CN215641499U

CN215641499U - System for monitoring FEM running condition of machine table

Info

Publication number: CN215641499U
Application number: CN202122066587.4U
Authority: CN
Inventors: 裴敏强
Original assignee: Warship Chip Manufacturing Suzhou Ltd By Share Ltd
Current assignee: Warship Chip Manufacturing Suzhou Ltd By Share Ltd
Priority date: 2021-08-30
Filing date: 2021-08-30
Publication date: 2022-01-25
Anticipated expiration: 2031-08-30

Abstract

The utility model relates to a system for monitoring the FEM running condition of a machine table, which comprises a source, a gas box, a shaft leading-out electrode, a mass analysis magnet, an acceleration cylinder, an FEM, a processing chamber, a wafer box, an operator interface and a computing device, wherein the source is communicated with one side of the shaft leading-out electrode, the gas box blows gas from the upper end of the shaft leading-out electrode, the other side of the shaft leading-out electrode is connected to one end of the mass analysis magnet, the other end of the mass analysis magnet is connected to one end of the acceleration cylinder, the other end of the acceleration cylinder is connected to one end of the FEM, the other end of the FEM is communicated with the processing chamber, the operator interface is arranged on the outer side of the processing chamber, the processing chamber is connected to the wafer box, and the computing device is communicated with the FEM and is configured to monitor the running condition of the FEM. The system can monitor the running state of the FEM when the machine runs in real time and early warn in advance when the FEM has deviation or downtime.

Description

System for monitoring FEM running condition of machine table

Technical Field

The present invention relates to monitoring systems, and more particularly, to a system for monitoring FEM operating conditions of a machine.

Background

The machine testing machine is used for measuring the resistance value of an implanted control wafer, the condition of the machine cannot be reflected in real time, if the condition is met, the operation can be stopped by depending on the alarm rule of the machine, however, the situation that the wire dividing ring in the middle of the FEM (final energy magnet) is down exists, namely, a part of energy is provided for the device and cannot work normally, and the machine can give an alarm only under the condition that the machine is down completely, so that the method of only waiting for the machine to give an alarm is passive, and a system capable of giving an early warning in advance when the FEM has deviation is needed.

SUMMERY OF THE UTILITY MODEL

In view of the deficiencies of the prior art, it is an object of the present invention to provide a desirable system for monitoring the FEM operating condition of a machine.

In order to solve the technical problems, the utility model adopts the following technical scheme:

according to an aspect of the present invention, there is provided a system for monitoring an FEM operation condition of a machine, including a source, a gas tank, a shaft-drawing electrode, a mass analysis magnet, an acceleration cylinder, an FEM, a processing chamber, a wafer cassette, an operator interface, and a computing device, wherein the source communicates with one side of the shaft-drawing electrode, the gas tank blows gas from an upper end of the shaft-drawing electrode, the other side of the shaft-drawing electrode is connected to one end of the mass analysis magnet, the other end of the mass analysis magnet is connected to one end of the acceleration cylinder, the other end of the acceleration cylinder is connected to one end of the FEM, the other end of the FEM communicates with the processing chamber, the outside of the processing chamber is provided with the operator interface, the processing chamber is connected to the wafer cassette, and the computing device communicates with the FEM and is configured to monitor an operation condition of the FEM.

In one embodiment of the utility model, the axial extraction electrode is a triaxial extraction electrode.

In one embodiment of the utility model, the FEM exhibits a circular arc shape.

In one embodiment of the present invention, the FEM includes a first coil, a second coil and a hall element disposed within the FEM, wherein the first coil and the second coil are arranged in parallel up and down, and the hall element detects the intensity of magnetic field provided by the first coil and the second coil.

In one embodiment of the utility model, the first coil provides a first current I₁The second coil provides a second current I₂The Hall element obtains the magnetic field intensity B_energy。

In one embodiment of the utility model, based on the first current I₁A second current I₂And magnetic field strength B_energyTo calculate the magnetic field coefficient k, wherein at the first current I₁And a second current I₂In the case where they are equal and the hall element is normal, the magnetic field coefficient k is calculated by the following equation:

in one embodiment of the utility model, the coefficient k of the FEM during normal operation is calculated by the magnetic field coefficient k_FEMWherein k is_FEMObtained by the following formula:

。

in one embodiment of the utility model, the calculating means monitors the coefficient k by_FEMThe value of (2) to determine whether the FEM is abnormal.

In one embodiment of the utility model, the system further comprises an alarm, the alarm being connected to the computing device.

In one embodiment of the present invention, an alarm is issued by an alarm when the computing device determines that an abnormality occurs in the FEM.

By adopting the technical scheme, compared with the prior art, the utility model has the following advantages:

the utility model can monitor the running state of the FEM when the machine runs in real time and early warn in advance when the FEM has deviation or downtime.

Drawings

FIG. 1 shows a schematic diagram of a system for monitoring FEM operating conditions of a tool.

List of reference numerals

1 source, 2 gas boxes, 3 three-axis extraction electrodes, 4 mass analysis magnets, 5 acceleration column, 6FEM (final energy magnet), 61 hall element, 62 first coil, 63 second coil, 7 process chamber, 8 wafer box, 9 operator interface.

Detailed Description

It should be understood that the embodiments of the utility model shown in the exemplary embodiments are illustrative only. Although only a few embodiments of the present invention have been described in detail above, those skilled in the art will readily appreciate that many modifications are possible without materially departing from the teachings of the present subject matter. Accordingly, all such modifications are intended to be included within the scope of this invention. Other substitutions, modifications, changes and omissions may be made in the design, operating conditions and parameters and the like of the following exemplary embodiments without departing from the spirit of the present invention.

The utility model provides a system for monitoring the FEM running condition of a machine table, which comprises a source, a gas box, a shaft leading-out electrode, a mass analysis magnet, an acceleration cylinder, an FEM, a processing chamber, a wafer box, an operator interface and a computing device, wherein the source is communicated with one side of the shaft leading-out electrode, the gas box blows gas from the upper end of the shaft leading-out electrode, the other side of the shaft leading-out electrode is connected to one end of the mass analysis magnet, the other end of the mass analysis magnet is connected to one end of the acceleration cylinder, the other end of the acceleration cylinder is connected to one end of the FEM, the other end of the FEM is communicated with the processing chamber, the operator interface is arranged on the outer side of the processing chamber, the processing chamber is connected to the wafer box, and the computing device is communicated with the FEM and is configured to monitor the running condition of the FEM.

In the above system, the axial extraction electrode is a triaxial extraction electrode.

In the above system, the FEM takes a circular arc shape.

In the above system, the FEM includes a first coil, a second coil and a hall element provided in the FEM, wherein the first coil and the second coil are arranged in parallel up and down, and the hall element detects the magnetic field intensity provided by the first coil and the second coil.

In the above system, the first coil supplies a first current I₁The second coil provides a second current I₂The Hall element obtains the magnetic field intensity B_energy。

In the above system, based on the first current I₁A second current I₂And magnetic field strength B_energyTo calculate the magnetic field coefficient k, wherein at the first current I₁And a second current I₂In the case where they are equal and the hall element is normal, the magnetic field coefficient k is calculated by the following equation:

in the above system, the coefficient k at the time of normal operation of the FEM is calculated from the magnetic field coefficient k_FEMWherein k is_FEMObtained by the following formula:

in the above system, the calculating means monitors the coefficient k_FEMThe value of (2) to determine whether the FEM is abnormal.

In the above system, the system further comprises an alarm, the alarm being connected to the computing device.

In the above system, an alarm is issued by an alarm when the computing means determines that an abnormality occurs in the FEM.

The system provided by the present invention is described in detail below by way of specific embodiments.

As shown in fig. 1, a system for monitoring FEM operation of a machine includes a source 1, a gas box 2, a triaxial extraction electrode 3, a mass analysis magnet 4, an acceleration cylinder 5, a FEM 6, a processing chamber 7, a wafer box 8, an operator interface 9 and a computing device (not shown), the source 1 is communicated with one side of the triaxial extraction electrode 3, the gas box 2 blows gas from the upper end of the triaxial extraction electrode 3, the other side of the triaxial extraction electrode 3 is connected to one end of the mass analysis magnet 4, the other end of the mass analysis magnet 4 is connected to one end of the acceleration cylinder 5, the other end of the acceleration cylinder 5 is connected to one end of the FEM 6, the other end of the FEM 6 is communicated with the processing chamber 7, the outer side of the processing chamber 7 is provided with the operator interface 9, the processing chamber 7 is connected to the wafer box 8, and the computing device is communicated with the FEM 6 and is configured to monitor the operating condition of the FEM 6.

In the present embodiment, the FEM 6 takes a circular arc shape. The FEM 6 includes a first coil 62, a second coil 63, and a hall element 61 provided in the FEM 6, wherein the first coil 62 and the second coil 63 are arranged in parallel up and down, and the hall element 61 detects the magnetic field intensity provided by the first coil 62 and the second coil 63. The first coil provides a first current I₁The second coil provides a second current I₂The Hall element obtains the magnetic field intensity B_energy。

The FEM 6 is a parallel magnetic field and consists of an upper first coil 62 and a lower first coil 63 which are jointly arranged, the middle gap is a parallel magnetic field area, the magnetic field intensity is provided by the upper coil 62 and the lower coil 63 which are jointly arranged to form an energy screening magnetic field by approximate superposition, and the magnetic field intensity formed by the first coil 62 is B₁The second coil 63 forms a magnetic field of strength B₂From this point B_energy＝B₁+B₂。

It is well known that the magnetic field B formed by the coil is linearly dependent on the current I through the coil, i.e. B-K I, whereby,

，

when the first current I₁And a second current I₂When the hall elements 61 are equal and normal,

，

thereby making

Referred to as the magnetic field coefficient k.

Then, based on the magnetic field coefficient kCalculating FEM coefficient k when FEM normally operates_FEMWherein k is_FEMObtained by the following formula:

。

thus, the computing device need only monitor k_FEMThe value of (2) to determine whether the FEM is abnormal. When the first coil 62 and the second coil 63 or the hall element are abnormal, the calculated magnetic field coefficient will not be equal to the k value, and the FEM coefficient monitored by the calculating device will not be equal to k_FEMAt this time, the computing device may activate the corresponding alarm to issue a corresponding alarm to prove that the FEM is operating abnormally.

In summary, the system provided by the utility model can monitor the running state of the FEM when the machine runs in real time, and can early warn in advance when the FEM has deviation or downtime.

The above description is only for the preferred embodiment of the present invention, and is not intended to limit the scope of the present invention; it is intended that the following claims be interpreted as including all such alterations, modifications, and equivalents as fall within the true spirit and scope of the utility model.

Claims

1. A system for monitoring FEM running condition of machine is characterized by comprising a source, a gas box, a shaft leading-out electrode, a mass analysis magnet, an acceleration cylinder, a FEM, a processing chamber, a wafer box, an operator interface and a computing device, wherein the source is communicated with one side of the shaft leading-out electrode, the gas box blows gas from the upper end of the shaft leading-out electrode, the other side of the shaft leading-out electrode is connected to one end of the mass analysis magnet, the other end of the mass analysis magnet is connected to one end of the acceleration cylinder, the other end of the acceleration cylinder is connected to one end of the FEM, the other end of the FEM is communicated with the processing chamber, the operator interface is disposed outside the process chamber, the process chamber is connected to the wafer cassette, the computing device is in communication with the FEM and is configured to monitor an operating condition of the FEM.

2. The system of claim 1, wherein the axial extraction electrode is a triaxial extraction electrode.

3. The system of claim 1, wherein the FEM exhibits a circular arc shape.

4. The system of claim 3, wherein the FEM comprises a first coil, a second coil, and a Hall element disposed within the FEM, wherein the first coil and the second coil are arranged in parallel above and below, and wherein the Hall element detects the strength of the magnetic field provided by the first coil and the second coil.

5. The system of claim 4, wherein the first coil provides a first current I₁The second coil provides a second current I₂The Hall element obtains the magnetic field intensity B_energy。

6. The system of claim 5, wherein the I is based on the first current₁The second current I₂And the magnetic field strength B_energyTo calculate a magnetic field coefficient k, wherein at said first current I₁And the second current I₂In the case where the hall elements are equal and the hall elements are normal, the magnetic field coefficient k is calculated by the following formula:

7. the system according to claim 6, wherein the coefficient k of the FEM during normal operation is calculated from the magnetic field coefficient k_FEMWherein k is_FEMObtained by the following formula:

。

8. the system of claim 7, wherein the computing device monitors the coefficient k by monitoring the coefficient k_FEMTo determine whether the FEM is abnormal.

9. The system of claim 8, further comprising an alarm coupled to the computing device.

10. The system of claim 9, wherein an alarm is issued by the alarm when the computing device determines that the FEM is abnormal.