CN216133245U - Ultraviolet monochromatic laser objective lens - Google Patents
Ultraviolet monochromatic laser objective lens Download PDFInfo
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- CN216133245U CN216133245U CN202121826712.0U CN202121826712U CN216133245U CN 216133245 U CN216133245 U CN 216133245U CN 202121826712 U CN202121826712 U CN 202121826712U CN 216133245 U CN216133245 U CN 216133245U
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Abstract
The utility model discloses an ultraviolet monochromatic laser objective lens which comprises a first lens, a second lens, a third lens, a fourth lens, a fifth lens and a sixth lens which are sequentially arranged along the incident direction; the first lens is a negative lens with a meniscus shape, the second lens is a positive lens with a meniscus shape, the third lens is a double convex positive lens, the fourth lens is a double convex positive lens, the fifth lens is a positive lens with a meniscus shape, and the sixth lens is a positive lens with a meniscus shape. The utility model relates to an ultraviolet monochromatic laser objective lensThe MTF is close to the diffraction limit, the distortion is less than 0.2 percent, the test target can be perfectly amplified, the laser transmittance is more than 95 percent, and the laser damage threshold is 3J/cm2The method is used for measuring the high-power ultrafast micron-sized laser focusing light spots.
Description
Technical Field
The utility model relates to an ultraviolet monochromatic laser objective lens, and belongs to the field of laser optics.
Background
The ultraviolet microscope objective is one of microscope objectives, and the application wavelength band is 190-450nm, and the magnification is 10X, 20X, 50X and the like. The method is mainly used for single ultraviolet fluorescence microscopic observation, or on-axis laser focusing and microscopic imaging of ultraviolet excimer lasers and other ultraviolet lasers. As the design wavelength is 190-450nm, in order to ensure the imaging quality, the optical design achromatism adopts a plurality of glass material designs. The design adopts broadband coating, so that the laser transmittance at 343nm of single laser wavelength is about 80 percent. If the glass lens is used for high-power ultra-fast ultraviolet laser, the damage threshold of the glass lens is 0.8J/cm2It is difficult to meet the use requirements.
SUMMERY OF THE UTILITY MODEL
The utility model provides an ultraviolet monochromatic laser objective, which is designed by using a full ultraviolet fused quartz material, wherein MTF is close to a diffraction limit, distortion is less than 0.2%, a test target can be perfectly amplified, the laser transmittance is greater than 95%, and the laser damage threshold is 3J/cm2And can be used for high-power laser focusing and detection applications.
In order to solve the technical problems, the technical scheme adopted by the utility model is as follows:
an ultraviolet monochromatic laser objective lens comprises a first lens, a second lens, a third lens, a fourth lens, a fifth lens and a sixth lens which are sequentially arranged along an incidence direction; the first lens is a negative lens with a meniscus shape, the second lens is a positive lens with a meniscus shape, the third lens is a double convex positive lens, the fourth lens is a double convex positive lens, the fifth lens is a positive lens with a meniscus shape, and the sixth lens is a positive lens with a meniscus shape.
The ultraviolet monochromatic laser objective is a 10X limited far ultraviolet objective and can be used for measuring high-power ultrafast micron-sized laser focusing spots.
Along the incident direction, two side surfaces of the first lens are a first curved surface and a second curved surface in sequence, two side surfaces of the second lens are a third curved surface and a fourth curved surface in sequence, two side surfaces of the third lens are a fifth curved surface and a sixth curved surface in sequence, two side surfaces of the fourth lens are a seventh curved surface and an eighth curved surface in sequence, two side surfaces of the fifth lens are a ninth curved surface and a tenth curved surface in sequence, and two side surfaces of the sixth lens are an eleventh curved surface and a twelfth curved surface in sequence;
the curvature radius of the first curved surface is-11 to-15 mm, and the curvature radius of the second curved surface is 250 to 265 mm; the curvature half of the third curved surface is-60 to-70 mm, and the curvature radius of the fourth curved surface is-20 to-30 mm; the curvature radius of the fifth curved surface is 490-500 mm, and the curvature radius of the sixth curved surface is-40-50 mm; the curvature radius of the seventh curved surface is 60-70 mm, and the curvature radius of the eighth curved surface is-150-155 mm; the curvature radius of the ninth curved surface is 30-35 mm, and the curvature radius of the tenth curved surface is 105-115 mm; the curvature radius of the eleventh curved surface is 15-25 mm, and the curvature radius of the twelfth curved surface is 25-35 mm.
In order to improve the imaging effect, the curvature radius of the first curved surface is preferably-13.709 +/-0.002 mm, and the curvature of the second curved surface is preferably 258.191 +/-0.002 mm; the curvature half of the third curved surface is-67.445 +/-0.002 mm, and the curvature radius of the fourth curved surface is-25 +/-0.002 mm; the curvature radius of the fifth curved surface is 496.482 +/-0.002 mm, and the curvature radius of the sixth curved surface is-44.67 +/-0.002 mm; the curvature radius of the seventh curved surface is 65.77 +/-0.002 mm, and the curvature radius of the eighth curved surface is-152.183 +/-0.002 mm; the curvature radius of the ninth curved surface is 33.73 +/-0.002 mm, and the curvature radius of the tenth curved surface is 111.34 +/-0.002 mm; the curvature radius of the eleventh curved surface is 20.781 +/-0.002 mm, and the curvature radius of the twelfth curved surface is 31.45 +/-0.002 mm.
In order to further improve the imaging effect, the central thickness of the first lens is 3.3 +/-0.1 mm; the central thickness of the second lens is 6 +/-0.1 mm; the central thickness of the third lens is 6 +/-0.1 mm; the center thickness of the fourth lens is 5.9 +/-0.1 mm; the center thickness of the fifth lens is 5.5 +/-0.1 mm; the center thickness of the sixth lens is 5.5 +/-0.1 mm. The center spacing between the first lens and the second lens is 5.5 +/-0.2 mm, the center spacing between the second lens and the third lens is 2.4 +/-0.2 mm, the center spacing between the third lens and the fourth lens is 9.9 +/-0.2 mm, the center spacing between the fourth lens and the fifth lens is 1.3 +/-0.2 mm, the center spacing between the fifth lens and the sixth lens is 0.7 +/-0.2 mm, and the back intercept length is 23.2 +/-0.2 mm.
In order to meet the requirement of high-power laser measurement, all lens materials adopt an ultraviolet fused quartz material. Plating a high-power ultraviolet laser film system, and installing the lens while adjusting to ensure that the integral center is less than 1'.
The parameters of the ultraviolet monochromatic laser objective lens are as follows: wavelength 343nm, focal length 20mm, NA0.25, conjugate distance 259.8 mm.
For convenience of design, the design principle of the objective lens adopts a reverse light path design, and when a focused light spot needs to be tested actually, the right end of the objective lens is a laser input end. In consideration of the problem of structural space, a design of a limited distance is adopted, and a design scheme of an infinite distance plus a tube mirror is not adopted.
The prior art is referred to in the art for techniques not mentioned in the present invention.
The ultraviolet monochromatic laser objective lens has MTF close to the diffraction limit and distortion less than 0.2 percent, can perfectly amplify a test target, has the laser transmittance of more than 95 percent and the laser damage threshold of 3J/cm2The method is used for measuring the high-power ultrafast micron-sized laser focusing light spots.
Drawings
FIG. 1 is a schematic view of micron-sized light spot measurement according to the present invention;
FIG. 2 is a schematic diagram of the optical path of the UV objective lens of the present invention;
FIG. 3 is a dot diagram of different fields of view of the UV objective of the present invention, wherein 3a is the design of the present application and b is a 10X objective dot diagram from thorlabs; (Note: the adopted design is thorlabs company LMUL-10X-UVB)
FIG. 4 is a field curvature and distortion plot of the UV objective lens of the present invention, wherein a is the design of the present application, and b is the field curvature and distortion plot of a thorlabs 10X objective lens;
FIG. 5 is a graph of MTF for the UV objective of the present invention, with logarithmic lines per millimeter (lp/mm) on the horizontal axis and contrast values on the vertical axis; wherein, a is the design of the application, b is a 10X objective MTF graph of thorlabs company;
Detailed Description
In order to better understand the present invention, the following examples are further provided to illustrate the present invention, but the present invention is not limited to the following examples.
Example 1
As shown in fig. 2, an ultraviolet monochromatic laser objective lens includes a first lens, a second lens, a third lens, a fourth lens, a fifth lens and a sixth lens sequentially arranged along an incident direction; the first lens is a negative lens in a meniscus shape, the second lens is a positive lens in a meniscus shape, the third lens is a double convex positive lens, the fourth lens is a double convex positive lens, the fifth lens is a positive lens in a meniscus shape, and the sixth lens is a positive lens in a meniscus shape; objective lens parameters: wavelength 343nm, focal length 20mm, NA0.25, conjugate distance 259.8 mm.
Along the incident direction, two side surfaces of the first lens are a first curved surface and a second curved surface in sequence, two side surfaces of the second lens are a third curved surface and a fourth curved surface in sequence, two side surfaces of the third lens are a fifth curved surface and a sixth curved surface in sequence, two side surfaces of the fourth lens are a seventh curved surface and an eighth curved surface in sequence, two side surfaces of the fifth lens are a ninth curved surface and a tenth curved surface in sequence, and two side surfaces of the sixth lens are an eleventh curved surface and a twelfth curved surface in sequence; the curvature radius of the first curved surface is-13.709 mm, and the curvature of the second curved surface is 258.191 mm; the curvature half of the third curved surface is-67.445, and the curvature radius of the fourth curved surface is-25 mm; the curvature radius of the fifth curved surface is 496.482mm, and the curvature radius of the sixth curved surface is-44.67 mm; the curvature radius of the seventh curved surface is 65.77mm, and the curvature radius of the eighth curved surface is-152.183 mm; the curvature radius of the ninth curved surface is 33.73mm, and the curvature radius of the tenth curved surface is 111.34 mm; the curvature radius of the eleventh curved surface is 20.781mm, and the curvature radius of the twelfth curved surface is 31.45 mm.
The center thickness of the first lens is 3.3 mm; the center thickness of the second lens is 6 mm; the center thickness of the third lens is 6 mm; the center thickness of the fourth lens is 5.9 mm; the center thickness of the fifth lens is 5.5 mm; the center thickness of the sixth lens is 5.5 mm. The center spacing between the first lens and the second lens is 5.5mm, the center spacing between the second lens and the third lens is 2.4mm, the center spacing between the third lens and the fourth lens is 9.9mm, the center spacing between the fourth lens and the fifth lens is 1.3mm, the center spacing between the fifth lens and the sixth lens is 0.7mm, and the back intercept length is 23.2 mm.
Table 1 shows the parameters of the UV monochromatic laser objective
From fig. 3-5, it can be seen that the performance parameters of the design, namely the focused light spots, are within the diffraction limit, the sagittal field curvature is about 2.2um, the meridional field curvature is about 0.9um, and the maximum field distortion is about 0.18%; the 10X objective lens design of thorlabs company, the focusing light spot is close to the diffraction limit, the sagittal field curvature is 1.7um, the meridional field curvature is about 1.2um, and the maximum field distortion is 0.6 percent; in addition, the laser transmittance is higher than 95% and the laser damage threshold is 3J/cm2From this it is clear that the design is significantly better and less costly than the Thorlabs design.
Claims (7)
1. An ultraviolet monochromatic laser objective lens is characterized in that: the optical lens comprises a first lens, a second lens, a third lens, a fourth lens, a fifth lens and a sixth lens which are sequentially arranged along an incidence direction; the first lens is a negative lens with a meniscus shape, the second lens is a positive lens with a meniscus shape, the third lens is a double convex positive lens, the fourth lens is a double convex positive lens, the fifth lens is a positive lens with a meniscus shape, and the sixth lens is a positive lens with a meniscus shape.
2. The ultraviolet monochromatic laser objective lens of claim 1, characterized in that: along the incident direction, two side surfaces of the first lens are a first curved surface and a second curved surface in sequence, two side surfaces of the second lens are a third curved surface and a fourth curved surface in sequence, two side surfaces of the third lens are a fifth curved surface and a sixth curved surface in sequence, two side surfaces of the fourth lens are a seventh curved surface and an eighth curved surface in sequence, two side surfaces of the fifth lens are a ninth curved surface and a tenth curved surface in sequence, and two side surfaces of the sixth lens are an eleventh curved surface and a twelfth curved surface in sequence;
the curvature radius of the first curved surface is-11 to-15 mm, and the curvature radius of the second curved surface is 250 to 265 mm; the curvature half of the third curved surface is-60 to-70 mm, and the curvature radius of the fourth curved surface is-20 to-30 mm; the curvature radius of the fifth curved surface is 490-500 mm, and the curvature radius of the sixth curved surface is-40-50 mm; the curvature radius of the seventh curved surface is 60-70 mm, and the curvature radius of the eighth curved surface is-150-155 mm; the curvature radius of the ninth curved surface is 30-35 mm, and the curvature radius of the tenth curved surface is 105-115 mm; the curvature radius of the eleventh curved surface is 15-25 mm, and the curvature radius of the twelfth curved surface is 25-35 mm.
3. The ultraviolet monochromatic laser objective lens of claim 2, characterized in that: the curvature radius of the first curved surface is-13.709 +/-0.002 mm, and the curvature radius of the second curved surface is 258.191 +/-0.002 mm; the curvature half of the third curved surface is-67.445 +/-0.002 mm, and the curvature radius of the fourth curved surface is-25 +/-0.002 mm; the curvature radius of the fifth curved surface is 496.482 +/-0.002 mm, and the curvature radius of the sixth curved surface is-44.67 +/-0.002 mm; the curvature radius of the seventh curved surface is 65.77 +/-0.002 mm, and the curvature radius of the eighth curved surface is-152.183 +/-0.002 mm; the curvature radius of the ninth curved surface is 33.73 +/-0.002 mm, and the curvature radius of the tenth curved surface is 111.34 +/-0.002 mm; the curvature radius of the eleventh curved surface is 20.781 +/-0.002 mm, and the curvature radius of the twelfth curved surface is 31.45 +/-0.002 mm.
4. The ultraviolet monochromatic laser objective lens according to any one of claims 1 to 3, characterized in that: the central thickness of the first lens is 3.3 +/-0.1 mm; the central thickness of the second lens is 6 +/-0.1 mm; the central thickness of the third lens is 6 +/-0.1 mm; the center thickness of the fourth lens is 5.9 +/-0.1 mm; the center thickness of the fifth lens is 5.5 +/-0.1 mm; the center thickness of the sixth lens is 5.5 +/-0.1 mm.
5. The ultraviolet monochromatic laser objective lens according to any one of claims 1 to 3, characterized in that: the center spacing between the first lens and the second lens is 5.5 +/-0.2 mm, the center spacing between the second lens and the third lens is 2.4 +/-0.2 mm, the center spacing between the third lens and the fourth lens is 9.9 +/-0.2 mm, the center spacing between the fourth lens and the fifth lens is 1.3 +/-0.2 mm, the center spacing between the fifth lens and the sixth lens is 0.7 +/-0.2 mm, and the back intercept length is 23.2 +/-0.2 mm.
6. The ultraviolet monochromatic laser objective lens according to any one of claims 1 to 3, characterized in that: all lens materials are made of ultraviolet fused quartz materials.
7. The ultraviolet monochromatic laser objective lens according to any one of claims 1 to 3, characterized in that: objective lens parameters: wavelength 343nm, focal length 20mm, NA0.25, conjugate distance 259.8 mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121826712.0U CN216133245U (en) | 2021-08-06 | 2021-08-06 | Ultraviolet monochromatic laser objective lens |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121826712.0U CN216133245U (en) | 2021-08-06 | 2021-08-06 | Ultraviolet monochromatic laser objective lens |
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| Publication Number | Publication Date |
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| CN216133245U true CN216133245U (en) | 2022-03-25 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202121826712.0U Active CN216133245U (en) | 2021-08-06 | 2021-08-06 | Ultraviolet monochromatic laser objective lens |
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| CN (1) | CN216133245U (en) |
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2021
- 2021-08-06 CN CN202121826712.0U patent/CN216133245U/en active Active
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