CN216477859U

CN216477859U - Water cooling structure for joint of main pump and backing pump

Info

Publication number: CN216477859U
Application number: CN202123389549.9U
Authority: CN
Inventors: 沈文武; 杨胜勇; 周贤忠; 谌绍飞
Original assignee: Sichuan Leicester Vacuum Technology Co ltd
Current assignee: Sichuan Leicester Vacuum Technology Co ltd
Priority date: 2021-12-30
Filing date: 2021-12-30
Publication date: 2022-05-10
Anticipated expiration: 2031-12-30

Abstract

The utility model provides a main pump and backing pump junction water-cooling structure relates to the vacuum pump field. This main pump and backing pump junction water-cooling structure includes the connecting piece, cooling plate and cooling tube, the connecting piece is used for connecting respectively in main pump and backing pump, the cooling plate sets up in the connecting piece, the cooling tube is worn to locate the cooling plate, the one end of cooling tube is used for being connected with the water inlet of vacuum pump, the other end is used for being connected with the outlet of vacuum pump, set up cooling structure through main pump and backing pump junction, be about to the cooling plate and install on the connecting piece, lead to into water in the cooling tube of wearing to locate the cooling plate, with reduce the gas temperature in the connecting piece, reduce the corruption of corrosive gas to spare part.

Description

Water cooling structure for joint of main pump and backing pump

Technical Field

The utility model relates to a vacuum pump field particularly, relates to a main pump and backing pump junction water-cooling structure.

Background

With the development of economy, the progress of society and the rise of photovoltaic semiconductor industry, higher requirements are put forward for the processing and manufacturing of equipment, and the equipment can adapt to severe working conditions, corrosion resistance and the like. In order to obtain higher vacuum degree and higher air extraction rate, the requirement on a vacuum pump is higher and higher, while a roots vacuum pump (main pump) cannot be started independently, if the power of a motor is required to be started to be quite large, and the operation of the pump is damaged, so that the pump set can be used by being matched with a backing pump to form the pump set. The main pump and the backing pump must be connected by means of a connecting member (connecting flange) or the like.

The inventor researches to find that the existing vacuum pump only has a cooling system for the main pump and the backing pump, and gas passing through the connecting piece is not disposed.

SUMMERY OF THE UTILITY MODEL

The utility model provides a main pump and backing pump junction water cooling structure through setting up the cooling plate in the junction, wears to locate the cooling plate with the cooling tube, and the water inlet of vacuum pump is connected to the one end of cooling tube, and the outlet of vacuum pump is connected to the other end, lets in water in the cooling tube, and it can cool down the gas in the connecting piece, and then has reduced the corrosivity to spare parts such as the rotor of backing pump and chamber board.

The embodiment of the utility model is realized like this:

in a first aspect, the utility model provides a main pump and backing pump junction water-cooling structure, include:

the connecting piece is used for being connected to the main pump and the backing pump respectively;

the cooling plate is arranged on the connecting piece;

and the cooling pipe penetrates through the cooling plate, one end of the cooling pipe is used for being connected with a water inlet of the vacuum pump, and the other end of the cooling pipe is used for being connected with a water outlet of the vacuum pump.

In an alternative embodiment, the cooling plates are two and spaced apart.

In an alternative embodiment, the cooling pipe is provided with a joint at each end for connecting to the water inlet and the water outlet of the vacuum pump, respectively.

In an optional embodiment, a gas channel is formed inside the connecting piece and used for gas circulation.

In an alternative embodiment, the cooling plate is provided with a groove or a through hole through which the cooling pipe passes.

In an alternative embodiment, the grooves or the through holes are opened in a plurality for multiple passes of the cooling pipe.

In an alternative embodiment, the main pump is provided with a first gas inlet for drawing gas.

In an optional embodiment, the main pump is further provided with a first exhaust port, the first exhaust port is arranged on one side of the main pump away from the first air inlet, and the first exhaust port is connected to the connecting piece.

In an alternative embodiment, the backing pump is provided with a second inlet port, and the second inlet port is connected with one end of the connecting piece far away from the main pump, so that the second inlet port is communicated with the first exhaust port.

In an alternative embodiment, the backing pump further defines a second exhaust port for exhausting gas that passes into the second inlet port.

The embodiment of the utility model provides a beneficial effect is:

this main pump and backing pump junction water-cooling structure includes the connecting piece, cooling plate and cooling tube, the connecting piece is used for connecting respectively in main pump and backing pump, the cooling plate sets up in the connecting piece, the cooling tube is worn to locate the cooling plate, the one end of cooling tube is used for being connected with the water inlet of vacuum pump, the other end is used for the outlet connection with the vacuum pump, set up cooling structure through main pump and backing pump junction, install the cooling plate on the connecting piece (be main pump and backing pump junction promptly), lead to into water in the cooling tube of wearing to locate the cooling plate, with the gas temperature in the reduction connecting piece, reduce the corruption of corrosive gas to spare part.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.

FIG. 1 is an installation diagram of a water cooling structure at the joint of a main pump and a backing pump in the embodiment of the present invention;

fig. 2 is the embodiment of the utility model provides an embodiment of the water-cooling structure of main pump and backing pump junction.

Icon: 1-a water cooling structure at the joint of a main pump and a backing pump; 10-a main pump; 100-a first air inlet; 101-a first exhaust port; 20-a connector; 201-gas channel; 30-a cooling plate; 300-grooves; 40-a cooling pipe; 50-a backing pump; 500-a second air inlet; 501-a second exhaust port; 60-joint.

Detailed Description

In order to obtain higher vacuum degree and higher air extraction rate, the requirement on a vacuum pump is higher and higher, while a roots vacuum pump (a main pump) cannot be started independently, if the power of a motor is required to be started to be quite large and the operation of the pump is damaged, the pump set can be used by being matched with a backing pump to form the pump set. The main pump and the backing pump are connected by flanges and the like, but the existing vacuum pump only has a cooling system for the main pump and the backing pump, and only nitrogen purging is carried out on the connecting flange, and gas passing through the connecting flange is not treated.

In view of the above problem, the utility model provides a cooling plate is worn to locate by main pump and backing pump junction water-cooling structure with the cooling tube, then installs the cooling plate on the connecting piece of junction, can reduce the inside gas temperature of junction, reduces the corruption of corrosive gas to spare part.

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate the position or positional relationship based on the position or positional relationship shown in the drawings, or the position or positional relationship which is usually placed when the product of the present invention is used, and are only for convenience of description and simplification of the description, but do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.

Furthermore, the terms "horizontal", "vertical" and the like do not imply that the components are required to be absolutely horizontal or pendant, but rather may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.

In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

Referring to fig. 1, fig. 1 is a schematic view illustrating an installation of a water cooling structure 1 at a joint of a main pump and a backing pump according to an embodiment of the present invention. This main pump and backing pump junction water-cooling structure 1 includes connecting piece 20, cooling plate 30 and cooling tube 40, and connecting piece 20 is used for connecting respectively in main pump 10 and backing pump 50, and cooling plate 30 sets up in connecting piece 20, and cooling tube 40 wears to locate cooling plate 30, and the one end of cooling tube 40 is used for being connected with the water inlet of vacuum pump, and the other end is used for being connected with the outlet of vacuum pump.

The connecting piece 20 is the structure of connecting main pump 10 and backing pump 50, gas channel 201 has been seted up to the inside of connecting piece 20, be used for the gas circulation, in this embodiment, the width of gas channel 201 is unanimous with the width of first exhaust hole and second inlet hole, connecting piece 20 is flange, install cooling plate 30 on connecting piece 20, specifically, cooling plate 30 is installed in the both sides of connecting piece 20, wear to be equipped with cooling tube 40 in the cooling plate 30, be connected the one end of cooling tube 40 with the water inlet of vacuum pump, be used for leading to water, the other end is connected with the outlet of vacuum pump, be used for discharging water.

By adopting the mode to carry out water cooling on the joint of the main pump 10 and the backing pump 50, the gas temperature in the connecting piece 20 can be reduced, the corrosion of corrosive gas to parts can be reduced, and the rotating speed of the backing pump 50 can be improved and the air extraction efficiency can be increased because the gas temperature is reduced.

The main pump 10 is provided with a first gas inlet 100 for pumping gas. In this embodiment, the first intake port 100 is opened at the upper side of the main pump 10, and is mainly used for being connected to a working space to draw the atmosphere therein.

The main pump 10 is further provided with a first exhaust port 101, the first exhaust port 101 is arranged on one side of the main pump 10 away from the first air inlet 100, and the first exhaust port 101 is connected to the connecting piece 20. In this embodiment, the first exhaust port 101 is opened on the lower side surface of the main pump 10, and is opened on both sides of the main pump 10 opposite to the first intake port 100, the first intake port 100 and the first exhaust port 101 are opened in a staggered manner, and the lower portion of the first exhaust port 101 is connected to the connecting member 20, so as to transmit the gas introduced into the main pump 10 to the connecting member 20, and further to the backing pump 50.

The backing pump 50 is opened with a second inlet port 500, and the second inlet port 500 is connected to an end of the connecting member 20 away from the main pump 10, so that the second inlet port 500 communicates with the first exhaust port 101. In this embodiment, the second gas inlet 500 is provided on the upper side surface of the backing pump 50, and in the mounted state, the second gas inlet 500 is connected to one end of the connecting member 20 away from the main pump 10, so that the gas in the main pump 10 can be introduced into the backing pump 50.

The backing pump 50 further defines a second exhaust port 501, and the second exhaust port 501 is used for exhausting the gas introduced into the second gas inlet 500. In this embodiment, the second exhaust port 501 is opened on the lower side of the backing pump 50, and finally exhausts the gas cooled by the main pump 10, the coupling 20, and the backing pump 50.

Referring to fig. 2, fig. 2 is a schematic structural diagram of a water cooling structure 1 at a junction of a main pump and a backing pump according to an embodiment of the present invention. The two cooling plates 30 are spaced apart from each other, and in the present embodiment, the cooling plates 30 have a square structure, are mounted on both left and right side surfaces of the connector 20, and cool the gas in the connector 20 through the cooling pipes 40 of the cooling plates 30.

The cooling plate 30 is provided with a plurality of grooves 300 or through holes for the cooling pipes 40 to penetrate through, and the plurality of grooves 300 or through holes are used for the cooling pipes 40 to penetrate through for a plurality of times. In this embodiment, the cooling plates are provided with grooves 300, the inner walls of the grooves 300 are arc-shaped, the grooves 300 are provided along the length direction of the cooling plates 30, each cooling plate 30 is provided with two grooves 300, the cooling pipes 40 are sequentially pressed into different grooves 300 on different cooling plates 30, and the arrangement of the cooling pipes 40 in the cooling plates 30 is completed; in other embodiments, the cooling plates 30 are provided with through holes, the through holes are provided along the length direction of the cooling plates 30, each cooling plate 30 is provided with two through holes, the cooling tube 40 penetrates through one through hole of one cooling plate 30, then sequentially penetrates through another through hole of the cooling plate 30, one through hole and another through hole of another cooling plate 30, and finally penetrates out, so that the cooling tube 40 is inserted into different cooling plates 30 and different through holes, and the arrangement of the cooling tube 40 in the cooling plate 30 is completed.

The cooling pipe 40 is provided at both ends thereof with joints 60 for connection to a water inlet and a water outlet of the vacuum pump, respectively. The joints 60 are cylindrical structures, and the joints 60 are connected to both ends of the cooling pipe 40, and connected to a water inlet and a water outlet of a vacuum pump, so that water is introduced into the cooling pipe 40, and continuous water introduction is realized, so that the temperature of the gas in the connection member 20 is reduced by the cooling plate 30.

The working principle and the working process of the water cooling structure 1 at the joint of the main pump and the backing pump in the embodiment are as follows:

the vacuum pump is generally composed of a main pump 10 and a backing pump 50 connected in series, the first inlet 100 of the main pump 10 is connected to the working space to draw the atmosphere therein, and then the first inlet 100 of the backing pump 50 is connected through the first exhaust 101 of the main pump 10, while the main pump 10 and the backing pump 50 are communicated through a connecting member 20 (a connecting flange in this embodiment), and finally the gas is exhausted through the second exhaust 501 of the backing pump 50. The cooling pipe 40 is fixed on the two cooling plates 30 by means of penetration, the two cooling plates 30 are connected together by the cooling pipe 40, finally the two cooling plates 30 are fixed on the upper surface and the lower surface of the connecting piece 20 at the connecting part of the main pump 10 and the backing pump 50 by screws, the water inlet of the cooling pipe 40 is connected with the water inlet of the vacuum pump in series, the water outlet of the cooling pipe 40 is connected with the water outlet of the vacuum pump in series, when the pump starts to work, the water inlet of the cooling pipe 40 starts to feed water, and the heat generated on the connecting piece 20 at the connecting part of the main pump 10 and the backing pump 50 is exhausted by the water outlet of the cooling pipe 40.

This main pump and backing pump junction water-cooling structure 1 includes connecting piece 20, cooling plate 30 and cooling tube 40, and connecting piece 20 is used for connecting respectively in main pump 10 and backing pump 50, and cooling plate 30 sets up in connecting piece 20, and cooling tube 40 wears to locate cooling plate 30, and the one end of cooling tube 40 is used for being connected with the water inlet of vacuum pump, and the other end is used for being connected with the outlet of vacuum pump. The cooling plate 30 is arranged on the connecting piece 20 at the joint of the main pump 10 and the backing pump 50, the cooling pipe 40 penetrates through the cooling plate 30, one end of the cooling pipe 40 is introduced with water through a water inlet of the vacuum pump, and the other end of the cooling pipe discharges water through a water outlet of the vacuum pump, so that heat on the connecting piece 20 is taken away through the water, the temperature of gas inside the joint of the main pump 10 and the backing pump 50 is reduced, corrosion of corrosive gas to parts is reduced, the rotating speed of the backing pump 50 can be increased due to low gas temperature, and the air suction efficiency is increased.

The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and various modifications and changes will occur to those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. The utility model provides a main pump and backing pump junction water-cooling structure which characterized in that includes:

a cooling plate disposed on the connecting member;

2. The water-cooling structure for the joint of the main pump and the backing pump according to claim 1, wherein the two cooling plates are arranged at intervals.

3. The water-cooling structure for the joint of the main pump and the backing pump according to claim 1, wherein joints are respectively provided at both ends of the cooling pipe for connecting to the water inlet and the water outlet of the vacuum pump, respectively.

4. The water-cooling structure for the joint of the main pump and the backing pump as recited in claim 1, wherein a gas passage is formed inside the connecting member for gas circulation.

5. The water-cooling structure at the joint of the main pump and the backing pump according to claim 1, wherein the cooling plate is provided with a groove or a through hole for the cooling pipe to penetrate through.

6. The water-cooling structure for the joint of the main pump and the backing pump as claimed in claim 5, wherein a plurality of grooves or through holes are formed for the multiple penetration of the cooling pipe.

7. The water-cooling structure for the joint of the main pump and the backing pump as recited in claim 1, wherein the main pump is provided with a first gas inlet for pumping gas.

8. The water-cooling structure of the joint of the main pump and the backing pump as recited in claim 7, wherein a first exhaust port is further formed in the main pump, the first exhaust port is formed in a side, away from the first air inlet, of the main pump, and the first exhaust port is connected to the connecting piece.

9. The water-cooling structure of the joint between the main pump and the backing pump as claimed in claim 8, wherein a second air inlet is formed in the backing pump, and the second air inlet is connected with one end of the connecting piece, which is far away from the main pump, so that the second air inlet is communicated with the first exhaust port.

10. The water-cooling structure of the joint of the main pump and the backing pump as recited in claim 9, wherein said backing pump further defines a second exhaust port for exhausting said gas introduced into said second inlet port.