CN216208676U - Detection device - Google Patents

Abstract

The application discloses a detection device. The detection equipment is used for detecting a sample to be detected and comprises a light source device, a detection device and a bearing device. The light source device comprises a first light source and a second light source, wherein the first light source projects light signals to the sample to form a first light spot, the second light source projects light signals to the sample to form a second light spot, and the light power of the first light spot is smaller than that of the second light spot. The detection device receives the first light spot reflected or scattered by the sample to generate first detection information, and the first detection information is used for determining the position of the characteristic object of the sample. The bearing device bears the sample, the bearing device drives the sample to move relative to the first light spot and the second light spot, and when the second light spot irradiates the position of the characteristic object, the optical power density of the second light spot projected to the characteristic object is reduced. The feature objects are prevented from being exploded (disintegrated) under the irradiation of the second light spots, so that the samples are prevented from being polluted by the feature objects which are swept and exploded, and the yield of the samples is improved.

Description

Detection device

Technical Field

The application relates to the technical field of industrial detection, in particular to detection equipment.

Background

When the optical detection is performed on a semiconductor, laser is a common light source, and along with the improvement of the sensitivity and the improvement of throughput of optical detection equipment, a high-power deep ultraviolet industrial laser with higher power and shorter wavelength is adopted as the light source, so that certain advantages are achieved. In the process of detecting the defects of the semiconductor by using optical detection equipment, laser is projected on the defects of the semiconductor, reflected or scattered signals generated by the defects are received by a detector with a set angle, and then signal processing is carried out to finish the defect detection. However, when a laser with a short wavelength (high single photon energy) and a large power is used as a light source, the laser may blow some special defects (e.g., loose large-sized organic particle defects) on the semiconductor by the laser, and the special defects after the blowing may generate contaminants, which may contaminate the surrounding area and reduce the yield of the semiconductor.

SUMMERY OF THE UTILITY MODEL

The embodiment of the application provides a detection device.

The test equipment of this application embodiment is used for detecting the sample that awaits measuring, test equipment includes:

the light source device comprises a first light source and a second light source, the first light source projects light signals to the sample to form a first light spot, the second light source projects light signals to the sample to form a second light spot, and the optical power of the first light spot is smaller than that of the second light spot;

a detection device for receiving the first light spot reflected or scattered by the sample to generate first detection information, wherein the first detection information is used for determining the position of the characteristic object of the sample; and

and the bearing device is used for bearing the sample and driving the sample to move relative to the first light spot and the second light spot, wherein when the second light spot irradiates the position of the characteristic object, the optical power density of the second light spot projected to the characteristic object is reduced.

In some embodiments, the first light source is configured to project a light signal to the sample to form a first light spot, the carrying device is configured to drive the sample to move relative to the first light spot, so that the first light spot scans the region to be detected of the sample to determine the first detection information, and the second light source is configured to project a light signal to the sample to form a second light spot after determining the positions of all feature objects of the sample according to the first detection information, so that the detecting device detects the region to be detected of the sample according to the second light spot.

In some embodiments, the light source device projects a light signal to the sample to form a first light spot and a second light spot simultaneously, the carrying device is configured to drive the sample to move simultaneously relative to the first light spot and the second light spot, and any position on the sample is irradiated by the first light spot and then irradiated by the second light spot.

In some embodiments, the carrier is configured to rotate the sample around a rotation center, the first light spot and the second light spot are equidistant from the rotation center, and the first light spot is located on a side of the second light spot facing the rotation direction of the sample along the rotation direction of the sample.

In some embodiments, the carrier is configured to rotate the sample about a center of rotation;

the first light spot and the second light spot are scanned from the edge of the sample to the rotation center gradually, and at the same moment, the first light spot is close to the rotation center compared with the second light spot; or

The first light spot and the second light spot are gradually scanned from the rotation center to the edge of the sample, and at the same time, the first light spot is far away from the rotation center than the second light spot.

In some embodiments, the light source device includes a light emitting element and a light splitting element, the light emitting element is configured to emit a light signal, and the light splitting element is configured to split the light signal and project the split light signal to the sample to form the first light spot and the second light spot, respectively; or

The light source device at least comprises a first light-emitting piece and a second light-emitting piece, wherein the first light-emitting piece is used for projecting light signals to form the first light spot, and the second light-emitting piece is used for projecting light signals to form the second light spot.

In some embodiments, the detection apparatus comprises a light shield for shielding at least part of the light signal projected by the second light source to prevent formation of the second light spot when the second light spot is scanned to the location of the feature object.

In some embodiments, the detection apparatus comprises an attenuation device for attenuating at least part of the optical signal projected by the second light source to attenuate the optical power of the second spot when the second spot is scanned to the location of the feature object.

In some embodiments, the carrying device is configured to drive the sample to move along the projection direction of the second light spot when the second light spot is scanned to the position of the feature object, so as to reduce the optical power density of the second light spot.

In some embodiments, the optical power density of the second spot projected onto the feature object is restored to the initial optical power density when the position illuminated by the second spot does not coincide with the position of the feature object.

In the detection apparatus according to the embodiment of the application, the detection device receives the first light spot reflected or scattered by the sample to generate the first detection information, determines the position of the feature object according to the first detection information, and reduces the optical power density of the second light spot projected to the feature object when the second light spot with higher optical power irradiates the position of the feature object, so as to prevent the feature object from being exploded (disassembled) under the irradiation of the second light spot, further prevent the exploded feature object from polluting the sample, and improve the yield of the sample.

Additional aspects and advantages of embodiments of the present application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the present application.

Drawings

The above and/or additional aspects and advantages of the present application will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:

FIG. 1 is a schematic plan view of a detection apparatus according to certain embodiments of the present disclosure;

FIG. 2 is a schematic structural diagram of a light source device according to some embodiments of the present disclosure;

FIG. 3 is a schematic structural diagram of a light source device according to some embodiments of the present disclosure;

FIG. 4 is a schematic view of a sample during testing according to certain embodiments of the present disclosure;

FIG. 5 is a schematic view of a sample during testing according to certain embodiments of the present disclosure;

FIG. 6 is a schematic view of a sample during testing according to certain embodiments of the present disclosure;

FIG. 7 is a schematic view of a sample during testing according to certain embodiments of the present disclosure;

FIG. 8 is a schematic view of a sample during testing according to certain embodiments of the present disclosure;

FIG. 9 is a schematic view of a sample during testing according to certain embodiments of the present disclosure;

FIG. 10 is a schematic view of a light source device according to some embodiments of the present disclosure;

FIG. 11 is a schematic view of a sample during testing according to certain embodiments of the present disclosure;

FIG. 12 is a schematic view of a light source device according to some embodiments of the present disclosure;

FIG. 13 is a schematic view of a sample during testing according to certain embodiments of the present disclosure;

FIG. 14 is a schematic view of a carrier according to some embodiments of the present disclosure in use;

FIG. 15 is a schematic view of a sample during testing according to certain embodiments of the present disclosure;

FIG. 16 is a schematic view of a sample during testing according to certain embodiments of the present disclosure.

Description of the main elements and symbols:

the detection device 100, the light source device 10, the first light source 11, the second light source 12, the light emitting element 13, the light splitting element 14, the first light emitting element 15, the second light emitting element 16, the detection device 20, the carrying device 30, the transfer device 40, the shading device 50, the attenuation device 60, the sample 200, the feature object 201 and the rotation center X.

Detailed Description

Reference will now be made in detail to embodiments of the present application, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below by referring to the drawings are exemplary only for the purpose of explaining the embodiments of the present application, and are not to be construed as limiting the embodiments of the present application.

Referring to fig. 1 and fig. 2, fig. 1 is a schematic plan view illustrating a detecting apparatus 100 according to some embodiments of the present disclosure, and fig. 2 is a schematic structural view illustrating a light source device 10 according to some embodiments of the present disclosure, in which the detecting apparatus 100 is used for detecting a sample 200. The detection apparatus 100 includes a light source device 10, a detection device 20, and a carrier device 30. The light source device 10 includes a first light source 11 and a second light source 12, and the first light source 11 projects a light signal to the sample 200 to form a first light spot. The second light source 12 projects a light signal toward the sample 200 to form a second light spot. The optical power of the first light spot is smaller than the optical power of the second light spot.

The detection device 20 receives the first light spot reflected or scattered by the sample 200 to generate first detection information, which is used to determine the position of the feature object of the sample 200. The carrier 30 carries the sample 200, and the carrier 30 drives the sample 200 to move relative to the first light spot and the second light spot. And when the second light spot irradiates to the position of the characteristic object, the optical power density of the second light spot projected to the characteristic object is reduced.

In the detection apparatus 100 according to the embodiment of the present application, the detection device 20 first receives the first light spot reflected or scattered by the sample 200 to generate the first detection information, determines the position of the feature object according to the first detection information, and reduces the optical power density of the second light spot projected to the feature object when the second light spot with larger optical power irradiates the position of the feature object, so as to prevent the feature object from being exploded (disassembled) under the irradiation of the second light spot, thereby preventing the exploded feature object from polluting the sample 200, and improving the sample quality

Specifically, the inspection apparatus 100 may be a machine such as a semiconductor inspection apparatus, a semiconductor processing apparatus, a semiconductor manufacturing apparatus, or a part of the machine. The sample 200 to be tested may be any device or semi-finished product of the device that needs to be tested, for example, the sample 200 may be any device or semi-finished product such as a wafer, a chip, a display panel, glass, a cover plate, a substrate, a housing, a film, and the like, and is not limited herein. The figures of the present application illustrate the sample 200 as a wafer.

The sample 200 may include a region to be measured, which may be any region in the sample 200, for example, the region to be measured may be a region preset by a user, or a region of interest to the user, or a region with a specific structure or function. The characteristic objects may be distributed in the region to be measured, the characteristic objects in the embodiment of the present application may be particles with a size larger than a set size, and if the characteristic objects are irradiated by an optical signal with a large optical power, the characteristic objects are prone to explosion. Of course, the feature object may be other types of objects according to different detection requirements, and is not limited herein.

Referring to fig. 1 and fig. 2, the light source device 10 includes a first light source 11 and a second light source 12. The first light source 11 projects a light signal to the sample 200 to form a first light spot, and the second light source 12 projects a light signal to the sample 200 to form a second light spot, wherein the light power of the first light spot is smaller than that of the second light spot.

Specifically, in one example as shown in fig. 2, the light source device 10 includes at least a first light emitting element 15 and a second light emitting element 16, the first light emitting element 15 is used for projecting a light signal to form a first light spot, and the second light emitting element 16 is used for projecting a light signal to form a second light spot. At this time, the light signal projected by the first light emitting element 15 may be used as the first light source 11, and the light signal projected by the second light emitting element 16 may be used as the second light source 12. The on/off of the first light emitting element 15 and the second light emitting element 16, the magnitude of the projected optical power, the wavelength of the projected optical signal, and the like can be independently adjusted, so as to control parameters such as the optical power of the first light spot and the second light spot.

As another example shown in fig. 3, where fig. 3 is a schematic structural diagram of a light source device 10 according to some embodiments of the present disclosure, the light source device 10 includes a light emitting element 13 and a light splitting element 14, the light emitting element 13 is configured to emit a light signal, and the light splitting element 14 is configured to split the light signal and project the split light signal to a sample 200 to form a first light spot and a second light spot, respectively. At this time, one of the optical signals split by the beam splitter 14 may be used as the first light source 11, and the other optical signal split by the beam splitter 14 may be used as the second light source 12. The light source device 10 shown in fig. 3 can form the first light spot and the second light spot in the case where only one light emitting member 13 is provided.

The optical power of the first optical spot is less than the optical power of the second optical spot, and in one example, the optical signal forming the first optical spot may be a visible light signal (e.g., 532 nm optical signal) and the optical signal forming the second optical spot may be an ultraviolet light signal (e.g., 266 nm optical signal). It will be appreciated that, since the optical power of the first spot is less than the optical power of the second spot, under the same conditions, the probability of explosion of the feature object illuminated by the first spot is lower than the probability of explosion of the feature object illuminated by the second spot. Therefore, in the process of detecting the sample 200, the second light spot is prevented as much as possible from directly irradiating the feature object without special processing, and for the region to be detected in the sample 200 except the feature object, the second light spot can be directly irradiated, so that the detection precision and accuracy are improved.

With continued reference to fig. 1, the detecting device 20 receives the first light spot reflected or scattered by the sample 200 to generate first detection information. The detecting device 20 may be a linear array detector or an area array detector, and may be, for example, a Charge Coupled Device (CCD) array, a Complementary Metal Oxide Semiconductor (cmos) array, or a Photomultiplier tube (PMT) array, which is not limited herein. The detection device 20 may receive the first light spot reflected by the sample 200 for bright field detection and generate first detection information, or the detection device 20 may receive the first light spot scattered by the sample 200 for dark field detection and generate first detection information. Wherein the first detection information is used to determine the location of the feature object of the sample 200. Similarly, the detection device 20 can also receive the second light spot reflected or scattered by the sample 200 to detect the sample 200.

Specifically, please refer to the example shown in fig. 4, where fig. 4 is a schematic view of a scene of a sample 200 in a detection process according to some embodiments of the present application, taking the sample 200 as a wafer as an example, one or more feature objects 201 are distributed in the sample 200, the feature objects 201 are represented by shaded block shapes, and in a process of scanning the sample 200 with a first light spot, the detection apparatus 20 generates first detection information, where the first detection information is used to determine a position of the feature object 201 of the sample 200, for example, coordinate information of the distribution of the feature object 201 may be determined through the first detection information.

Referring to fig. 1, the supporting device 30 supports the sample 200, and the supporting device 30 drives the sample 200 to move relative to the first light spot and the second light spot. The carrier 30 may be used to fix the sample 200, for example, the sample 200 may be fixed by negative pressure adsorption, vacuum adsorption, and clamping, and the carrier 30 may also drive the sample 200 to move when necessary, for example, drive the sample 200 to rotate, horizontally move, vertically move, and the like. During the process of scanning the sample 200 with the first light spot and/or the second light spot, the supporting device 30 drives the sample 200 to move, so that the first light spot and/or the second light spot can scan different positions of the sample 200.

In the example shown in fig. 1, the detecting apparatus 100 further includes a transferring device 40, the transferring device 40 can transfer the undetected sample 200 onto the carrier device 30, and the transferring device 40 can also transfer the detected sample 200 on the carrier device 30 to a set position. The transfer device 40 may be a robot or the like, and is not limited thereto.

In the process that the carrying device 30 drives the sample 200 to move relative to the second light spot, when the second light spot irradiates the position of the feature object, the optical power density of the second light spot projected to the feature object is reduced. As described above, the feature object is more likely to explode after being irradiated by the second light spot, so that when the second light spot is irradiated to the position of the feature object, the optical power density of the second light spot projected to the feature object is reduced, the feature object is prevented from being exploded due to irradiation of the unprocessed second light spot, and secondary pollution is avoided. In particular, the manner of reducing the optical power density of the second spot projected onto the feature object may be selected according to practical situations, for example, reducing the optical power of the second spot projected onto the feature object to zero, or attenuating the optical power of the second spot without changing the projected area, or increasing the projected area without attenuating the total optical power of the second spot, or both attenuating the optical power of the second spot and increasing the projected area, without limitation.

It should be noted that, the position where the second light spot is irradiated to the feature object in the present application may refer to a position where the irradiation position of the second light spot is close to the feature object (for example, 1 mm to 5 mm away), and the second light spot is immediately irradiated to the feature object according to the current movement trend.

As mentioned above, the optical power density of the second light spot projected to the feature object needs to be reduced when the second light spot is irradiated to the position of the feature object, before the position of the feature object needs to be determined according to the first detection information, and the first detection information is obtained by receiving the reflected or scattered optical signal of the first light spot by the detection device 20. Therefore, for any feature object on the sample 200, it is necessary to first illuminate the feature object with the first spot to determine its position, and then accurately locate the feature object during the subsequent scanning of the second spot, and reduce the optical power density of the second spot projected onto the feature object. In the following, embodiments for realizing the sequential scanning of the feature object by the first light spot and the second light spot will be exemplarily described:

referring to fig. 4 and fig. 5, fig. 5 is a schematic view of a sample 200 in a testing process according to some embodiments of the present disclosure, in some embodiments, the first light source 11 is configured to project a light signal to the sample 200 to form a first light spot S1, and the carrier 30 is configured to drive the sample 200 to move relative to the first light spot S1 (as shown in fig. 4), so that the first light spot S1 scans a region to be tested of the sample 200 to determine first testing information. At this time, the second light spot S2 is not projected in the sample 200, in this process, the feature objects 201 are not irradiated to the explosion by the first light spot S1, and the positions and the number of all the feature objects 201 in the sample 200 can be determined according to the first detection information. The second light source 12 is configured to project a light signal to the sample 200 to form a second light spot S2 after determining the positions of all the feature objects 201 of the sample 200 according to the first detection information, so that the detection device 20 detects the region to be detected of the sample 200 according to the second light spot S2. In the process that the detection device 20 detects the region to be detected of the sample 200 according to the second light spot S2, when the second light spot S2 scans the position where the non-characteristic object is located, the optical power density of the second light spot S2 may not be reduced, so that the second light spot S2 is used to detect the positions, and the detection accuracy is improved; when the second spot S2 is scanned to the position where the feature 201 is located, the optical power density of the second spot S2 may be reduced to avoid the feature 201 being exploded after being irradiated. In one embodiment, the scanning speed of scanning the sample 200 with the first spot S1 may be faster than the scanning speed of scanning the sample 200 with the second spot S2.

Referring to the example shown in fig. 6, fig. 6 is a schematic view of a scene of the sample 200 in the process of being detected according to some embodiments of the present disclosure, in some embodiments, the light source device 10 projects a light signal to the sample 200 to simultaneously form the first light spot S1 and the second light spot S2, the carrying device 30 is configured to drive the sample 200 to simultaneously move relative to the first light spot S1 and the second light spot S2, and for any position on the sample 200, the sample is irradiated by the first light spot S1 first and then by the second light spot S2. At this time, since any position on the sample 200 is irradiated by the first light spot S1 and then by the second light spot S2, the feature object 201 can be prevented from being swept away when the second light spot S2 is irradiated, and since the first light spot S1 and the second light spot S2 scan the sample 200 at the same time (the scanning positions at the same time are different), the detection efficiency is higher compared with a mode in which the first light spot S1 and the second light spot S2 are separately and sequentially used for scanning, for example, the detection efficiency is improved by more than 50%.

Specifically, referring to the example shown in fig. 6, the carrier 30 is configured to drive the sample 200 to rotate around the rotation center X, the first light spot S1 and the second light spot S2 are equidistant from the rotation center X, and the first light spot S1 is located on a side of the second light spot S2 facing the rotation direction of the sample 200 along the rotation direction of the sample 200. The first light spot S1 and the second light spot S2 may project side by side on the sample 200, and a certain distance (e.g., less than 100 mm) is maintained between the first light spot S1 and the second light spot S2, so that any position on the sample 200 may be irradiated by the second light spot S2 after being irradiated by the first light spot S1 because the first light spot S1 is located on the side of the second light spot S2 facing the rotation direction of the sample 200 (the direction shown by the arrow in fig. 6), and in one example, the time difference between the irradiation of the same position by the first light spot S1 and the irradiation of the same position by the second light spot S2 is less than 1 second.

Further, after the first light spot S1 and the second light spot S2 are scanned at a distance from the rotation center X, the carrying device 30 may drive the sample 200 to move, so that the first light spot S1 and the second light spot S2 irradiate at a position at another distance from the rotation center X, the carrying device 30 drives the sample 200 to rotate around the rotation center X again, and so on until the whole region to be detected of the sample 200 is scanned by the first light spot S1 and the second light spot S2 and detected.

Of course, in other embodiments, the carrier 30 may also drive the sample 200 to translate, and the first light spot S1 is located on the side of the second light spot S2 facing the translation direction of the sample 200, which is not limited herein.

Referring to the example shown in fig. 7, fig. 7 is a schematic view of a scene of the sample 200 during the detection process according to some embodiments of the present disclosure, in some embodiments, the carrier 30 is configured to drive the sample 200 to rotate around the rotation center X, the first light spot S1 and the second light spot S2 gradually scan from the edge of the sample 200 to the rotation center X, and at the same time, the first light spot S1 is closer to the rotation center X than the second light spot S2. Since the first light spot S1 is always closer to the rotation center X than the second light spot S2, and the first light spot S1 and the second light spot S2 scan from the edge of the sample 200 to the rotation center X gradually, the area scanned by the second light spot S2 is already scanned by the first light spot S1, and the position of the feature object 201 in the area is determined.

Of course, when the first spot S1 scans the edge of the sample 200, the second spot S2 may not be projected onto the sample 200, and when the first spot S1 scans the edge of the sample 200, the first spot S1 moves to the rotation center X by a certain distance, and the second spot S2 starts to be projected to the edge position of the sample 200.

Referring to the example shown in fig. 8, fig. 8 is a schematic view of a scene of the sample 200 during the detection process according to some embodiments of the present disclosure, in some embodiments, the carrier 30 is configured to drive the sample 200 to rotate around the rotation center X, the first light spot S1 and the second light spot S2 gradually scan from the rotation center X to the edge of the sample 200, and at the same time, the first light spot S1 is far away from the rotation center X than the second light spot S2. Since the first light spot S1 is always farther from the rotation center X than the second light spot S2, and the first light spot S1 and the second light spot S2 are gradually scanned from the rotation center X of the sample 200 to the edge, the area scanned by the second light spot S2 is necessarily scanned by the first light spot S1, and the position of the feature object 201 in the area is determined. Of course, when the first light spot S1 scans the rotation center X of the sample 200, the second light spot S2 may not be projected onto the sample 200, and after the first light spot S1 scans the rotation center X of the sample 200, the first light spot S1 moves to an edge by a certain distance, and the second light spot S2 starts to be projected to the position of the rotation center X of the sample 200.

Referring to fig. 9, fig. 9 is a schematic view of a scene of a sample 200 during a detection process according to some embodiments of the present disclosure, in a state shown in fig. 9, a second light spot S2 is about to be projected to a position where a feature object 201 is located, and at this time, it is required to reduce an optical power density of the second light spot S2 projected to the feature object 201 to prevent the feature object 201 from being irradiated to a burst, and an embodiment of reducing the optical power density of the second light spot S2 projected to the feature object 201 when the second light spot S2 is irradiated to the position where the feature object 201 is located will be described as follows by way of example:

referring to fig. 10 and fig. 11 for examples, fig. 10 is a schematic diagram illustrating a usage state of the light source device 10 according to some embodiments of the present application, and fig. 11 is a schematic diagram illustrating a scene of the sample 200 according to some embodiments of the present application during the inspection process, in some embodiments, the inspection apparatus 100 includes a light shielding device 50, and the light shielding device 50 is configured to shield at least a portion of the light signal projected by the second light source 12 to prevent the second light spot S2 from being formed when the second light spot S2 is scanned to a position where the feature object 201 is located.

The light shielding device 50 may be a shutter, when the second light spot S2 irradiates to the position of the non-feature object, the light shielding device 50 avoids the light signal projected by the second light source 12, and when the second light spot S2 irradiates to the position of the feature object 201, the light shielding device 50 moves to the optical path of the light signal projected by the second light source 12 to shield the light signal projected by the second light source 12 and prevent the second light spot S2 from being formed (as shown in fig. 10 and 11), so that the feature object 201 is not irradiated by the second light spot S2, and the feature object 201 is prevented from being exploded.

Referring to fig. 12 and fig. 13 for an example, fig. 12 is a schematic diagram illustrating a usage status of the light source apparatus 10 according to some embodiments of the present application, and fig. 13 is a schematic diagram illustrating a scene of the sample 200 according to some embodiments of the present application during the inspection process, in some embodiments, the inspection apparatus 100 includes an attenuation device 60, the attenuation device 60 is configured to attenuate at least a portion of the light signal projected by the second light source 12 when the second light spot S2 is scanned to the position of the feature object 201, so as to attenuate the optical power of the second light spot S2,

the attenuation device 60 may be specifically a device such as an acousto-optic modulator (Q-switch, etc.), the attenuation rate of the optical signal by the attenuation device 60 may be adjusted, when the second light spot S2 is irradiated to the position where the non-feature object is located, the attenuation rate of the attenuation device 60 may be adjusted to be small to improve the accuracy of detection by the second light spot S2, when the second light spot S2 is irradiated to the position where the feature object 201 is located, the attenuation rate of the attenuation device 60 may be adjusted to be large to reduce the optical power of the second light spot S2 irradiated on the feature object 201 (in the state shown in fig. 13, the cross-hatching of the second light spot S2 shown in fig. 13 is sparse compared with the cross-hatching of the second light spot S2 shown in fig. 9 to show that the optical power is small), so as to avoid the feature object 201 from being exploded.

Referring to fig. 14 and fig. 15, in which fig. 14 is a schematic view of a use state of the carrying device 30 according to some embodiments of the present disclosure, fig. 15 is a schematic view of a scene of the sample 200 according to some embodiments of the present disclosure during the detection process, in some embodiments, the carrying device 30 is configured to drive the sample 200 to move along the projection direction of the second light spot S2 when the second light spot S2 is scanned to the position of the feature object 201, so as to reduce the optical power density of the second light spot S2.

It can be understood that the optical power density of the second light spot S2 can be reduced if the area of the second light spot S2 is increased without changing the total optical power of the second light spot S2. When the second light spot S2 irradiates to the position where the non-characteristic object is located, the carrying device 30 fixes the sample 200 in the projection direction of the second light spot S2, and makes the irradiation area of the second light spot S2 on the sample 200 smaller (for example, makes the second light spot S2 irradiated on the sample in a focused state), so as to improve the optical power density of the second light spot S2 and improve the detection accuracy; when the second light spot S2 irradiates the position of the feature object 201, the carrying device 30 drives the sample 200 to move in the projection direction of the second light spot S2 (for example, the second light spot S2 irradiating on the sample is out of focus), and the irradiation area of the second light spot S2 on the sample 200 is larger (as shown in fig. 15, the irradiation area of the second light spot S2 shown in fig. 15 is larger than the irradiation area of the second light spot S2 shown in fig. 9), so as to reduce the optical power density of the second light spot S2 and prevent the feature object 201 from being exploded.

Referring to fig. 16, fig. 16 is a schematic view of a scene of the sample 200 during the detection process according to some embodiments of the present disclosure, in some embodiments, when the position irradiated by the second light spot S2 does not coincide with the position of the feature object 201, for example, the distance between the second light spot S2 and the feature object 201 is already 1 mm to 5 mm, and the distance gradually increases according to the current movement trend, the optical power density of the second light spot S2 projected onto the feature object 201 is restored to the initial optical power density, so as to avoid affecting the detection effect of the position where the non-feature object is located. The specific way of recovering is, for example, to withdraw the light shielding device 50 from the optical path forming the second light spot S2, or to readjust the light attenuation rate of the attenuation device 60 to a smaller state, or to move the sample 200 to a focused state along the projection direction of the second light spot S2 by the carrying device 30.

After the first light spot S1 and the second light spot S2 scan the sample 200, the detection device 20 obtains a final detection result according to the information detected by the reflected or scattered first light spot S1 and the second light spot S2. For example, images obtained from the reflected or scattered first spot S1 and images obtained from the reflected or scattered second spot S2 are stitched.

In summary, in the detection apparatus 100 according to the embodiment of the present invention, the detection device 20 first receives the first light spot reflected or scattered by the sample 200 to generate the first detection information, determines the position of the feature object according to the first detection information, and when the second light spot with a larger optical power irradiates the position of the feature object, reduces the optical power density of the second light spot projected to the feature object, so as to prevent the feature object from being exploded (disassembled) under the irradiation of the second light spot, thereby preventing the exploded feature object from polluting the sample 200, and improving the yield of the sample 200.

In the description herein, reference to the description of the terms "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example" or "some examples" or the like means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the application. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.

Any process or method descriptions in flow charts or otherwise described herein may be understood as representing modules, segments, or portions of code which include one or more executable instructions for implementing specific logical functions or steps of the process, and the scope of the preferred embodiments of the present application includes other implementations in which functions may be executed out of order from that shown or discussed, including substantially concurrently or in reverse order, depending on the functionality involved, as would be understood by those reasonably skilled in the art of the present application.

Although embodiments of the present application have been shown and described above, it is to be understood that the above embodiments are exemplary and not to be construed as limiting the present application, and that changes, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art within the scope of the present application.

Claims (10)

1. A testing apparatus for testing a sample to be tested, the testing apparatus comprising:

the light source device comprises a first light source and a second light source, the first light source projects light signals to the sample to form a first light spot, the second light source projects light signals to the sample to form a second light spot, and the optical power of the first light spot is smaller than that of the second light spot;

a detection device for receiving the first light spot reflected or scattered by the sample to generate first detection information, wherein the first detection information is used for determining the position of the characteristic object of the sample; and

and the bearing device is used for bearing the sample and driving the sample to move relative to the first light spot and the second light spot, wherein when the second light spot irradiates the position of the characteristic object, the optical power density of the second light spot projected to the characteristic object is reduced.

2. The detection apparatus according to claim 1, wherein the first light source is configured to project a light signal to the sample to form a first light spot, the carrying device is configured to move the sample relative to the first light spot, so that the first light spot scans the region to be detected of the sample to determine the first detection information, and the second light source is configured to project a light signal to the sample to form a second light spot after determining the positions of all feature objects of the sample according to the first detection information, so that the detection device detects the region to be detected of the sample according to the second light spot.

3. The apparatus according to claim 1, wherein the light source device projects a light signal to the sample to form a first light spot and a second light spot simultaneously, the carrying device is configured to drive the sample to move relative to the first light spot and the second light spot simultaneously, and any position on the sample is irradiated by the first light spot first and then by the second light spot.

4. The detecting apparatus according to claim 3, wherein the carrying device is configured to drive the sample to rotate around a rotation center, the first light spot and the second light spot are at the same distance from the rotation center, and the first light spot is located on a side of the second light spot facing the rotation direction of the sample along the rotation direction of the sample.

5. The detection apparatus according to claim 3, wherein the carrier is configured to rotate the sample around a rotation center;

the first light spot and the second light spot are scanned from the edge of the sample to the rotation center gradually, and at the same moment, the first light spot is close to the rotation center compared with the second light spot; or

The first light spot and the second light spot are gradually scanned from the rotation center to the edge of the sample, and at the same time, the first light spot is far away from the rotation center than the second light spot.

6. The detection apparatus according to claim 1, wherein the light source device comprises a light emitting element and a light splitting element, the light emitting element is configured to emit a light signal, and the light splitting element is configured to split the light signal and project the split light signal to the sample to form the first light spot and the second light spot, respectively; or

The light source device at least comprises a first light-emitting piece and a second light-emitting piece, wherein the first light-emitting piece is used for projecting light signals to form the first light spot, and the second light-emitting piece is used for projecting light signals to form the second light spot.

7. The detection apparatus according to any one of claims 1 to 6, wherein the detection apparatus comprises a light shield for shielding at least part of the light signal projected by the second light source to prevent the second light spot from being formed when the second light spot is scanned to the position where the feature object is located.

8. The detection apparatus according to any one of claims 1 to 6, wherein the detection apparatus comprises an attenuation device for attenuating at least part of the optical signal projected by the second light source when the second light spot is scanned to the position of the feature object to attenuate the optical power of the second light spot.

9. The detection apparatus according to any one of claims 1 to 6, wherein the carrying device is configured to drive the sample to move along the projection direction of the second light spot when the second light spot is scanned to the position of the feature object, so as to reduce the optical power density of the second light spot.

10. The detection apparatus according to claim 1, wherein the optical power density of the second spot projected onto the feature object is restored to an initial optical power density when the position illuminated by the second spot does not coincide with the position of the feature object.

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