CN216582544U - Substrate conveying device - Google Patents

Abstract

The application provides a base plate conveyer, including splint mechanism and plane moving platform, splint mechanism includes: a support base plate; two sets of roller assemblies for supporting opposite sides of the substrate in a matching manner; and the two sets of clamping assemblies are respectively arranged on the two opposite sides of the supporting base plate and are used for abutting and fixing the two opposite sides of the substrate on the corresponding roller assemblies so that the clamping assemblies and the corresponding roller assemblies are matched to clamp and fix the side edges of the substrate. The application provides a base plate conveyer sets up roller components respectively through the both sides at the supporting baseplate, supports the base plate through roller components to reduce the relative supporting baseplate's of base plate focus height, and set up centre gripping subassembly and the fixed base plate of roller components cooperation centre gripping, and then be convenient for the plane moving platform drive plate mechanism steady and accurate removal, and then drive the base plate steady and accurate removal. Need not structures such as motor, conveyer belt, weight is lighter, and the structure is more simplified and light and handy, and it is more steady accurate to drive the base plate and remove.

Description

Substrate conveying device

Technical Field

The application belongs to the technical field of die bonding, and particularly relates to a substrate conveying device.

Background

When die bonder is used for die bonding, the die bonding head generally sucks the die to mount the die on the substrate, which requires the substrate to be transported to the die bonding head for mounting the die on the substrate. During die bonding, a plurality of chips are often mounted on the substrate, which requires aligning each die bonding site on the substrate with the die bonding head to mount the chip. Currently, for small substrates, a belt conveying structure is used to receive and support the substrate, and a plane moving table is used to drive the belt conveying structure and the substrate to move integrally, so that each die bonding position on the substrate is aligned with a die bonding head to bond the die. For a large-sized substrate, the substrate is large in size, and the belt conveying structure is provided with a supporting bottom plate, a motor, a conveying belt, a plurality of tension wheels, a plurality of guide wheels and a plurality of riding wheels, so that the whole weight is large after the substrate is supported, the substrate is higher than the supporting bottom plate, the center of gravity of the substrate is high, and the substrate is difficult to accurately position when moving, so that the die bonding is currently performed on the large-sized substrate, generally, a three-axis moving platform is used for moving a die bonding head, and the die bonding head sequentially corresponds to each die bonding position on the substrate for die bonding. However, moving the die bonding head back and forth from the pick-up position to the die bonding position is inefficient.

SUMMERY OF THE UTILITY MODEL

An object of the embodiment of the application is to provide a substrate conveying device to when solving the solid brilliant of large-scale substrate that exists among the correlation technique, the whole weight of conveying structure and substrate is big, and the focus is high, is difficult to pinpoint, needs to remove solid brilliant bonding head, leads to the problem of inefficiency.

In order to achieve the above purpose, the embodiment of the present application adopts the following technical solutions: there is provided a substrate transfer apparatus including a chucking mechanism for supporting and chucking a substrate and a plane moving stage driving the chucking mechanism to move on a plane, the chucking mechanism including:

the supporting bottom plate is arranged on the plane moving table;

the two sets of roller assemblies are respectively arranged on the two opposite sides of the supporting base plate and are used for matching with the two opposite sides of the supporting base plate; and the number of the first and second groups,

and the two sets of clamping assemblies are respectively arranged on the two opposite sides of the supporting base plate and are used for abutting and fixing the two opposite sides of the base plate on the corresponding roller assemblies so as to enable the clamping assemblies and the corresponding roller assemblies to be matched and clamped to fix the side edges of the base plate.

In an optional embodiment, the roller assembly comprises a supporting seat supported on the supporting bottom plate, a plurality of roller seats are arranged on the supporting seat, the plurality of roller seats are arranged at intervals along the length direction of the supporting seat, and a roller is rotatably mounted on each roller seat.

In an alternative embodiment, the scroll wheel assembly further comprises:

the positioning seat is arranged on the supporting bottom plate;

the guide rail assemblies are connected with the positioning seat and the supporting seat and used for guiding the supporting seat to move up and down on the positioning seat; and the number of the first and second groups,

and the lifting pusher is used for pushing the supporting seat to move up and down, and the lifting pusher is arranged on the positioning seat.

In an optional embodiment, the positioning seat is slidably mounted on the supporting base plate, a plurality of sliding grooves for guiding the positioning seat to move are formed in the supporting base plate, and each sliding groove is perpendicular to the length direction of the supporting seat.

In an alternative embodiment, the clamping assembly comprises:

the pressing plate is used for pressing the substrate against the corresponding roller assembly;

a support supporting the pressing plate; and the number of the first and second groups,

and the lifting driver drives the support to move up and down, and the lifting driver is supported on the supporting bottom plate.

In an optional embodiment, the clamping assembly further comprises a baffle plate mounted on the support base plate, the support is slidably supported on the baffle plate, and the lifting driver is mounted on the baffle plate.

In an alternative embodiment, the chucking mechanism further includes a blade for supporting the substrate, the blade being supported on the support base plate.

In an optional embodiment, the supporting plate is provided with a plurality of adsorption holes for adsorbing and fixing the substrate.

In an alternative embodiment, the planar mobile station comprises a transverse moving mechanism for driving the supporting bottom plate to move transversely and a longitudinal moving mechanism for driving the transverse moving mechanism to move longitudinally, the supporting bottom plate is mounted on the transverse moving mechanism, and the transverse moving mechanism is mounted on the longitudinal moving mechanism.

In an optional embodiment, the clamping plate mechanism further comprises a positioning assembly for stopping and positioning the substrate supported on the roller assembly, the positioning assembly comprises a stopper for stopping the substrate, a lifting pusher for driving the stopper to move up and down, and a bracket for supporting the lifting pusher, and the bracket is mounted at one end of the supporting bottom plate.

The beneficial effects of the substrate conveying device that this application embodiment provided lie in: compared with the prior art, this application embodiment base plate conveyer sets up roller components respectively through the both sides at the supporting baseplate, supports the base plate through roller components to reduce the relative supporting baseplate's of base plate focus height, and set up centre gripping subassembly and the fixed base plate of roller components cooperation centre gripping, and then be convenient for the plane moving platform drive plate mechanism steady and accurate removal, and then drive the base plate steady and accurate removal. Need not structures such as motor, conveyer belt, weight is lighter, and the structure is more simplified and light and handy, and it is more steady accurate to drive the base plate and remove.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the embodiments or exemplary technical descriptions will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.

Fig. 1 is a schematic structural diagram of a substrate transfer apparatus according to an embodiment of the present disclosure;

fig. 2 is an exploded view of a substrate transfer apparatus according to an embodiment of the present disclosure;

FIG. 3 is a schematic structural diagram of a clamping mechanism provided in an embodiment of the present application;

FIG. 4 is an exploded view of the clamping mechanism shown in FIG. 3;

FIG. 5 is an enlarged schematic view of the roller assembly and the corresponding clamping assembly of FIG. 3;

FIG. 6 is a schematic structural diagram of a longitudinal movement mechanism according to an embodiment of the present disclosure;

fig. 7 is a schematic structural diagram of a traversing mechanism according to an embodiment of the present application.

Wherein, in the drawings, the reference numerals are mainly as follows:

100-a substrate transport device;

10-a clamping plate mechanism; 11-a support floor; 111-a chute; 12-a roller assembly; 121-a support seat; 1211-roller seat; 122-a roller; 123-positioning seat; 124-a lifting pusher; 125-a rail assembly; 13-a clamping assembly; 131-a press plate; 132-a support; 133-a baffle; 134-a lift drive; 14-a pallet; 141-adsorption holes; 15-a positioning assembly; 151-a stopper; 152-a lifting pusher; 153-sliding seat; 154-a sliding rail; 155-a bracket;

20-a planar mobile station; 21-longitudinal moving mechanism; 211-longitudinal floor; 2111-longitudinal grooves; 212-longitudinal slide rail; 213-longitudinal slide block; 214-a longitudinal movement drive assembly; 2141-longitudinal lead screw; 2142-nut shifting longitudinally; 2143-a rotating base; 2144-a longitudinal movement driving motor; 2145-a longitudinal movement coupler; 22-a traversing mechanism; 221-transverse floor; 2211-transverse slot; 222-transverse slide rail; 223-lateral slide block; 224-a traverse drive assembly; 2241-transverse screw rod; 2242-traversing the nut; 2243-a rotating seat; 2244-a traverse driving motor; 2245-traversing shaft coupling.

Detailed Description

In order to make the technical problems, technical solutions and advantageous effects to be solved by the present application clearer, the present application is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise. The meaning of "a number" is one or more unless specifically limited otherwise.

In the description of the present application, it is to be understood that the terms "center", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present application and for simplicity in description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present application.

In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.

Reference throughout this specification to "one embodiment," "some embodiments," or "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment is included in one or more embodiments of the present application. Thus, appearances of the phrases "in one embodiment," "in some embodiments," "in other embodiments," or the like, in various places throughout this specification are not necessarily all referring to the same embodiment, but rather "one or more but not all embodiments" unless specifically stated otherwise. Furthermore, the particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.

For convenience of description, three coordinate axes which are mutually vertical in space are defined as an X axis, a Y axis and a Z axis respectively, and meanwhile, the direction along the X axis is a longitudinal direction, the direction along the Y axis is a transverse direction, and the direction along the Z axis is a vertical direction; the X axis and the Y axis are two coordinate axes which are vertical to each other on the same horizontal plane, and the Z axis is a coordinate axis in the vertical direction; the X axis, the Y axis and the Z axis are positioned in space and are mutually vertical, and three planes are respectively an XY plane, a YZ plane and an XZ plane, wherein the XY plane is a horizontal plane, the XZ plane and the YZ plane are vertical planes, and the XZ plane is vertical to the YZ plane. Three axes in space are an X axis, a Y axis and a Z axis, and the three-axis movement in space refers to the movement along three axes which are vertical to each other in space, in particular to the movement along the X axis, the Y axis and the Z axis in space; the planar motion is a motion in the XY plane.

Referring to fig. 1 to 3, a substrate transfer apparatus 100 provided in the present application will now be described. The substrate transfer apparatus 100 includes a chucking mechanism 10 and a plane moving stage 20, and the chucking mechanism 10 is used for supporting and chucking a substrate to position and fix the substrate. The clamping mechanism 10 is mounted on the planar moving stage 20, and the planar moving stage 20 drives the clamping mechanism 10 to move on a plane, so as to drive the substrate to move.

The clamping plate mechanism 10 comprises a support base plate 11, two sets of roller assemblies 12 and two sets of clamping assemblies 13. The two sets of roller assemblies 12 are respectively installed on two opposite sides of the supporting base plate 11, the two sets of clamping assemblies 13 correspond to the two sets of roller assemblies 12 one by one, and the two sets of clamping assemblies 13 are respectively installed on two opposite sides of the supporting base plate 11. Two sets of roller assemblies 12 are used to cooperatively support opposite sides of the substrate. The two sets of clamping assemblies 13 are used for pressing and fixing two opposite sides of the substrate onto the corresponding roller assemblies 12, so that each clamping assembly 13 and the corresponding roller assembly 12 are matched to clamp and fix the side edges of the substrate. The support base plate 11 is mounted on the flat surface moving stage 20, and the chucking mechanism 10 is mounted on the flat surface moving stage 20.

In use, a substrate is conveyed to the clamping mechanism 10, and opposite sides of the substrate are respectively supported on the two sets of roller assemblies 12, and the two sets of clamping assemblies 13 press the two sides of the substrate against the corresponding roller assemblies 12 to clamp and fix the substrate. So that the plane moving stage 20 drives the chucking mechanism 10 to move the substrate on the plane.

Because the roller assemblies 12 are used for supporting the substrate, the height of the substrate relative to the supporting bottom plate 11 can be set lower so as to reduce the center of gravity of the substrate, and the clamping assemblies 13 and the roller assemblies 12 are matched for clamping and fixing the substrate, so that the substrate is lighter in weight, simpler and lighter in structure, and the plane moving table 20 can more stably and accurately drive the substrate to move so as to be convenient for the rapid moving and positioning of the substrate.

Compared with the prior art, the substrate conveying device 100 provided by the embodiment of the application is characterized in that the roller assemblies 12 are respectively arranged on two sides of the supporting base plate 11, the substrate is supported through the roller assemblies 12, the gravity height of the substrate relative to the supporting base plate 11 is reduced, the clamping assemblies 13 and the roller assemblies 12 are matched to clamp the fixed substrate, and therefore the plane moving table 20 can drive the clamping plate mechanism 10 to stably and accurately move, and the substrate is driven to stably and accurately move. Need not structures such as motor, conveyer belt, weight is lighter, and the structure is more simplified and light and handy, and it is more steady accurate to drive the base plate and remove. When the substrate conveying device 100 is applied to a die bonder, the platform moving table can drive the substrate to be accurately aligned with the die bonder head, so that the die bonder efficiency can be improved.

In one embodiment, referring to fig. 3 to 5, the roller assembly 12 includes a supporting base 121 and a plurality of rollers 122, the plurality of rollers 122 are respectively mounted on the supporting base 121, the supporting base 121 is provided with a plurality of roller seats 1211 for supporting the rollers 122, and the supporting base 121 is supported on the supporting base 11, so as to support the plurality of rollers 122 on the supporting base 11. The roller holders 1211 are spaced along the length direction of the support base 121, and the rollers 122 are rotatably mounted on the roller holders 1211, so that the rollers 122 are arranged on the support base 121 in a row to better support the side of the substrate. The roller mount 1211 is disposed on the support base 121 to support the rollers 122, so that the structure is simple and the assembly is convenient, and the installation support base 121 is installed on the support base 11 to support the rollers 122 on the support base 11, so that the installation is convenient.

In one embodiment, the roller assembly 12 further includes a positioning seat 123, a plurality of rail assemblies 125 and a lifting pusher 124, each rail assembly 125 connects the positioning seat 123 and the supporting seat 121, the rail assemblies 125 are used for guiding the supporting seat 121 to move up and down on the positioning seat 123, and the plurality of rail assemblies 125 are provided to more stably guide the supporting seat 121 to move up and down on the positioning seat 123. The lifting pusher 124 is installed on the positioning seat 123, and the lifting pusher 124 is used for pushing the supporting seat 121 to move up and down. The positioning seat 123 is installed on the supporting base plate 11. The positioning seat 123 is driven by the lifting pusher 124 to move up and down, so as to drive the rollers 122 to move up and down, so as to cooperate with the clamping assembly 13 to clamp the substrate, thereby ensuring more stable clamping of the substrate.

In one embodiment, the lifting pusher 124 is a pneumatic cylinder, which is small, light and easy to control. It is understood that the lift pusher 124 may also be a linear module such as a linear motor.

In one embodiment, the lifting pusher 124 is provided in plural to cooperate with the pushing support base 121 to lift, so that the lifting pusher 124 with smaller volume can be used to reduce the thickness of the chucking mechanism 10, and further lower the height of the substrate, so as to lower the height of the center of gravity of the substrate.

In one embodiment, the rail assembly 125 may be a sliding rail slider assembly. Of course, the rail assembly 125 may also be a cross rail, or the like.

In one embodiment, the positioning seat 123 is slidably mounted on the supporting base plate 11, the supporting base plate 11 is provided with a plurality of sliding grooves 111, the sliding grooves 111 are used for guiding the positioning seat 123 to move on the supporting base plate 11, and each sliding groove 111 is perpendicular to the length direction of the supporting seat 121, so that the position of the positioning seat 123 on the supporting base plate 11 can be adjusted, and further the distance between the two roller assemblies 12 can be adjusted to adapt to substrates with different sizes.

In one embodiment, the clamp assembly 13 includes a pressure plate 131, a support 132, and a lift drive 134. The pressing plate 131 is used to press the substrate against the corresponding roller assembly 12. The holder 132 supports the pressure plate 131, that is, the pressure plate 131 is mounted on the holder 132, and the pressure plate 131 is supported by the holder 132. The elevating driver 134 is supported on the support base 11. The lifting driver 134 drives the support 132 to move up and down to drive the pressing plate 131 to move up and down, so that the lifting driver 134 drives the pressing plate 131 to ascend to supply the substrate onto the roller assembly 12 or take out the substrate from the roller assembly 12 when the pressing plate is away from the corresponding roller assembly 12; after the substrates are supplied to the roller assemblies 12, the lifting driver 134 drives the pressing plate 131 to descend, so that the side edges of the substrates are pressed against the corresponding roller assemblies 12 to fix the substrates.

In one embodiment, the lifting actuator 134 is a pneumatic cylinder, which is small, light and easy to control. It is understood that the lift drive 134 may also be a linear module such as a linear motor.

In one embodiment, the lifting driver 134 is provided in plurality to cooperate with the pushing support base 121 to lift, so that the lifting driver 134 with smaller volume can be used to reduce the thickness of the clamping plate mechanism 10, and further reduce the height of the substrate, so as to reduce the height of the center of gravity of the substrate.

In one embodiment, the plurality of pressing plates 131 is provided, and the plurality of pressing plates 131 are spaced to press the substrate. By providing a plurality of pressing plates 131, each pressing plate 131 can be made smaller, thereby reducing the weight and increasing the coverage area.

In one embodiment, each pressure plate 131 is provided in a U-shape for mounting and fixing.

In one embodiment, the clamping assembly 13 further includes a blocking plate 133, the blocking plate 133 is mounted on the supporting base plate 11, the support 132 is slidably supported on the blocking plate 133, and the lifting driver 134 is mounted on the blocking plate 133. The baffle 133 is arranged to support the lifting driver 134 and the support 132, and can guide the support 132 to move up and down, and the baffle 133 is installed on the support base plate 11, so that the clamping assembly 13 can be installed on the support base plate 11, and the assembly is convenient.

In one embodiment, when the positioning seat 123 is slidably mounted on the supporting base plate 11, the baffle 133 is also slidably mounted on the supporting base plate 11, and the sliding groove 111 is also used for guiding the baffle 133 to move on the supporting base plate 11, so that the positions of the positioning seat 123 and the corresponding baffle 133 on the supporting base plate 11 can be adjusted, and further, the distance between the two roller assemblies 12 and the distance between the two clamping assemblies 13 can be adjusted to adapt to substrates with different sizes.

In one embodiment, referring to fig. 1 and 2, the clamping mechanism 10 further includes a pallet 14, the pallet 14 being supported on the support base 11, the pallet 14 being configured to support a substrate. The carrier plate 14 is provided so that the carrier plate 14 can drag the substrate when both sides of the substrate are supported on the roller assemblies 12 to more stably support the substrate and can facilitate die bonding onto the substrate.

In one embodiment, the supporting plate 14 is provided with a plurality of suction holes 141, and the supporting plate 14 is provided with the suction holes 141, so that when the substrate is supported on the supporting plate 14, the substrate can be sucked and fixed through the suction holes 141, thereby more stably driving the substrate to move and accurately positioning the substrate.

In one embodiment, the two opposite sides of the pallet 14 may be supported on two positioning bases 123 for better level alignment with the rollers 122 for stable support of the substrate.

In one embodiment, referring to fig. 2 to 4, the clamping mechanism 10 further includes a positioning assembly 15, the positioning assembly 15 is used for stopping the substrate supported on the roller assemblies 12, that is, when the substrate is transferred to the two sets of roller assemblies 12 of the clamping mechanism 10, the positioning assembly 15 stops the substrate to position the substrate on the roller assemblies 12.

In one embodiment, the positioning assembly 15 includes a stopper 151, a lifting pusher 152, and a bracket 155, the lifting pusher 152 is mounted on the bracket 155 to support the lifting pusher 152 via the bracket 155, the stopper 151 is connected to the lifting pusher 152, and the lifting pusher 152 drives the stopper 151 to move up and down, so that when the stopper 151 is lifted up, the substrate can be stopped and positioned, and when the stopper 151 is lowered, the substrate can be moved from above the stopper 151 to be removed from the roller assembly 12. The bracket 155 is installed at one end of the support base 11 to mount the positioning assembly 15 at one end of the support base 11.

In one embodiment, the lifting pusher 152 is a pneumatic cylinder, which is small, light and easy to control. It is understood that the lifting pusher 152 may also be a linear module such as a linear motor.

In one embodiment, the positioning assembly 15 further includes a sliding rail 154 and a sliding seat 153, the sliding rail 154 is vertically disposed, the sliding rail 154 is mounted on the bracket 155, the sliding seat 153 is slidably mounted on the sliding rail 154, the stopper 151 is mounted on the sliding seat 153, and the lifting pusher 152 is connected to the sliding seat 153, and the lifting pusher 152 pushes the sliding seat 153 to lift to drive the stopper 151 to move up and down. The sliding rail 154 and the sliding seat 153 are provided to facilitate supporting the stopper 151 and to facilitate guiding the stopper 151 to be smoothly lifted.

In one embodiment, the plane moving stage 20 includes a traverse mechanism 22 and a longitudinal moving mechanism 21, the support base plate 11 is mounted on the traverse mechanism 22, and the traverse mechanism 22 is mounted on the longitudinal moving mechanism 21. So that the support base plate 11 is driven to move transversely by the transverse moving mechanism 22, and the substrate is driven to move transversely. The longitudinal moving mechanism 21 drives the transverse moving mechanism 22 to move longitudinally, so as to drive the clamping plate mechanism 10 and the substrate to move longitudinally, and the transverse moving mechanism 22 and the longitudinal moving mechanism 21 are arranged to realize the matching driving of the substrate to move in two directions which are perpendicular to each other on a plane, so as to drive the substrate to move on the plane.

In one embodiment, referring to fig. 1, fig. 2 and fig. 6, the longitudinal moving mechanism 21 includes a longitudinal base plate 211, a plurality of longitudinal sliding rails 212, a plurality of longitudinal sliding blocks 213 and a longitudinal moving driving assembly 214, wherein the longitudinal base plate 211 is disposed along a longitudinal direction. The plurality of longitudinal sliding rails 212 are disposed in parallel on the longitudinal base plate 211, and each longitudinal sliding rail 212 extends in a longitudinal direction. Each longitudinal slide rail 212 is provided with a longitudinal slide block 213, and each longitudinal slide block 213 is connected with the transverse moving mechanism 22 so as to support the transverse moving mechanism 22 through the cooperation of a plurality of longitudinal slide blocks 213 and guide the transverse moving mechanism 22 to move smoothly along the longitudinal direction. A longitudinal movement drive assembly 214 is mounted on the longitudinal base plate 211 and the longitudinal movement drive assembly 214 is connected to the traverse mechanism 22 to drive the traverse mechanism 22 to move in the longitudinal direction.

In one embodiment, the longitudinal base plate 211 defines a longitudinal slot 2111, and the longitudinal driving assembly 214 is installed in the longitudinal slot 2111 to reduce the thickness of the longitudinal moving mechanism 21, so as to reduce the height of the substrate and to more stably drive the transverse moving mechanism 22 and the substrate to move longitudinally.

In one embodiment, the vertical movement driving assembly 214 includes a vertical movement nut 2142, a vertical movement lead screw 2141, two rotation bases 2143, a vertical movement driving motor 2144 and a vertical movement coupler 2145, the two rotation bases 2143 are mounted on the vertical base plate 211, the two rotation bases 2143 rotatably support the vertical movement lead screw 2141, the vertical movement lead screw 2141 is disposed along the vertical direction, the vertical movement nut 2142 is mounted on the vertical movement lead screw 2141, the vertical movement lead screw 2141 is connected with the vertical movement driving motor 2144 through the vertical movement coupler 2145, so that the vertical movement driving motor 2144 drives the vertical movement lead screw 2141 to rotate so as to drive the vertical movement nut 2142 to move vertically, the vertical movement nut 2142 is connected with the horizontal movement mechanism 22 so as to drive the horizontal movement mechanism 22 to move vertically, the driving force of the structure is large, and the horizontal movement mechanism 22 and the substrate can be stably supported and pushed to move. It is understood that the longitudinal movement driving component 214 may also use a linear module such as a linear motor.

In one embodiment, referring to fig. 1, 2 and 7, the traverse mechanism 22 includes a traverse base 221, a plurality of traverse rails 222, a plurality of traverse sliders 223 and a traverse driving assembly 224, wherein the length direction of the traverse base 221 is arranged along the transverse direction. The plurality of lateral sliding rails 222 are disposed in parallel on the lateral base plate 221, and each lateral sliding rail 222 extends along the lateral direction. Each transverse slide rail 222 is provided with a transverse slide block 223, and each transverse slide block 223 is connected with the transverse moving mechanism 22 so as to support the transverse moving mechanism 22 through the cooperation of a plurality of transverse slide blocks 223 and guide the transverse moving mechanism 22 to move stably along the transverse direction. The traverse driving assembly 224 is installed on the lateral base plate 221, and the traverse driving assembly 224 is connected to the support base plate 11 to drive the support base plate 11 to move in the lateral direction.

In one embodiment, the transverse bottom plate 221 is formed with a transverse slot 2211, and the traverse driving assembly 224 is installed in the transverse slot 2211 to reduce the thickness of the traverse mechanism 22, so as to reduce the height of the substrate, thereby driving the clamping mechanism 10 and the substrate to move transversely more stably.

In one embodiment, the traverse driving assembly 224 includes a traverse nut 2242, a traverse screw 2241, two rotating seats 2243, a traverse driving motor 2244 and a traverse coupling 2245, two rotating seats 2243 are installed on the traverse base 221, two rotating seats 2243 rotatably support the traverse screw 2241, the traverse screw 2241 is disposed in the transverse direction, the traverse nut 2242 is installed on the traverse screw 2241, the traverse screw 2241 is connected with the traverse driving motor 2244 through the traverse coupling 2245, so that the traverse driving motor 2244 drives the traverse screw 2241 to rotate, to drive the traverse nut 2242 to move transversely, the traverse nut 2242 is connected with the support base 11, and further, the clamp mechanism 10 is driven to move transversely. It will be appreciated that linear modules such as linear motors may be used for the traverse drive assembly 224.

The above description is only exemplary of the present application and should not be taken as limiting the present application, as any modification, equivalent replacement, or improvement made within the spirit and principle of the present application should be included in the protection scope of the present application.

Claims (10)

1. A substrate transfer apparatus comprising a chucking mechanism for supporting and holding a substrate and a plane moving stage for driving the chucking mechanism to move on a plane, characterized in that the chucking mechanism comprises:

the supporting bottom plate is arranged on the plane moving table;

the two sets of roller assemblies are respectively arranged on the two opposite sides of the supporting base plate and are used for matching with the two opposite sides of the supporting base plate; and the number of the first and second groups,

and the two sets of clamping assemblies are respectively arranged on the two opposite sides of the supporting base plate and are used for abutting and fixing the two opposite sides of the base plate on the corresponding roller assemblies so as to enable the clamping assemblies and the corresponding roller assemblies to be matched and clamped to fix the side edges of the base plate.

2. The substrate transport apparatus according to claim 1, wherein: the roller assembly comprises a supporting seat supported on the supporting bottom plate, a plurality of roller seats are arranged on the supporting seat, the plurality of roller seats are arranged along the length direction of the supporting seat in a clearance mode, and rollers are rotatably arranged on the roller seats.

3. The substrate transport apparatus of claim 2, wherein the roller assembly further comprises:

the positioning seat is arranged on the supporting bottom plate;

the guide rail assemblies are connected with the positioning seat and the supporting seat and used for guiding the supporting seat to move up and down on the positioning seat; and the number of the first and second groups,

and the lifting pusher is used for pushing the supporting seat to move up and down, and the lifting pusher is arranged on the positioning seat.

4. The substrate transport apparatus according to claim 3, wherein: the positioning seats are slidably mounted on the supporting base plate, a plurality of sliding grooves for guiding the positioning seats to move are formed in the supporting base plate, and each sliding groove is perpendicular to the length direction of the supporting seat.

5. The substrate transport apparatus of claim 1, wherein the clamping assembly comprises:

the pressing plate is used for pressing the substrate against the corresponding roller assembly;

a support supporting the pressing plate; and the number of the first and second groups,

and the lifting driver drives the support to move up and down, and the lifting driver is supported on the supporting bottom plate.

6. The substrate transport apparatus according to claim 5, wherein: the clamping assembly further comprises a baffle plate arranged on the supporting base plate, the support is slidably supported on the baffle plate, and the lifting driver is arranged on the baffle plate.

7. The substrate transport apparatus according to any one of claims 1 to 6, wherein: the clamping plate mechanism further comprises a supporting plate for supporting the base plate, and the supporting plate is supported on the supporting bottom plate.

8. The substrate transport apparatus according to claim 7, wherein: the supporting plate is provided with a plurality of adsorption holes for adsorbing and fixing the substrate.

9. The substrate transport apparatus according to any one of claims 1 to 6, wherein: the plane moving platform comprises a transverse moving mechanism for driving the supporting bottom plate to transversely move and a longitudinal moving mechanism for driving the transverse moving mechanism to longitudinally move, the supporting bottom plate is installed on the transverse moving mechanism, and the transverse moving mechanism is installed on the longitudinal moving mechanism.

10. The substrate transport apparatus according to any one of claims 1 to 6, wherein: the clamping plate mechanism further comprises a positioning assembly used for stopping the base plate which is positioned and supported on the roller assembly, the positioning assembly comprises a stop block used for stopping the base plate, a lifting pusher used for driving the stop block to move up and down and a support used for supporting the lifting pusher, and the support is installed at one end of the supporting base plate.

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