CN216051800U - Based on scanning electron microscope triaxial control drive assembly - Google Patents
Based on scanning electron microscope triaxial control drive assembly Download PDFInfo
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- CN216051800U CN216051800U CN202122670205.9U CN202122670205U CN216051800U CN 216051800 U CN216051800 U CN 216051800U CN 202122670205 U CN202122670205 U CN 202122670205U CN 216051800 U CN216051800 U CN 216051800U
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Abstract
The utility model discloses a scanning electron microscope-based three-axis control driving assembly, which comprises a base, wherein a sliding table is slidably connected above the base, the sliding table slides above the base along the front-back direction, two groups of fixed columns are fixed above the sliding table, a lead screw is connected between the two groups of fixed columns, a threaded sleeve block is sleeved outside the lead screw, a fixed plate is fixed at the bottom of the threaded sleeve block, an air cylinder is fixed on the fixed plate, the output end of the air cylinder is connected with a telescopic rod, and the other end of the telescopic rod is connected with a mounting plate for mounting a scanning electron microscope.
Description
Technical Field
The utility model relates to the technical field of scanning electron microscopes, in particular to a driving assembly based on three-axis control of a scanning electron microscope.
Background
The scanning electron microscope is a novel electronic optical instrument, has the characteristics of simple sample preparation, wide adjustable range of magnification, high image resolution, large depth of field and the like, and has been widely applied to the fields of biology, medicine, metallurgy and other subjects for decades, thereby promoting the development of various related subjects; the scanning electron microscope is modulated and imaged by various physical signals which are excited by the fine focusing electron beams when the surface of a sample is scanned, and in actual use, the scanning electron microscope needs to be driven by a driving assembly to move to a proper position above the sample table and then to scan and detect the sample.
The control driving component for the existing scanning electron microscope can only adjust the height of the control driving component generally, so that the control driving component is inconvenient to adjust to a proper position according to the requirement when detecting different samples.
SUMMERY OF THE UTILITY MODEL
In order to overcome the defects of the prior art, the utility model provides the driving component based on the scanning electron microscope three-axis control, which can provide three-axis control driving for the scanning electron microscope, and further can conveniently meet the position adjustment requirements of different samples during detection.
In order to solve the technical problems, the utility model provides the following technical scheme: the utility model provides a based on scanning electron microscope triaxial control drive assembly, the on-line screen storage device comprises a base, the top sliding connection of base has the sliding stand, the sliding stand slides in the base top along the fore-and-aft direction, the sliding stand top is fixed with two sets of fixed columns, and is two sets of be connected with the lead screw between the fixed column, the outside cover of lead screw is equipped with the screw cover piece, the bottom of screw cover piece is fixed with the fixed plate, be fixed with the cylinder on the fixed plate, the telescopic link is connected to the output of cylinder, the other end of telescopic link is connected with the mounting panel that is used for installing scanning electron microscope.
As a preferred technical scheme of the utility model, two groups of sliding strips are fixed above the base, the two groups of sliding strips are symmetrically arranged, two groups of sliding grooves are formed in the bottom of the sliding table, and the two groups of sliding strips respectively penetrate through the two groups of sliding grooves.
As a preferable technical scheme of the utility model, one end of the screw rod penetrates through one side of the fixed column and is connected with a motor.
As a preferable technical scheme of the utility model, the inner side of the other group of the fixed columns far away from the motor is provided with a fixed groove, the other end of the screw rod extends into the fixed groove, the inner wall of the fixed groove is uniformly provided with a plurality of groups of hemispheres, and the spherical surface of each hemisphere is in rolling connection with the screw rod.
As a preferred technical scheme of the utility model, the screw rod is provided with a guide mechanism for guiding the movement direction of the thread sleeve block to enable the thread sleeve block to reciprocate between the two groups of fixed columns.
As a preferred technical scheme of the utility model, a controller is arranged in the base, and the output end of the controller is respectively connected with the motor and the cylinder.
Compared with the prior art, the utility model can achieve the following beneficial effects:
the utility model can provide three-axis control drive for the scanning electron microscope, thereby being convenient to meet the position adjustment requirement of different samples during detection.
Drawings
FIG. 1 is a schematic view of the overall external structure of the present invention;
FIG. 2 is a schematic view of the overall internal structure of the present invention;
FIG. 3 is an enlarged view taken at A of FIG. 2 according to the present invention;
FIG. 4 is a top view of the slide table and base of the present invention;
wherein: 1. a base; 2. a sliding table; 3. fixing a column; 4. a motor; 5. a screw rod; 6. a threaded bushing block; 7. a fixing plate; 8. a cylinder; 9. a telescopic rod; 10. mounting a plate; 11. a slide bar; 12. a chute; 13. fixing grooves; 14. and (4) a hemisphere.
Detailed Description
The present invention will be further described with reference to specific embodiments for the purpose of facilitating an understanding of technical means, characteristics of creation, objectives and functions realized by the present invention, but the following embodiments are only preferred embodiments of the present invention, and are not intended to be exhaustive. Based on the embodiments in the implementation, other embodiments obtained by those skilled in the art without any creative efforts belong to the protection scope of the present invention. The experimental methods in the following examples are conventional methods unless otherwise specified, and materials, reagents and the like used in the following examples are commercially available unless otherwise specified.
Example (b):
as shown in fig. 1 and 2, the utility model provides a scanning electron microscope-based three-axis control driving assembly, which comprises a base 1, wherein a sliding table 2 is slidably connected above the base 1, the sliding table 2 slides above the base 1 along the front-back direction, two groups of fixing columns 3 are fixed above the sliding table 2, a lead screw 5 is connected between the two groups of fixing columns 3, a threaded sleeve block 6 is sleeved outside the lead screw 5, a fixing plate 7 is fixed at the bottom of the threaded sleeve block 6, an air cylinder 8 is fixed on the fixing plate 7, the output end of the air cylinder 8 is connected with a telescopic rod 9, and the other end of the telescopic rod 9 is connected with a mounting plate 10 for mounting a scanning electron microscope;
when the device is used, the scanning electron microscope is arranged on the mounting plate 10, the fixed column 3 above the sliding table 2, the mounting plate 10 and the scanning electron microscope on the mounting plate 10 can be driven to slide by pushing the sliding table 2 to slide on the base 1, so that the scanning electron microscope is driven on the X axis, the screw rod 5 is rotated to drive the screw sleeve block 6 to slide left and right by arranging a guide mechanism on the screw sleeve block 6, so as to drive the fixed plate 7 at the bottom of the scanning electron microscope, the mounting plate 10 and the scanning electron microscope on the mounting plate 10 to slide left and right, realize the driving of the scanning electron microscope on the Y axis, drive the telescopic rod 9 to extend and retract through the cylinder 8, and then can make mounting panel 10 and the scanning electron microscope of telescopic link 9 bottom reciprocate, realize carrying out the drive to the scanning electron microscope on the Z axle, finally reach the control drive to the scanning electron microscope in triaxial, the convenience can both satisfy scanning electron microscope's position adjustment demand when detecting the sample of difference.
As shown in fig. 2 and 4, two sets of sliding strips 11 are fixed above the base 1, the two sets of sliding strips 11 are symmetrically arranged, two sets of sliding grooves 12 are formed in the bottom of the sliding table 2, and the two sets of sliding strips 11 respectively penetrate through the two sets of sliding grooves 12; through the arrangement of the sliding strip 11 and the sliding groove 12, the sliding table 2 and the scanning electron microscope above the sliding table can slide on the base 1 stably.
As shown in fig. 1 and 2, one end of the screw rod 5 passes through one side of the fixed column 3 and is connected with a motor 4; the screw rod 5 is conveniently driven in an electric control mode through the motor 4.
As shown in fig. 2 and 3, a fixing groove 13 is formed in the inner side of the other group of fixing columns 3 far away from the motor 4, the other end of the screw rod 5 extends into the fixing groove 13, a plurality of groups of hemispheres 14 are uniformly arranged on the inner wall of the fixing groove 13, and the spherical surfaces of the hemispheres 14 are in rolling connection with the screw rod 5; the screw rod 5 is installed by arranging the fixing grooves 13, the contact area between the screw rod 5 and the fixing grooves 13 can be reduced by arranging the plurality of groups of hemispheres 14, and then the abrasion of the surface of the screw rod 5 when the screw rod rotates is reduced.
And the screw rod 5 is provided with a guide mechanism for guiding the movement direction of the thread sleeve block 6 to make the thread sleeve block reciprocate between the two groups of fixed columns 3.
In order to facilitate the electric control of the motion of the scanning electron microscope, a controller can be arranged inside the base 1, and the output end of the controller is respectively connected with the motor 4 and the cylinder 8.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. The utility model provides a based on scanning electron microscope triaxial control drive assembly, includes base (1), its characterized in that: the top sliding connection of base (1) has sliding stand (2), sliding stand (2) is in base (1) top along preceding back direction slip, sliding stand (2) top is fixed with two sets of fixed columns (3), and is two sets of be connected with lead screw (5) between fixed column (3), the outside cover of lead screw (5) is equipped with screw cover piece (6), the bottom of screw cover piece (6) is fixed with fixed plate (7), be fixed with cylinder (8) on fixed plate (7), telescopic link (9) is connected to the output of cylinder (8), the other end of telescopic link (9) is connected with mounting panel (10) that are used for installing scanning electron microscope.
2. The driving assembly based on the scanning electron microscope triaxial control according to claim 1, wherein: two sets of draw runner (11) are fixed with to the top of base (1), and are two sets of draw runner (11) symmetry sets up each other, two sets of spout (12) have been seted up to the bottom of sliding stand (2), and are two sets of draw runner (11) pass two sets of spout (12) respectively.
3. The driving assembly based on the scanning electron microscope triaxial control according to claim 1, wherein: one end of the screw rod (5) penetrates through one side of the fixing column (3) and is connected with a motor (4).
4. The driving assembly based on the scanning electron microscope triaxial control according to claim 3, wherein: the inner side of the other group of the fixing columns (3) far away from the motor (4) is provided with a fixing groove (13), the other end of the screw rod (5) extends into the fixing groove (13), the inner wall of the fixing groove (13) is uniformly provided with a plurality of groups of hemispheres (14), and the spherical surface of each hemisphere (14) is in rolling connection with the screw rod (5).
5. The driving assembly based on the scanning electron microscope triaxial control according to claim 1, wherein: and the screw rod (5) is provided with a guide mechanism for guiding the movement direction of the thread sleeve block (6) to make the thread sleeve block reciprocate between the two groups of fixed columns (3).
6. The driving assembly based on the scanning electron microscope triaxial control according to claim 3, wherein: the base (1) is internally provided with a controller, and the output end of the controller is respectively connected with the motor (4) and the cylinder (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122670205.9U CN216051800U (en) | 2021-11-03 | 2021-11-03 | Based on scanning electron microscope triaxial control drive assembly |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122670205.9U CN216051800U (en) | 2021-11-03 | 2021-11-03 | Based on scanning electron microscope triaxial control drive assembly |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216051800U true CN216051800U (en) | 2022-03-15 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122670205.9U Active CN216051800U (en) | 2021-11-03 | 2021-11-03 | Based on scanning electron microscope triaxial control drive assembly |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216051800U (en) |
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2021
- 2021-11-03 CN CN202122670205.9U patent/CN216051800U/en active Active
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