantalum, or the like; more preferably, the heat insulation plate is made of molybdenum metal, so that the production cost of the heat insulation plate of the vacuum furnace can be reduced, the heat emitted by the heating body can be better utilized, and the utilization rate of the heat is improved.
Sealing ring
The sealing ring is arranged above the annular connecting part and above the first cavity and used for enabling the first cavity to be in a closed state. The transverse cross-section of the sealing ring may be of any shape, preferably the same shape as the transverse cross-section of the first chamber. In certain embodiments, the sealing ring is annular.
In the utility model, the sealing ring can be made of a metal material with certain hardness and high temperature resistance; preferably, the metal material is titanium, molybdenum, tungsten, niobium, tantalum, or the like; more preferably, the metal material is molybdenum metal.
According to some preferred embodiments of the present invention, the inner wall and the outer wall are both cylindrical made of molybdenum, and the central axes thereof overlap; the annular connecting part and the sealing ring are both of molybdenum circular ring structures.
Thermal insulation layer
The heat insulating layer of the utility model is arranged on the periphery of the outer wall. The insulating layer may be selected from conventional insulating materials such as silicates, carbon felts, and the like. According to some embodiments of the utility model, the outer wall is a cylindrical structure made of molybdenum, and the outer periphery of the outer wall is provided with a thermal insulation layer of carbon felt. Thus, the heat at the periphery of the heating body can be fully utilized, and the heat can be prevented from being diffused to the outside of the furnace.
< vacuum furnace >
The vacuum furnace comprises a furnace body and the vacuum furnace heat shield, wherein the vacuum furnace heat shield is arranged in the furnace body. The furnace body can be any rare earth smelting furnace, such as a vacuum carbon tube furnace for preparing metal samarium.
In the present invention, specifically, the vacuum furnace may include a furnace body, a furnace cover, a crucible, a heating body, an electrode, a first receiver, a vacuum furnace heat shield, a second receiver, a vacuum device, and optionally an inflator device and an annular heat shield cover. The vacuum furnace heat shield is as described above.
The top of the furnace body of the utility model is provided with an opening. The outer contour of the furnace body can be in any shape, such as circular, rectangular and the like.
The furnace cover is arranged at the top of the furnace body. The utility model has no special requirements on the structure of the furnace cover, and the bottom of the furnace cover is matched with the top of the furnace body. In certain embodiments, the furnace lid has an arc-shaped longitudinal cross-section.
The crucible is arranged in the furnace body and used for containing and returning raw material blocks. The outer contour of the crucible can be circular or rectangular. In certain embodiments, the crucible is a cylindrical structure.
The heating body is sleeved outside the crucible and used for heating the crucible. The heating element can be selected from silicon molybdenum rod, silicon carbon rod, lanthanum chromate and graphite heating element; the graphite heating body is preferably selected, so that the production cost of the vacuum furnace can be reduced, and the temperature requirement for preparing rare earth metal can be met. According to some embodiments of the utility model, the heating element is a cylindrical structure.
The electrode of the present invention is connected to a heating element. The electrode may be provided at the bottom of the heating body.
The first receiver of the present invention is disposed above the crucible for condensing and collecting the metal vapor escaping during the reduction process. According to some embodiments of the utility model, the vacuum furnace further comprises a frustoconical or cone-shaped sleeve. The sleeve is disposed between the crucible and the first receiver. The bottom end of the sleeve is matched with the top end of the crucible, and the top end of the sleeve is matched with the shape of the first receiver.
The heat shield of the vacuum furnace is sleeved outside the heating body and used for containing the returned raw material blocks and preventing heat from being diffused outwards. The specific structure of the vacuum furnace heat shield is as described above, and is not described herein again.
The second receiver of the utility model is arranged above the first chamber of the heat shield of the vacuum furnace and is used for condensing and collecting the metal vapor escaping in the reduction process. The transverse cross-section of the second receptacle is the same shape as the transverse cross-section of the first chamber. In certain embodiments, the second receptacle is annular.
The vacuum device is arranged outside the furnace body and used for vacuumizing the interior of the furnace body. In certain embodiments, the vacuum device comprises a vacuum pump, a vacuum line, and a vacuum extraction valve.
The gas charging device is arranged outside the furnace body and is used for charging gas into the furnace body, for example, inert gas is charged into the furnace body to prevent metal from being oxidized; or cooling gas is filled into the furnace body to help the furnace body to quickly cool. In some embodiments, the inflation device comprises a cylinder and an inflation valve.
The annular heat insulation cover is arranged at the top of the heating body and used for preventing heat at the top of the heating body from diffusing. In some embodiments, the crucible and the heating element are respectively arranged in a barrel-shaped structure, and the central axes of the crucible and the heating element are overlapped; the annular heat insulation cover is arranged at the top of the heating body. The annular heat insulation cover can be made of a metal material with certain hardness and high temperature resistance; preferably, the metal material is titanium, molybdenum, tungsten, niobium, tantalum, or the like; more preferably, the material is molybdenum metal.
According to some embodiments of the present invention, the vacuum furnace may further comprise a temperature detection device and a heating control system, thereby enabling better control of the temperature within the furnace body.
Example 1
FIG. 1 is a schematic longitudinal cross-sectional view of a vacuum furnace heat shield according to the present invention. As shown in fig. 1, the vacuum furnace heat shield 7 of the present embodiment includes an inner wall 71, an outer wall 72, and an annular connecting portion 73. The inner wall 71 and the outer wall 72 are arranged parallel to each other.
The inner wall 71 encloses a central cavity 75 in the form of a cylinder. The central chamber 75 is open at both ends and accommodates a heating element.
The outer wall 72 is sleeved outside the inner wall 71, and the outer wall and the inner wall are not in contact and are arranged at intervals. The outer wall 72 is cylindrical. The outer wall 72 overlaps the central axis of the inner wall 71.
An annular connection 73 is provided between the inner wall 71 and the outer wall 72. The annular connecting portion 73 is connected to a lower portion of the inner wall 71, and the annular connecting portion 73 is connected to a lower portion of the outer wall 72. The distance A from the connecting point of the annular connecting portion 73 and the inner wall 71 to the bottom end of the inner wall 71 is equal to the distance B from the connecting point of the annular connecting portion 73 and the outer wall 72 to the bottom end of the outer wall 72. The annular connecting portion 73 divides the space between the inner wall 71 and the outer wall 72 into upper and lower chambers, a first chamber 76 and a second chamber 77, respectively. The first chamber 76 opens upwardly and the second chamber 77 opens downwardly. The first chamber 76 receives a slug of feedstock. And (4) carrying out primary reduction on the reduced material blocks by utilizing the heat diffused by the heating element. The second chamber 77 contains a thermally insulating material. This reduces the heat dissipation.
In the present embodiment, the inner wall 71, the outer wall 72, and the annular connecting portion 73 are each formed of a molybdenum metal material.
Example 2
The remaining structure is the same as in example 1 except for the following structure:
in this embodiment, the vacuum furnace heat shield 7 further comprises a sealing ring (not shown). A sealing ring is disposed above the first chamber 76. The sealing ring may seal the first chamber 76. In the present embodiment, the seal ring is formed of a molybdenum metal material.
Example 3
The remaining structure is the same as in example 2 except for the following structure:
FIG. 2 is a schematic longitudinal sectional view of a vacuum furnace according to the present invention. As shown in fig. 2, the vacuum furnace heat shield 7 of the present embodiment further includes a heat insulating layer 74. An insulation layer 74 is provided at the outer periphery of the outer wall 72. This prevents heat from being dissipated outward. In this embodiment, the thermal insulation layer 74 is a carbon felt thermal insulation layer.
Example 4
FIG. 2 is a schematic longitudinal sectional view of a vacuum furnace according to the present invention. FIG. 3 is a schematic cross-sectional view of the vacuum furnace shown in FIG. 2. As shown in fig. 2 to 3, the vacuum furnace of the present embodiment includes a furnace body 1, a furnace cover 2, a crucible 3, a heating element 4, an electrode 5, a first receiver 6, a vacuum furnace heat shield 7, a second receiver 8, and a vacuum device 9.
The top of the furnace body 1 has an opening.
The furnace cover 2 is arranged at the top of the furnace body 1. The furnace cover 2 has an arc-shaped longitudinal section.
The crucible 3 is arranged in the furnace body 1 and is used for containing the raw material blocks 10. In this embodiment, the crucible 3 has a cylindrical structure.
The heating element 4 is a cylindrical structure and is sleeved outside the crucible 3. The heating element 4 heats the crucible 3. In this embodiment, the heating element 4 is a graphite heating element.
The electrode 5 is connected to the heating element 4. The electrode 5 is provided at the bottom of the heating element 4.
A first receiver 6 is arranged above the crucible 3 for condensing and collecting the metal vapors escaping during the reduction process.
The vacuum furnace heat shield 7 is sleeved outside the heating body 4. The specific structure of the vacuum furnace heat shield 7 is as described in example 3.
In this embodiment, the first chamber 76 of the vacuum furnace heat shield 7 is used to hold the feedstock pieces 10. Thus, the heat diffused by the heating body 4 can be utilized for reduction, thereby improving the utilization rate of energy and the production efficiency of rare earth metal. The second chamber 77 of the vacuum furnace heat shield 7 is used to hold an insulating material such as carbon felt. This can reduce the heat spread of the first chamber 76. The thermal insulation layer 74 of the vacuum furnace heat shield 7 is a carbon felt thermal insulation layer. This further prevents the heat of the first chamber 76 from being diffused outward.
A second receiver 8 is arranged above the first chamber 76 of the vacuum furnace heat shield 7 for condensing and collecting metal vapors escaping during the reduction process. The second receiver 8 is of annular configuration.
The vacuum device 9 is provided outside the furnace body 1 and is used for evacuating the inside of the furnace body 1. The vacuum device 9 comprises a vacuum pump, a vacuum pipeline and a vacuum suction valve.
Example 5
The remaining structure is the same as in example 4 except for the following structure:
the vacuum furnace of this embodiment further comprises an aerating device (not shown). The inflating device is arranged outside the furnace body 1 and is used for inflating gas into the furnace body 1. The inflation device comprises a gas cylinder and an inflation valve.
Example 6
The remaining structure is the same as in example 5 except for the following structure:
the vacuum furnace of this embodiment further includes an annular heat insulating cover (not shown). The annular heat insulating cover is provided on the top of the heating body 4 for preventing heat diffusion at the top of the heating body 4. In this embodiment, the annular insulating cover is formed of a molybdenum metal material.
The present invention is not limited to the above-described embodiments, and any variations, modifications, and substitutions which may occur to those skilled in the art may be made without departing from the spirit of the utility model.
Claims (10)
1. A heat shield of a vacuum furnace is characterized by comprising an inner wall, an outer wall and an annular connecting part,
the inner wall is enclosed to form a central cavity, two ends of the central cavity are opened, and the central cavity is used for accommodating a heating element;
the outer wall is sleeved on the outer side of the inner wall, and the outer wall and the inner wall are arranged at intervals;
the annular connecting part is arranged between the inner wall and the outer wall and is respectively connected with the inner wall and the outer wall, and the annular connecting part divides the space between the inner wall and the outer wall into an upper chamber and a lower chamber which are respectively a first chamber and a second chamber;
the first chamber is configured to receive a reducing feedstock piece;
the second chamber is configured to receive an insulating material.
2. The vacuum furnace heat shield of claim 1, wherein the annular connection is connected to a lower portion of the inner wall and the annular connection is connected to a lower portion of the outer wall.
3. The vacuum furnace heat shield of claim 1, wherein the inner wall and the outer wall are disposed parallel to each other.
4. The vacuum furnace heat shield according to any of claims 1 to 3, further comprising a sealing ring disposed above the annular connection portion and configured to seal the first chamber.
5. The vacuum furnace heat shield of claim 4, further comprising an insulating layer disposed about the outer wall.
6. The vacuum furnace heat shield of claim 5, wherein the inner wall and the outer wall are both cylindrical and have overlapping central axes; the annular connecting part and the sealing ring are both of circular ring structures.
7. A vacuum furnace, characterized by comprising a furnace body and the vacuum furnace heat shield according to any one of claims 1 to 6, wherein the vacuum furnace heat shield is arranged in the furnace body.
8. The vacuum furnace according to claim 7, further comprising a furnace cover, a crucible, a heating body, an electrode, a first receiver, a second receiver, and a vacuum device;
the top of the furnace body is provided with an opening;
the furnace cover is arranged at the top of the furnace body;
the crucible is arranged in the furnace body and is used for containing and returning raw material blocks;
the heating body is sleeved outside the crucible and used for heating the crucible;
the electrode is connected with the heating body;
the first receiver is arranged above the crucible and is used for condensing and collecting metal vapor escaping in the reduction process;
the vacuum furnace heat shield is sleeved on the heating body and is used for containing the returned raw material blocks and preventing heat from being diffused outwards;
the second receiver is arranged above the first chamber of the heat shield of the vacuum furnace and is used for condensing and collecting metal steam escaping in the reduction process;
the vacuum device is arranged outside the furnace body and can vacuumize the inside of the furnace body.
9. The vacuum furnace of claim 8, further comprising an inflator disposed outside the furnace body, the inflator being configured to inflate gas into the furnace body.
10. The vacuum furnace of claim 9, further comprising an annular heat insulating cover;
the crucible and the heating body are both of cylindrical structures, and the central axes of the crucible and the heating body are overlapped;
the annular heat insulation cover is arranged at the top of the heating body and used for preventing heat at the top of the heating body from diffusing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220227165.2U CN216765018U (en) | 2022-01-27 | 2022-01-27 | Vacuum furnace heat shield and vacuum furnace |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220227165.2U CN216765018U (en) | 2022-01-27 | 2022-01-27 | Vacuum furnace heat shield and vacuum furnace |
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| CN216765018U true CN216765018U (en) | 2022-06-17 |
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| CN202220227165.2U Active CN216765018U (en) | 2022-01-27 | 2022-01-27 | Vacuum furnace heat shield and vacuum furnace |
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- 2022-01-27 CN CN202220227165.2U patent/CN216765018U/en active Active
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