CN215824524U

CN215824524U - Processing device and processing system

Info

Publication number: CN215824524U
Application number: CN202121405474.6U
Authority: CN
Inventors: 徐贵阳; 李远鹏; 祝磊; 张鹏; 唐梦飞; 柯于仁; 金元涛
Original assignee: Wuhan DR Llaser Technology Corp Ltd
Current assignee: Wuhan DR Llaser Technology Corp Ltd
Priority date: 2021-06-23
Filing date: 2021-06-23
Publication date: 2022-02-15
Anticipated expiration: 2031-06-23

Abstract

The utility model discloses a processing device and a processing system, which comprise at least one feeding mechanism, a processing mechanism, at least one discharging mechanism and a carrying mechanism, wherein the processing mechanism comprises a conveying assembly for conveying materials along a first direction, and a feeding station, a processing station and a discharging station are sequentially formed on a conveying track of the conveying assembly; the feeding mechanism and the discharging mechanism are arranged on the same side of the processing mechanism along a second direction and are respectively close to the feeding station and the discharging station; the carrying mechanism comprises a fixing part, a carrying part and a driving part, wherein the carrying part is arranged on the fixing part and moves along the fixing part in a second direction through the driving part, and is used for carrying materials from the feeding mechanism to the feeding station and/or carrying materials from the discharging station to the discharging mechanism. The processing device can be arranged in a narrow area.

Description

Processing device and processing system

Technical Field

The utility model relates to the technical field of material processing, in particular to a processing device and a processing system.

Background

At present, in the processing process of a sheet-shaped product (particularly, a solar cell in the photovoltaic industry), a plurality of processes (such as a main process of laser processing, a product detection auxiliary process, and the like) are usually provided, each process needs one or more corresponding working units to be completed, at present, processing equipment for the solar cell is usually arranged in a straight line manner, namely, the modules are arranged in the straight line manner, the solar cell is sequentially transferred to each working unit through a conveying belt or a mechanical arm, and corresponding processing is completed under the action of different working units.

Because the working units in the processing equipment are combined into a linear arrangement, the processing equipment occupies a longer position, and the processing equipment cannot be arranged in a compact area.

SUMMERY OF THE UTILITY MODEL

In view of this, it is necessary to provide a processing apparatus and a processing system, which solve the technical problem of long occupied area caused by the linear arrangement of each working unit in the processing equipment in the prior art.

In order to achieve the technical purpose, the technical scheme of the utility model provides a processing device which comprises at least one feeding mechanism, a processing mechanism, at least one discharging mechanism and a carrying mechanism, wherein the processing mechanism comprises a conveying assembly for conveying materials along a first direction, and a feeding station, a processing station and a discharging station are sequentially formed on a conveying track of the conveying assembly;

the feeding mechanism and the blanking mechanism are arranged on the same side of the processing mechanism along a second direction and are respectively close to the feeding station and the blanking station;

the carrying mechanism comprises a fixing part, a carrying part and a driving part, wherein the carrying part is arranged on the fixing part and moves along the fixing part in a second direction through the driving part, and is used for carrying materials from the feeding mechanism to the feeding station and/or carrying materials from the blanking station to the blanking mechanism.

The material conveying device comprises a feeding station, a conveying part and at least one positioning and deviation rectifying mechanism, wherein the feeding station is used for conveying materials to the feeding station, the positioning and deviation rectifying mechanism is used for positioning and rectifying the materials, the feeding station is used for feeding the materials to the conveying part, the positioning and deviation rectifying mechanism is used for conveying the materials to the feeding station, and the conveying part is used for conveying the materials among the feeding mechanism, the positioning and deviation rectifying mechanism and the feeding station in sequence.

The material conveying device comprises a conveying part, a blanking station, a detection mechanism and a carrying part, wherein the conveying part is used for conveying materials, the blanking station is used for conveying the materials, the detection mechanism is used for detecting whether the materials output from the blanking station are qualified, the blanking station, the detection mechanism and the blanking mechanism are sequentially arranged along a second direction, and the carrying part is also used for sequentially carrying the materials among the blanking station, the detection mechanism and the blanking mechanism.

Further, the carrying mechanism is arranged between the feeding mechanism and the discharging mechanism, the fixing portion of the carrying mechanism is arranged along the second direction, the carrying portion comprises at least two carrying assemblies, at least two carrying assemblies are arranged on two sides of the fixing portion in a sliding mode, the driving portion is opposite to the fixing portion, the feeding mechanism and the feeding station are arranged along the second direction, horizontal reciprocating movement is conducted between the discharging station and the discharging mechanism, and a sucking disc and/or a clamping jaw are arranged at the free end of each carrying assembly and used for sucking and/or mechanically grabbing materials.

Furthermore, the carrying mechanism is arranged between the feeding mechanism and the discharging mechanism, a fixing part of the carrying mechanism is arranged along a second direction, the carrying part comprises four carrying components, the four carrying components are slidably arranged on two sides of the fixing part respectively, and the four carrying components horizontally reciprocate relative to the fixing part along the second direction through the driving part;

the first carrying assembly linearly reciprocates between the feeding mechanism and the positioning and deviation rectifying mechanism, and the second carrying assembly linearly reciprocates between the positioning and deviation rectifying mechanism and the feeding station;

the third carrying assembly linearly reciprocates between the blanking station and the detection mechanism, and the fourth carrying assembly linearly reciprocates between the detection mechanism and the blanking mechanism;

the free end of the handling assembly is provided with a suction cup and/or a clamping jaw for absorbing and/or mechanically gripping the material.

Further, the conveying parts and the driving parts are arranged in a one-to-one correspondence manner.

Furthermore, the feeding mechanism, the discharging mechanism, the positioning and deviation rectifying mechanism and the detecting mechanism are two and are arranged in parallel along a second direction; the sucking discs or the clamping jaws of the carrying assembly are two in parallel arrangement along the second direction.

Further, processingequipment still including will detection mechanism detects for unqualified material exhaust mechanism, exhaust mechanism set up in detection mechanism with between the unloading mechanism, fourth carrier subassembly is at detection mechanism and exhaust mechanism between straight reciprocating motion.

Further, the first direction and the second direction are perpendicular.

Further, the feeding mechanism and/or the discharging mechanism is a belt conveyor, and the belt conveyor conveys materials along a first direction or a second direction.

The utility model also relates to a processing system comprising at least one processing device as described above, the processing means comprising:

a base;

the conveying assembly comprises a bearing table, a lifting piece and a linear moving piece, the lifting piece is connected to the bearing table and used for driving the bearing table to lift, the linear moving piece is arranged on the base and connected to the lifting piece and used for driving the lifting piece and the bearing table to linearly move, one end of a linear moving track of the bearing table is a feeding station, the other end of the linear moving track of the bearing table is a discharging station, and the processing station is arranged between the feeding station and the discharging station;

the laser processing assembly is arranged above a processing station of the processing mechanism and is used for processing the material on the bearing table;

the number of the conveying assemblies on the base is two, the two linear moving parts are respectively arranged on two sides of the base, and the moving directions of the two linear moving parts are parallel to each other; two the plummer set up in the top of base can pile up in vertical direction, two the plummer can also be from top to bottom the alternating movement, and pass through material loading station, processing station and unloading station.

Further, the processing system comprises two processing devices which are arranged in parallel and symmetrically.

Compared with the prior art, the utility model has the beneficial effects that: when the material is processed, the material on the carrying mechanism moves to the feeding station, the processing mechanism moves the material to the discharging station from the feeding station, the material is processed in the moving process, the material on the discharging station is carried to the discharging mechanism by the carrying mechanism, the processing of the material is realized, because the feeding mechanism and the discharging mechanism are arranged on the same side of the processing mechanism, the linear setting is avoided, the occupied length of the equipment is reduced, and the processing device can be arranged in a narrow area.

Drawings

FIG. 1 is a schematic diagram of a processing system according to the present invention;

FIG. 2 is a schematic view of another aspect of the processing system of the present invention;

FIG. 3 is a perspective view of a processing mechanism in the processing system of the present invention;

FIG. 4 is a schematic diagram of a processing mechanism in the processing system of the present invention;

FIG. 5 is a schematic view of a handling mechanism of the processing system of the present invention;

fig. 6 is a schematic structural view of another embodiment of a processing system according to the present invention.

Detailed Description

The accompanying drawings, which are incorporated in and constitute a part of this application, illustrate preferred embodiments of the utility model and together with the description, serve to explain the principles of the utility model and not to limit the scope of the utility model.

The utility model provides a processing device which is used for conveying and processing materials, and particularly the materials are flaky materials, wherein the flaky materials are silicon wafers and the like.

As shown in fig. 1 and 5, the processing apparatus includes at least one feeding mechanism 1, a processing mechanism 2, at least one discharging mechanism 3, and a carrying mechanism 4, the processing mechanism 2 includes a conveying assembly 21 for conveying the material along a first direction Y, a feeding station, a processing station, and a discharging station are sequentially formed on a conveying track, the feeding mechanism 1 and the discharging mechanism 3 are located on the same side of the processing mechanism 2 along a second direction X and are respectively disposed close to the feeding station and the discharging station, the carrying mechanism 4 includes a fixing portion 41, a carrying portion 42, and a driving portion 43, the carrying portion 42 is disposed on the fixing portion 41 and moves along the fixing portion 41 along the second direction X through the driving portion 43, and is used for carrying the material from the feeding mechanism 1 to the feeding station and/or for carrying the material from the discharging station to the discharging mechanism 3.

The conveying assembly 21 moves in a circulating or preferably reciprocating manner between the loading station, the processing station and the unloading station, and the conveying part 42 of the conveying mechanism 4 also moves in a reciprocating manner between the loading mechanism 1 and the loading station and/or between the unloading station and the unloading mechanism 3, so that continuous processing is realized.

According to the processing device provided by the utility model, the feeding mechanism 1 and the discharging mechanism 3 are positioned at the same side of the processing mechanism 2, and the feeding mechanism 1 and the discharging mechanism 3 are respectively arranged corresponding to the feeding station and the discharging station of the processing mechanism 2, so that the feeding mechanism 1 and the discharging mechanism form a layout of a semi-enclosed structure. The material is first carried from the loading station to the loading station of the processing mechanism 2 by the carrying portion 42 (a clamping jaw or an adsorption component or the like of the prior art is common at the free end) of the carrying mechanism 4, then is carried through the loading station, the processing station (where processing is performed) and the unloading station by the conveying component 21 of the processing mechanism 2, and finally is carried from the unloading station to the unloading mechanism 3 by the carrying mechanism 4. The layout of the semi-surrounding structure effectively saves the space of equipment, enables the equipment to be arranged in a compact area and is beneficial to manual operation.

In this embodiment, the carrying mechanism 4 is disposed between the feeding mechanism 1 and the discharging mechanism 3, the fixing portion 41 (moving direction of the carrying portion 42) is disposed along the second direction X, and the carrying portion 42 reciprocates along the second direction X to the feeding mechanism 1 and the feeding station, and/or above the discharging station and the discharging mechanism 3, so that the carrying portion 42 can conveniently carry the material from the feeding mechanism 1 to the discharging station, and/or from the discharging station to the discharging mechanism 3.

The processing device provided by the utility model can effectively utilize the vacant positions among the feeding mechanism 1, the blanking mechanism 3 and the processing mechanism 2, and has the advantages of more compact structure and more convenient transportation of the transportation mechanism 4.

In some embodiments, the first direction Y and the second direction X are perpendicular. Due to the arrangement, the space is saved and effectively utilized, and the materials are conveyed more smoothly.

The feeding mechanism 1 is used for feeding (providing materials to be processed), the feeding mechanism 1 has various forms, and can be a drawer (also can be a material box and the like), and the drawer is used for containing the materials.

In some of these embodiments, as shown in fig. 6, the feeding mechanism 1 may also be a conveyor belt line, the direction of which is perpendicular or parallel to the material conveying direction (the first direction Y) of the processing device 2, so that the equipment can be processed online without manually feeding the material into the drawer. Moreover, the direction of the belt line can be flexibly conveyed according to the blanking direction and the space of the previous working procedure.

In some embodiments, the number of the feeding mechanisms 1 is multiple, referring to fig. 1 and 6, two feeding mechanisms 1 are provided, and the two feeding mechanisms 1 are arranged side by side along the second direction X, so that feeding of two materials can be performed simultaneously, and the processing efficiency is improved.

Further, the feeding mechanisms 1 may be one group, two groups, or multiple groups, and in some embodiments, the feeding mechanisms 1 are multiple groups, and the multiple groups of feeding mechanisms 1 are sequentially arranged along the second direction X. When one group of processing objects is exhausted, the processing objects can be taken from other feeding mechanisms, and the waiting time of the equipment is shortened.

The blanking mechanism 3 is used for blanking (receiving processed materials), the blanking mechanism 3 can be a drawer (or a material box), and the drawer is used for containing materials.

The blanking mechanism 3 can also be a conveyor belt line, the direction of the conveyor belt line is vertical to or parallel to the material conveying direction of the processing device 2, so that the equipment can be processed on line, and the materials are not required to be manually conveyed into the drawer. Moreover, the direction of the belt line can be flexibly conveyed according to the feeding direction and the space of the next procedure.

In some embodiments, as shown in fig. 6, the number of the blanking mechanisms 3 is multiple, referring to fig. 1 and 6, two blanking mechanisms 3 are provided, and the two blanking mechanisms 3 are arranged in parallel along the second direction X, so that two materials can be blanked simultaneously, and the processing efficiency is improved.

Further, the blanking mechanisms 3 may be one set, two sets, multiple sets, etc., in some embodiments, the blanking mechanisms 3 are multiple sets, and the multiple sets of blanking mechanisms 3 are sequentially arranged along the second direction X. When the processing objects of one group are full, the processing objects of the other groups can be discharged, and the time for waiting for the material to be removed is reduced.

In some embodiments, as shown in fig. 6, the feeding mechanism 1 and the discharging mechanism 3 are both belt conveyors, and the belt conveyors and the conveying assembly 21 are parallel to each other. The belt conveyor can be used for connecting upstream and downstream equipment in series, and the expansibility and compatibility of feeding and discharging materials on the equipment are reserved.

In some embodiments, the processing device further comprises at least one positioning deviation rectifying mechanism 5 for performing positioning deviation rectifying on the material conveyed to the feeding station. The feeding mechanism 1, the positioning deviation correcting mechanism 5 and the feeding station are sequentially arranged on one side of the fixing part 41 of the conveying mechanism 4, and the blanking station and the blanking mechanism 3 are arranged on the other side of the fixing part 41 of the conveying mechanism 4; the carrying part 42 is also used for sequentially transferring materials among the feeding mechanism 1, the positioning deviation correcting mechanism 5 and the feeding station.

As shown in fig. 2, further, the positioning deviation rectifying mechanism 5 includes a two-dimensional calibration platform 51 and a positioning camera 52, and the positioning camera 52 is disposed above the two-dimensional calibration platform 51 and electrically connected to the two-dimensional calibration platform 51. Wherein the positioning camera 52 is a CCD camera.

The positioning camera 52 is used for photographing and positioning the processing object arranged on the two-dimensional correction platform 51, and the two-dimensional correction platform 51 performs two-dimensional movement according to photographing information to adjust the position of the material, so that the processing precision meets the requirement, and the position correction is performed on the processing object to finish deviation correction. The positioning deviation correcting mechanism 5 may be an existing device, such as a Y/θ two-dimensional correcting platform, which is not described herein.

Further, the feeding stations of the feeding mechanism 1, the positioning and deviation correcting mechanism 5 and the processing mechanism 3 are linearly arranged, the feeding mechanism 1, the positioning and deviation correcting mechanism 5, the processing mechanism 3 and the discharging mechanism 2 form a layout of a semi-surrounding structure, and the carrying mechanism 4 is arranged in the middle of the semi-surrounding layout. The positioning and deviation correcting mechanism 5 in the prior art can enable the whole processing equipment to occupy a longer area, the layout of the semi-surrounding structure effectively solves the problem that the equipment in the prior art occupies a long space, the space is effectively saved and utilized, and the material is convenient to carry.

In some embodiments, the number of the positioning and deviation-rectifying mechanisms 5 is multiple, referring to fig. 1 and 6, two positioning and deviation-rectifying mechanisms 5 are provided, and the two positioning and deviation-rectifying mechanisms 5 are arranged in parallel along the second direction X, so that the positioning and deviation-rectifying of two materials can be performed simultaneously, and the processing efficiency is improved.

In some embodiments, the processing apparatus further includes a detection mechanism 6 for detecting whether the material output from the blanking station is qualified, the blanking station, the detection mechanism 6 and the blanking mechanism 3 are sequentially disposed on the other side of the fixing portion 41 of the carrying mechanism 4, the detection mechanism 6 is configured to detect whether the processed material output from the blanking station is qualified, and the carrying portion 42 is further configured to sequentially transfer the material among the blanking station, the detection mechanism 6 and the blanking mechanism 3. The conveying unit 42 conveys the processing object that has been detected as being acceptable to the blanking mechanism 3.

Further, the inspection mechanism 6 includes an inspection stage (not shown in the drawings) and an inspection camera (not shown in the drawings) disposed above or below the inspection stage to inspect the processing object disposed on the inspection stage. Wherein, the detection camera is a CCD camera.

The processed material is detected through the detection platform and the detection camera by adopting the prior art, and the method is not explained in more detail in the application.

The positioning deviation correcting mechanism 5 and the detection mechanism 6 are respectively arranged between the feeding mechanism 1 and the feeding station of the processing mechanism 2, and between the discharging station of the processing mechanism 2 and the discharging mechanism 3, and are arranged in a straight line; the feeding mechanism 1, the positioning deviation correcting mechanism 5, the processing mechanism 2, the detection mechanism 6 and the blanking mechanism 3 form a layout of a semi-surrounding structure, and the carrying mechanism 4 is arranged in the middle of the layout of the semi-surrounding structure. The positioning deviation correcting mechanism 5 and the detecting mechanism 6 in the prior art can enable the whole processing equipment to occupy a longer space, the layout of the semi-surrounding structure effectively solves the problem of long occupied space of the equipment in the prior art, the space is effectively saved and utilized, and the material is convenient to carry.

In some embodiments, the number of the detecting mechanisms 6 is multiple, referring to fig. 1 and 6, two detecting mechanisms 6 are provided, and two detecting mechanisms 6 are arranged along the second direction X, so that two materials can be detected simultaneously, and the processing efficiency is improved.

In some embodiments, the conveying unit 42 transfers the detected qualified materials to the blanking mechanism 3, the processing apparatus further includes a waste discharge mechanism (not shown in the drawings) for discharging the materials detected as unqualified by the detection component, the waste discharge mechanism is disposed between the detection mechanism 6 and the blanking mechanism 3, the waste discharge mechanism is a waste box or a belt conveyor, and when the processed objects are detected, the conveying unit 42 discharges the processed objects detected as waste by the detection mechanism 6 at the waste discharge mechanism.

In some of these embodiments, the handling portion 42 of the handling mechanism 4 may be a robot or may be the material handling mechanism 4 as shown in fig. 5. In this embodiment, the conveying unit 42 is slidably connected to the fixing unit 41, the conveying unit 42 includes at least two conveying assemblies 421, the number of the conveying assemblies 421 may be three, four, five, etc., and the conveying efficiency may be improved by arranging a plurality of conveying assemblies 421.

In some embodiments, the two carrying assemblies 421 are respectively disposed on two sides of the fixing portion 41, and horizontally reciprocate relative to the fixing portion 41 through the driving portion 43, in this embodiment, the two carrying assemblies 421 respectively reciprocate between the feeding mechanism 1, the positioning deviation correcting mechanism 5 and the feeding station, and between the discharging station, the detecting mechanism 6 and the discharging mechanism 3, and are used for taking and placing materials, the free ends of the carrying assemblies 421 are suction cups or clamping jaws, and the manner of taking and placing materials is adsorption or mechanical grabbing.

As an embodiment more suitable for the processing apparatus including the feeding mechanism 1, the processing mechanism 2, and the discharging mechanism 3, two conveying assemblies 421 are provided on two sides of the fixing portion 41. One of the carrying assemblies reciprocates between the feeding mechanism 1 and the feeding station, and the other carrying assembly reciprocates between the blanking station and the blanking mechanism 3, so that smooth feeding and blanking are realized.

In some embodiments, referring to fig. 6, the number of the carrying assemblies 421 is four, the four carrying assemblies 421 are respectively a first carrying assembly, a second carrying assembly, a third carrying assembly and a fourth carrying assembly, the first carrying assembly and the second carrying assembly are parallel to each other and are disposed at one side of the fixing portion 41 at intervals, the third carrying assembly and the fourth carrying assembly are parallel to each other and are disposed at the other side of the fixing portion 41 at intervals, the first carrying assembly is far away from the processing mechanism 2 relative to the second carrying assembly, and the fourth carrying assembly is far away from the processing mechanism 2 relative to the third carrying assembly. The fixing portion 41 provides a supporting structure for the four carrying assemblies 421, and the four carrying assemblies 421 are distributed on two sides of the fixing portion 41, so as to share the supporting mechanism or the guiding mechanism, reduce the occupied area and the utilization rate of the carrying module, and save the cost.

The four carrying assemblies 421 are more suitable for the processing device comprising the feeding mechanism 1, the positioning and deviation rectifying mechanism 5, the processing mechanism 2, the detecting mechanism 6 and the blanking mechanism 3. The first carrying assembly moves between the feeding mechanism 1 and the positioning and deviation correcting mechanism 5 in a reciprocating mode and is used for carrying materials from the feeding mechanism 1 to the positioning and deviation correcting mechanism 5; the second carrying assembly moves back and forth between the positioning mechanism deviation correcting mechanism 5 and the feeding station and is used for carrying the material from the positioning deviation correcting mechanism 5 to the feeding station; the third carrying assembly moves back and forth between the blanking station and the detection mechanism 6 to carry the materials from the blanking station to the detection mechanism 6; the fourth carrying assembly reciprocates between the detecting mechanism 6 and the blanking mechanism 3 to carry the material from the detecting mechanism 6 to the blanking mechanism 3.

The plurality of carrying assemblies 421 are arranged, so that materials can be smoothly and continuously carried among the processes, and the carrying efficiency is higher.

Referring to fig. 5, each of the carrying assemblies 421 further includes a fixing frame 4211 and at least one suction cup 4212, the fixing frame 4211 is slidably connected to the fixing portion 41, and the suction cup 4212 is disposed below the fixing frame 4211 and connected to the fixing frame 4211.

Wherein, by arranging the suction cup 4212, the sheet can be adsorbed by vacuum adsorption. The number of the suction cups 4212 in each carrying assembly 421 can be one, two, three, four, etc., and the arrangement of a plurality of suction cups 4212 can improve the carrying efficiency. Wherein the suction cup 4212 may be a bernoulli suction cup.

In some embodiments, the carrying assembly 421 further comprises a lifting cylinder 4214, the lifting cylinder 4214 is disposed on the fixing frame 4211, and the output end is connected with the suction cup 4212, so as to lift the suction cup 4212.

The lifting cylinder 4214 may also be a hydraulic cylinder, an electric push rod, or the like.

By arranging the suction cup 4212 and the lifting cylinder 4214, materials can be sucked by the suction cup 4212, the suction cup 4212 can be driven to move up and down by the lifting cylinder 4214, and the suction cup 4212 is moved to be close to the materials downwards.

Referring to fig. 5, the number of the driving portions 43 is further four, and the driving portions 43 and the conveying assemblies 421 are arranged in a one-to-one correspondence. The four driving parts 43 are respectively connected with the four carrying assemblies 421 in a one-to-one correspondence manner, and the driving parts 43 can respectively control the independent linear reciprocating movement of the first carrying assembly, the second carrying assembly, the third carrying assembly and the fourth carrying assembly, so that the independent conveying of materials on the first carrying assembly, the second carrying assembly, the third carrying assembly and the fourth carrying assembly is realized, the carrying distance and the carrying speed can be more flexibly set, and the capacity can be improved.

The driving unit 43 may be a motor-driven lead screw nut, and drives the conveying assembly 421 to move along the fixing unit 41. The driving unit 43 may be an air cylinder, a hydraulic cylinder, an electric push rod, a linear motor, or the like, and the type of the driving unit 43 is not limited thereto.

Further, the carrying assembly 421 further includes a slide rail 4213, the slide rail 4213 is connected to the fixing portion 41 along the length direction of the fixing portion 41, and the fixing frame 4211 is slidably connected to the slide rail 4213.

As a multi-disc processingequipment, corresponding to a plurality of feed mechanism 1, the setting of location mechanism 5 of rectifying, detection mechanism 6 and unloading mechanism 3, every transport subassembly 421 includes at least a plurality of negative pressure adsorption equipment or clamping jaw, and a plurality of negative pressure adsorption equipment or clamping jaw set up along the second direction for carry a plurality of materials simultaneously.

In another aspect of the present invention, a processing system is provided, which includes at least one processing device, and the processing device is the processing device described above.

As shown in fig. 3 and 4, the processing mechanism 2 further includes a base 22 and a laser processing assembly 23, the base 22 is disposed at one end of the fixing portion 41, in this embodiment, perpendicular to the fixing portion 41; conveying assembly 21 includes plummer 211, lifting member 212 and straight line moving member 213, plummer 211 sets up in the top of base 22, lifting member 212 is connected in plummer 211, be used for driving plummer 211 to go up and down, straight line moving member 213 sets up on base 22 and is connected in lifting member 212, be used for driving lifting member 212 and plummer 211 to be rectilinear movement, the one end of the rectilinear movement orbit of plummer 211 is the material loading station, the other end is the unloading station, the processing station sets up between material loading station and unloading station. The laser processing assembly 23 is arranged above a processing station of the processing mechanism 2 and used for processing the materials on the bearing table 211.

As shown in fig. 1, the linear moving member 213 moves in the first direction Y along which the processing mechanism 2 conveys the material.

The bearing table 211 may be at least one tray, a fixing plate, a negative pressure adsorption table, and the like. Corresponding to the processing system of the multi-chip processing device, in this embodiment, the bearing table 211 is a plurality of negative pressure adsorption working tables arranged along the first direction Y for receiving a plurality of materials.

The lifting member 212 can be a cylinder, a hydraulic cylinder, an electric push rod, etc., and in this embodiment, the lifting member 212 is a cylinder.

Wherein, linear moving member 213 can be a cylinder, a hydraulic cylinder, an electric push rod, a linear motor, etc., in this embodiment, linear moving member 213 is a linear motor, a guide rail of the linear motor is fixed on base 22 and is arranged along the length direction of base 22, the linear motor is connected with the cylinder of lifting member 212, and the linear motor drives lifting member 212 and plummer 211 to move linearly.

Through setting up linear moving member 213 and plummer 211, when needs, set up the material on plummer 211, order about plummer 211 through linear moving member 213 and remove, realized that the material loops through material loading station, processing station and unloading station, reciprocating or cyclic motion realizes continuous processing.

The laser processing assembly 23 may be a part capable of performing laser processing in the prior art, and will not be described herein.

Further, the conveying assembly 21 further comprises a supporting frame 214, and the supporting frame 214 is connected to the extending ends of the carrying platform 211 and the lifting member 212 respectively, for realizing the connection between the carrying platform 211 and the lifting member 212.

In this embodiment, the number of the conveying assemblies 21 on the base 22 is two, the two linear moving members 213 are respectively disposed on two sides of the base 22, and the moving directions of the two linear moving members 213 are parallel to each other; two plummer 211 set up in the top of base 22 and can pile up in vertical direction, and two plummers 211 can also be from top to bottom alternating movement to through material loading station, processing station and unloading station.

Two plummer 211 are when the alternating movement, and the lift of plummer 211 can be ordered to the piece 212 that goes up and down, and when two plummers 211 take place to intersect, because two plummers 211 pile up at vertical direction, avoid two plummers 211 to bump at the in-process that removes.

Through set up two conveying assembly 21 in the both sides of base 22, two conveying assembly 21 can carry out material loading, unloading and processing respectively, can improve machining efficiency.

In this embodiment, the material moving direction of the processing mechanism 2 is a linear direction (the first direction Y) and is perpendicular to the carrying direction (the second direction X) of the carrying mechanism 4, the feeding mechanism 1, the discharging mechanism 3 and the carrying mechanism 4 are located on the same side of the processing mechanism 2, and the carrying mechanism 4 is disposed between the feeding mechanism 1 and the discharging mechanism 3, on one hand, as mentioned above, the occupied area is effectively utilized, and on the other hand, the carrying and processing of the material are more convenient and smooth.

This application adopts foretell two plummer to exchange processing module in succession, and when a plummer 211 was carrying out laser machining, another plummer 211 goes up the relevant action of unloading and plummer 211 removal, makes two plummers 211 can carry out laser machining in succession in turn, can improve machining efficiency. And because the positioning deviation correcting mechanism 5 and the detection mechanism 6 are arranged outside the processing device 2, the load of the processing device 2 can be reduced, and the cost of equipment is reduced. In addition, when the laser processing time is short, the two conveying assemblies 21 are connected in parallel, so that the process time ratio of the laser processing can be increased, and the productivity is improved.

As a preferred embodiment, a processing system is provided, which is two parallel and symmetrical processing devices, and by arranging the two processing devices in parallel, the functions and structural layouts of the two processing devices are symmetrical to each other, and the symmetrical arrangement can further reduce the occupied area on the one hand, and on the other hand, the laser processing assemblies 23 of the two single-line processing devices can be arranged side by side in a close manner, which is beneficial to installation and maintenance. The design that two processing systems are back to back, the convenience is maintained equipment, and in addition, two processing systems operation mutual noninterference.

The following briefly introduces the working process of the present invention, which is only exemplified by a double-silicon-wafer single-line processing system including a feeding mechanism 1, a positioning and deviation-correcting mechanism 5, a processing mechanism 2, a detecting mechanism 6 and a discharging mechanism 6, and the other embodiments are similar and can be known by referring to the working process.

When a silicon wafer is processed, the two suckers 4212 of the first carrying assembly aim at the silicon wafer on the two feeding mechanisms 1, the lifting cylinder 4214 drives the suckers 4212 to move towards the direction close to the silicon wafer, negative pressure is started to enable a negative pressure adsorption device (hereinafter called a sucker) to adsorb the silicon wafer, then the driving portion 43 drives the first carrying assembly to move to the position above the two-dimensional correction platforms 51 of the positioning correction mechanism 5, and the negative pressure of the suckers 4212 is relieved to enable the silicon wafer to be placed on the two-dimensional correction platforms 51.

The silicon wafer is photographed by the positioning camera 52, and then the position of the silicon wafer is adjusted by the two-dimensional correction platform 51, so that the position and the angle of the silicon wafer are in the set direction.

Then the driving part 43 drives the second carrying assembly to move, so that the two suckers 4212 of the second carrying assembly suck the silicon wafers on the two-dimensional correction platforms 51, the driving part 43 drives the second carrying assembly to carry the silicon wafers to the upper part of the loading table 211 positioned at the loading station (the loading table 211 moves to the loading station in advance through the linear moving part 213 and the lifting part 212), and then the negative pressure of the suckers 4212 is released, so that the silicon wafers fall on the two negative pressure suction tables of the loading table 211. Then, the susceptor 211 loaded with the silicon wafer is conveyed to a processing station below the laser processing assembly 23 by the linear moving member 213 and the lifting member 212, and the silicon wafer on the susceptor 211 is processed by the laser processing assembly 23. After the processing, the susceptor 211 carrying the processed silicon wafer is conveyed to a blanking station for blanking through the linear moving member 213 and the lifting member 212. Through setting up two conveying assembly 21, can realize that when a plummer 211 is located the processing station, unloading of another plummer 211 unloading station and move to the material loading of material loading station, the two is in turn, accomplishes continuous processing.

The driving part 43 drives the third carrying assembly to move, so that the sucking disc 4212 in the third carrying assembly sucks the silicon wafer on the bearing table 211 of the blanking station, the driving part 43 drives the third carrying assembly to move to the positions above the two detection platforms, the negative pressure of the sucking disc 4212 is relieved, the silicon wafer falls on the detection platforms, and the silicon wafer is detected through the detection camera.

The driving part 43 drives the fourth carrying assembly to move, so that the sucking discs 4212 in the fourth carrying assembly suck the silicon wafers on the two detection platforms, when the silicon wafers are detected to be qualified, the driving part 43 drives the fourth carrying assembly to move to the two blanking mechanisms 3, and when the silicon wafers are detected to be unqualified, the silicon wafers are conveyed to the two waste discharge mechanisms.

According to the processing system, the processing devices are sequentially arranged along the circumferential direction of the conveying mechanism 4 and are in a zigzag layout (semi-surrounding or fully-surrounding layout), so that the length occupied by the devices is reduced, the processing device can be arranged in a narrow area, and the space of the devices is fully utilized.

The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention.

Claims

1. A processing device is characterized by comprising at least one feeding mechanism, a processing mechanism, at least one discharging mechanism and a carrying mechanism, wherein the processing mechanism comprises a conveying assembly for conveying materials along a first direction, and a feeding station, a processing station and a discharging station are sequentially formed on a conveying track of the processing mechanism;

2. The processing device according to claim 1, further comprising at least one positioning and deviation rectifying mechanism for positioning and rectifying deviation of the material conveyed to the feeding station, wherein the feeding mechanism, the positioning and deviation rectifying mechanism and the feeding station are sequentially arranged along a second direction, and the carrying part is further used for sequentially carrying the material among the feeding mechanism, the positioning and deviation rectifying mechanism and the feeding station.

3. The processing device according to claim 2, further comprising at least one detection mechanism for detecting whether the material output from the blanking station is qualified, wherein the blanking station, the detection mechanism and the blanking mechanism are sequentially arranged along a second direction, and the carrying portion is further used for sequentially carrying the material among the blanking station, the detection mechanism and the blanking mechanism.

4. A processing apparatus according to any one of claims 1 to 3, wherein the carrying mechanism is disposed between the feeding mechanism and the discharging mechanism, the fixed portion of the carrying mechanism is disposed along the second direction, the carrying portion comprises at least two carrying components, at least two of the carrying components are slidably disposed on two sides of the fixed portion, and are horizontally reciprocated between the feeding mechanism and the feeding station, and between the discharging station and the discharging mechanism along the second direction relative to the fixed portion by the driving portion, and suction cups and/or clamping jaws are disposed at free ends of the carrying components for sucking and/or mechanically grasping the materials.

5. A processing apparatus as set forth in claim 3, wherein: the conveying mechanism is arranged between the feeding mechanism and the discharging mechanism, a fixing part of the conveying mechanism is arranged along a second direction, the conveying part comprises four conveying assemblies, the four conveying assemblies are slidably arranged on two sides of the fixing part respectively, and the conveying mechanism horizontally reciprocates relative to the fixing part along the second direction through the driving part;

6. The processing apparatus according to claim 5, wherein the conveying section and the driving section are provided in one-to-one correspondence.

7. The processing device according to claim 5, wherein the feeding mechanism, the discharging mechanism, the positioning and deviation correcting mechanism and the detecting mechanism are two in parallel arrangement along the second direction; the sucking discs or the clamping jaws of the carrying assembly are two in parallel arrangement along the second direction.

8. The processing device as claimed in claim 5, further comprising a waste discharging mechanism for discharging the material detected as being unqualified by the detecting mechanism, wherein the waste discharging mechanism is arranged between the detecting mechanism and the blanking mechanism, and the fourth carrying assembly linearly reciprocates between the detecting mechanism and the waste discharging mechanism.

9. A processing device as claimed in any of claims 1 to 3, wherein the first and second directions are perpendicular.

10. A processing apparatus as claimed in any of claims 1 to 3, in which the loading means and/or the unloading means is a belt conveyor which conveys material in either a first direction or a second direction.

11. A processing system comprising at least one processing device according to any one of claims 1 to 10, the processing mechanism comprising:

a base;

12. A tooling system according to claim 11, wherein said tooling system comprises two of said tooling devices arranged side-by-side and symmetrically.