CN216563009U - Magnetic enhancement Faraday shielding structure - Google Patents
Magnetic enhancement Faraday shielding structure Download PDFInfo
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- CN216563009U CN216563009U CN202122079832.5U CN202122079832U CN216563009U CN 216563009 U CN216563009 U CN 216563009U CN 202122079832 U CN202122079832 U CN 202122079832U CN 216563009 U CN216563009 U CN 216563009U
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- shielding layer
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- pipe
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- 239000004020 conductor Substances 0.000 claims abstract description 17
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 30
- 238000003860 storage Methods 0.000 claims description 21
- 230000006698 induction Effects 0.000 abstract description 7
- 230000008878 coupling Effects 0.000 abstract description 6
- 238000010168 coupling process Methods 0.000 abstract description 6
- 238000005859 coupling reaction Methods 0.000 abstract description 6
- 230000007797 corrosion Effects 0.000 abstract description 4
- 238000005260 corrosion Methods 0.000 abstract description 4
- 238000004544 sputter deposition Methods 0.000 abstract description 4
- 239000000126 substance Substances 0.000 abstract description 4
- 239000004065 semiconductor Substances 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 230000009467 reduction Effects 0.000 abstract description 2
- 238000009616 inductively coupled plasma Methods 0.000 description 7
- 239000000110 cooling liquid Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000005530 etching Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 230000007935 neutral effect Effects 0.000 description 3
- 230000003068 static effect Effects 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 2
- 238000000427 thin-film deposition Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Abstract
The utility model relates to the field of semiconductor manufacturing equipment, in particular to a magnetic enhanced Faraday shielding structure, which comprises a first fixing plate, the surface of one side of the first fixing plate is fixedly connected with a first shell, an outer conductor is arranged in the first shell, an inner conductor is arranged in the outer conductor, a flange pipe is fixedly connected with the surface of one side of the first shell, one end of the flange pipe is fixedly connected with a third fixing plate, one side surface of the third fixing plate is fixedly connected with a second shell, an outer shielding layer is fixedly arranged in the second shell, first gaps are arranged on the surface of the outer shielding layer at equal intervals, by the permanent magnet, the magnetic enhanced Faraday shielding structure can weaken the sputtering and chemical corrosion of a medium window caused by the voltage of the induction coupling coil through the shielding layer, and the magnetic element can compensate the reduction of the power coupling efficiency of the induction coupling coil caused by the shielding layer.
Description
Technical Field
The utility model relates to the field of semiconductor manufacturing equipment, in particular to a magnetic enhanced Faraday shielding structure.
Background
In the semiconductor field, plasma processing techniques are mainly used for etching or deposition processes. Plasma sources can be classified into a capacitively coupled plasma source (CCP), an inductively coupled plasma source (ICP) and a microwave plasma source (MP) according to the generation manner. The CCP source breaks down gas by voltage applied between the electrode plates to generate plasma, and the working gas pressure is higher than that of the ICP source, so that the CCP source has the advantages of large area uniformity and the like, and is generally used for a thin film deposition process; the ICP source can work in a lower air pressure range and has higher plasma density by exciting gas through a high-frequency electromagnetic field generated by a coil by high-frequency current, and simultaneously, a bias voltage source is applied to control ion energy, so the ICP source is usually used for an etching process; the MP source is generated by mechanisms such as electron cyclotron resonance or surface wave heating, has low working pressure and high electron density, can obtain low electron temperature, has the advantages of low damage and the like, and is commonly used for thin film deposition or etching process with low damage requirement. Among the three plasma sources, the ICP source has the advantages of high plasma density, adjustable energy, low cost and the like, and is widely applied to the etching process.
1. For an ICP source, high frequency current and high frequency voltage exist on the surface of the coil, and the voltage exists, so that ions are attracted to the position of the medium window projected by the coil to bombard the inner surface of the medium window, and physical sputtering and accelerated chemical corrosion of the medium window material are caused. The aggravation of the physical sputtering and the chemical corrosion is a fatal defect for the etching process, on one hand, the existence of the sputtering phenomenon increases the particle number and deteriorates the product yield; on the other hand, the service life of the dielectric window is shortened.
2. The structure of the existing flange second shielding structure is unstable, and the effect of the shielding structure can be reduced under the condition of higher temperature.
There is therefore a need for a magnetically enhanced faraday shield structure that ameliorates the above-mentioned problems.
SUMMERY OF THE UTILITY MODEL
The present invention is directed to a magnetically enhanced faraday shield structure to solve the above-mentioned problems of the prior art.
In order to achieve the purpose, the utility model provides the following technical scheme:
a magnetic enhanced Faraday shielding structure comprises a first fixing plate, wherein a first shell is fixedly connected to one side surface of the first fixing plate, an outer conductor is arranged in the first shell, an inner conductor is arranged in the outer conductor, a flange pipe is fixedly connected to one side surface of the first shell, a third fixing plate is fixedly connected to one end of the flange pipe, a second shell is fixedly connected to one side surface of the third fixing plate, an outer shielding layer is fixedly arranged in the second shell, first gaps are formed in the surface of the outer shielding layer at equal intervals, an inner shielding layer is fixedly arranged on the inner side of the outer shielding layer, second gaps are formed in the surface of the inner shielding layer at equal intervals, permanent magnets are fixedly connected between the outer shielding layer and the inner shielding layer at equal intervals, a second fixing plate is fixedly connected to the other end of the flange pipe, an annular water storage tank is fixedly connected to one side surface of the second fixing plate, the annular water storage tank is internally and fixedly provided with a condenser, the upper side of the surface of one side outside the annular water storage tank is fixedly connected with a first connecting pipe, the lower side of the surface of one side outside the annular water storage tank is fixedly connected with a second connecting pipe, and a circulating water pump is fixedly arranged on the second connecting pipe.
As a preferable scheme of the present invention, one end of each of the first connecting pipe and the second connecting pipe is fixedly connected with an annular shunt pipe, a diversion cold-conducting pipe is fixedly connected to a surface of one side of the annular shunt pipe at equal intervals, the diversion cold-conducting pipe penetrates through the third fixing plate, a section of the diversion cold-conducting pipe is fixedly connected to a surface of one side inside the second housing, and a cold-conducting plate is fixedly arranged between the diversion cold-conducting pipe and the outer shielding layer.
As a preferable scheme of the present invention, a first screw hole is formed in a side surface of the first housing, a second screw hole is formed in a side surface of the second fixing plate, a bolt head groove is formed in one side of the second screw hole, the first screw hole and the second screw hole are arranged in a position corresponding to each other, the first housing and the second fixing plate are fixedly connected by a fixing bolt, and the fixing bolt head is located in the bolt head groove.
As a preferable aspect of the present invention, the fixing bolt is threadedly coupled to the first screw hole and the second screw hole, respectively.
In a preferred embodiment of the present invention, the first slit on the surface of the inner shield layer is provided corresponding to the second slit on the surface of the inner shield layer.
As a preferable aspect of the present invention, the first slit on the surface of the inner shield layer, the second slit on the surface of the inner shield layer, and the permanent magnet are provided at intervals.
Compared with the prior art, the utility model has the beneficial effects that:
1. according to the utility model, the fixed bolt is rotated to enter the first screw hole on the surface of the first shell and the second screw hole on the surface of the second fixed plate through the arranged permanent magnet until the bolt head of the fixed bolt completely enters the bolt head groove on the surface of the second fixed plate, the Faraday shielding structure is further arranged on the surface of one side of the first shell, equipment is started to work, the permanent magnet can generate a static magnetic field, the permanent magnet can restrain electrons in plasma and enable the electrons to do Raymond movement (spiral movement) along the direction of a magnetic induction line, the movement enables the movement path of the electrons in the plasma to be increased, the collision frequency of the electrons and neutral gas is increased, the collision effect of the electrons and gas molecules is enhanced, the plasma density is finally improved, and the magnetic enhancement Faraday shielding structure can weaken dielectric window and chemical corrosion caused by the voltage of an induction coupling coil through the shielding layer, and the magnetic element can compensate the reduction of the power coupling efficiency of the induction coupling coil caused by the shielding layer.
2. According to the Faraday shield structure, the condenser and the cold guide plate are arranged, the condenser is started to work to cool the cooling liquid in the annular water storage tank, the circulating water pump is started again to enable the cooled cooling liquid to enter the annular flow dividing pipe and the flow dividing cold guide pipe through the second connecting pipe, cold is guided through the cold guide plate, heat exchange is further conducted on the Faraday shield structure, and the Faraday shield structure is further enabled to be more stable.
Drawings
FIG. 1 is a perspective view of the present invention;
FIG. 2 is a schematic cross-sectional view of the present invention;
FIG. 3 is a schematic side sectional view of the present invention;
fig. 4 is a schematic side sectional view of the annular water storage tank of the present invention.
In the figure: 1. a first fixing plate; 2. a first housing; 3. a second fixing plate; 4. an annular water storage tank; 5. a third fixing plate; 6. a second housing; 7. a flange pipe; 8. an outer conductor; 9. an inner conductor; 10. a first screw hole; 11. a second screw hole; 12. a first connecting pipe; 13. a diversion cooling duct; 14. a cold conducting plate; 15. an outer shield layer; 16. a permanent magnet; 17. an inner shield layer; 18. an annular shunt tube; 19. a water circulating pump; 20. fixing the bolt; 21. a bolt head groove; 22. a condenser; 23. a second connecting pipe; 24. a first slit; 25. a second slit.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, rather than all embodiments, and all other embodiments obtained by a person of ordinary skill in the art without any creative work based on the embodiments of the present invention belong to the protection scope of the present invention.
To facilitate an understanding of the utility model, the utility model will now be described more fully with reference to the accompanying drawings. Several embodiments of the utility model are presented. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the utility model herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the utility model. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
Referring to fig. 1-4, the present invention provides a technical solution:
embodiment 1, please refer to fig. 1, 2, 3 and 4, a magnetic enhanced faraday shielding structure, comprising a first fixing plate 1, a first housing 2 fixedly connected to one side surface of the first fixing plate 1, an outer conductor 8 disposed inside the first housing 2, an inner conductor 9 disposed inside the outer conductor 8, a flange tube 7 fixedly connected to one side surface of the first housing 2, a third fixing plate 5 fixedly connected to one end of the flange tube 7, a second housing 6 fixedly connected to one side surface of the third fixing plate 5, an outer shielding layer 15 fixedly disposed inside the second housing 6, first slits 24 equidistantly disposed on the surface of the outer shielding layer 15, an inner shielding layer 17 fixedly disposed inside the outer shielding layer 15, second slits 25 equidistantly disposed on the surface of the inner shielding layer 17, permanent magnets 16 fixedly connected between the outer shielding layer 15 and the inner shielding layer 17, and a second fixing plate 3 fixedly connected to the other end of the flange tube 7, an annular water storage tank 4 is fixedly connected to one side surface of the second fixing plate 3, a condenser 22 is fixedly arranged inside the annular water storage tank 4, a first connecting pipe 12 is fixedly connected to the upper side of one side surface outside the annular water storage tank 4, a second connecting pipe 23 is fixedly connected to the lower side of one side surface outside the annular water storage tank 4, and a circulating water pump 19 is fixedly arranged on the second connecting pipe 23; when the device is started to work, the permanent magnet 16 can generate a static magnetic field, the permanent magnet 16 can restrain electrons in the plasma to make the electrons do Raymond movement (spiral movement) along the direction of the magnetic induction line, the movement increases the movement path of the electrons in the plasma, the collision frequency of the electrons and neutral gas is increased, the collision effect of the electrons and gas molecules is enhanced, and the plasma density is finally improved.
Embodiment 2, please refer to fig. 1, 2, 3 and 4, a magnetic enhanced faraday shielding structure, comprising a first fixing plate 1, a first housing 2 fixedly connected to one side surface of the first fixing plate 1, an outer conductor 8 disposed inside the first housing 2, an inner conductor 9 disposed inside the outer conductor 8, a flange tube 7 fixedly connected to one side surface of the first housing 2, a third fixing plate 5 fixedly connected to one end of the flange tube 7, a second housing 6 fixedly connected to one side surface of the third fixing plate 5, an outer shielding layer 15 fixedly disposed inside the second housing 6, first slits 24 equidistantly disposed on the surface of the outer shielding layer 15, an inner shielding layer 17 fixedly disposed inside the outer shielding layer 15, second slits 25 equidistantly disposed on the surface of the inner shielding layer 17, permanent magnets 16 fixedly connected between the outer shielding layer 15 and the inner shielding layer 17, and a second fixing plate 3 fixedly connected to the other end of the flange tube 7, an annular water storage tank 4 is fixedly connected to one side surface of the second fixing plate 3, a condenser 22 is fixedly arranged inside the annular water storage tank 4, a first connecting pipe 12 is fixedly connected to the upper side of one side surface outside the annular water storage tank 4, a second connecting pipe 23 is fixedly connected to the lower side of one side surface outside the annular water storage tank 4, and a circulating water pump 19 is fixedly arranged on the second connecting pipe 23; one end of each of the first connecting pipe 12 and the second connecting pipe 23 is fixedly connected with an annular shunt pipe 18, the surface of one side of each annular shunt pipe 18 is fixedly connected with a diversion cold-conducting pipe 13 at equal intervals, each diversion cold-conducting pipe 13 penetrates through the third fixing plate 5, one section of each diversion cold-conducting pipe 13 is fixedly connected with the surface of one side inside the second shell 6, and a cold-conducting plate 14 is fixedly arranged between each diversion cold-conducting pipe 13 and the outer shielding layer 15; the condenser 22 is started to work to cool the cooling liquid in the annular water storage tank 4, the circulating water pump 19 is started again to enable the cooled cooling liquid to enter the annular shunt pipe 18 and the shunt cold guide pipe 13 through the second connecting pipe 23, cold is guided through the cold guide plate 14, heat exchange is further conducted on the Faraday shielding structure, and the Faraday shielding structure is further enabled to be more stable.
In embodiment 3, referring to fig. 1, 2, 3, and 4, a first screw hole 10 is formed in a side surface of a first housing 2, a second screw hole 11 is formed in a side surface of a second fixing plate 3, a bolt head groove 21 is formed in one side of the second screw hole 11, the first screw hole 10 and the second screw hole 11 are correspondingly arranged, the first housing 2 and the second fixing plate 3 are fixedly connected by a fixing bolt 20, and the fixing bolt 20 is located in the bolt head groove 21; the fixing bolt 20 is respectively in threaded connection with the first screw hole 10 and the second screw hole 11; the first gap 24 on the surface of the inner shielding layer 17 and the second gap 25 on the surface of the inner shielding layer 17 are correspondingly arranged; the first gap 24 on the surface of the inner shielding layer 17, the second gap 25 on the surface of the inner shielding layer 17 and the permanent magnet 16 are arranged at intervals.
The working principle is as follows: when the device is used, the fixing bolt 20 is rotated into the first screw hole 10 on the surface of the first shell 2 and the second screw hole 11 on the surface of the second fixing plate 3 until the bolt head of the fixing bolt 20 completely enters the bolt head groove 21 on the surface of the second fixing plate 3, the Faraday shielding structure is further installed on one side surface of the first shell 2, the device is started to work, the permanent magnet 16 can generate a static magnetic field, the permanent magnet 16 can restrain electrons in plasma and make the electrons do Lambda movement (spiral movement) along the direction of a magnetic induction line, the movement enables the movement path of the electrons in the plasma to be increased, the collision frequency of the electrons and neutral gas is increased, the collision effect of the electrons and gas molecules is enhanced, the plasma density is finally improved, the condenser 22 is started to work to cool the cooling liquid in the annular water storage tank 4, and the circulating water pump 19 is started again to enable the cooled cooling liquid to enter the annular shunt pipe 18 and the shunt cold conducting pipe 13 through the second connecting pipe 23 And then the cold is conducted through the cold conducting plate 14, so that the heat exchange is further carried out on the Faraday shielding structure, and the Faraday shielding structure is further stable.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. A magnetically enhanced faraday shield structure comprising a first fixed plate (1), characterized in that: the surface of one side of the first fixing plate (1) is fixedly connected with a first shell (2), an outer conductor (8) is arranged inside the first shell (2), an inner conductor (9) is arranged inside the outer conductor (8), a flange pipe (7) is fixedly connected to one side of the first shell (2), one end of the flange pipe (7) is fixedly connected with a third fixing plate (5), one side of the third fixing plate (5) is fixedly connected with a second shell (6), an outer shielding layer (15) is fixedly arranged inside the second shell (6), first gaps (24) are formed in the surface of the outer shielding layer (15) at equal intervals, an inner shielding layer (17) is fixedly arranged on the inner side of the outer shielding layer (15), second gaps (25) are formed in the surface of the inner shielding layer (17) at equal intervals, and permanent magnets (16) are fixedly connected between the outer shielding layer (15) and the inner shielding layer (17) at equal intervals, the improved water-saving water tank is characterized in that a second fixing plate (3) is fixedly connected to the other end of the flange pipe (7), an annular water storage tank (4) is fixedly connected to one side surface of the second fixing plate (3), a condenser (22) is fixedly arranged inside the annular water storage tank (4), a first connecting pipe (12) is fixedly connected to the upper side of the outer side surface of the annular water storage tank (4), a second connecting pipe (23) is fixedly connected to the lower side of the outer side surface of the annular water storage tank (4), and a circulating water pump (19) is fixedly arranged on the second connecting pipe (23).
2. A magnetically enhanced faraday shield structure according to claim 1, wherein: the equal fixedly connected with annular shunt tubes (18) of one end of first connecting pipe (12) and second connecting pipe (23), equidistant fixedly connected with reposition of redundant personnel cold-conducting pipe (13) of annular shunt tubes (18) side surface, reposition of redundant personnel cold-conducting pipe (13) run through third fixed plate (5), reposition of redundant personnel cold-conducting pipe (13) one section and second casing (6) inside one side fixed surface are connected, it leads cold plate (14) to fixedly be equipped with between reposition of redundant personnel cold-conducting pipe (13) and outer shielding layer (15).
3. A magnetically enhanced faraday shield structure according to claim 1, wherein: first screw (10) have been seted up to first casing (2) side surface, second screw (11) have been seted up to second fixed plate (3) side surface, bolt head recess (21) have been seted up to second screw (11) one side, first screw (10) correspond the setting with second screw (11) position, through fixing bolt (20) fixed connection between first casing (2) and second fixed plate (3), fixing bolt (20) head is located bolt head recess (21).
4. A magnetically enhanced faraday shield structure according to claim 3, wherein: the fixing bolt (20) is in threaded connection with the first screw hole (10) and the second screw hole (11) respectively.
5. A magnetically enhanced faraday shield structure according to claim 1, wherein: and a first gap (24) on the surface of the inner shielding layer (17) and a second gap (25) on the surface of the inner shielding layer (17) are correspondingly arranged.
6. A magnetically enhanced faraday shield structure according to claim 1, wherein: and a first gap (24) on the surface of the inner shielding layer (17), a second gap (25) on the surface of the inner shielding layer (17) and the permanent magnet (16) are arranged at intervals.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122079832.5U CN216563009U (en) | 2021-08-31 | 2021-08-31 | Magnetic enhancement Faraday shielding structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122079832.5U CN216563009U (en) | 2021-08-31 | 2021-08-31 | Magnetic enhancement Faraday shielding structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216563009U true CN216563009U (en) | 2022-05-17 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122079832.5U Active CN216563009U (en) | 2021-08-31 | 2021-08-31 | Magnetic enhancement Faraday shielding structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216563009U (en) |
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2021
- 2021-08-31 CN CN202122079832.5U patent/CN216563009U/en active Active
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Denomination of utility model: A magnetic enhanced Faraday shielding structure Effective date of registration: 20231116 Granted publication date: 20220517 Pledgee: Bank of Nanjing Co.,Ltd. Jiangning sub branch Pledgor: FTSE Seiko (Nanjing) Co.,Ltd. Registration number: Y2023980065509 |