CN216425632U

CN216425632U - Substrate frame storage mechanism for coating production line

Info

Publication number: CN216425632U
Application number: CN202122522697.7U
Authority: CN
Inventors: 程海军; 李献伟
Original assignee: Luoyang Shengbo Vacuum Equipment Co ltd
Current assignee: Luoyang Shengbo Vacuum Equipment Co ltd
Priority date: 2021-10-20
Filing date: 2021-10-20
Publication date: 2022-05-03
Anticipated expiration: 2031-10-20

Abstract

The utility model provides a substrate frame storage mechanism that coating production line was used, including the storage frame, locate the front and back side of storage frame and be used for the supporting component of bearing substrate frame, locate the top of storage frame and be used for supplying the substrate frame to support and lean on and carry out the last flange guider that leads to it and locate the lower part of storage frame and can drive the conveyer of substrate frame along Z axle and Y axle motion, be equipped with the draw-in groove that the bottom side card that can supply the substrate frame was gone into on the supporting component, it supports and carries out the leading wheel that leads to it when the substrate frame moves along the Y axle to be equipped with the top side that can supply the substrate frame on the last flange guider. Conveyer can drive the substrate frame and send into or see off the storage frame, goes up flange guider's leading wheel and supplies the substrate frame to support and lean on and lead to it to realize the automatic storage of substrate frame, the utility model discloses with the coating film production line cooperation, can directly transport the substrate frame in the production line, its simple structure has improved the degree of automation of whole coating film production line, uses manpower sparingly, improves production efficiency.

Description

Substrate frame storage mechanism for coating production line

[ technical field ] A method for producing a semiconductor device

The utility model relates to a vacuum coating field, especially a substrate frame storage mechanism that coating film production line was used.

[ background of the invention ]

On the continuous coating production line, the product needs to be loaded on the substrate frame, and then the preparation of the required film layer of the product is completed through the transmission of the substrate frame in the whole production line. Based on coating film continuous type production line, can not cause the production line to stop production because of work such as the sandblast maintenance of substrate frame, the basic assurance of general substrate frame quantity adopts one to use one and prepare the mode according to the demand of producing the line, uses one set promptly on the production line, can reserve one set in addition, uses as the replacement.

At present, most manufacturers can intensively place standby substrate frames in a workshop or a warehouse, a special storage mechanism is not arranged, and the substrate frames are stacked or improperly placed, so that the substrate frames deform or parts on the substrate frames are damaged, and the normal use of the substrate frames is influenced. Some manufacturers have simple storage mechanisms, but do not link with the production line, need to use manual handling to the production line or the storage mechanism, its amount of labour is too big, and along with the continuous increase of product, the substrate frame increases thereupon, the manual handling degree of difficulty is too big, the security is poor, and present like product mainly makes the guide way by the magnetic guide, when needs to save the multi-disc even when small-scale substrate frame, it needs the same structure multirow to pile up, lead to overall structure seem complicated, the price/performance ratio is low, installation time is long, processing cycle is of a specified duration, carry intensity of labour big, degree of automation is not high.

[ Utility model ] content

The to-be-solved technical problem of the utility model is to provide a substrate frame storage mechanism that coating production line used that degree of automation is high and can improve production efficiency.

The purpose of the utility model is realized like this:

the utility model provides a substrate frame storage mechanism that coating production line was used, includes the storage frame, locates the front and back side of storage frame just is used for bearing the supporting component of substrate frame, locates the top of storage frame just is used for supplying the substrate frame to support and supports and carry out the last flange guider who leads to it and locates the lower part of storage frame just can drive the conveyer of substrate frame along Z axle and Y axle motion, the draw-in groove that the bottom side card that is equipped with on the supporting component can supply the substrate frame goes into, it supports and leans on and carries out the leading wheel that leads to it when the substrate frame moves along the Y axle to go up the top side that is equipped with to supply the substrate frame on the flange guider.

The utility model adopts the above structure, conveyer can drive the substrate frame and send into or see off the storage frame, and the in-process goes up flange guider's leading wheel and supplies the substrate frame to support and lead to it to realize the automatic storage of substrate frame, the utility model discloses with the coating film production line cooperation, can directly transport the substrate frame in the production line, its simple structure has improved the degree of automation of whole coating film production line, has saved the manpower, has improved the efficiency of production greatly.

According to the substrate frame storage mechanism for the coating production line, the supporting component comprises a plurality of supporting blocks arranged on the front side and the rear side of the storage frame along the X-axis direction, and each supporting block is provided with the clamping groove, so that the guide rods on the bottom side of the substrate frame can be clamped and connected.

According to the substrate shelf storage mechanism for the coating production line, the upper flange guiding device comprises the upper baffle and the plurality of guide wheel sets arranged at the bottom of the upper baffle, each guide wheel set is provided with the plurality of guide wheels arranged along the Y axis, and the guide wheels are matched with the clamping grooves, so that the storage shelf with a compact structure can store a plurality of substrate shelves.

The substrate holder storage mechanism for the coating production line further comprises a translation device capable of driving the conveying device to move along the X axis, so that the conveying device is driven to move among the plurality of supporting blocks.

According to the substrate frame storage mechanism for the coating production line, the conveying device comprises a base and a lifting seat arranged on the base in a lifting manner, the base is provided with a lifting driving device capable of driving the lifting seat to move along the Z axis, and the lifting seat is provided with a carrying device capable of bearing the substrate frame and driving the substrate frame to move along the Y axis. The lifting driving device drives the lifting seat to move along the Z axis, so that the substrate frame can automatically leave or be clamped into the clamping groove, and the carrying device drives the substrate frame to move along the Y axis to be sent into or sent out of the storage frame.

The substrate holder storage mechanism for the coating production line comprises a friction transmission wheel arranged on one side of the lifting seat and used for bearing and transmitting the substrate holder, and a driving piece arranged on the other side of the lifting seat and used for driving the friction transmission wheel to rotate, wherein the driving piece drives the friction transmission wheel to rotate so as to drive the substrate holder to move along the Y axis.

According to the substrate shelf storage mechanism for the coating production line, the driving piece is the synchronous belt conveying assembly, and the substrate shelf storage mechanism is clean, low in noise and excellent in synchronism.

According to the substrate frame storage mechanism for the coating production line, the supporting component is provided with the sensor used for sensing whether the substrate frame is placed or not at the position corresponding to the clamping groove, and the conveying device is provided with the sensor capable of mutually sensing with the sensor, so that the position automatic detection of the substrate frame and the conveying device is realized.

According to the substrate frame storage mechanism for the coating production line, the guide wheels are conical, the number of the guide wheel sets is equal to half of the number of the clamping grooves, and the clamping grooves and the guide wheel sets are staggered, so that the substrate frame storage mechanism is suitable for ultrathin large-size substrate frames.

According to the substrate frame storage mechanism for the coating production line, the guide wheels are cylindrical, the number of the guide wheel sets is one more than half of the number of the clamping grooves, and the clamping grooves are opposite to the central position between two adjacent guide wheel sets, so that the substrate frame storage mechanism is suitable for small-size substrate frames.

[ description of the drawings ]

The following detailed description of embodiments of the present invention is provided with reference to the accompanying drawings, in which:

FIG. 1 is a schematic view of the structure of the present invention for a large-sized substrate holder;

fig. 2 is a schematic structural view of the support assembly of the present invention;

FIG. 3 is a schematic structural view of the upper retaining edge guide device of the present invention when applied to a large-sized substrate holder;

fig. 4 is a schematic structural diagram of the conveying device according to the present invention;

fig. 5 is a second schematic structural view of the conveying device of the present invention;

FIG. 6 is a schematic view of the structure of the present invention for a small-sized substrate holder;

FIG. 7 is a schematic structural view of the upper edge guide device of the present invention for a small-sized substrate holder.

[ detailed description ] embodiments

The utility model provides a substrate frame storage mechanism that coating production line used, including storage frame 1, locate the front and back side of storage frame 1 and be used for bearing the supporting component 2 of substrate frame 10, locate the top of storage frame 1 and be used for supplying substrate frame 10 to support and lean on and carry out the last flange guider 3 that leads to it and locate the lower part of storage frame 1 and can drive the conveyer 4 of substrate frame 10 along Z axle and Y axle motion, be equipped with the draw-in groove 21 that can supply the bottom side card of substrate frame 10 to go up on the flange guider 3 and support and lean on and carry out the leading wheel 31 that leads to it when substrate frame 10 moves along the Y axle on the top side that can supply substrate frame 10.

The supporting component 2 comprises a plurality of supporting blocks 22 arranged on the front side and the rear side of the storage rack 1 along the X-axis direction, and each supporting block 22 is provided with the clamping groove 21. Preferably, the cross section of the clamping groove 21 is V-shaped.

The upper flange guiding device 3 comprises an upper baffle 32 and a plurality of guide wheel sets 33 arranged at the bottom of the upper baffle 32, each guide wheel set 33 is provided with a plurality of guide wheels 31 arranged along the Y axis (rotatably), thereby ensuring the stability of the support of the guide wheels 31 to the substrate frame 10.

The substrate shelf storage mechanism for the coating production line further comprises a translation device 5 capable of driving the conveying device 4 to move along the X axis. The translation device 5 is mainly driven by a servo motor, and drives a screw rod transmission pair to realize linear reciprocating motion through a speed reducer. Translation device 5 installs in conveyer 4's bottom, and the silk braid fixed plate realizes being connected with conveyer 4, and servo motor circular telegram back drive conveyer 4 moves along the X axle to realize that substrate frame 10 can deposit at a plurality of stations (draw-in groove 21) accurately.

The conveying device 4 comprises a base 41 and a lifting seat 42 arranged on the base 41 in a lifting way, wherein the lifting seat 41 is provided with a lifting driving device 43 capable of driving the lifting seat 42 to move along the Z axis, and the lifting seat 42 is provided with a carrying device 44 capable of supporting the substrate frame 10 and driving the substrate frame to move along the Y axis. The lifting driving device 43 adopts a synchronizer, and the synchronizer is powered by a common motor to realize up-and-down movement.

The conveying device 44 includes a friction transfer wheel 441 disposed on one side of the lifting seat 42 for supporting and transferring the substrate holder 10, and a driving member 442 disposed on the other side of the lifting seat 42 for driving the friction transfer wheel 441 to rotate. The friction transfer wheel 441 is provided with a V-shaped groove for the substrate holder 10 to be clamped in.

The driving member 442 is a timing belt transmission assembly, which includes 3 sets of timing pulleys, each of which is coaxially connected to the friction transmission wheel 441.

The supporting component 2 is provided with a sensor 23 for sensing whether the substrate holder 10 is placed or not at a position corresponding to the card slot 21, and the conveying device 4 is provided with a sensor 40 which can mutually sense with the sensor 23. The sensor 23 is photoelectric with E2E _ X5ME1, so that the space position of the substrate holder 10 and the conveying device 4 can be controlled effectively, and the substrate holder 10 can be safely and reliably parked and stored at the designated position. When the bottom guide rod of the substrate holder 10 is close to the photoelectric device, an electric signal can be generated, thereby realizing the position detection of the substrate holder 10 and the conveying device 4.

The utility model is suitable for large-sized substrate frames and small-sized substrate frames. When the guide wheel set is used for a large-size substrate frame, the guide wheels 31 are conical, the number of the guide wheel sets 33 is equal to half of the number of the clamping grooves 21, and the clamping grooves 21 are staggered with the guide wheel sets 33. The guide wheel 31 is designed into a conical structure, so that the substrate frame 10 can be obliquely moved and meets the requirement that the large-size thin substrate frame is not clamped (the large-size thin substrate frame does not allow clamping marks and can be deformed by clamping), and meanwhile, the guide wheel is also suitable for other obliquely arranged production line equipment.

The utility model is used for during small-size substrate frame, leading wheel 31 is cylindricly, and the group number of leading wheel group 33 is more than half of the quantity of draw-in groove 21 a set of, and draw-in groove 21 is just to adjacent two sets of central point between the leading wheel group 33 puts. The top of the substrate holder 10 may be clamped between two adjacent sets of guide rollers 33.

When the utility model is used, the translation device 5 drives the conveying device 4 to move to a station where the substrate frame 10 needs to be stored, the lifting driving device 43 drives the lifting seat 42 to rise along the Z axis, the substrate frame translation turnover mechanism in the production line conveys the substrate frame 10 into the station, the top of the substrate frame 10 is abutted against the side part of the guide wheel 31 of the station at the moment, the bottom guide rod is supported on the friction conveying wheel 441 of the conveying device 4, then the driving piece 442 drives the friction conveying wheel 441 to rotate positively to drive the substrate frame 10 to move along the Y axis and completely move into the storage frame 1, the guide wheel 31 guides the top of the substrate frame 10 in the process (in order to improve the stability of moving the substrate frame 10, the guide wheel 100 can be arranged at one side of the storage frame 1 and at a position corresponding to the clamping groove 21), then the lifting driving device 43 drives the lifting seat 42 to descend along the Z axis, so that the bottom guide rod of the substrate frame 10 is completely clamped into the clamping groove 21 of the station, thereby enabling automatic storage of the substrate holder 10. When the stored substrate frame 10 needs to be sent out, the translation device 5 drives the conveying device 4 to move to a station where the substrate frame 10 needs to be sent out, then the lifting driving device 43 drives the lifting seat 42 to ascend along the Z axis, so that the friction conveying wheel 441 lifts the bottom guide rod of the substrate frame 10 and leaves the supporting block 22, then the driving piece 442 drives the friction conveying wheel 441 to rotate reversely to drive the substrate frame 10 to move along the Y axis and send out to a substrate frame translation turnover mechanism in the production line, and the guide wheel 31 guides the top of the substrate frame 10 in the process.

The utility model discloses simple structure, the processing technology is good, need not the magnetic conductance that use cost is high and the cycle length, has improved current product processing cycle length, with high costs, the loaded down with trivial details technical problem of equipment. The utility model discloses be in the same place with coating film production line overall arrangement, drive mechanism is relevant, can be directly transmit the production line with substrate frame 10 from storage frame 1, also can transmit storage frame 1 from the production line, and it does not need artifical transport, has improved the degree of automation of whole production line, uses manpower sparingly, raises the efficiency, but whole workshop compact overall arrangement moreover for substrate frame is maintained and is changed more conveniently.

Claims

1. The utility model provides a substrate frame storage mechanism that coating production line was used, its characterized in that includes storage frame (1), locates the front and back side of storage frame (1) just is used for supporting component (2) of substrate frame (10), locates the top of storage frame (1) just is used for supplying substrate frame (10) to support and lean on and carry out last flange guider (3) that lead to it and locate the lower part of storage frame (1) just can drive conveyer (4) of substrate frame (10) along Z axle and Y axle motion, be equipped with draw-in groove (21) that can supply the bottom side card of substrate frame (10) to go up flange guider (3) and lean on and carry out leading wheel (31) to it when substrate frame (10) move along the Y axle on the top side that can supply substrate frame (10).

2. The substrate holder storage mechanism according to claim 1, wherein the support assembly (2) comprises a plurality of support blocks (22) disposed at the front and rear sides of the storage frame (1) along the X-axis direction, and each support block (22) is provided with the engaging slot (21).

3. The substrate holder storage mechanism for coating production line according to claim 2, wherein the upper rib guide means (3) comprises an upper baffle plate (32) and a plurality of guide roller sets (33) provided at the bottom of the upper baffle plate (32), each of the guide roller sets (33) being provided with a plurality of the guide rollers (31) arranged along the Y-axis.

4. The substrate holder storage mechanism according to claim 3, further comprising a translation device (5) for driving the conveying device (4) to move along the X-axis.

5. The substrate holder storage mechanism according to any one of claims 1 to 4, wherein the conveying device (4) comprises a base (41) and a lifting seat (42) arranged on the base (41) in a liftable manner, the base (41) is provided with a lifting driving device (43) capable of driving the lifting seat (42) to move along the Z axis, and the lifting seat (42) is provided with a carrying device (44) capable of supporting the substrate holder (10) and driving the substrate holder to move along the Y axis.

6. The substrate holder storage mechanism of claim 5, wherein the carrying device (44) comprises a friction transfer wheel (441) disposed on one side of the lifting seat (42) for supporting and transferring the substrate holder (10), and a driving member (442) disposed on the other side of the lifting seat (42) for driving the friction transfer wheel (441) to rotate.

7. The substrate holder storage mechanism of claim 6, wherein the driving member (442) is a timing belt conveyor assembly.

8. The substrate holder storage mechanism for coating production line according to claim 4, wherein the supporting component (2) is provided with a sensor (23) for sensing whether the substrate holder (10) is placed or not at a position corresponding to the slot (21), and the conveying device (4) is provided with a sensor (40) capable of sensing with the sensor (23).

9. The substrate holder storage mechanism of claim 3, wherein the guide wheels (31) are tapered, the number of the guide wheel sets (33) is equal to half of the number of the clamping grooves (21), and the clamping grooves (21) are staggered with respect to the guide wheel sets (33).

10. The substrate holder storage mechanism according to claim 3, wherein the guide wheels (31) are cylindrical, the number of the guide wheel sets (33) is one set larger than half of the number of the slots (21), and the slots (21) are aligned with the center between two adjacent guide wheel sets (33).