CN216435860U - Carrier transport system and vacuum deposition system - Google Patents
Carrier transport system and vacuum deposition system Download PDFInfo
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- CN216435860U CN216435860U CN201990001341.7U CN201990001341U CN216435860U CN 216435860 U CN216435860 U CN 216435860U CN 201990001341 U CN201990001341 U CN 201990001341U CN 216435860 U CN216435860 U CN 216435860U
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32733—Means for moving the material to be treated
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67712—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
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Abstract
A carrier transport system (100) and a vacuum deposition system are described. The carrier transport system is used for transporting a carrier (10) in a transport direction (T) and comprises a track assembly (150) extending in the transport direction (T) in a vacuum chamber (101). The track assembly comprises at least one magnetic levitation unit (136) for levitating a carrier (10) and at least one drive unit (154) for moving the carrier along the track assembly (150). The carrier transport system further comprises a transport device (160) for moving the rail assembly (150) in a path switching direction (S) transverse to the transport direction (T), in particular perpendicular to the transport direction (T).
Description
Technical Field
Embodiments of the present disclosure relate to apparatus and methods for transporting carriers, particularly carriers used to carry large area substrates. More particularly, embodiments of the present disclosure relate to apparatus and methods for transporting carriers employable in processing systems for vertical substrate processing (e.g., material deposition on large area substrates for display production). In particular, embodiments of the present disclosure relate to a carrier transport system, a vacuum deposition system, and a method of transporting a carrier in a vacuum chamber.
Background
Techniques for layer deposition on a substrate include, for example, sputter deposition, Physical Vapor Deposition (PVD), Chemical Vapor Deposition (CVD), and thermal evaporation. The coated substrate can be used in several applications and in several technical fields. For example, the coated substrate may be used in the field of display devices. The display device may be used in the manufacture of television screens, computer monitors, mobile phones, other handheld devices, and the like for displaying information. Typically, displays are produced by coating a substrate with a layer stack (stack) of different materials.
To deposit a layer on a substrate, an in-line arrangement of process modules may be used. The inline processing system includes a plurality of subsequent processing modules, such as deposition modules and optionally further processing modules, for example cleaning modules and/or etching modules, wherein processing aspects are subsequently performed in the processing modules such that a plurality of substrates can be processed continuously or quasi-continuously (quasi-continuously) in the inline processing system.
The substrate is typically carried by a carrier, i.e. a carrier device for carrying the substrate. Typically, the carrier is transported through a vacuum system using a carrier transport system. The carrier transport system may be configured to transport carriers carrying substrates along one or more transport paths. At least two transport paths may be provided adjacent to each other in the vacuum system, for example, a first transport path T1 for transporting the carriers in a forward direction and a second transport path T2 for transporting the carriers in a return direction opposite to the forward direction.
The function of the display device typically depends on the coating thickness of the material, which must be within a predetermined range. In order to obtain a high resolution display device, it is necessary to cope with technical challenges related to material deposition. In particular, it is challenging to transport the carrier accurately and smoothly through a vacuum system. For example, particle generation due to wear of moving parts may lead to deterioration of the manufacturing process. Accordingly, there is a need for transporting carriers in a vacuum deposition system with reduced or minimized particle generation. Other challenges are to provide a robust carrier transport system for high temperature vacuum environments, for example, at low cost.
Accordingly, it would be beneficial to provide an improved apparatus and method for transporting carriers in a vacuum chamber and an improved vacuum deposition system that overcome at least some of the problems of the prior art.
SUMMERY OF THE UTILITY MODEL
In view of the above, a carrier transport system for transporting a carrier in a vacuum chamber, a vacuum deposition system and a method of transporting a carrier in a vacuum chamber according to the independent claims are provided. Further aspects, advantages and features are apparent from the dependent claims, the description and the accompanying drawings.
According to one aspect of the present disclosure, a carrier transport system for transporting a carrier is provided. The carrier system includes a track assembly extending in a transport direction. The track assembly comprises at least one magnetic levitation unit for levitating the carrier and at least one drive unit for moving the carrier along the track assembly. The carrier transport system further comprises a transport device for moving the rail assembly in a path switching direction transverse to the transport direction.
In some embodiments, the conveyor is configured to move the track assembly between a first position on the first transport path and a second position on the second transport path.
In some embodiments, the conveyor is configured to move the track assembly between a first position on the first transport path, a second position on the second transport path, and a processing position.
In some embodiments, the at least one drive unit comprises a linear motor.
In some embodiments, the at least one magnetic levitation unit comprises a passive magnet unit.
In some embodiments, the at least one magnetic levitation unit comprises a permanent magnet unit configured to hold the carrier in a floating state.
In some embodiments, the track assembly comprises a bottom track and a top track, the at least one magnetic levitation unit and the at least one drive unit being disposed at the bottom track.
In some embodiments, a side stabilizing unit for stabilizing the carrier in the path switching direction is provided at the top track. Alternatively, the side stabilizing unit may be a magnetic side stabilizing unit.
In some embodiments, the conveyor comprises a lower conveyor for moving the bottom track in the path switching direction and an upper conveyor for moving the top track in the path switching direction in synchronism with the bottom track.
In some embodiments, the rail assembly comprises a pressure-tight housing configured to maintain a predetermined pressure, in particular atmospheric pressure, in the pressure-tight housing, wherein the at least one drive unit is arranged inside the pressure-tight housing.
In some embodiments, the transfer device comprises: at least one movable arm extending through a wall of the vacuum chamber and connected to the track assembly; and at least one motor arranged outside the vacuum chamber for moving the movable arm in the path switching direction. The movable arm is connected to the wall of the vacuum chamber via a flexible bellows. Optionally, the movable arm provides a supply passage, in particular wherein at least one of a cable and a line for cooling fluid extends at least partially through the movable arm.
According to one aspect of the present disclosure, a carrier transport system for transporting a carrier is provided. The carrier transport system includes a track assembly extending in a transport direction. The track assembly comprises at least one magnetic levitation unit configured to generate a magnetic levitation force for levitating the carrier and at least one drive unit configured to move the carrier along the track assembly in the transport direction. The rail assembly is movable with the carrier in a path switching direction transverse to the transport direction.
The at least one magnetic levitation unit may comprise one or more passive levitation magnets, in particular a plurality of permanent magnets for levitating the carrier.
In some embodiments, the carrier transport system described herein is configured to transport a carrier in a vacuum environment, and the movable track assembly is located within the vacuum chamber. In other embodiments, the carrier transport system described herein is configured to transport carriers in an atmospheric environment, and the movable track assembly is disposed outside the vacuum chamber.
According to one aspect of the present disclosure, a carrier transport system for transporting a carrier in a vacuum chamber is provided. The carrier transport system comprises a vacuum chamber and a track assembly extending in a transport direction in the vacuum chamber. The track assembly includes: a pressure-tight housing configured to maintain a predetermined pressure, in particular atmospheric pressure, in the pressure-tight housing; at least one magnetic levitation unit for levitating the carrier; and at least one drive unit for moving the carrier along the track assembly. At least one of the at least one magnetic levitation unit and the at least one drive unit is disposed within the pressure-tight enclosure.
Optionally, the carrier transport system may further comprise a transport device for moving the track assembly in a path switching direction transverse to the transport direction.
In one embodiment, a linear motor configured to move the carrier in a transport direction along the track assembly is disposed in the pressure sealed enclosure.
According to a further aspect of the present disclosure, a vacuum deposition system is provided. The vacuum deposition system includes a vacuum chamber, a rail assembly extending in a transport direction in the vacuum chamber, a deposition source, and a conveyor. The track assembly comprises at least one magnetic levitation unit for levitating the carrier and at least one drive unit for moving the carrier along the track assembly. The conveyor is configured to move the rail assembly toward or away from the deposition source in a path switching direction.
According to another aspect of the present disclosure, a method of transporting a carrier in a vacuum chamber is provided. The method comprises transporting the carrier along the track assembly in a transport direction while levitating the carrier with at least one magnetic levitation unit of the track assembly. The method further comprises transporting the track assembly with the carrier in a path switching direction transverse to the transport direction.
Furthermore, the carrier can be moved along the rail assembly with at least one drive unit of the rail assembly, in particular with a linear motor.
Embodiments are also directed to apparatuses for performing the disclosed methods and include apparatus parts for performing each of the described method aspects. These method aspects may be performed by hardware components, a computer programmed by suitable software, any combination of the two, or in any other manner. Furthermore, embodiments according to the present disclosure also relate to a method for operating the described device. The method for operating the described apparatus includes method aspects for performing each function of the apparatus.
Drawings
So that the manner in which the above recited features of the present disclosure can be understood in detail, a more particular description of the disclosure, briefly summarized above, may be had by reference to embodiments. The figures relate to embodiments of the present disclosure and are described below:
fig. 1 shows a schematic cross-sectional view of a carrier transport system according to embodiments described herein;
fig. 2 shows a schematic top view of a carrier transport system according to embodiments described herein;
fig. 3A shows a schematic cross-sectional view of a vacuum deposition system according to embodiments described herein in a first position;
FIG. 3B shows the vacuum deposition system of FIG. 3A in a processing position;
FIG. 3C illustrates the vacuum deposition system of FIG. 3A in a second position;
fig. 4 shows a lower part of a carrier transport system according to embodiments described herein in a schematic cross-sectional view; and is
Fig. 5 is a flow diagram illustrating a method of transporting a carrier in a vacuum chamber according to embodiments described herein.
Detailed Description
Reference will now be made in detail to the various embodiments of the disclosure, one or more examples of which are illustrated in the figures. Within the following description of the drawings, like reference numerals refer to like parts. Only the differences associated with individual embodiments are described. Each example is provided by way of explanation of the disclosure, and is not meant as a limitation of the disclosure. Furthermore, features illustrated or described as part of one embodiment can be used on or in conjunction with other embodiments to yield yet a further embodiment. The description is intended to embrace such modifications and variations.
The carrier transport system is configured for transporting the carriers in a vacuum environment, in particular in a vacuum chamber or in a vacuum system comprising a plurality of vacuum chambers arranged adjacent to each other (e.g. in a linear array). The carrier transport system may provide one, two or more transport paths, wherein the carriers may be moved or transported along the one or more transport paths in the transport direction. The first transport path T1 may extend adjacent to the second transport path T2, e.g., the second transport path T2 is substantially parallel to the first transport path T1. The first transport path T1 and/or the second transport path T2 may extend adjacent to each other in a transport direction T which may be a substantially horizontal direction.
The first and second transport paths T1 and T2 may be offset from each other in the path switching direction S. The distance between the first transport path T1 and the second transport path T2 in the path switching direction S may be 10cm or more, and/or 100cm or less, in particular 50cm or less.
The carrier transport system described herein may be part of a vacuum processing system, in particular a vacuum deposition system configured for depositing material on a substrate carried by a carrier. The vacuum deposition system may be an in-line processing system such that the substrate may be processed continuously or quasi-continuously. The carrier transport system may be configured to shift or transfer the carrier from the first position on the first transport path T1 away from the first transport path T1 to at least one of the second transport path T2 and a processing position P (where the substrate may be processed). In particular, the carrier transport system may laterally displace carriers from a first position on the first transport path T1 in the path switching direction S away from the first transport path to a second position. The path switching direction S may be transverse to the transport direction T, in particular substantially perpendicular to the transport direction T. When a carrier moves from one transport path to another in a path switching direction S, said movement is also referred to herein as "path switching".
In some embodiments, the levitated carrier is transported along a first transport path T1 in a transport direction T, moved away from the first transport path T1 in a path switching direction S to a processing position P where the substrate is processed, moved to a second transport path T2 in the path switching direction S, and transported along the second transport path T2 (e.g., in a direction opposite to the initial direction).
The carrier transport system may be configured for contactless transport or substantially contactless transport of the carrier along the first transport path and/or the second transport path (e.g. using a magnetic levitation force for keeping the carrier in a floating state). In other words, the transport system may not use contact mechanical forces for transporting the carrier. Instead, the transport system may magnetically push or pull the carrier to a new location. For example, the carrier is magnetically moved by repulsive and/or attractive magnetic forces extending along the rail assembly in the transport direction T.
In some implementations, there is no mechanical contact at all between the track assembly and the carrier during carrier transport. In other embodiments, during transport there may be lateral mechanical contact between the carrier and the track assembly, such contact may be used to stabilize the carrier in the lateral direction and/or to prevent the carrier from deviating from the track assembly, however, at least a majority of the weight of the carrier is held by magnetic forces such that the carrier moves while in a floating state.
In some embodiments, the carrier transport system may comprise a magnetic levitation system. The magnetic levitation system may be configured to maintain the carrier in a floating state during transport, wherein most or all of the weight of the carrier is maintained by magnetic force.
Fig. 1 is a schematic cross-sectional view of a carrier transport system 100 according to embodiments herein. The carrier transport system 100 is configured for transporting a carrier 10, which carrier 10 can carry a substrate 11 in a transport direction T in a vacuum chamber 101. The transport direction T is perpendicular to the plane of the paper in fig. 1. The carrier 10 and/or the substrate 11 carried by the carrier 10 may have a substantially vertical orientation (e.g., vertical orientation +/10 °) during transport.
The carrier transport system 100 comprises a rail assembly 150, the rail assembly 150 extending in a transport direction T in the vacuum chamber 101. The carrier 10 can move contactlessly or substantially contactlessly along the track assembly 150 in the vacuum chamber 101.
According to the embodiments described herein, the track assembly 150 comprises at least one magnetic levitation unit 156 for levitating the carrier 10 and at least one drive unit 154 for moving the carrier along the track assembly 150 in the transport direction. The at least one magnetic levitation unit 156 may comprise one or more levitation magnets configured to generate a magnetic levitation force for levitating the carrier (i.e. for magnetically holding the weight of the carrier or a majority of the weight of the carrier). For example, the at least one magnetic levitation unit 156 may be configured to magnetically hold the carrier above a bottom rail (bottom track)151 or bottom rail (bottom rail) of the track assembly 150, as schematically depicted in fig. 1.
The at least one drive unit 154 may be configured to move the carrier 10 along the track assembly 150 in the transport direction. In some embodiments, the at least one drive unit 154 may be configured to move the carrier 10 via magnetic forces. In particular, the at least one drive unit 154 may comprise at least one linear motor.
The carrier transport system 100 further comprises a conveyor 160 for moving the track assembly 150 in a path switching direction S transverse to the transport direction T. Specifically, the rail assembly 150 may be movably installed in the vacuum chamber 101 such that the rail assembly 150 may be moved with the conveyor 160 in the path switching direction S. In particular, a laterally displaceable bottom rail may be provided. The "lateral" direction as used herein may relate to the path switching direction S. In some embodiments, the conveyor 160 is configured to move the track assembly 150 with the carrier 10 in the path-switching direction S, during which the carrier 10 may be held above the bottom track 151 of the track assembly 150.
The track assembly 150 is movable from a first position on the first transport path T1 to at least one of a second position on the second transport path T2 and a processing position P. The conveyor 160 may be configured to move the track assembly without a carrier and/or with a carrier suspended on the track assembly. For example, the track assembly 150 may move with the carrier away from the first transport path T1, the carrier may then exit the track assembly 150 in the transport direction T, and the track assembly may move back to the first transport path T1 without the carrier. Another carrier may be moved onto the track assembly disposed at the first position.
According to embodiments described herein, the track assembly 150 is movable in a path switching direction by a conveyor 160. Thus, the carrier can be moved along the track assembly 150 in the transport direction T to a path switching position on the track assembly and thereafter be moved together with the track assembly 150 in the path switching direction S without handing over the carrier to a further path switching device. Rather, the carrier can also be moved in the path switching direction S merely by moving the track assembly 150 in the path switching direction S. In particular, no additional handling means for bearer path switching is required. By moving the carrier together with the track assembly in the path switching direction, the tact rate can be reduced compared to a case where the carrier needs to be additionally handed over to the path switching device. Furthermore, particle generation in the vacuum chamber can be reduced due to the at least one magnetic levitation unit that can continuously levitate the carrier during the path switching movement. Furthermore, the complexity of the carrier design and the risk of carrier vibration and/or carrier flutter during path switching may be reduced.
According to embodiments, which may be combined with other embodiments described herein, the conveyor 160 is configured to move the track assembly 150 between a first position on the first transport path T1, a second position on the second transport path T2, and/or a processing position P depicted in fig. 1. The processing location may be closer to the deposition source 105 than the first location and/or the second location.
In some embodiments, the at least one drive unit 154 may comprise a linear motor configured to exert a magnetic force on the carrier for moving the carrier along the track assembly in the transport direction T. The at least one drive unit 154 may include a plurality of linear motors disposed on the track assembly (e.g., at predetermined intervals along the transport direction).
In some implementations, the at least one drive unit may include a synchronous linear motor. In other embodiments, the at least one drive unit may comprise an asynchronous linear motor. Providing a drive unit comprising an asynchronous linear motor may be beneficial in that the asynchronous linear motor may magnetically interact with a counter-unit 15 arranged on the carrier, e.g. the counter-unit 15 is configured as a conductive trace at the carrier. For example, the counter unit 15 may comprise a metal plate (e.g. an aluminum plate) arranged at a lateral face of the carrier and/or extending in the transport direction T.
The at least one drive unit may comprise a linear motor comprising a plurality of coil units configured to generate a magnetic field to induce an electric current in an opposing unit 15 arranged at the carrier (e.g. arranged at a lateral face of the carrier directed towards the at least one drive unit) during transport.
In some embodiments, which may be combined with other embodiments described herein, the at least one drive unit 154 may be a linear motor arranged laterally with respect to the carrier transport space, such that the linear motor may magnetically interact with the counter unit 15 arranged at a lateral face of the carrier. In some embodiments, at least one drive unit 154 is arranged to interact with a lower portion of the carrier to move the carrier in the transport direction.
In some embodiments, which may be combined with other embodiments described herein, the at least one magnetic levitation unit 156 comprises a passive magnet unit (in particular a permanent magnet) arranged at the track assembly 150. The permanent magnet unit is configured to generate a levitation force for levitating the carrier. The permanent magnet may be configured to magnetically interact with another permanent magnet disposed at the carrier such that the carrier may be maintained in a floating state with respect to the track assembly 150. For example, a vertical displacement of the carrier 10 from the equilibrium position may cause an increase in the restoring force between a permanent magnet disposed at the track assembly and another permanent magnet disposed at the carrier, such that the carrier maintains the equilibrium position and does not sag/sink below or rise above the predetermined vertical level.
In particular, a passive magnet levitation system including permanent magnets may be provided for levitating the carrier relative to the track assembly 150. The at least one magnetic levitation unit 156 may include a first plurality of permanent magnets disposed at preset intervals at the track assembly 150, and a second plurality of permanent magnets configured to magnetically interact with the first plurality of permanent magnets may be disposed at the carrier. The at least one magnetic levitation unit 156 may be configured to maintain the weight of the carrier, for example, above a bottom or lower rail of the track assembly 150.
In other embodiments, the at least one magnetic levitation unit 156 may include one or more actively controlled magnet units, e.g., a plurality of actively controlled magnetic bearings that hold the carrier at a predetermined distance from the track assembly 150 via a feedback loop. For example, the distance between the carrier and the track assembly may be measured with one or more distance sensors, and the one or more actively controlled magnet units may be controlled as a function of the measured distance.
Providing at least one magnetic levitation unit as a pure passive magnet unit may be beneficial, because costs may be reduced (active control is not necessary), and because problems related to heat generation and power supply of the active magnet unit in the vacuum chamber may be reduced. Furthermore, the risk of failure of the magnetic levitation system can also be reduced, since permanent magnets are typically fail-safe (fail-safe).
According to embodiments, which can be combined with other embodiments described herein, the track assembly 150 comprises a bottom track 151 (also referred to herein as "drive bar" or "lower track") extending at least partially along the transport direction T below the carrier transport space. The bottom rail 151 may comprise a recess or channel extending in the transport direction T, into which the lower carrier part may protrude during transport, as schematically depicted in fig. 1. In particular, a lower portion of the carrier, which may carry one or more magnetically opposing units, may protrude into a recess of the bottom rail 151 extending in the transport direction T. The at least one magnetic levitation unit 156 of the track assembly 150 may be arranged laterally on both sides of the recess such that the at least one magnetic levitation unit 156 may magnetically interact with one or more magnetically opposing units of the carrier and hold the carrier at a predetermined vertical position and/or a predetermined lateral position with respect to the recess.
In some embodiments, a side stabilizing unit configured to stabilize the carrier in the path switching direction S may also be provided at the track assembly. The stabilizing unit may ensure a correct carrier position in the path switching direction (lateral direction) during carrier transport along the transport direction. The side stabilizing elements may be magnetic side stabilizing elements or side stabilizing elements providing mechanical contact with the carrier.
The conveyor 160 may include a movable arm connected to the track assembly 150 and configured to displace the track assembly 150 in a path switching direction. A motor may be provided for moving the movable arm in the path switching direction. In some embodiments, the motor is disposed outside the vacuum chamber.
Fig. 2 is a schematic top view of a carrier transport system 100 according to embodiments described herein. The carrier transport system in fig. 2 is similar to the carrier transport system in fig. 1, so that reference can be made to the above description, which is not repeated here.
The carrier transport system 100 comprises a track assembly 150 extending in a transport direction T in the vacuum chamber 101. The vacuum chamber 101 can be a processing vacuum chamber housing a deposition source 105. Two or more carrier transport paths (first transport path T1 and second transport path T2 in fig. 2) may extend at least partially through the vacuum chamber 101 in the transport direction T. As indicated by the two arrows in fig. 2, the track assembly 150 is movably mounted in the vacuum chamber 101. Specifically, the track assembly 150 may be transferred from a first position on the first traffic path T1 depicted in fig. 2 to a second position remote from the first transport path T1 (e.g., on the second transport path T2).
The track assembly 150 comprises at least one magnetic levitation unit (not shown in fig. 2) for levitating the carrier. The track assembly 150 is movable in the path switching direction S with or without a carrier 10 suspended on the track assembly 150 by at least one magnetic levitation unit 156. The track assembly 150 further comprises at least one drive unit 154 for moving the carrier along the track assembly. The at least one driving unit 154 may include a linear motor including coils disposed at predetermined intervals along the transport direction T.
Both the at least one magnetic levitation unit 156 and the at least one drive unit 154 are movable with the track assembly 150 in the path switching direction S. Thus, the at least one magnetic levitation unit 156 of the track assembly is adapted for levitating the carrier at both the first position on the first transport path T1 and the second position on the second transport path T2. Furthermore, the at least one drive unit 154 is adapted to move the carrier along both the first transport path T1 and the second transport path T2.
In some embodiments, the at least one second vacuum chamber 102 can be disposed adjacent to the vacuum chamber 101 (e.g., a high vacuum chamber, a low vacuum chamber, a load lock chamber, and/or a load lock chamber). Further track assemblies 111 may be provided adjacent to the track assemblies 150 in the transport direction T such that a carrier may be transported from the track assembly 150 to one or more of the further track assemblies 111. The further track assembly 111 may be mounted immovably, i.e. may be stationary, e.g. fixed to the at least one second vacuum chamber 102. Thus, each additional track assembly may be located on one of the transport paths. The further track assembly 111 may comprise a further magnetic levitation unit for levitating the carrier and/or a further drive unit for moving the carrier along the further track assembly.
Fig. 3A is a schematic cross-sectional view of a vacuum deposition system 200 according to embodiments described herein. The vacuum deposition system 200 may include the carrier transport system 100 as described above such that reference may be made to the above description, which is not repeated here.
The vacuum deposition system 200 includes a vacuum chamber 101, a rail assembly 150 extending in the vacuum chamber 101 in a transport direction T, and a deposition source 105 disposed in the vacuum chamber 101. The track assembly 150 is movable in a path switching direction S and comprises at least one magnetic levitation unit 156 for levitating the carrier and at least one drive unit 154 for moving the carrier along the track assembly 150. The track assembly 150 may be moved in the path switching direction S via a conveyor 160 configured to move the track assembly 150 toward the deposition source 105 and/or away from the deposition source 105.
The deposition source 105 can be a sputter deposition source, for example, a sputter deposition source including a plurality of targets that can optionally be rotatable. Alternatively, the deposition source 105 may be at least one of a CVD source, an evaporation source, and a PVD source.
In some embodiments, which can be combined with other embodiments described herein, the track assembly 150 includes a bottom track 151 and a top track 152 disposed above the bottom track 151 in a vertical direction. A carrier transport space, in which the carrier 10 is arranged during transport, extends between the bottom track 151 and the top track 152.
For example, a lower portion of the carrier 10 may extend downward to the recess or guide channel of the bottom rail 151 during transport, and/or an upper portion of the carrier 10 may extend upward to the recess or guide channel of the top rail 152 during transport, as schematically depicted in fig. 3A.
In some embodiments, at least one drive unit 154 is disposed at the bottom rail 151.
In some embodiments, at least one magnetic levitation unit 156, in particular a passive magnet unit, more in particular a permanent levitation magnet, is arranged at the bottom rail 151.
In some embodiments, a side stabilizing unit 158 for stabilizing the carrier 10 in the path switching direction S is provided at the top rail 152. For example, the side stabilizing unit 158 is a magnetic side stabilizing unit configured to hold the upper portion of the carrier at a predetermined lateral position. Tilting of the upper portion of the carrier may be reduced or prevented by the side stabilizing unit 158. The side stabilizing unit 158 may include a plurality of permanent magnets configured to apply a repulsive magnetic force to the upper portion of the carrier such that the upper portion of the carrier is maintained at an equilibrium position.
In some embodiments, which may be combined with other embodiments described herein, the conveyor 160 includes a lower conveyor for moving the bottom rail 151 in the path switching direction and/or an upper conveyor for moving the top rail 152 in the path switching direction. The bottom track 151 and the top track 152 may be transported substantially synchronously in the path switching direction S, such that the upper portion of the carrier may be substantially kept above the lower portion of the carrier while the lower portion of the carrier is moved in the path switching direction. In some embodiments, the lower and upper conveyors include respective movable arms and respective motors for moving the movable arms. Alternatively, one motor is provided for moving both the bottom rail 151 and the top rail 152 in the path switching direction.
The carrier 10 carrying the substrate 11 may be moved in the carrier transport space between the bottom rail 151 (or lower rail) and the top rail 152 (or upper rail) of the rail assembly 150 to a first position on the first transport path T1 depicted in fig. 3A. The movement of the carrier 10 along the track assembly 150 may be completely or substantially contactless, i.e. the carrier may be kept in a floating state by a magnetic levitation system.
Thereupon, as schematically depicted in fig. 3B, the conveyor 160 may move the track assembly 150 comprising the bottom track 151 and the top track 152 in the path switching direction S to a processing position P away from the first transport path T1. During said path switching movement, the carrier 10 may be levitated by the at least one magnetic levitation unit 156 of the track assembly 150 such that the carrier moves together with the track assembly 150 in the path switching direction S.
The deposition source 105 may be used to deposit material on a substrate 11 (which is carried by the carrier 10 in the processing position P), as schematically indicated by the three arrows in fig. 3B.
Thereupon, as schematically depicted in fig. 3C, the conveyor 160 may move the track assembly 150 comprising the bottom track 151 and the top track 152 to a second position on the second transport path T2 in the path switching direction S. During the described path switching movement, the carrier 10 can be levitated by the at least one magnetic levitation unit 156 of the track assembly 150 such that the carrier moves together with the track assembly 150 in the path switching direction S towards the second transport path T2.
Thereupon, the carrier 10 may be moved away from the track assembly 150, e.g. towards another vacuum chamber, by moving the carrier in the transport direction with the at least one drive unit 154 of the track assembly 150. The movement of the carrier along the track assembly 150 may be a complete or substantially contactless movement, i.e. during the movement, a majority of the weight of the carrier is maintained via the magnetic levitation force generated by the at least one magnetic levitation unit 156.
A fast and reliable carrier path switching without carrier handover and with reduced risk of particle generation may be provided.
Fig. 4 is an enlarged view of a lower portion of a carrier transport system 300 according to embodiments described herein, shown in schematic cross-sectional view. The carrier transport system 300 may substantially correspond to the carrier transport system 100 in fig. 1 and 2, such that reference may be made to the above description, which is not repeated here.
The carrier transport system includes a track assembly 150, which may include a bottom track 151 and an optional top track 152. Only the bottom rail 151 is depicted in fig. 4. The track assembly 150 comprises at least one drive unit 154 configured for moving the carrier 10 along the track assembly 150 in the transport direction T and at least one magnetic levitation unit 156 configured for generating a magnetic levitation force for levitating the carrier. The at least one drive unit 154 and the at least one magnetic levitation unit 156 may be arranged at the bottom rail 151.
In some embodiments, which can be combined with other embodiments described herein, the track assembly 150 includes a pressure-sealed (pressure-light) enclosure 170 configured to maintain a predetermined pressure therein. In particular, the pressure sealed enclosure may be an atmospheric box configured to maintain atmospheric pressure in the pressure sealed enclosure. Since the pressure sealed housing 170 is part of the track assembly 150, the conveyor 160 is configured to move the pressure sealed housing 170 and the track assembly 150 in the path switching direction S. Providing a pressure-sealed enclosure 170 at the track assembly 150 may be beneficial because non-vacuum compatible components may be disposed within the pressure-sealed enclosure 170.
In some embodiments, at least one of the at least one drive unit 154 and the at least one magnetic levitation unit 156 is disposed inside the pressure sealed enclosure 170. In the embodiment depicted in fig. 4, at least one drive unit 154 is disposed inside a pressure-tight enclosure 170. Thus, the at least one drive unit 154 may include non-vacuum compatible components.
According to individual aspects described herein, which may be the subject of independent claims, a carrier transport system 300 with a pressure sealed enclosure 170, in particular a carrier transport system 300 with an atmospheric box configured to maintain atmospheric pressure in the atmospheric box, is described. The carrier transport system 300 may have some or all of the features of any of the carrier transport systems described herein.
The carrier transport system 300 comprises a vacuum chamber 101, and a rail assembly 150 extending in a transport direction T in the vacuum chamber 101. The track assembly 150 includes a pressure seal housing 170 configured to maintain a predetermined pressure in the pressure seal housing 170. The track assembly 150 further comprises at least one magnetic levitation unit 156 for levitating the carrier 10 and at least one drive unit 154 for moving the carrier along the track assembly 150. At least one of the at least one magnetic levitation unit 156 and the at least one drive unit 154 is disposed inside the pressure sealed enclosure 170. In the embodiment depicted in fig. 4, at least one drive unit 154 (in particular a linear motor) is arranged inside the pressure-tight housing 170. The pressure sealed housing 170 may be configured to maintain atmospheric pressure in the pressure sealed housing 170.
Thus, since the at least one drive unit 154 is arranged in an atmospheric environment, in particular in an atmospheric box provided inside the vacuum chamber 101, the at least one drive unit 154 need not be vacuum compatible. This increases flexibility and reduces costs. Furthermore, at least one drive unit 154 arranged inside said pressure tight housing 170 may be moved together with the rail assembly 150 in the path switching direction S during operation. Thus, the at least one drive unit 154 may be properly positioned and adjusted by moving the track assembly 150 to a predetermined position. Furthermore, the supply of e.g. cooling fluid, signals and/or power to the at least one drive unit is facilitated, as the supply line 165 may extend from outside the vacuum chamber into the pressure-tight enclosure, i.e. into the atmosphere, such that the number of vacuum-fed through(s) may be reduced. In particular, the supply line may be provided in an atmospheric environment along the entire extension of the supply line, since there is no need to let the supply line enter the vacuum environment of the vacuum chamber.
Furthermore, the pressure tight enclosure 170 (with the at least one drive unit 154 provided in the pressure tight enclosure 170) may be preconfigured and adapted as a sub-assembly that can be easily and quickly installed in the chamber with a reduced risk of contamination in the vacuum chamber.
In some embodiments, which can be combined with other embodiments described herein, the transfer device 160 includes at least one movable arm 161 connected to the track assembly 150 and at least one motor 162 for moving the movable arm 161 and the track assembly 150 connected to the movable arm 161 together in the path switching direction S.
The movable arm 161 may extend through the wall of the vacuum chamber 101 to the outside of the vacuum chamber 101, and the motor 162 may be disposed outside of the vacuum chamber 101. Maintenance and service of the conveyor 160, and in particular the motor 162, may be facilitated and a conventional motor that is not vacuum compatible may be used.
The movable arm 161 may extend through a sidewall of the vacuum chamber into the vacuum chamber, with a distal portion of the movable arm 161 connected to the track assembly 150. The movable arm 161 can be displaced into the vacuum chamber via a motor 162 coupled to a proximal portion of the movable arm 161 that extends out of the vacuum chamber. For example, the movable arm 161 may be provided with a slider 166 at a proximal portion of the movable arm 161 that engages the track 167, the motor 162 being configured to move the slider 166 along the track 167. Other drive mechanisms are possible.
In some implementations, the movable arm 161 is connected to the wall of the vacuum chamber 101 via a flexible bellows 163. This allows movement of the moveable arm 161 relative to the wall through which the moveable arm 161 extends, while maintaining a pressure differential between the two opposing sides of the flexible bellows 163. A vacuum feedthrough is provided that allows relative movement between the moveable arm 161 and the vacuum chamber 101.
In some embodiments, which may be combined with other embodiments described herein, the movable arm 161 provides a supply path for the supply line 165 for supplying the track assembly 150, in particular for supplying at least one of the at least one magnetic levitation unit 156 and the at least one drive unit 154. In some implementations, at least one of the cable and the cooling line extends at least partially through the movable arm 161. The movable arm may be hollow. For example, the movable arm may be configured as a hollow tube element providing a supply passage. Thus, the track assembly 150 may be supplied with power and/or cooling fluid in any position during the path switching movement. Furthermore, the number of vacuum feedthroughs can be reduced and costs can be saved.
The present description focuses on a carrier transport system for transporting carriers inside a vacuum chamber (e.g., inside a vacuum processing chamber, a vacuum deposition chamber, and/or a vacuum transport chamber). It is noted, however, that any of the carrier transport systems described herein may also be configured for transporting carriers in an atmospheric environment, and the movable track assembly may be disposed outside the vacuum chamber.
For example, the carrier transport assembly may comprise a track assembly extending in a transport direction and a transport device for moving the track assembly in a path switching direction transverse to the transport direction. The track assembly may be disposed in an atmospheric environment, for example, proximate to a closable opening of a vacuum deposition system, particularly proximate to a load-lock vacuum chamber in the vacuum deposition system. The load lock vacuum chamber may be configured as an airlock (airlock) chamber for unlocking the carrier into the high vacuum chamber. Thus, the carrier transport system described herein may be used for path switching of carriers outside the vacuum deposition system, e.g., before the carriers again enter the vacuum deposition system through the load lock chamber.
In some embodiments, a vacuum deposition system having a plurality of vacuum chambers includes at least one carrier transport assembly disposed inside a vacuum chamber of the vacuum deposition system (e.g., inside a vacuum deposition chamber) as described herein; and at least one second carrier transport assembly as described herein disposed outside of a vacuum chamber of the vacuum deposition system. Thus, the carrier may be switched path inside the vacuum deposition system, e.g. in a first path switching direction, and the carrier may be switched path outside the vacuum deposition system, e.g. in a second path switching direction opposite to the first path switching direction. Thus, the carriers may be transported along two endless paths comprising two parallel carrier transport paths and two carrier transport assemblies for switching the path between the two carrier transport paths, the endless paths being partly located in a vacuum environment and partly located in an atmospheric environment.
Fig. 5 is a flow chart illustrating a method of transporting the carrier 10 in the vacuum chamber 101 according to embodiments described herein.
In block 510, the carrier 10 is transported along the track assembly 150 in a transport direction T while being levitated with the at least one magnetic levitation unit 156 of the track assembly 150.
In block 520, the track assembly 150 is transported with the carrier suspended by the track assembly in a path switching direction S transverse to the transport direction. In particular, the rail assembly 150, which includes at least one magnetic levitation unit 156 and includes at least one driving unit 154, moves together with the carrier in a path switching direction, for example, from the first transport path T1 to at least one of the second transport path T2 and the processing position P. In some embodiments, the track assembly 150 is transferred with the carrier from a first position on the first transport path T1 to at least one of a second position on the second transport path T2 and the processing position P.
In optional block 530, a material is deposited on a substrate carried by a carrier disposed at a processing location P proximate to a deposition source.
Further, the following embodiments are described herein:
the method comprises the following steps: a method for transporting a carrier (10) in a vacuum chamber (101), comprising: transporting the carrier (10) along the track assembly (150) in a transport direction (T) while levitating the carrier with at least one magnetic levitation unit (156) of the track assembly (150); and conveying the rail assembly (150) together with the carrier in a path switching direction (S) transverse to the transport direction (T).
The method 2 comprises the following steps: the above method, further comprising: transferring the track assembly (150) with the carrier from a first position on a first transport path (T1) to at least one of a second position and a processing position (P) on a second transport path (T2); and depositing a material on a substrate carried by the carrier.
Embodiments described herein may be used to transport a carrier carrying at least one of a large area substrate, a glass substrate, a wafer, a semiconductor substrate, a mask, a shield, and other objects. The carrier may carry a single object, e.g. of size 1m2Or more, in particular 5m2Or 10m2Or larger large area substrates, or multiple objects with smaller dimensions, such as multiple semiconductor wafers. The carrier may comprise a holding device, e.g. a magnetic chuck, an electrostatic chuck or a mechanical clamping device, configured to hold the object at the carrier.
The carrier may have a substantially vertical orientation (e.g., vertical +/-10 °) during transport, or the carrier may have a substantially horizontal orientation (e.g., horizontal +/-10 °) during transport. In particular, the vacuum deposition system may be configured for vertical substrate processing or for horizontal substrate processing.
While the foregoing is directed to embodiments, other and further embodiments may be devised without departing from the basic scope thereof, and the scope thereof is determined by the claims that follow.
Claims (20)
1. A carrier transport system, characterized by comprising a track assembly (150) extending in a transport direction (T), the track assembly comprising:
at least one magnetic levitation unit (156) for levitating the carrier (10); and
at least one drive unit (154) for moving the carrier along the track assembly (150),
the carrier transport system further comprises a transport device (160) for moving the track assembly (150) in a path switching direction (S) transverse to the transport direction (T).
2. The carrier transport system of claim 1, wherein the conveyor (160) is configured to move the track assembly between a first position on a first transport path (T1) and a second position on a second transport path (T2).
3. The carrier transport system of claim 1, wherein the conveyor (160) is configured to move the track assembly between a first position on a first transport path (T1), a second position on a second transport path (T2), and a processing position (P).
4. The carrier transport system of claim 1, wherein the at least one drive unit (154) comprises a linear motor.
5. The carrier transport system according to any of claims 1 to 4, wherein the at least one magnetic levitation unit (156) comprises a passive magnet unit.
6. The carrier transport system according to any of claims 1 to 4, wherein the at least one magnetic levitation unit (156) comprises a permanent magnet unit configured to keep the carrier in a floating state.
7. The carrier transport system according to any of claims 1 to 4, wherein the track assembly (150) comprises a bottom track (151) and a top track (152), at least one of the at least one magnetic levitation unit (156) and the at least one drive unit (154) being arranged at the bottom track.
8. The carrier transportation path according to claim 7, wherein a side stabilizing unit (158) for stabilizing the carrier in the path switching direction (S) is provided at the top track (152).
9. The carrier transport path of claim 8, wherein the side stabilizing unit (158) is a magnetic side stabilizing unit.
10. The carrier transport system according to claim 7, wherein the conveyor (160) comprises a lower conveyor for moving the bottom track (151) in the path switching direction (S) and an upper conveyor for moving the top track (152) in the path switching direction (S) synchronously with the bottom track (151).
11. The carrier transport system of any of claims 1-4, wherein the track assembly (150) comprises a pressure-sealed enclosure (170) configured to maintain a predetermined pressure therein, wherein the at least one drive unit (154) is disposed inside the pressure-sealed enclosure.
12. The carrier transport system of claim 11, wherein the pressure-sealed enclosure (170) is configured to maintain atmospheric pressure in the pressure-sealed enclosure.
13. The carrier transport system of any of claims 1-4, wherein the transport device (160) comprises:
at least one movable arm (161) extending through a wall of the vacuum chamber (101) and connected to the rail assembly (150); and
at least one motor (162) arranged outside the vacuum chamber (101) for moving the movable arm (161) in the path switching direction (S).
14. The carrier transport system of claim 13, wherein the movable arm is connected to the wall of the vacuum chamber (101) via a flexible bellows (163).
15. The carrier transport system of claim 13, wherein the movable arm provides a supply pathway.
16. The carrier transport system of claim 15, wherein at least one of a cable and a line for cooling fluid extends at least partially through the movable arm.
17. A carrier transport system, characterized by comprising a track assembly (150) extending in a transport direction (T), the track assembly comprising:
at least one magnetic levitation unit (156) configured to generate a magnetic levitation force for levitating the carrier (10); and
at least one drive unit (154) configured to move the carrier (10) along the track assembly (150) in the transport direction (T),
wherein the rail assembly (150) is movable together with the carrier in a path switching direction (S) transverse to the transport direction (T).
18. A vacuum deposition system, comprising:
a vacuum chamber (101);
a rail assembly (150) extending in a transport direction (T) in the vacuum chamber, the rail assembly comprising:
at least one magnetic levitation unit (156) for levitating the carrier (10); and
at least one drive unit (154) for moving the carrier along the track assembly (150);
a deposition source (105); and
a conveyor (160) for moving the rail assembly (150) towards or away from the deposition source in a path switching direction (S).
19. A carrier transport system characterized by comprising
A vacuum chamber, and
a rail assembly (150) extending in a transport direction (T) in the vacuum chamber (101), the rail assembly comprising:
a pressure sealed housing (170) configured to maintain a predetermined pressure in the pressure sealed housing;
at least one magnetic levitation unit (156) for levitating the carrier (10); and
at least one drive unit (154) for moving the carrier along the track assembly (150),
wherein at least one of the at least one magnetic levitation unit (156) and the at least one drive unit (154) is arranged inside the pressure-tight enclosure (170).
20. The carrier transport system of claim 19, wherein the pressure-sealed enclosure is configured to maintain atmospheric pressure in the pressure-sealed enclosure.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/EP2019/058418 WO2020200443A1 (en) | 2019-04-03 | 2019-04-03 | Carrier transport system, vacuum deposition system, and method of transporting a carrier in a vacuum chamber |
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| CN216435860U true CN216435860U (en) | 2022-05-03 |
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| CN201990001341.7U Active CN216435860U (en) | 2019-04-03 | 2019-04-03 | Carrier transport system and vacuum deposition system |
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| WO (1) | WO2020200443A1 (en) |
Cited By (1)
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|---|---|---|---|---|
| WO2023245882A1 (en) * | 2022-06-23 | 2023-12-28 | 拉普拉斯(无锡)半导体科技有限公司 | Variable distance structure |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102020130209A1 (en) * | 2020-11-16 | 2022-05-19 | Applied Materials, Inc. | Vacuum processing system, support structure and method for transporting a substrate |
| CN118266067A (en) * | 2021-11-26 | 2024-06-28 | 应用材料公司 | Carrier transport system, vacuum deposition system and carrier transport method |
| WO2023222196A1 (en) * | 2022-05-17 | 2023-11-23 | Applied Materials, Inc. | Carrier transport system, vacuum deposition system, and method of transporting carriers |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| EP2159302B1 (en) * | 2008-08-25 | 2015-12-09 | Applied Materials, Inc. | Coating chamber with a moveable shield |
| CN104619619B (en) * | 2012-09-10 | 2017-08-11 | 应用材料公司 | The method of base plate transmission device and moving substrate |
| JP6719567B2 (en) * | 2017-08-25 | 2020-07-08 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | Apparatus for transporting a carrier, system for vacuuming a substrate, and method for transporting a carrier in a vacuum chamber |
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2019
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| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2023245882A1 (en) * | 2022-06-23 | 2023-12-28 | 拉普拉斯(无锡)半导体科技有限公司 | Variable distance structure |
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