CN215887210U - Magnetron sputtering coating machine convenient to operation - Google Patents
Magnetron sputtering coating machine convenient to operation Download PDFInfo
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- CN215887210U CN215887210U CN202121392313.8U CN202121392313U CN215887210U CN 215887210 U CN215887210 U CN 215887210U CN 202121392313 U CN202121392313 U CN 202121392313U CN 215887210 U CN215887210 U CN 215887210U
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- cleaning
- magnetron sputtering
- clamping joint
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Abstract
The utility model discloses a magnetron sputtering coating machine convenient to operate, which comprises: the cleaning device comprises a bottom plate, a cleaning roller, an ultrasonic cleaning box and a drying shell, wherein the top of the bottom plate is fixedly connected with a protective shell through clamping, the top of the protective shell is fixedly connected with a top plate through clamping, the center of the bottom of the top plate is fixedly connected with an upper protective cover through clamping, the center of the top of the bottom plate is fixedly connected with a lower protective cover through clamping, in the process of preparing the substrate, impurities on one side of the film coating surface of the substrate are removed through ultrasonic cleaning, the stepping motor drives the connecting rod to rotate, so that the substrate passes through the upper parts of the cleaning rollers in sequence, the bottom of the substrate is wiped by the lens wiping paper above the cleaning roller, the substrate is driven to enter the drying shell through the electric oil cylinder to be dried, the whole device automatically finishes the preparation and cleaning work in the early stage of the magnetron sputtering substrate, and the cleaning efficiency is high, so that the cleaning effect is high, and the secondary pollution is prevented from being easily caused by manual cleaning of the substrate.
Description
Technical Field
The utility model relates to the technical field of coating machines, in particular to a magnetron sputtering coating machine convenient to operate.
Background
Vacuum coating is a technique for generating a thin film material, atoms or molecules of the coating material are separated from the surface in a vacuum chamber and hit on the surface of a coated object, and generally, vacuum coating refers to depositing a thin film by a physical method, and mainly comprises evaporation coating, ion coating and sputtering coating; the magnetron sputtering coating in the sputtering coating is widely applied by the advantages of good film-substrate bonding fastness, high efficiency, no pollution and the like, the magnetron sputtering is a method for effectively improving the ionization rate of gas in order to carry out high-speed sputtering under low pressure, the plasma density is improved by introducing a magnetic field on the surface of a target cathode and utilizing the restraint of the magnetic field on charged particles to increase the sputtering efficiency, and the principle is as follows: the substrate and the target material are arranged in a vacuum chamber, positive ions, negative ions and electrons are formed in glow discharge of gas in a low-pressure state, the positive ions bombard the target material serving as a cathode, target material atoms are sputtered out, and a film is formed on the substrate, so that various functions of the substrate material are realized.
However, the existing magnetron sputtering coating machine has some disadvantages in the using process, such as:
the existing magnetron sputtering coating machine needs to clean a substrate before use, the substrate is placed in a dryer after cleaning and drying for standby, the substrate is generally manually operated when being cleaned and dried, the substrate is easy to clean and unclean when being cleaned and dried, and meanwhile, when the substrate is transported in the dryer after cleaning and drying, the substrate is easy to generate secondary pollution, and the operation is complex while the coating efficiency is influenced.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a magnetron sputtering coating machine convenient to operate so as to solve the problems in the background technology.
In order to achieve the purpose, the utility model provides the following technical scheme: a magnetron sputtering coating machine convenient to operate comprises: the cleaning device comprises a bottom plate, a cleaning roller, an ultrasonic cleaning box and a drying shell, wherein the top of the bottom plate is fixedly connected with a protective shell through a clamping joint, the top of the protective shell is fixedly connected with a top plate through a clamping joint, the center of the bottom of the top plate is fixedly connected with an upper protective cover through a clamping joint, the center of the top of the bottom plate is fixedly connected with a lower protective cover through a clamping joint, the center between the top plate and the bottom plate is fixedly connected with a stepping motor through a clamping joint, one end of a power output shaft of the stepping motor is fixedly connected with a connecting rod through a clamping joint, one end of the connecting rod, far away from the stepping motor, is fixedly connected with a supporting plate through a clamping joint, the center of the top of the supporting plate is fixedly connected with an electric oil cylinder through a clamping joint, the bottom of a piston rod of the electric oil cylinder is fixedly connected with a fixing plate through a clamping joint, the bottom surface of the fixing plate is fixedly connected with a substrate through gluing joint, one side of the top of the bottom plate is fixedly connected with the ultrasonic cleaning box through a clamping joint, the ultrasonic cleaning box is kept away from at the bottom plate top one side and is passed through joint fixedly connected with drying shell, be connected with the cleaning roller through the bearing rotation between protective housing inner wall one side and the lower protection casing outer wall.
Furthermore, a gap is reserved between the upper protective cover and the lower protective cover and outside the connecting rod.
Furthermore, one side of the bottom plate, which is far away from the cleaning roller, is provided with a receding groove.
Furthermore, the outer wall of the cleaning roller is wrapped with lens wiping paper.
Further, the inner diameter of the ultrasonic cleaning box and the inner diameter of the drying box are larger than the outer diameter of the substrate.
Compared with the prior art, the utility model has the beneficial effects that:
the utility model realizes that when the magnetron sputtering coating machine which is convenient to operate is used, in the process of preparing a substrate, the feeding and discharging door on the side of the protective shell close to the ultrasonic cleaning box is opened, the substrate is adhered on the fixed plate, the side of the coating surface of the substrate is downward, the feeding and discharging door is closed, the piston rod of the electric oil cylinder descends to drive the substrate to be immersed in the cleaning agent in the ultrasonic cleaning box, impurities on the side of the coating surface of the substrate are removed through ultrasonic cleaning, the electric oil cylinder returns to the original position after cleaning is finished, the substrate is separated from the ultrasonic cleaning box, the stepping motor drives the connecting rod to rotate, the substrate sequentially passes through the upper parts of the cleaning rollers, the bottom of the substrate is wiped through the mirror wiping paper above the cleaning rollers, and the stepping motor drives the substrate to move to the upper part of the drying shell after wiping is finished, drive the substrate through electric cylinder and enter into inside the drying shell and dry, after the drying is accomplished, continue to drive the substrate through electric cylinder and break away from the drying shell, drive the substrate through step motor and remove to the groove department of giving up of bottom plate, the substrate enters into the magnetron sputtering station this moment, carries out magnetron sputtering, whole device accomplishes magnetron sputtering substrate preparation cleaning in the early stage automatically, when clean efficient, clean effect is high, prevents that the artifical cleanness of substrate from causing secondary pollution easily.
Drawings
FIG. 1 is a schematic cross-sectional view of the overall front view structure of the present invention;
FIG. 2 is a schematic cross-sectional side view of the overall left-hand side view of the present invention;
fig. 3 is a schematic cross-sectional view of the overall top view structure of the present invention.
In the figure: 1-a bottom plate; 2-a protective housing; 3-a cleaning roller; 4-a top plate; 5-mounting a protective cover; 6-a step motor; 7-lower protective cover; 8-ultrasonic cleaning box; 9-a substrate; 10-a support plate; 11-an electric oil cylinder; 12-a fixing plate; 13-drying the shell; 14-connecting rod.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-3, the present invention provides a technical solution: a magnetron sputtering coating machine convenient to operate comprises: the cleaning device comprises a bottom plate 1, a cleaning roller 3, an ultrasonic cleaning box 8 and a drying shell 13, wherein the top of the bottom plate 1 is fixedly connected with a protective shell 2 through a clamping joint, the top of the protective shell 2 is fixedly connected with a top plate 4 through a clamping joint, the center of the bottom of the top plate 4 is fixedly connected with an upper protective cover 5 through a clamping joint, the center of the top of the bottom plate 1 is fixedly connected with a lower protective cover 7 through a clamping joint, the center between the top plate 4 and the bottom plate 1 is fixedly connected with a stepping motor 6 through a clamping joint, one end of a power output shaft of the stepping motor 6 is fixedly connected with a connecting rod 14 through a clamping joint, one end of the connecting rod 14, far away from the stepping motor 6, is fixedly connected with a support plate 10 through a clamping joint, the center of the top of the support plate 10 is fixedly connected with an electric oil cylinder 11 through a clamping joint, the bottom of a piston rod of the electric oil cylinder 11 is fixedly connected with a fixing plate 12 through a clamping joint, the bottom of the fixing plate 12 is fixedly connected with a substrate 9 through gluing and fixedly connected with one side of the top of the bottom plate 1 through a clamping joint, one side of the top of the ultrasonic cleaning box 8, keep away from ultrasonic cleaning case 8 one side at 1 top of bottom plate through joint fixedly connected with drying cabinet 13, rotate through the bearing between 2 inner wall one sides of protective housing and the 7 outer walls of lower protection casing and be connected with cleaning roller 3, it leaves the clearance to lie in the connecting rod 14 outside between 5 and the lower protection casing 7 to go up the protection casing, 3 one sides of cleaning roller are kept away from to bottom plate 1 has been seted up and have been moved back the groove of giving way, 3 outer wall parcels of cleaning roller have lens wiping paper, the internal diameter of ultrasonic cleaning case 8 and the internal diameter of drying cabinet 13 are greater than the external diameter of substrate 9.
The working principle is as follows: when the magnetron sputtering coating machine convenient to operate is used, in the process of preparing a substrate, the substrate 9 is adhered on the fixing plate 12 by opening the feeding and discharging door at one side of the protective shell 2 close to the ultrasonic cleaning box 8, so that one side of the coating surface of the substrate 9 faces downwards, the feeding and discharging door is closed, the piston rod of the electric oil cylinder 11 descends to drive the substrate 9 to immerse into the cleaning agent in the ultrasonic cleaning box 8, impurities at one side of the coating surface of the substrate are removed by ultrasonic cleaning, the substrate 9 returns to the original position by the electric oil cylinder 11 after cleaning is finished, the substrate 9 is separated from the ultrasonic cleaning box 8, the connecting rod 14 is driven by the stepping motor 6 to rotate, so that the substrate 9 sequentially passes through the upper parts of the cleaning rollers 3, the bottom of the substrate 9 is cleaned by the mirror paper above the cleaning rollers 3, and the substrate 9 is driven by the stepping motor 6 to move to the upper part of the drying shell 13 after cleaning is finished, drive substrate 9 through electric cylinder 11 and enter into inside dry shell 13 and dry, after the drying is accomplished, continue to drive substrate 9 through electric cylinder 11 and break away from dry shell 13, drive substrate 9 through step motor 6 and remove to the groove department of giving a retreat of bottom plate 1, substrate 9 enters into the magnetron sputtering station this moment, carry out magnetron sputtering, whole device accomplishes the preparation cleaning work of magnetron sputtering substrate earlier stage automatically, when clean efficient, clean effect is high, prevent that the artifical cleanness of substrate from causing secondary pollution easily.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (5)
1. A magnetron sputtering coating machine convenient to operate is characterized by comprising:
a base plate (1);
a cleaning roller (3);
an ultrasonic cleaning tank (8);
a drying shell (13) is arranged,
wherein the top of the bottom plate (1) is fixedly connected with a protective shell (2) through a clamping joint, the top of the protective shell (2) is fixedly connected with a top plate (4) through a clamping joint, the center of the bottom of the top plate (4) is fixedly connected with an upper protective cover (5) through a clamping joint, the center of the top of the bottom plate (1) is fixedly connected with a lower protective cover (7) through a clamping joint, the center between the top plate (4) and the bottom plate (1) is fixedly connected with a stepping motor (6) through a clamping joint, one end of a power output shaft of the stepping motor (6) is fixedly connected with a connecting rod (14) through a clamping joint, one end of the connecting rod (14) far away from the stepping motor (6) is fixedly connected with a supporting plate (10) through a clamping joint, the center of the top of the supporting plate (10) is fixedly connected with an electric oil cylinder (11) through a clamping joint, the bottom of a piston rod of the electric oil cylinder (11) is fixedly connected with a fixing plate (12) through a clamping joint, fixed plate (12) underrun sticky fixedly connected with substrate (9), bottom plate (1) top one side is through joint fixedly connected with ultrasonic cleaning case (8), ultrasonic cleaning case (8) one side is kept away from at bottom plate (1) top is through joint fixedly connected with drying shell (13), it is connected with cleaning roller (3) to rotate through the bearing between protective housing (2) inner wall one side and lower protection casing (7) outer wall.
2. The magnetron sputtering coating machine of claim 1 wherein: a gap is reserved between the upper protective cover (5) and the lower protective cover (7) and on the outer side of the connecting rod (14).
3. The magnetron sputtering coating machine of claim 1 wherein: and one side of the bottom plate (1) far away from the cleaning roller (3) is provided with a receding groove.
4. The magnetron sputtering coating machine of claim 1 wherein: the outer wall of the cleaning roller (3) is wrapped with lens wiping paper.
5. The magnetron sputtering coating machine of claim 1 wherein: the inner diameter of the ultrasonic cleaning box (8) and the inner diameter of the drying shell (13) are larger than the outer diameter of the substrate (9).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121392313.8U CN215887210U (en) | 2021-06-23 | 2021-06-23 | Magnetron sputtering coating machine convenient to operation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121392313.8U CN215887210U (en) | 2021-06-23 | 2021-06-23 | Magnetron sputtering coating machine convenient to operation |
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| Publication Number | Publication Date |
|---|---|
| CN215887210U true CN215887210U (en) | 2022-02-22 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202121392313.8U Active CN215887210U (en) | 2021-06-23 | 2021-06-23 | Magnetron sputtering coating machine convenient to operation |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115404446A (en) * | 2022-08-24 | 2022-11-29 | 潮州市汇鑫陶瓷科技有限公司 | High-glossiness coating equipment and coating process special for ceramics |
-
2021
- 2021-06-23 CN CN202121392313.8U patent/CN215887210U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115404446A (en) * | 2022-08-24 | 2022-11-29 | 潮州市汇鑫陶瓷科技有限公司 | High-glossiness coating equipment and coating process special for ceramics |
| CN115404446B (en) * | 2022-08-24 | 2023-10-27 | 潮州市汇鑫陶瓷科技有限公司 | Special high-glossiness coating equipment and coating process for ceramics |
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